CN111632467A - Vehicle-mounted electronic grade high-purity special gas tail gas liquefaction recovery device - Google Patents
Vehicle-mounted electronic grade high-purity special gas tail gas liquefaction recovery device Download PDFInfo
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- CN111632467A CN111632467A CN202010381592.1A CN202010381592A CN111632467A CN 111632467 A CN111632467 A CN 111632467A CN 202010381592 A CN202010381592 A CN 202010381592A CN 111632467 A CN111632467 A CN 111632467A
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/02—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography
- B01D53/04—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography with stationary adsorbents
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D3/00—Distillation or related exchange processes in which liquids are contacted with gaseous media, e.g. stripping
- B01D3/14—Fractional distillation or use of a fractionation or rectification column
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D3/00—Distillation or related exchange processes in which liquids are contacted with gaseous media, e.g. stripping
- B01D3/14—Fractional distillation or use of a fractionation or rectification column
- B01D3/32—Other features of fractionating columns ; Constructional details of fractionating columns not provided for in groups B01D3/16 - B01D3/30
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/005—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by heat treatment
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- Filling Or Discharging Of Gas Storage Vessels (AREA)
Abstract
The utility model provides a high-purity special gas tail gas liquefaction recovery unit of on-vehicle electron level, it includes waste electron special gas tail gas, electron special gas tail gas connects tail gas input stop valve import and tail gas bypass stop valve import respectively, tail gas input stop valve export connects the compressor import, and the compressor export connects into low temperature dewar stop valve import, and low temperature dewar stop valve export connects low temperature dewar raw materials import. The device is provided with an LNG storage tank, a system cold source is provided by LNG vaporization, and redundant cold energy can be provided for a vehicle-mounted air conditioner. By utilizing the vehicle-mounted fuel cell and taking the vaporized LNG as fuel, the device can be provided with electric energy, and redundant electric energy can be input into the vehicle-mounted cell, so that the energy consumption of the truck is reduced.
Description
Technical Field
The invention discloses a vehicle-mounted electronic grade high-purity special gas tail gas liquefaction recovery device, and belongs to the technical field of tail gas recovery.
Background
The high-purity electronic special gas is widely applied to high-end electronic industries such as semiconductors, chips and the like, and has higher economic value. At present, most chip manufacturers often adopt the direct discharge after treatment for the used electronic special gas tail gas. The method not only hinders the environmental protection, but also wastes the raw materials of the electronic special gas. The invention discloses a vehicle-mounted electronic grade high-purity special gas tail gas liquefaction recovery device which adopts a vehicle-mounted skid-mounted mode and can recover electronic special gas from electronic special gas tail gas discharged from a factory to obtain low pure electronic special gas and high-purity electronic special gas. The device is provided with an LNG storage tank, a system cold source is provided by LNG vaporization, and redundant cold energy can be provided for a vehicle-mounted air conditioner. By utilizing the vehicle-mounted fuel cell and taking the vaporized LNG as fuel, the device can be provided with electric energy, and redundant electric energy can be input into the vehicle-mounted cell, so that the energy consumption of the truck is reduced.
Disclosure of Invention
The invention discloses a vehicle-mounted electronic grade high-purity special gas tail gas liquefaction recovery device, which is used for carrying out a series of treatments on waste gas discharged by an electronic factory and then obtaining high-purity electronic special gas again. Exhaust gas from electronic plant: firstly, pressurizing by a compressor, and introducing a low-temperature dewar to remove high-boiling-point impurities in tail gas; secondly, preliminarily purifying the low-temperature Dewar outlet tail gas by a high-pressure adsorption module to obtain low pure electronic special gas with the purity of more than 97 percent (V/V); thirdly, the low pure electronic special gas is rectified at low temperature to obtain 5N (V/V) high-purity electronic special gas. The device is provided with an LNG storage tank, a system cold source is provided by LNG vaporization, and redundant cold energy can be provided for a vehicle-mounted air conditioner. By utilizing the vehicle-mounted fuel cell and taking the vaporized LNG as fuel, the device can be provided with electric energy, and redundant electric energy can be input into the vehicle-mounted cell, so that the energy consumption of the truck is reduced.
In order to achieve the purpose of the invention, the vehicle-mounted electronic grade high-purity special gas tail gas liquefaction recovery device comprises waste electronic special gas tail gas, wherein the electronic special gas tail gas is respectively connected with an inlet of a tail gas input stop valve and an inlet of a tail gas bypass stop valve, an outlet of the tail gas input stop valve is connected with an inlet of a compressor, an outlet of the compressor is connected with an inlet of a low-temperature Dewar stop valve, and an outlet of the low-temperature Dewar stop valve is connected with an inlet of a low-temperature Dewar raw material. The outlet of the tail gas bypass stop valve is connected with the inlet of a low-temperature Dewar raw material, the outlet of the low-temperature Dewar raw material is respectively connected with the inlet of an adsorption feeding stop valve, the inlet of an adsorption feeding stop valve and the inlet of a purging emptying stop valve, and the outlet of the purging emptying stop valve is connected with the external environment. The outlet of the top of the low-temperature Dewar heat-insulating cavity is connected with the inlet of a high-pressure liquefaction compressor, the outlet of the high-pressure liquefaction compressor is connected with a filling busbar, and the filling busbar is connected with a product steel bottle. An emergency discharge stop valve is arranged on the charging and confluence pipeline.
Preferably, the method comprises the following steps: the outlet of the adsorption feeding stop valve is connected with the inlet of the high-pressure adsorption tower, and the outlet of the high-pressure adsorption tower is respectively connected with the inlet of the stop valve and the outlet of the first blowing stop valve; the outlet of the high-pressure adsorption tower is respectively connected with the inlet of the stop valve and the outlet of the second purging stop valve, and the inlets of the first purging stop valve and the second purging stop valve are connected with a purging gas source together.
Preferably, the method comprises the following steps: the device comprises a stop valve, a heat exchanger, a rectification tower, a liquid stop valve, a heat exchanger, a rectification tower, a heat insulation cavity, a heat exchange raw material, a rectification tower, a heat insulation cavity, a heat exchange device, a heat insulation cavity, a heat exchange device, a rectification tower top exhaust port, a waste gas buffer tank and an exhaust pipeline, wherein the stop valve and the stop valve outlet are connected with an inlet of the low-purity product stop valve and an inlet of the heat exchange device, the outlet of the low-purity product stop valve is connected with an outlet of the low-purity product stop valve and a storage pipeline of the low-purity gas product respectively, the outlet.
Preferably, the method comprises the following steps: the refrigeration cycle export in the heat exchanger cold junction access connection car, this car internal refrigeration cycle connects stop valve export and stop valve export, the gaseous export of stop valve access connection LNG storage tank, stop valve access connection LNG storage tank liquid outlet, the heat exchanger cold junction export connects fuel cell device raw materials import. The top of the LNG storage tank is also provided with a safety valve for preventing the LNG storage tank from being overpressurized, and the electric energy generated by the fuel cell device can be used as a compressor, a high-pressure liquefaction compressor input power supply and a vehicle-mounted battery auxiliary charging power supply after being stabilized by the voltage stabilizing device.
The invention relates to a vehicle-mounted electronic grade high-purity special gas tail gas liquefaction recovery device, which is used for carrying out a series of treatments on waste gas discharged by an electronic factory and then obtaining high-purity electronic special gas again. Exhaust gas from electronic plant: firstly, pressurizing by a compressor, and introducing a low-temperature dewar to remove high-boiling-point impurities in tail gas; secondly, preliminarily purifying the low-temperature Dewar outlet tail gas by a high-pressure adsorption module to obtain low pure electronic special gas with the purity of more than 97 percent (V/V); thirdly, the low pure electronic special gas is rectified at low temperature to obtain 5N (V/V) high-purity electronic special gas. The device is provided with an LNG storage tank, a system cold source is provided by LNG vaporization, and redundant cold energy can be provided for a vehicle-mounted air conditioner. By utilizing the vehicle-mounted fuel cell and taking the vaporized LNG as fuel, the device can be provided with electric energy, and redundant electric energy can be input into the vehicle-mounted cell, so that the energy consumption of the truck is reduced.
Drawings
FIG. 1 is a schematic view of the present invention.
Detailed Description
Referring to the drawings, the invention will be described in detail, wherein as shown in fig. 1, the device for liquefying and recovering tail gas of vehicle-mounted electronic grade high-purity special gas comprises waste electronic special gas tail gas 1, and is characterized in that the electronic special gas tail gas 1 is respectively connected with an inlet of a tail gas input stop valve 2 and an inlet of a tail gas bypass stop valve 3, an outlet of the tail gas input stop valve 2 is connected with an inlet of a compressor 4, an outlet of the compressor 4 is connected with an inlet of a low-temperature Dewar stop valve 5, and an outlet of the low-temperature Dewar stop valve 5 is connected with an inlet of a low-. The outlet of the tail gas bypass stop valve 3 is connected with the inlet of a low-temperature Dewar 6 raw material, the outlet of the low-temperature Dewar 6 raw material is respectively connected with the inlet of an adsorption feeding stop valve 8, the inlet of an adsorption feeding stop valve 9 and the inlet of a purging emptying stop valve 34, and the outlet of the purging emptying stop valve 34 is connected with the external environment. The outlet of the top of the low-temperature Dewar 6 heat preservation cavity 7 is connected with the inlet of the high-pressure liquefaction compressor 24, the outlet of the high-pressure liquefaction compressor 24 is connected with the filling bus bar 33, and the filling bus bar 33 is connected with the product steel cylinder 25. An emergency discharge stop valve 26 is arranged on a filling busbar 33 pipeline, the outlet of the adsorption feed stop valve 8 is connected with the inlet of the high-pressure adsorption tower 10, the outlet of the adsorption feed stop valve 9 is connected with the inlet of the high-pressure adsorption tower 11, and the outlet of the high-pressure adsorption tower 10 is respectively connected with the inlet of a stop valve 12 and the outlet of a first purge stop valve 36); the outlet of the high-pressure adsorption tower 11 is respectively connected with the inlet of a stop valve 13 and the outlet of a second purging stop valve 35, the inlets of a first purging stop valve 36 and the second purging stop valve 35 are jointly connected with a purging gas source, the outlets of a stop valve 12 and a stop valve 13 are jointly connected with the inlet of a low-purity product stop valve 14 and the inlet of a heat exchanger 15, the outlet of the low-purity product stop valve 14 is respectively connected with the outlet of a stop valve 22 and a low-purity gas product storage pipeline, the outlet 43 of the heat exchanger 15 is connected with the inlet of a rectifying raw material stop valve 16, the outlet of the rectifying raw material stop valve 16 is connected with the inlet of a raw material of a rectifying tower 17, the outlet of the bottom of the rectifying tower 17 is connected with the inlet of a liquid stop valve 23, the outlet of the liquid stop valve 23 is connected with the inlet 38 of the cold end, the export of stop valve 18 connects 19 intakes of waste gas buffer tank, and 19 exports of waste gas buffer tank connect respectively 20 import of stop valve, the import of stop valve 22, and 20 exports of stop valve connection outside evacuation pipeline, the export connects 15 cold junction import 39 of heat exchanger and connects the export of refrigeration cycle 43 in the car, this car internal refrigeration cycle 43 connects 28 exports of stop valve and 29 exports of stop valve, connect the 27 gas outlet of 28 access connection LNG storage tank of stop valve, 27 liquid outlet of 29 access connection LNG storage tank of stop valve, 15 cold junction exports 37 of heat exchanger connect 31 raw materials import of fuel cell device. The top of the LNG storage tank 27 is also provided with a safety valve 30 for preventing the LNG storage tank 27 from being overpressurized, and the electric energy generated by the fuel cell device (31) 31 can be used as an input power supply of the compressor 4 and the high-pressure liquefaction compressor 24 and as an auxiliary charging power supply of the vehicle-mounted battery after being stabilized by a voltage stabilizing device 32.
The invention obtains the high-purity electronic special gas again after the waste gas discharged by the electronic factory is processed in a series of ways. Exhaust gas from electronic plant: firstly, pressurizing by a compressor, and introducing a low-temperature dewar to remove high-boiling-point impurities in tail gas; secondly, preliminarily purifying the low-temperature Dewar outlet tail gas by a high-pressure adsorption module to obtain low pure electronic special gas with the purity of more than 97 percent (V/V); thirdly, the low pure electronic special gas is rectified at low temperature to obtain 5N (V/V) high-purity electronic special gas. The device is provided with an LNG storage tank, a system cold source is provided by LNG vaporization, and redundant cold energy can be provided for a vehicle-mounted air conditioner. By utilizing the vehicle-mounted fuel cell and taking the vaporized LNG as fuel, the device can be provided with electric energy, and redundant electric energy can be input into the vehicle-mounted cell, so that the energy consumption of the truck is reduced.
The embodiments of the present invention are as follows.
The device of the invention obtains the high-purity electronic special gas again after the waste gas discharged by the electronic factory is processed in a series of ways. Before the device is started, all valves are closed. When the electronic waste gas needs to be purified, firstly, the pressure condition of the electronic waste gas source is considered: firstly, the pressure of an electronic waste gas source is high, a tail gas bypass stop valve 3 is opened, and the electronic waste gas is introduced into a low-temperature Dewar 6; secondly, the pressure of the electronic waste gas source is small, the tail gas input stop valve 2 and the stop valve 5 are opened, and the electronic waste gas is pressurized by the compressor 4 and then is introduced into the low-temperature Dewar 6.
And (3) opening an adsorption feeding stop valve 8, and enabling the electronic waste gas in the low-temperature Dewar 6 to enter an adsorption tower 10 to adsorb partial impurities. The stop valve 28 is slowly opened, the LNG steam is introduced into the cold end inlet 39 of the heat exchanger 15 through the in-vehicle refrigeration cycle 33, the stop valve 28 is closed for ten minutes, then the stop valve 29 is opened, and the LNG is introduced into the cold end inlet 39 of the heat exchanger 15 through the in-vehicle refrigeration cycle 43. It is noted that whether LNG vapor and LNG pass through the in-vehicle refrigeration cycle 43 depends on the actual demand.
Further, the stop valve 12 is opened, the absorbed electronic waste gas enters the hot end inlet 41 of the heat exchanger 15, the rectification raw material stop valve 16 is opened, and the liquefied electronic waste gas after heat exchange and cooling exits the hot end outlet 42 of the heat exchanger 15 and enters the rectification tower 17. When the accumulated liquid at the bottom of the rectifying tower 17 reaches the specified liquid level, a reboiler at the bottom of the rectifying tower 17 is started to establish the concentration gradient in the rectifying tower. When the rectification process is balanced, the stop valves 18 and 20 are opened slowly, and the waste gas at the top of the rectification tower 17 is emptied.
Further, slowly opening liquid stop valve 23, the liquid of rectifying column 17 bottom gets into heat exchanger 15 cold junction import 38, goes out heat exchanger 15 cold junction export 40 after participating in the heat transfer, gets into low temperature dewar 6 heat preservation chamber 7, and along with low temperature dewar 6 progressively cools off, high boiling point impurity in the electron waste gas begins to be liquefied in succession, and electron waste gas obtains preliminary purification in the low temperature dewar 6. Accordingly, as the purity of the electron waste gas entering the adsorption tower 10 increases, the purity of the electron waste gas exiting the adsorption tower also increases.
Along with the reduction of high boiling point components in the electronic waste gas, the specific heat capacity of the electronic waste gas entering the hot end inlet 41 of the heat exchanger 15 is increased, and the heat exchanger gradually reaches a heat exchange load balance state.
The purity of the electronic waste gas entering the rectifying tower 17 is improved, and the purity of the product at the bottom of the rectifying tower and the purity of the top exhaust gas are correspondingly improved. When the whole device is debugged and balanced, the top waste gas can be used as a low-purity electronic special gas product.
It should be noted that when the low-purity electronic special gas product is needed, the low-purity product stop valves 14 and 22 are opened, and part of the low-purity electronic special gas product is output.
In addition, the cold energy released by the vaporization of the liquid high-purity electronic special gas in the heat preservation cavity 7 of the low-temperature Dewar 6 is used for liquefying the high-boiling-point impurity gas in the low-temperature Dewar 6. The vaporized high-purity electronic special gas is compressed by a high-pressure compressor 24 and directly filled into a steel cylinder 25 through a bus 33.
It should be noted that the LNG vapor is reheated by the heat exchanger 15, and then exits the outlet 37 at the cold end of the heat exchanger 15, enters the vehicle-mounted fuel cell system 31, and outputs electric energy.
The electric energy output by the fuel cell system 31 is stabilized by the voltage stabilizer 32, and can be used for providing electric energy for the whole set of device; secondly, the vehicle-mounted battery can be charged, and the energy consumption of the truck is reduced.
The invention relates to a vehicle-mounted electronic grade high-purity special gas tail gas liquefaction recovery device, which is used for carrying out a series of treatments on waste gas discharged by an electronic factory and then obtaining high-purity electronic special gas again. Exhaust gas from electronic plant: firstly, pressurizing by a compressor, and introducing a low-temperature dewar to remove high-boiling-point impurities in tail gas; secondly, preliminarily purifying the low-temperature Dewar outlet tail gas by a high-pressure adsorption module to obtain low pure electronic special gas with the purity of more than 97 percent (V/V); thirdly, the low pure electronic special gas is rectified at low temperature to obtain 5N (V/V) high-purity electronic special gas. The device is provided with an LNG storage tank, a system cold source is provided by LNG vaporization, and redundant cold energy can be provided for a vehicle-mounted air conditioner. By utilizing the vehicle-mounted fuel cell and taking the vaporized LNG as fuel, the device can be provided with electric energy, and redundant electric energy can be input into the vehicle-mounted cell, so that the energy consumption of the truck is reduced.
Claims (4)
1. A vehicle-mounted electronic grade high-purity special gas tail gas liquefaction recovery device comprises waste electronic special gas tail gas (1), and is characterized in that the electronic special gas tail gas (1) is respectively connected with an inlet of a tail gas input stop valve (2) and an inlet of a tail gas bypass stop valve (3), an outlet of the tail gas input stop valve (2) is connected with an inlet of a compressor (4), an outlet of the compressor (4) is connected with an inlet of a low-temperature Dewar stop valve (5), an outlet of the low-temperature Dewar stop valve (5) is connected with an inlet of a low-temperature Dewar stop valve (6), an outlet of the tail gas bypass stop valve (3) is connected with an inlet of a low-temperature Dewar (6), an outlet of the low-temperature Dewar (6) is respectively connected with an inlet of an adsorption feed stop valve (8), an inlet of an adsorption feed stop valve (9) and an inlet of a purging exhaust stop valve (34), an outlet of the purging exhaust stop valve (34) is connected with, the outlet of the high-pressure liquefaction compressor (24) is connected with a filling bus bar (33), the filling bus bar (33) is connected with a product steel cylinder (25), and an emergency discharge stop valve (26) is arranged on the pipeline of the filling bus bar (33).
2. The vehicle-mounted electronic grade high-purity special gas tail gas liquefaction recovery device according to claim 1, characterized in that the outlet of the adsorption feed stop valve (8) is connected with the inlet of a high-pressure adsorption tower (10), the outlet of the adsorption feed stop valve (9) is connected with the inlet of a high-pressure adsorption tower (11), and the outlets of the high-pressure adsorption tower (10) are respectively connected with the inlet of a stop valve (12) and the outlet of a first purge stop valve (36); the outlet of the high-pressure adsorption tower (11) is respectively connected with the inlet of the stop valve (13) and the outlet of the second purging stop valve (35), and the inlets of the first purging stop valve (36) and the second purging stop valve (35) are connected with a purging gas source.
3. The vehicle-mounted electronic grade high-purity special gas tail gas liquefaction recovery device according to claim 2, characterized in that outlets of the stop valve (12) and the stop valve (13) are connected with an inlet of a low-purity product stop valve (14) and an inlet (41) of a hot end of a heat exchanger (15) together, an outlet of the low-purity product stop valve (14) is connected with an outlet of a stop valve (22) and a storage pipeline of a low-purity gas product respectively, an outlet (42) of the hot end of the heat exchanger (15) is connected with an inlet of a rectification raw material stop valve (16), an outlet of the rectification raw material stop valve (16) is connected with an inlet of a raw material of a rectification tower (17), a discharge port at the bottom of the rectification tower (17) is connected with an inlet of a liquid stop valve (23), an outlet of the liquid stop valve (23) is connected with an inlet (38) of the cold end of the heat exchanger (15), an outlet (40) of the cold end of the, the outlet of the stop valve (18) is connected with the inlet of a waste gas buffer tank (19), the outlet of the waste gas buffer tank (19) is respectively connected with the inlet of the stop valve (20) and the inlet of the stop valve (22), and the outlet of the stop valve (20) is connected with an external emptying pipeline.
4. The vehicle-mounted electronic grade high-purity special gas tail gas liquefaction recovery device according to claim 3, characterized in that a cold end inlet (39) of the heat exchanger (15) is connected with an outlet of a refrigeration cycle (43) in a vehicle, the in-vehicle refrigeration cycle (43) is connected with the outlet of the stop valve (28) and the outlet of the stop valve (29), the inlet of the stop valve (28) is connected with the gas outlet of the LNG storage tank (27), the inlet of the stop valve (29) is connected with the liquid outlet of the LNG storage tank (27), the outlet (37) at the cold end of the heat exchanger (15) is connected with the raw material inlet of the fuel cell device (31), the top of the LNG storage tank (27) is also provided with a safety valve (30) for preventing the LNG storage tank (27) from overpressure, the electric energy generated by the fuel cell device (31) can be used as an input power supply of the compressor (4) and the high-pressure liquefaction compressor (24) and as an auxiliary charging power supply of a vehicle-mounted battery after being stabilized by the voltage stabilizing device (32).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010381592.1A CN111632467A (en) | 2020-05-08 | 2020-05-08 | Vehicle-mounted electronic grade high-purity special gas tail gas liquefaction recovery device |
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| Application Number | Priority Date | Filing Date | Title |
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| CN202010381592.1A CN111632467A (en) | 2020-05-08 | 2020-05-08 | Vehicle-mounted electronic grade high-purity special gas tail gas liquefaction recovery device |
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| CN202010381592.1A Pending CN111632467A (en) | 2020-05-08 | 2020-05-08 | Vehicle-mounted electronic grade high-purity special gas tail gas liquefaction recovery device |
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Citations (7)
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| JPH08159655A (en) * | 1994-12-02 | 1996-06-21 | Teisan Kk | Air separating method and air separating device using the method |
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| CN203035472U (en) * | 2012-12-03 | 2013-07-03 | 中国石油大学(北京) | Generating system utilizing hydrocarbon mixture as working medium to recover liquefied natural gas cold energy |
| CN107576148A (en) * | 2017-10-16 | 2018-01-12 | 上海烯珀科技有限公司 | The energy-saving production method of high-purity special gas and system based on LNG cold energy |
| CN108821253A (en) * | 2018-08-10 | 2018-11-16 | 南京佳华工程技术有限公司 | A kind of purification system and processing method of electron level phosphine |
| CN109958534A (en) * | 2019-03-29 | 2019-07-02 | 山东大学 | Utilize the reverse-flow type fuel cell generation and its working method of LNG cold energy |
| CN212942175U (en) * | 2020-05-08 | 2021-04-13 | 杭州制氧机集团股份有限公司 | Vehicle-mounted electronic grade high-purity special gas tail gas liquefaction recovery device |
-
2020
- 2020-05-08 CN CN202010381592.1A patent/CN111632467A/en active Pending
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH08159655A (en) * | 1994-12-02 | 1996-06-21 | Teisan Kk | Air separating method and air separating device using the method |
| JP2002372367A (en) * | 2001-06-14 | 2002-12-26 | Air Water Inc | Air separator for gas product and its cold heat utilizing method |
| CN203035472U (en) * | 2012-12-03 | 2013-07-03 | 中国石油大学(北京) | Generating system utilizing hydrocarbon mixture as working medium to recover liquefied natural gas cold energy |
| CN107576148A (en) * | 2017-10-16 | 2018-01-12 | 上海烯珀科技有限公司 | The energy-saving production method of high-purity special gas and system based on LNG cold energy |
| CN108821253A (en) * | 2018-08-10 | 2018-11-16 | 南京佳华工程技术有限公司 | A kind of purification system and processing method of electron level phosphine |
| CN109958534A (en) * | 2019-03-29 | 2019-07-02 | 山东大学 | Utilize the reverse-flow type fuel cell generation and its working method of LNG cold energy |
| CN212942175U (en) * | 2020-05-08 | 2021-04-13 | 杭州制氧机集团股份有限公司 | Vehicle-mounted electronic grade high-purity special gas tail gas liquefaction recovery device |
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