CN111684243A - 光谱仪、用于制造光谱仪的方法和用于运行光谱仪的方法 - Google Patents

光谱仪、用于制造光谱仪的方法和用于运行光谱仪的方法 Download PDF

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Publication number
CN111684243A
CN111684243A CN201980011251.0A CN201980011251A CN111684243A CN 111684243 A CN111684243 A CN 111684243A CN 201980011251 A CN201980011251 A CN 201980011251A CN 111684243 A CN111684243 A CN 111684243A
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CN
China
Prior art keywords
spectrometer
angle
intensity
incidence
pixel
Prior art date
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Pending
Application number
CN201980011251.0A
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English (en)
Chinese (zh)
Inventor
B·斯坦
M·胡思尼克
E·鲍姆加特
F·毛赫
C·谢林
R·维斯
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Robert Bosch GmbH
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Robert Bosch GmbH
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Filing date
Publication date
Application filed by Robert Bosch GmbH filed Critical Robert Bosch GmbH
Publication of CN111684243A publication Critical patent/CN111684243A/zh
Pending legal-status Critical Current

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0256—Compact construction
    • G01J3/0259—Monolithic
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0256—Compact construction
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12—Generating the spectrum; Monochromators
    • G01J3/18—Generating the spectrum; Monochromators using diffraction elements, e.g. grating
    • G01J3/1804—Plane gratings
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12—Generating the spectrum; Monochromators
    • G01J3/26—Generating the spectrum; Monochromators using multiple reflection, e.g. Fabry-Perot interferometer, variable interference filters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/2803—Investigating the spectrum using photoelectric array detector
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
    • H01L27/144—Devices controlled by radiation
    • H01L27/146—Imager structures
    • H01L27/14601—Structural or functional details thereof
    • H01L27/1462—Coatings
    • H01L27/14621—Colour filter arrangements
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
    • H01L27/144—Devices controlled by radiation
    • H01L27/146—Imager structures
    • H01L27/14601—Structural or functional details thereof
    • H01L27/14625—Optical elements or arrangements associated with the device
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
    • H01L27/144—Devices controlled by radiation
    • H01L27/146—Imager structures
    • H01L27/14683—Processes or apparatus peculiar to the manufacture or treatment of these devices or parts thereof
    • H01L27/14685—Process for coatings or optical elements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12—Generating the spectrum; Monochromators
    • G01J2003/1226—Interference filters

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  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Electromagnetism (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Spectrometry And Color Measurement (AREA)
CN201980011251.0A 2018-02-01 2019-01-16 光谱仪、用于制造光谱仪的方法和用于运行光谱仪的方法 Pending CN111684243A (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE102018201519.8A DE102018201519A1 (de) 2018-02-01 2018-02-01 Spektrometer, Verfahren zum Herstellen eines Spektrometers und Verfahren zum Betreiben eines Spektrometers
DE102018201519.8 2018-02-01
PCT/EP2019/051034 WO2019149526A1 (de) 2018-02-01 2019-01-16 Spektrometer, verfahren zum herstellen eines spektrometers und verfahren zum betreiben eines spektrometers

Publications (1)

Publication Number Publication Date
CN111684243A true CN111684243A (zh) 2020-09-18

Family

ID=65199405

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201980011251.0A Pending CN111684243A (zh) 2018-02-01 2019-01-16 光谱仪、用于制造光谱仪的方法和用于运行光谱仪的方法

Country Status (3)

Country Link
CN (1) CN111684243A (de)
DE (1) DE102018201519A1 (de)
WO (1) WO2019149526A1 (de)

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20020126279A1 (en) * 2000-11-10 2002-09-12 Kung Helen L. Miniaturized talbot spectrometer
US20070298533A1 (en) * 2006-06-26 2007-12-27 Micron Technology, Inc. Method and apparatus providing imager pixel array with grating structure and imager device containing the same
CN102262253A (zh) * 2010-05-27 2011-11-30 原子能与替代能源委员会 适合处理入射可变辐射的光学滤波器、包括滤波器的检测器
US20120091372A1 (en) * 2008-07-25 2012-04-19 Cornell University Light field image sensor, method and applications
US20150145084A1 (en) * 2013-11-27 2015-05-28 Taiwan Semiconductor Manufacturing Company, Ltd. Diffraction Grating with Multiple Periodic Widths

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10121499B4 (de) 2001-05-03 2007-08-02 Campus Technologies Ag Vorrichtung und Verfahren zur optischen Spektroskopie und optischen Sensorik sowie Verwendung der Vorrichtung
JP5366982B2 (ja) * 2008-03-04 2013-12-11 ヒューレット−パッカード デベロップメント カンパニー エル．ピー． 導波モード共鳴を利用する角度センサ、システム、及び方法
CN112985603A (zh) * 2015-09-01 2021-06-18 苹果公司 用于非接触式感测物质的基准开关架构
DE102016216842B4 (de) * 2016-09-06 2019-12-24 Robert Bosch Gmbh Verfahren und Vorrichtung zum Betreiben eines Spektrometers

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20020126279A1 (en) * 2000-11-10 2002-09-12 Kung Helen L. Miniaturized talbot spectrometer
US20070298533A1 (en) * 2006-06-26 2007-12-27 Micron Technology, Inc. Method and apparatus providing imager pixel array with grating structure and imager device containing the same
US20120091372A1 (en) * 2008-07-25 2012-04-19 Cornell University Light field image sensor, method and applications
CN102262253A (zh) * 2010-05-27 2011-11-30 原子能与替代能源委员会 适合处理入射可变辐射的光学滤波器、包括滤波器的检测器
US20150145084A1 (en) * 2013-11-27 2015-05-28 Taiwan Semiconductor Manufacturing Company, Ltd. Diffraction Grating with Multiple Periodic Widths

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
ADRIAAN JOHANNES TAAL: "COLOUR SENSITIVE LENS-LESS IMAGINGUSING RESONATING NANOPHOTONIC DIFFRACTION GRATINGS", 《HTTP://REPOSITORY.TUDELFT.NL/ISLANDORA/OBJECT/UUID%3A85B98CC9-E770-40FD-A344-77F1BCE4CD35?COLLECTION=EDUCATION》 *

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Publication number Publication date
WO2019149526A1 (de) 2019-08-08
DE102018201519A1 (de) 2019-08-01

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