CN217785841U

CN217785841U - High pressure positive blower heat absorption cooling system

Info

Publication number: CN217785841U
Application number: CN202220552218.8U
Authority: CN
Inventors: 余仲; 罗伟斌; 秦小宏
Original assignee: Shenzhen Headquarter SC New Energy Technology Corp
Current assignee: Shenzhen Headquarter SC New Energy Technology Corp
Priority date: 2022-03-11
Filing date: 2022-03-11
Publication date: 2022-11-11
Anticipated expiration: 2032-03-11

Abstract

The utility model discloses a high pressure positive blower heat absorption cooling system, include: the device comprises a fan bracket air draft system, a heat collecting cover and a soup plate, wherein the air draft system is fixedly connected to the fan bracket; the heat collecting cover is fixedly connected with the fan bracket and arranged at a furnace door formed on the furnace body, and the heat collecting cover is connected with the air draft system and is used for sucking hot air emitted when the furnace door is opened; the soup plate is fixedly connected with the fan support and arranged above the moving path of the graphite boat, and the soup plate is connected with the air exhaust system and used for sucking hot air emitted when the graphite boat moves. The utility model provides a pair of high pressure positive blower heat absorption cooling system can effectual reduction equipment and the inside temperature of factory building, improves production efficiency.

Description

High pressure positive blower heat absorption cooling system

Technical Field

The utility model relates to a photovoltaic equipment diffusion furnace field especially relates to a high pressure positive blower heat absorption cooling system.

Background

At present, photovoltaic equipment on the market, particularly a diffusion furnace and PECVD equipment need to be cooled to a certain temperature and then enter the next procedure after the graphite boat and the quartz boat which are fully loaded with silicon wafers are subjected to a high-temperature process, a large amount of heat is emitted into the equipment during the process, the integral temperature inside the equipment is overhigh, the rapid cooling effect of the process boat cannot be achieved, and various electric elements inside the equipment can be accelerated and aged in a high-temperature environment, so that the service life of the equipment is shortened. The cooling scheme that adopts on the market at present adopts axial fan to send cold wind toward equipment inside for the bottom, and platform department of keeping in adopts water-cooled radiator to carry out the cooling to graphite boat or quartz boat, also has to install the wind that little fan blown through water-cooled radiator cooling to graphite boat or quartz boat on water-cooled radiator. This kind of cooling mode can reduce the temperature that graphite went away or the quartz boat to a certain extent really, but the heat that distributes through graphite boat and quartz boat has still given off inside the equipment, leads to the inside temperature of equipment higher all the time, and production efficiency is low.

SUMMERY OF THE UTILITY MODEL

The utility model discloses aim at solving one of the technical problem that exists among the prior art at least. Therefore, the utility model provides a high pressure positive blower heat absorption cooling system can effectual reduction equipment and the inside temperature of factory building, improves production efficiency.

According to the utility model discloses a high pressure positive blower heat absorption cooling system of first aspect embodiment for the graphite boat that takes out from the furnace body cools off, include: the solar heat collector comprises a fan bracket, an air draft system, a heat collecting cover and a soup plate, wherein the air draft system is fixedly connected to the fan bracket; the heat collection cover is fixedly connected with the fan support and arranged at a furnace door formed in the furnace body, and the heat collection cover is connected with the air draft system and used for sucking hot air emitted when the furnace door is opened; the soup plate is fixedly connected with the fan support and arranged above the moving path of the graphite boat, and the soup plate is connected with the air exhaust system and used for sucking hot air emitted when the graphite boat moves and stays on the paddle.

According to the utility model discloses high pressure positive blower heat absorption cooling system has following technological effect at least: the embodiment of the utility model provides a pair of high pressure positive blower heat absorption cooling system, thermal-arrest cover and soup plate link to each other with exhaust system, the hot-air that gives off when opening the furnace gate takes out the hot-air that gives off after the furnace gate with the graphite boat and takes out to exhaust system, and cold air supplyes near the graphite boat and cools off the graphite boat, and the tradition is to the direct blast cooling of graphite boat, and the heat that the graphite boat gived off has still given off inside the equipment, leads to the inside temperature of equipment and factory building higher all the time. The mode of convulsions is adopted to dispel the heat, can effectual reduction equipment and the inside temperature of factory building, improves production efficiency.

According to some embodiments of the utility model, high pressure positive blower heat absorption cooling system includes water cooling plant, water cooling plant is used for the cooling to follow take out in the furnace body the air near the graphite boat, the water cooling plant bottom is connected with the heat absorption housing, the heat absorption housing with exhaust system links to each other in order to suction hot-air.

According to some embodiments of the utility model, the water cooling plant with the heat absorption housing is a set of cooling part, the cooling part is provided with the multiunit from top to bottom to the interval.

According to some embodiments of the utility model, exhaust system includes first fan, first fan with the thermal-arrest cover links to each other through first tuber pipe.

According to the utility model discloses a some embodiments, exhaust system includes the second fan, the second fan with the heat absorption housing passes through the second tuber pipe and links to each other, the second fan passes through the second tuber pipe with the soup plate links to each other.

According to some embodiments of the invention, the first air duct and the second air duct are both at least partially bellows.

According to the utility model discloses a some embodiments, first fan with the second fan all is connected with out the tuber pipe.

According to some embodiments of the utility model, first fan with install first snubber block between the fan support, the second fan with install the second snubber block between the fan support, first snubber block with the second snubber block is used for reducing respectively first fan with the vibration when second fan moves.

According to the utility model discloses a some embodiments, the heat absorption housing is the cavity box body, heat absorption housing lower extreme seted up a plurality ofly with the heat absorption hole that heat absorption housing inner space is linked together, the second tuber pipe with heat absorption housing inner space is linked together.

According to some embodiments of the utility model, the soup plate is the cavity box body, the soup plate lower extreme seted up a plurality of with the ventilation hole that the soup plate inner space is linked together, the second tuber pipe with the soup plate inner space is linked together.

Additional aspects and advantages of the invention will be set forth in part in the description which follows and, in part, will be obvious from the description, or may be learned by practice of the invention.

Drawings

The present invention will be further explained with reference to the drawings and examples.

FIG. 1 is a schematic view of an installation structure of an embodiment of the present invention;

FIG. 2 is a schematic view of a heat collecting cover according to an embodiment of the present invention;

fig. 3 is a schematic view of a soup plate according to an embodiment of the present invention;

FIG. 4 is an enlarged view at A in FIG. 3;

fig. 5 is a schematic view of a heat absorbing housing according to an embodiment of the present invention.

Reference numerals are as follows:

the furnace body 100, the paddle 101 and the furnace door 110;

a graphite boat 200;

the heat-absorbing device comprises a fan bracket 300, a first bracket 301, a second bracket 302, a water cooling device 310, a heat-absorbing housing 320, a heat-absorbing hole 321 and a mounting hole 322;

the air draft system 400, an air outlet pipe 401, a first fan 410, a first air pipe 411, a first damper 412, a second fan 420, a second air pipe 421 and a second damper 422;

a heat collecting cover 500;

a soup plate 600.

Detailed Description

Reference will now be made in detail to embodiments of the present invention, examples of which are illustrated in the accompanying drawings, wherein like reference numerals refer to the same or similar elements or elements having the same or similar function throughout. The embodiments described below with reference to the drawings are exemplary only for the purpose of explaining the present invention, and should not be construed as limiting the present invention.

In the description of the present invention, it is to be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "axial", "radial", "circumferential", and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, merely for convenience of description and simplification of the description, and do not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore, should not be construed as limiting the invention. Furthermore, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of the present invention, "a plurality" means two or more unless otherwise specified.

In the description of the present invention, it is to be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in the present invention can be understood in specific cases to those skilled in the art.

Referring to fig. 1 to 5, the utility model discloses a high pressure positive blower heat absorption cooling system for the graphite boat 200 that takes out from furnace body 100 is cooled off to the silicon chip among the graphite boat 200, and plasma reinforcing vapor deposition coating process is accomplished in furnace body 100 to the silicon chip among the graphite boat 200, and furnace body 100 is equipped with the furnace gate 110 that supplies graphite boat 200 to take out, include: the solar heat collector comprises a fan bracket 300, an air draft system 400, paddles 101, a heat collecting cover 500 and a soup plate 600; the exhaust system 400 is connected to the fan support 300 through bolts, the corresponding paddle 101 is arranged at the position of the furnace door 110, the paddle 101 is used for taking out the graphite boat 200 from the furnace door 110 of the furnace body 100 and transporting the graphite boat 200, the material of the paddle 101 is silicon carbide, the specific structure and the installation mode of the paddle 101 are the prior art, and the paddle is disclosed in the Chinese utility model patent with the patent publication number of CN202888220U and is not detailed any more. The heat collecting cover 500 is fixedly connected with the fan bracket 300 and is arranged at the oven door 110, the heat collecting cover 500 is communicated with the air draft system 400, a large amount of heat can be emitted instantly when the oven door 110 is opened, the air draft system 400 sucks hot air emitted when the oven door 110 is opened, and the heat collecting cover 500 is cylindrical with a flared lower end and is positioned above the oven door 110 so as to improve the efficiency of sucking the hot air; the soup plate 600 is connected with the fan bracket 300 through bolts and arranged above the moving path of the paddle 101, the soup plate 600 is communicated with the air draft system 400, the temperature of the graphite boat 200 is highest when the graphite boat 200 moves outwards, and the air draft system 400 sucks hot air emitted when the graphite boat 200 on the paddle 101 moves and stays.

The utility model provides a pair of high pressure positive blower heat absorption cooling system, thermal-arrest cover 500 and soup plate 600 all are linked together with exhaust system 400, the hot-air that gives off when opening furnace gate 110 takes out to exhaust system 400 with the hot-air that gives off of graphite boat 200 on oar 101, cold air supplyes near graphite boat 200 and cools off graphite boat 200, and traditional direct air-blast cooling to graphite boat 200, the heat that graphite boat 200 gived off has still given off inside the equipment, lead to the inside temperature of equipment and factory building higher all the time. The air draft mode is adopted for heat dissipation, so that the temperature inside equipment and a workshop can be effectively reduced, and the production efficiency is improved.

In some embodiments of the present invention, the high pressure fan heat absorption and cooling system further includes a water cooling device 310, the paddle 101 is used for transporting the graphite boat 200 from the furnace body 100 to the water cooling device 310, the water cooling device 310 is used for cooling the graphite boat 200 taken out from the furnace body 100, the water cooling device 310 selects a conventional coiled pipe, and the water cooling device 310 has a specific structure as the prior art, and is not described in detail. The lower end of the water cooling device 310 is connected with a heat absorption cover 320 through bolts, the heat absorption cover 320 is communicated with the air extraction system 400, and the air extraction system 400 and the heat absorption cover 320 suck hot air. Most of heat is absorbed through air convection, so that a large amount of heat is prevented from being dissipated into the equipment, and the cooling time of the graphite boat 200 is shortened.

In some embodiments of the present invention, the water cooling device 310 and the heat absorbing cover 320 are a set of cooling members, and the cooling members are provided with 4 sets at intervals in the up-down direction. Is favorable for saving the occupied area and the cost. It is foreseeable that the soup plate 600 is equipped with 4 groups, and the heat collecting cover 500 is equipped with 6 groups, and the soup plate 600, the heat collecting cover 500 and the heat absorbing cover 320 share the exhaust system 400, are favorable to practicing thrift equipment investment. The heat absorbing cover 320 in the cooling part absorbs high temperature air, and simultaneously, the outside air passes through the water cooling device 310 at the bottom of the graphite boat 200 in the lower cooling part, and is further cooled and then supplemented to the vicinity of the graphite boat 200, so that the cooling of the graphite boat 200 is accelerated.

In some embodiments of the present invention, the air exhaust system 400 includes a first fan 410, the first fan 410 is connected to a first air pipe 411, the first fan 410 is connected to the heat collecting cover 500 through the first air pipe 411, and the first fan 410 extracts hot air near the heat collecting cover 500.

In some embodiments of the present invention, the ventilation system 400 includes a second blower 420, the second blower 420 is connected to a second air pipe 421, the second blower 420 is connected to the heat absorbing cover 320 through the second air pipe 421, and the second blower 420 is connected to the soup plate 600 through the second air pipe 421. The hot air near the heat absorbing cover 320 and the soup plate 600 is drawn by the second fan 420.

In some embodiments of the present invention, the exhaust pipe 410 is at least partially a corrugated pipe, which is easy to install and disassemble due to its good deformation ability.

In some embodiments of the present invention, the first fan 410 and the second fan 420 are both connected to the air outlet pipe 401, and the air outlet pipe 401 extends to the heat exhausting system of the plant to prevent hot air from accumulating in the plant. The hot exhaust system is used for exhausting hot air to a position where production is not affected. The specific structure of the heat exhausting system is the prior art and is not described in detail.

In some embodiments of the present invention, a first damping block 412 is installed between the first fan 410 and the fan bracket 300, a second damping block 422 is installed between the second fan 420 and the fan bracket 300, and the first damping block 412 and the second damping block 422 are made of high-strength rubber. The first and second

vibration absorbing blocks

412 and 422 are used to reduce vibration when the first and

second fans

410 and 420 operate. The fan bracket 300 is prevented from being damaged due to resonance.

In some embodiments of the present invention, the blower support 300 comprises a first support 301 and a second support 302, the first blower 410 is mounted on the first support 301, and the second blower 420 is mounted on the second support 302. The first bracket 301 and the second bracket 302 are independently provided.

In some embodiments of the present invention, the heat absorbing cover 320 is a hollow box, the heat absorbing cover 320 has a mounting hole 322, the uppermost heat absorbing cover 320 is directly bolted to the fan bracket 300, the rest heat absorbing covers 320 are bolted to the bottom of the corresponding water cooling device 310 through the mounting hole 322, the lower end of the heat absorbing cover 320 has a plurality of heat absorbing holes 321 communicated with the inner space of the heat absorbing cover 320, and the heat absorbing holes 321 are uniformly distributed at the lower end of the heat absorbing cover 320. The second air duct 421 is connected to the heat absorbing housing 320 by bolts, and the second air duct 421 is communicated with the inner space of the heat absorbing housing 320. The plurality of heat absorption holes 321 are formed, so that the effect of absorbing the hot air near the graphite boat 200 is more uniform.

In some embodiments of the present invention, the soup plate 600 is a hollow box, the lower end of the soup plate 600 is provided with a plurality of ventilation holes communicated with the inner space of the soup plate 600, the ventilation holes are uniformly distributed at the lower end of the soup plate 600, the second air pipe 421 is connected with the soup plate 600 by bolts, and the second air pipe 421 is communicated with the inner space of the soup plate 600. The effect of absorbing the hot air near the graphite boat 200 is more uniform by forming a plurality of vent holes.

The working process is as follows: the heat collecting cover 500 is communicated with the first fan 410 through the first air duct 411, hot air emitted when the oven door 110 is opened is pumped to the first fan 410, and the graphite boat 200 is taken out of the oven door 110 by the paddle 101. The soup plate 600 and the heat absorption housing 320 are communicated with the second fan 420 through the second air pipe 421, hot air emitted when the paddle 101 transports the graphite boat 200 is pumped to the second fan 420 through the soup plate 600, when the graphite boat 200 is positioned on the water cooling device 310, the heat absorption housing 320 absorbs the hot air emitted by the graphite boat 200 on the water cooling device 310 corresponding to the lower part of the heat absorption housing, and meanwhile, the outside air passes through the water cooling device 310 at the bottom of the graphite boat 200 and is further cooled and then supplemented to the vicinity of the graphite boat 200.

In the description herein, references to the description of the term "one embodiment," "some embodiments," "an illustrative embodiment," "an example," "a specific example" or "some examples" or the like mean that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the invention. In this specification, the schematic representations of the terms used above do not necessarily refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.

While embodiments of the present invention have been shown and described, it will be understood by those of ordinary skill in the art that: various changes, modifications, substitutions and alterations can be made to the embodiments without departing from the principles and spirit of the invention, the scope of which is defined by the claims and their equivalents.

Claims

1. A high pressure positive blower heat absorption cooling system for cooling a graphite boat (200) taken out of a furnace body (100), comprising:

a fan support (300);

the air exhaust system (400) is fixedly connected to the fan bracket (300);

the heat collection cover (500) is fixedly connected with the fan bracket (300) and arranged at a furnace door (110) formed on the furnace body (100), and the heat collection cover (500) is connected with the air draft system (400) and is used for sucking hot air emitted when the furnace door (110) is opened;

the soup plate (600) is fixedly connected with the fan bracket (300) and is arranged above the moving path of the graphite boat (200), and the soup plate (600) is connected with the air draft system (400) and is used for sucking hot air emitted when the graphite boat (200) moves and stays on the paddle.

2. The high-pressure fan heat absorption and temperature reduction system according to claim 1, characterized in that: the graphite boat heat-absorbing device is characterized by further comprising a water cooling device (310), wherein the water cooling device (310) is used for cooling air taken out of the furnace body (100) and near the graphite boat (200), a heat-absorbing cover (320) is connected to the bottom of the water cooling device (310), and the heat-absorbing cover (320) is connected with the air extracting system (400) to suck hot air.

3. The high-pressure fan heat absorption and temperature reduction system according to claim 2, characterized in that: the water cooling device (310) and the heat absorption housing (320) are a set of cooling parts, and a plurality of groups of cooling parts are arranged at intervals in the vertical direction.

4. The high-pressure fan heat absorption and temperature reduction system according to claim 3, characterized in that: the air draft system (400) comprises a first fan (410), and the first fan (410) is connected with the heat collection cover (500) through a first air pipe (411).

5. The high-pressure fan heat absorption and temperature reduction system according to claim 4, characterized in that: the air draft system (400) comprises a second fan (420), the second fan (420) is connected with the heat absorption housing (320) through a second air pipe (421), and the second fan (420) is connected with the soup plate (600) through the second air pipe (421).

6. The high-pressure fan heat absorption and temperature reduction system according to claim 5, characterized in that: the first air pipe (411) and the second air pipe (421) are at least partially corrugated pipes.

7. The high-pressure fan heat absorption and temperature reduction system according to claim 6, characterized in that: the first fan (410) and the second fan (420) are both connected with an air outlet pipe (401).

8. The high-pressure fan heat absorption and temperature reduction system according to claim 7, characterized in that: first blower (410) with install first snubber block (412) between fan support (300), second blower (420) with install second snubber block (422) between fan support (300), first snubber block (412) with second snubber block (422) are used for reducing respectively first blower (410) with the vibration of second blower (420) when moving.

9. The high-pressure fan heat absorption and temperature reduction system according to claim 8, characterized in that: the heat absorption housing (320) is a hollow box body, the lower end of the heat absorption housing (320) is provided with a plurality of heat absorption holes (321) communicated with the inner space of the heat absorption housing (320), and the second air pipe (421) is communicated with the inner space of the heat absorption housing (320).

10. The high-pressure fan heat absorption and temperature reduction system according to claim 9, characterized in that: soup plate (600) are the cavity box body, soup plate (600) lower extreme seted up a plurality ofly with the ventilation hole that soup plate (600) inner space is linked together, second tuber pipe (421) with soup plate (600) inner space is linked together.