CN111678921B - Optical detection device - Google Patents

Optical detection device Download PDF

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Publication number
CN111678921B
CN111678921B CN202010567243.9A CN202010567243A CN111678921B CN 111678921 B CN111678921 B CN 111678921B CN 202010567243 A CN202010567243 A CN 202010567243A CN 111678921 B CN111678921 B CN 111678921B
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CN
China
Prior art keywords
line scanning
cantilever beam
line
camera
slide
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Active
Application number
CN202010567243.9A
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Chinese (zh)
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CN111678921A (en
Inventor
唐浩
程久阳
周全国
蒋国
王利
皮凯
黄忠
周丽佳
王志东
周铄
徐丽蓉
兰荣华
张青
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BOE Technology Group Co Ltd
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BOE Technology Group Co Ltd
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Priority to CN202010567243.9A priority Critical patent/CN111678921B/en
Publication of CN111678921A publication Critical patent/CN111678921A/en
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Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/88Investigating the presence of flaws or contamination
    • G01N21/8851Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01MTESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M11/00Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/88Investigating the presence of flaws or contamination
    • G01N21/8851Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
    • G01N2021/8887Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges based on image processing techniques

Abstract

The present disclosure provides an optical detection apparatus comprising: the carrier is configured to bear the product to be detected; the fixed supporting part is positioned on the side surface of the carrying platform; the line scanning camera is arranged on the fixed supporting part and is configured to scan a to-be-shot area on the surface of the product to be detected along a preset scanning direction so as to acquire a corresponding image; at least one light source is arranged on the fixed supporting part and corresponds to the line scanning cameras one by one, and the light source is configured to illuminate the shooting positions of the corresponding line scanning cameras.

Description

Optical detection device
Technical Field
The present disclosure relates to the field of displays, and in particular, to an optical detection device.
Background
With the development of display technology, display products develop from traditional plane forms to curved surfaces, cambered surfaces and even spherical surfaces. Because of the characteristics of the process and the product, the non-planar area has a plurality of bad types and high detection difficulty, and the conventional automatic optical detection (Automated Optical Inspection, AOI for short) equipment has a bright light band or a pure black band when the cambered surface shooting is carried out, so that the defect of the product can not be captured clearly, and further the quality problem is caused.
Disclosure of Invention
The present disclosure aims to solve at least one of the technical problems existing in the prior art, and proposes an optical detection device.
In a first aspect, embodiments of the present disclosure provide an optical detection apparatus, comprising:
the carrier is configured to bear the product to be detected;
the fixed supporting part is positioned on the side surface of the carrying platform;
the line scanning camera is arranged on the fixed supporting part and is configured to scan a to-be-shot area on the surface of the product to be detected along a preset scanning direction so as to acquire a corresponding image;
at least one light source is arranged on the fixed supporting part and corresponds to the line scanning cameras one by one, and the light source is configured to illuminate the shooting positions of the corresponding line scanning cameras.
In some embodiments, the fixed support comprises:
a bracket;
the cantilever beam is fixed on the bracket and provided with a sliding groove;
the sliding table is in one-to-one correspondence with the line scanning cameras, the part, close to the cantilever beam, on the sliding table is a first part, the part, far away from the cantilever beam, on the sliding table is a second part, the first part is positioned in the sliding groove and can slide along the sliding groove, and the second part is connected with the corresponding line scanning cameras.
In some embodiments, the second portion of the slide table is configured with a fine adjustment knob that is connected with a line scan camera located at the second portion of the slide table, the fine adjustment knob configured to adjust a distance between a lens of the line scan camera and the product to be inspected.
In some embodiments, the number of slide tables configured per cantilever beam is multiple;
on the same cantilever beam, the heights of any two sliding tables in the preset scanning direction are different.
In some embodiments, on the same cantilever beam, along the extending direction of the sliding groove, the heights of the sliding tables in the preset scanning direction are sequentially increased or sequentially decreased.
In some embodiments, on the same cantilever beam, a range of a height difference between two adjacent slide tables in the preset scanning direction includes: 3 mm-8 mm.
In some embodiments, the sliding groove is an arc-shaped sliding groove, the arc protruding toward a side away from the stage.
In some embodiments, the number of the brackets is 2, the number of the cantilever beams is 2, and the cantilever beams are in one-to-one correspondence with the brackets;
the 2 brackets are respectively positioned on two opposite sides of the carrying platform.
In some embodiments, the optical detection device further comprises:
and the driving mechanism is connected with the carrying platform and is configured to drive the carrying platform to run along the preset scanning direction.
In some embodiments, for any one of the line scan cameras, the range of an included angle between the light incident direction of the line scan camera and the light emergent direction of the light source corresponding to the line scan camera includes: 20-50 deg.
Drawings
FIG. 1 is a front view of an optical inspection apparatus provided in an embodiment of the present disclosure;
fig. 2 is a schematic diagram of a scanning of curved surface portions of one side of a product to be inspected by 3 line scanning cameras according to an embodiment of the disclosure
FIG. 3 is a schematic view of a structure of a fixing support portion according to an embodiment of the disclosure;
fig. 4 is a side view of the fixed support portion shown in fig. 3.
Fig. 5 is a schematic view of another structure of the fixing support portion in the embodiment of the disclosure.
Detailed Description
In order to better understand the technical solutions of the present disclosure, a detailed description of an optical detection device provided by the present disclosure is provided below with reference to the accompanying drawings.
Fig. 1 is a front view of an optical detection apparatus according to an embodiment of the present disclosure, as shown in fig. 1, the optical detection apparatus includes: a stage 1, a fixed support 2, at least one line scan camera 3 and at least one light source 4. The carrying platform 1 is configured to carry a product 9 to be detected, the fixed supporting part 2 is positioned on the side surface of the carrying platform 1, the line scanning camera 3 is arranged on the fixed supporting part 2, and the line scanning camera 3 is configured to scan a region to be shot on the surface of the product 9 to be detected along a preset scanning direction X so as to acquire a corresponding image; the light sources 4 are disposed on the fixed support portion 2 and are in one-to-one correspondence with the line scanning cameras 3, and the light sources 4 are configured to illuminate the shooting positions of the corresponding line scanning cameras 3.
Take the product 9 to be tested as a curved display panel as an example. Firstly, placing a curved display panel on a carrying platform 1; then, the number and positions of the line scanning cameras 3 are configured according to the curved surface portion of the curved surface display panel; in some embodiments, if the area of the curved surface portion is smaller, 1 line scan camera 3 needs to be configured (in this case, the corresponding drawing is not given); if the area of the curved surface part is large, a plurality of line scan cameras 3 (6 line scan cameras 3 are exemplarily shown in fig. 1) need to be configured, and the combination of the plurality of line scan cameras 3 is used for performing omnibearing dead angle-free scanning shooting on the curved surface part; then, adjusting the light emitting angle of the light source 4 corresponding to each line scanning camera 3 to illuminate the shooting position of the corresponding line scanning camera 3; finally, the console 1 is controlled to run along a preset scanning direction X, so that the line scanning camera 3 scans the surface of the product 9 to be detected, so as to obtain a clear image of the curved surface portion.
Fig. 2 is a schematic diagram of a scanning process performed by 3 line scanning cameras on a curved surface portion on one side of a product to be detected in an embodiment of the present disclosure, as shown in fig. 2, the curved surface portion is divided into 3 regions a, b, and c to be shot according to the size of the curved surface portion on the one side, and meanwhile, 3 line scanning cameras 3a, 3b, 3c, and 3 light sources 4 (not shown in fig. 2) are configured. When scanning is performed, the product 9 to be detected is controlled to run along the preset scanning direction X, so that the 3 line scanning cameras 3a, 3b and 3c respectively perform scanning shooting on the areas a, b and c to be shot.
In the embodiment of the disclosure, the scanning of the line scanning camera 3 has the characteristics of high resolution and high precision, and the line scanning camera can perform omnibearing dead-angle-free scanning shooting on the curved surface part of the product 9 to be detected and convert the image into a plane unfolding diagram, so that a clear image of the curved surface part is obtained, and the subsequent detection of defects (such as bruise, scratch, cracks, foreign matters and the like) is facilitated.
In some embodiments, the optical detection device further comprises a drive mechanism; the driving mechanism is connected to the stage 1 and configured to drive the stage 1 to run along a preset scanning direction X. By providing the driving mechanism, automatic scanning of the optical detection device can be realized.
In some embodiments, the optical detection device further comprises: the slide rail 11, the slide rail 11 extends along a preset scanning direction X, the carrier 1 has a connecting portion matched with the slide rail 11, and the carrier 1 can move along the slide rail 11. When present, the drive structure is capable of driving the carrier 1 to move along the slide rail 11.
In some embodiments, the light source 4 is a monochromatic coaxial light source, and the coaxial light source 4 can provide more uniform illumination than a traditional light source, and can highlight uneven surface of the product 9 to be detected, and overcome interference caused by surface reflection, so as to improve accuracy and reproducibility of vision of the line scanning camera 3.
In some embodiments, the light emitted by the light source 4 is blue light; since the blue light is a narrow band light, the line scan camera 3 can effectively remove the interference ambient light during image acquisition to obtain high quality image data.
In some embodiments, in practical applications, it is found that if an included angle between an incident light direction of the line scan camera 3 and an emergent light direction of the light source 4 corresponding to the line scan camera 3 is too small, the amount of light received by the line scan camera 3 is large, so that a bright light band image is easily formed; if the included angle between the light incident direction of the line scan camera 3 and the light emergent direction of the light source 4 corresponding to the line scan camera 3 is too large, the amount of light received by the line scan camera 3 is small, and a dark band image is easily formed. Based on the above phenomena, in the embodiment of the present disclosure, the range of the included angle between the light incident direction of the line scanning camera 3 and the light emergent direction of the light source 4 corresponding to the line scanning camera 3 includes: 20-50, the amount of light that line scanning camera 3 can receive is moderate this moment, can form the clear image.
Fig. 3 is a schematic structural view of a fixing support portion in the embodiment of the present disclosure, and as shown in fig. 3, the fixing support portion 2 includes: a bracket 5, a cantilever beam 6 and at least one sliding table 7; the cantilever beam 6 is fixed on the bracket 5 and is provided with a sliding groove 10; the sliding table 7 corresponds to the line scanning cameras 3 one by one, the part, close to the cantilever beam 6, of the sliding table 7 is a first part, the part, far away from the cantilever beam 6, of the sliding table 7 is a second part, the first part is located in the sliding groove 10 and can slide along the sliding groove, and the second part is connected with the corresponding line scanning camera 3. By moving the slide table 7 in the slide groove 10, the positions of the slide table 7 and the line scanning camera 3 connected thereto can be adjusted; after the wire sweep camera 3 is moved to the desired position, the slide table 7 is fixed in the slide groove 10.
In some embodiments, the cantilever beam 6 is L-shaped, the sliding groove 10 is an arc-shaped sliding groove 10, and the arc is outwards protruded towards one side far away from the carrier 1, so as to ensure that the distance between the lens of the line scanning camera 3 and the carrier 1 is always kept within a certain range; by adjusting the position of the slide table 7 in the slide groove 10, on the one hand, the area photographed by the line camera 3 can be adjusted, and on the other hand, the depth of field of the line camera 3 can be roughly adjusted.
In some embodiments, the second part of the slide table 7 is provided with a fine tuning knob 8, the fine tuning knob 8 being connected to the line scan camera 3 at the second part of the slide table 7, the fine tuning knob 8 being configured to adjust the distance between the lens of the line scan camera 3 and the product 9 to be inspected. In the embodiment of the present disclosure, the depth of field of the line camera 3 may be finely adjusted by the fine adjustment knob 8.
FIG. 4 is a side view of the stationary support shown in FIG. 3, as shown in FIG. 4, in some embodiments, the number of slide tables 7 configured by the cantilever beam 6 is multiple; the heights H of any two slide tables 7 on the cantilever beam 6 in the preset scanning direction X are different. At this time, the positions of the respective line scanning cameras 3 on the cantilever beam 6 photographed at any time are shifted in the preset scanning direction X, so that the line scanning cameras 3 can be prevented from being interfered by the light sources 4 corresponding to the other line scanning cameras 3.
With continued reference to fig. 4, in some embodiments, on the same cantilever beam 6, along the extending direction of the sliding groove 10, the heights H of the plurality of sliding tables 7 in the preset scanning direction X sequentially increase or sequentially decrease, that is, the positions of the line scanning cameras 3 on the cantilever beam 6 photographed at any moment are sequentially staggered in the preset scanning direction X, so that the problem of interference of the light source 4 can be avoided as much as possible. Further, on the same cantilever beam 6, the height difference range of the adjacent two slide tables 7 in the preset scanning direction X includes: 3 mm-8 mm.
With continued reference to fig. 2, when the line scan cameras 3 are selected to be arranged, the curved surface width W of the region to be photographed corresponding to each line scan camera 3 includes: 2 mm-5 mm, so as to ensure that the distance from the line scanning camera 3 to each position on the shooting area is approximately equal in the process of scanning the shooting area, and the line scanning camera is beneficial to obtaining a clear plane image.
Fig. 5 is another schematic structural view of a fixing support portion in the embodiment of the disclosure, as shown in fig. 5, in some embodiments, the number of the supports 5 is 2, the number of the cantilever beams 6 is 2, the cantilever beams 6 are in one-to-one correspondence with the supports 5, and the 2 supports 5 are respectively located at two opposite sides of the carrier 1, where the optical detection device can detect two curved surfaces of a product 9 to be detected at the same time, so as to shorten the detection period.
The optical detection equipment provided by the embodiment of the disclosure can perform omnibearing shooting on the curved surface part of the cambered surface/curved surface product, wherein the light sources 4 are in one-to-one correspondence with the line scanning cameras 3, the light is clear, and meanwhile, the setting of dislocation shooting of the line scanning cameras 3 enables the light sources 4 to be mutually noninterfered, so that clear images are formed. In addition, the position and depth of field of each line scanning camera 3 can be adjusted, and the number of the line scanning cameras 3 and the light sources 4 can be adjusted according to the product requirement, so that the line scanning device can adapt to larger product size range and radian angle change.
It is to be understood that the above embodiments are merely exemplary embodiments employed to illustrate the principles of the present disclosure, however, the present disclosure is not limited thereto. Various modifications and improvements may be made by those skilled in the art without departing from the spirit and substance of the disclosure, and are also considered to be within the scope of the disclosure.

Claims (7)

1. An optical inspection apparatus, comprising:
the carrier is configured to bear the product to be detected;
the fixed supporting part is positioned on the side surface of the carrying platform;
the line scanning camera is arranged on the fixed supporting part and is configured to scan a to-be-shot area on the surface of the product to be detected along a preset scanning direction so as to acquire a corresponding image;
at least one light source arranged on the fixed supporting part and corresponding to the line scanning cameras one by one, wherein the light source is configured to illuminate the shooting position of the corresponding line scanning camera;
the fixed support portion includes:
a bracket;
the cantilever beam is fixed on the bracket and provided with a sliding groove;
the sliding tables are in one-to-one correspondence with the line scanning cameras, the part, close to the cantilever beam, of the sliding table is a first part, the part, far away from the cantilever beam, of the sliding table is a second part, the first part is positioned in the sliding groove and can slide along the sliding groove, and the second part is connected with the corresponding line scanning camera;
the number of the sliding tables configured by each cantilever beam is multiple;
on the same cantilever beam, the heights of any two sliding tables in the preset scanning direction are different; the illumination positions of the light sources corresponding to the line scanning cameras on the cantilever beam at any moment are staggered in sequence in a preset scanning direction;
for any one of the line scanning cameras, the range of an included angle between the light incident direction of the line scanning camera and the light emergent direction of the light source corresponding to the line scanning camera comprises: 20-50 deg.
2. The optical inspection apparatus of claim 1, wherein the second portion of the slide table is configured with a fine tuning knob that is coupled to a line scan camera located at the second portion of the slide table, the fine tuning knob configured to adjust a distance between a lens of the line scan camera and the product to be inspected.
3. The optical inspection apparatus according to claim 1, wherein the heights of the plurality of slide tables in the preset scanning direction are sequentially increased or sequentially decreased along the extending direction of the slide groove on the same cantilever beam.
4. An optical detection apparatus according to claim 3, wherein a range of a height difference between two adjacent slide tables in the preset scanning direction on the same cantilever beam includes: 3 mm-8 mm.
5. The optical inspection apparatus of claim 1 wherein the slide slot is an arcuate slide slot, the arcuate line protruding toward a side away from the carrier.
6. The optical detection device according to claim 1, wherein the number of the brackets is 2, the number of the cantilever beams is 2, and the cantilever beams are in one-to-one correspondence with the brackets;
the 2 brackets are respectively positioned on two opposite sides of the carrying platform.
7. The optical detection apparatus according to any one of claims 1 to 6, further comprising:
and the driving mechanism is connected with the carrying platform and is configured to drive the carrying platform to run along the preset scanning direction.
CN202010567243.9A 2020-06-19 2020-06-19 Optical detection device Active CN111678921B (en)

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Publication number Priority date Publication date Assignee Title
CN113295696B (en) * 2021-04-06 2024-02-06 昆山精讯电子技术有限公司 Curved screen outer arc crack optical detection device

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