CN111678921A - Optical detection device - Google Patents

Optical detection device Download PDF

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Publication number
CN111678921A
CN111678921A CN202010567243.9A CN202010567243A CN111678921A CN 111678921 A CN111678921 A CN 111678921A CN 202010567243 A CN202010567243 A CN 202010567243A CN 111678921 A CN111678921 A CN 111678921A
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China
Prior art keywords
line
optical detection
cameras
cantilever beam
sliding
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Granted
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CN202010567243.9A
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Chinese (zh)
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CN111678921B (en
Inventor
唐浩
程久阳
周全国
蒋国
王利
皮凯
黄忠
周丽佳
王志东
周铄
徐丽蓉
兰荣华
张青
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BOE Technology Group Co Ltd
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BOE Technology Group Co Ltd
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Priority to CN202010567243.9A priority Critical patent/CN111678921B/en
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/88Investigating the presence of flaws or contamination
    • G01N21/8851Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01MTESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M11/00Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/88Investigating the presence of flaws or contamination
    • G01N21/8851Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
    • G01N2021/8887Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges based on image processing techniques

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  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Signal Processing (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Abstract

The present disclosure provides an optical detection apparatus comprising: a carrier configured to carry a product to be detected; the fixed support part is positioned on the side surface of the carrying platform; the line scanning camera is arranged on the fixed supporting part and is configured to scan the area to be shot on the surface of the product to be detected along a preset scanning direction so as to obtain a corresponding image; and the light sources are arranged on the fixed supporting part and are in one-to-one correspondence with the line scanning cameras, and the light sources are configured to illuminate the shooting positions of the corresponding line scanning cameras.

Description

Optical detection device
Technical Field
The present disclosure relates to the field of display, and in particular, to an optical inspection apparatus.
Background
With the development of display technology, display products develop from a traditional plane form to a curved surface, a cambered surface or even a spherical surface. Due to the characteristics of the process and the product, the non-planar area has many bad types and high detection difficulty, and a bright light band or a pure black band appears when conventional Automatic Optical Inspection (AOI) equipment is used for shooting an arc surface, so that the defects of the product cannot be clearly captured, and the quality problem is caused.
Disclosure of Invention
The present disclosure is directed to at least one of the technical problems of the prior art, and provides an optical detection apparatus.
In a first aspect, an embodiment of the present disclosure provides an optical detection apparatus, including:
a carrier configured to carry a product to be detected;
the fixed support part is positioned on the side surface of the carrying platform;
the line scanning camera is arranged on the fixed supporting part and is configured to scan the area to be shot on the surface of the product to be detected along a preset scanning direction so as to obtain a corresponding image;
and the light sources are arranged on the fixed supporting part and are in one-to-one correspondence with the line scanning cameras, and the light sources are configured to illuminate the shooting positions of the corresponding line scanning cameras.
In some embodiments, the fixing support comprises:
a support;
the cantilever beam is fixed on the bracket and is provided with a sliding groove;
the sliding table is in one-to-one correspondence with the line scanning cameras, the part, close to the cantilever beam, of the sliding table is a first part, the part, far away from the cantilever beam, of the sliding table is a second part, the first part is located in the sliding groove and can slide along the sliding groove, and the second part is connected with the corresponding line scanning cameras.
In some embodiments, the second portion of the slide table is configured with a fine adjustment knob connected to a line scan camera located at the second portion of the slide table, the fine adjustment knob configured to adjust a distance between a lens of the line scan camera and the product to be inspected.
In some embodiments, each cantilever beam is provided with a plurality of sliding tables;
on the same cantilever beam, the heights of any two sliding tables in the preset scanning direction are different.
In some embodiments, on the same cantilever beam, along the extending direction of the sliding groove, the heights of the plurality of sliding tables in the preset scanning direction sequentially increase or sequentially decrease.
In some embodiments, on the same cantilever beam, the range of the height difference between two adjacent sliding tables in the preset scanning direction includes: 3 mm-8 mm.
In some embodiments, the slide groove is an arc-shaped slide groove, and the arc is convex towards the side far away from the carrier.
In some embodiments, the number of the brackets is 2, the number of the cantilever beams is 2, and the cantilever beams correspond to the brackets one to one;
the 2 supports are respectively positioned at two opposite sides of the carrying platform.
In some embodiments, the optical detection apparatus further comprises:
and the driving mechanism is connected with the carrier and is configured to drive the carrier to run along the preset scanning direction.
In some embodiments, for any one of the line scan cameras, an included angle range between a light incident direction of the line scan camera and a light emergent direction of a light source corresponding to the line scan camera includes: 20 to 50 degrees.
Drawings
Fig. 1 is a front view of an optical inspection apparatus provided in an embodiment of the present disclosure;
FIG. 2 is a schematic diagram of a 3 line scan cameras scanning a curved surface portion of one side of a product to be inspected according to an embodiment of the present disclosure
FIG. 3 is a schematic view of a fixing support according to an embodiment of the disclosure;
fig. 4 is a side view of the fixing support shown in fig. 3.
Fig. 5 is another schematic structural diagram of the fixing support portion in the embodiment of the disclosure.
Detailed Description
In order to make those skilled in the art better understand the technical solution of the present disclosure, a detailed description of an optical detection apparatus provided in the present disclosure is provided below with reference to the accompanying drawings.
Fig. 1 is a front view of an optical detection apparatus provided in an embodiment of the present disclosure, as shown in fig. 1, the optical detection apparatus includes: a stage 1, a fixed support 2, at least one line scan camera 3, and at least one light source 4. The scanning device comprises a carrier 1, a fixed support part 2, a line scanning camera 3, a scanning unit and a scanning unit, wherein the carrier 1 is configured to bear a product 9 to be detected, the fixed support part 2 is positioned on the side surface of the carrier 1, the line scanning camera 3 is arranged on the fixed support part 2, and the line scanning camera 3 is configured to scan an area to be shot on the surface of the product 9 to be detected along a preset scanning direction X so as to; the light sources 4 are disposed on the fixed support portion 2 in one-to-one correspondence with the line-scan cameras 3, and the light sources 4 are arranged to illuminate positions photographed by the corresponding line-scan cameras 3.
Take the product 9 to be detected as a curved display panel as an example. Firstly, a curved surface display panel is placed on a platform deck 1; then, the number and positions of the line-scan cameras 3 are configured according to the curved surface portion of the curved surface display panel; in some embodiments, if the area of the curved surface portion is small, 1 line scan camera 3 needs to be configured (in this case, no corresponding figure is shown); if the area of the curved surface part is large, a plurality of line-scan cameras 3 (6 line-scan cameras 3 are exemplarily shown in fig. 1) need to be configured, and the combination of the plurality of line-scan cameras 3 is used for performing all-around dead-angle-free scanning shooting on the curved surface part; then, adjusting the light-emitting angle of the light source 4 corresponding to each line scan camera 3 to illuminate the corresponding shooting position of the line scan camera 3; and finally, controlling the carrying platform 1 to run along the preset scanning direction X, so that the line scanning camera 3 scans the surface of the product 9 to be detected to obtain a clear image of the curved surface part.
Fig. 2 is a schematic diagram of the 3 line scan cameras in the embodiment of the present disclosure when scanning a curved surface portion of one side of a product to be detected, as shown in fig. 2, the curved surface portion is divided into 3 regions a, b, and c to be photographed according to the size of the curved surface portion of the one side, and the 3 line scan cameras 3a, 3b, and 3c and the 3 light sources 4 (not shown in fig. 2) are configured at the same time. When scanning is carried out, the product 9 to be detected is controlled to run along the preset scanning direction X, so that the 3 line scanning cameras 3a, 3b and 3c respectively carry out scanning shooting on the areas a, b and c to be shot.
In the embodiment of the present disclosure, the scanning of the line scan camera 3 has the characteristics of high resolution and high precision, and can perform all-around dead-angle-free scanning and shooting on the curved surface portion of the product 9 to be detected, and convert the curved surface portion into a planar development view, so as to obtain a clear image of the curved surface portion, thereby facilitating subsequent defect (e.g., collision, scratch, crack, foreign matter, etc.) detection.
In some embodiments, the optical detection apparatus further comprises a drive mechanism; the driving mechanism is connected to the stage 1 and configured to drive the stage 1 to move in the preset scanning direction X. By arranging the driving mechanism, automatic scanning of the optical detection device can be realized.
In some embodiments, the optical detection apparatus further comprises: the slide rail 11, the slide rail 11 extends along the preset scanning direction X, the stage 1 has a connecting portion matching with the slide rail 11, and the stage 1 can move along the slide rail 11. When the driving mechanism is present, the driving mechanism can drive the stage 1 to move along the slide rail 11.
In some embodiments, the light source 4 is a monochromatic coaxial light source, and the coaxial light source 4 can provide more uniform illumination than a conventional light source, and can highlight the unevenness of the surface of the product 9 to be detected, and overcome the interference caused by surface reflection, thereby improving the accuracy and reproducibility of the line scanning camera 3 vision.
In some embodiments, the light emitted by the light source 4 is blue light; since the blue light is narrow-band light, the line scan camera 3 can effectively filter out the interference ambient light during image acquisition to obtain high-quality image data.
In some embodiments, in practical applications, it is found that, if an included angle between the light incident direction of the line scan camera 3 and the light emergent direction of the light source 4 corresponding to the line scan camera 3 is too small, the amount of light received by the line scan camera 3 is large, and a bright band image is easily formed; if the angle between the light incident direction of the line scan camera 3 and the light emergent direction of the light source 4 corresponding to the line scan camera 3 is too large, the amount of light received by the line scan camera 3 is small, and a dark band image is easily formed. Based on the above phenomenon, in the embodiment of the present disclosure, the included angle range between the light incident direction of the line scan camera 3 and the light emergent direction of the light source 4 corresponding to the line scan camera 3 includes: 20-50 degrees, at the moment, the light quantity which can be received by the line scan camera 3 is moderate, and a clear image can be formed.
Fig. 3 is a schematic structural diagram of a fixing and supporting portion in an embodiment of the disclosure, and as shown in fig. 3, the fixing and supporting portion 2 includes: a support 5, a cantilever beam 6 and at least one sliding table 7; wherein, the cantilever beam 6 is fixed on the bracket 5 and is provided with a sliding groove 10; the sliding table 7 corresponds to the line scan camera 3 one by one, the part of the sliding table 7 close to the cantilever beam 6 is a first part, the part of the sliding table 7 far away from the cantilever beam 6 is a second part, the first part is positioned in the sliding groove 10 and can slide along the sliding groove, and the second part is connected with the corresponding line scan camera 3. The position of the slide table 7 and the line scan camera 3 connected thereto can be adjusted by moving the slide table 7 in the slide groove 10; after the line scan camera 3 is moved to a desired position, the slide table 7 is fixed in the slide groove 10.
In some embodiments, the cantilever beam 6 is L-shaped, the sliding groove 10 is an arc-shaped sliding groove 10, and an arc line protrudes outward towards a side away from the carrier 1, so as to ensure that a distance between the lens of the line-scan camera 3 and the carrier 1 is always kept within a certain range; by adjusting the position of the sliding table 7 in the sliding groove 10, on one hand, the area shot by the line scan camera 3 can be adjusted, and on the other hand, the depth of field of the line scan camera 3 can be roughly adjusted.
In some embodiments, the second portion of the slide table 7 is provided with a fine adjustment knob 8, the fine adjustment knob 8 being connected to the line scan camera 3 located at the second portion of the slide table 7, the fine adjustment knob 8 being configured to adjust a distance between a lens of the line scan camera 3 and the product 9 to be inspected. In the embodiment of the present disclosure, the fine adjustment of the depth of field of the line scan camera 3 can be performed by the fine adjustment knob 8.
Fig. 4 is a side view of the fixed support of fig. 3, and as shown in fig. 4, in some embodiments, the cantilever beam 6 is provided with a plurality of sliding tables 7; the heights H of any two sliding tables 7 on the cantilever beam 6 in the preset scanning direction X are different. At this time, the positions of the line-scan cameras 3 on the cantilever 6, which are photographed at any time, are shifted in the preset scanning direction X, so that the line-scan cameras 3 can be prevented from being interfered by the light sources 4 corresponding to the other line-scan cameras 3.
With continued reference to fig. 4, in some embodiments, on the same cantilever 6, along the extending direction of the sliding groove 10, the heights H of the plurality of sliding tables 7 in the preset scanning direction X sequentially increase or decrease, that is, the positions photographed by the line-scan cameras 3 on the cantilever 6 at any time in the preset scanning direction X are sequentially staggered, so that the problem of interference of the light source 4 can be avoided as much as possible. Further, on the same cantilever 6, the height difference range of two adjacent sliding tables 7 in the preset scanning direction X includes: 3 mm-8 mm.
As shown in fig. 2, when the arrangement of the line-scan cameras 3 is selected, the range of the curved surface width W of the region to be photographed corresponding to each line-scan camera 3 includes: 2 mm-5 mm, so as to ensure that the distances from the line scanning camera 3 to each position on the shooting area are approximately equal in the process of scanning the area to be shot, and be beneficial to obtaining a clear plane image.
Fig. 5 is another schematic structural diagram of the fixing and supporting portion in the embodiment of the present disclosure, as shown in fig. 5, in some embodiments, the number of the supports 5 is 2, the number of the cantilever beams 6 is 2, the cantilever beams 6 correspond to the supports 5 one to one, and the 2 supports 5 are respectively located on two opposite sides of the carrier 1, at this time, the optical detection apparatus can simultaneously detect two side curved surfaces of the product 9 to be detected, so as to shorten the detection period.
The optical detection equipment provided by the embodiment of the disclosure can carry out all-round shooting on the curved surface part of a cambered surface/curved surface product, wherein the light sources 4 correspond to the line scanning cameras 3 one to one, the light is clear, and meanwhile, the light sources 4 are not interfered by each other due to the arrangement of staggered shooting of the line scanning cameras 3, so that clear images can be formed. In addition, the position and the depth of field of each line scan camera 3 can be adjusted, and the number of the line scan cameras 3 and the number of the light sources 4 can be adjusted according to the product requirements, so that the linear scan cameras can adapt to the larger product size range and the change of the arc angle.
It is to be understood that the above embodiments are merely exemplary embodiments that are employed to illustrate the principles of the present disclosure, and that the present disclosure is not limited thereto. It will be apparent to those skilled in the art that various changes and modifications can be made therein without departing from the spirit and scope of the disclosure, and these are to be considered as the scope of the disclosure.

Claims (10)

1. An optical inspection apparatus, comprising:
a carrier configured to carry a product to be detected;
the fixed support part is positioned on the side surface of the carrying platform;
the line scanning camera is arranged on the fixed supporting part and is configured to scan the area to be shot on the surface of the product to be detected along a preset scanning direction so as to obtain a corresponding image;
and the light sources are arranged on the fixed supporting part and are in one-to-one correspondence with the line scanning cameras, and the light sources are configured to illuminate the shooting positions of the corresponding line scanning cameras.
2. The optical detection apparatus of claim 1, wherein the fixed support comprises:
a support;
the cantilever beam is fixed on the bracket and is provided with a sliding groove;
the sliding table is in one-to-one correspondence with the line scanning cameras, the part, close to the cantilever beam, of the sliding table is a first part, the part, far away from the cantilever beam, of the sliding table is a second part, the first part is located in the sliding groove and can slide along the sliding groove, and the second part is connected with the corresponding line scanning cameras.
3. The optical inspection apparatus of claim 2, wherein the second portion of the slide table is configured with a fine adjustment knob, the fine adjustment knob being connected to a line scan camera located at the second portion of the slide table, the fine adjustment knob being configured to adjust a distance between a lens of the line scan camera and the product to be inspected.
4. The optical detection device according to claim 2, wherein each cantilever is provided with a plurality of sliding tables;
on the same cantilever beam, the heights of any two sliding tables in the preset scanning direction are different.
5. The optical detection apparatus according to claim 4, wherein the heights of the plurality of slide tables in the preset scanning direction sequentially increase or sequentially decrease along the extending direction of the slide groove on the same cantilever beam.
6. The optical detection apparatus according to claim 5, wherein on the same cantilever beam, a range of height difference between two adjacent sliding tables in the preset scanning direction includes: 3 mm-8 mm.
7. The optical detection apparatus of claim 2, wherein the slide groove is an arc-shaped slide groove, and the arc is convex toward a side away from the stage.
8. The optical detection apparatus of claim 2, wherein the number of the supports is 2, the number of the cantilever beams is 2, and the cantilever beams correspond to the supports one to one;
the 2 supports are respectively positioned at two opposite sides of the carrying platform.
9. The optical inspection apparatus of any of claims 1-8, further comprising:
and the driving mechanism is connected with the carrier and is configured to drive the carrier to run along the preset scanning direction.
10. The optical inspection apparatus of claim 9, wherein for any one of the line scan cameras, an included angle between the light incident direction of the line scan camera and the light emergent direction of the light source corresponding to the line scan camera includes: 20 to 50 degrees.
CN202010567243.9A 2020-06-19 2020-06-19 Optical detection device Active CN111678921B (en)

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Cited By (1)

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Publication number Priority date Publication date Assignee Title
CN113295696A (en) * 2021-04-06 2021-08-24 昆山精讯电子技术有限公司 Curved screen outer arc crackle optical detection device

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113295696A (en) * 2021-04-06 2021-08-24 昆山精讯电子技术有限公司 Curved screen outer arc crackle optical detection device
CN113295696B (en) * 2021-04-06 2024-02-06 昆山精讯电子技术有限公司 Curved screen outer arc crack optical detection device

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