CN109231238B - High-purity ammonia continuous production system and production process thereof - Google Patents
High-purity ammonia continuous production system and production process thereof Download PDFInfo
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- CN109231238B CN109231238B CN201811001607.6A CN201811001607A CN109231238B CN 109231238 B CN109231238 B CN 109231238B CN 201811001607 A CN201811001607 A CN 201811001607A CN 109231238 B CN109231238 B CN 109231238B
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- C01—INORGANIC CHEMISTRY
- C01C—AMMONIA; CYANOGEN; COMPOUNDS THEREOF
- C01C1/00—Ammonia; Compounds thereof
- C01C1/02—Preparation, purification or separation of ammonia
- C01C1/12—Separation of ammonia from gases and vapours
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Abstract
The invention provides a high-purity ammonia continuous production system and a production process thereof, wherein the production system comprises a raw material ammonia storage tank, a feed pump, a vaporizer, a filter, a two-stage ammonia rectifying tower device, a first buffer tank, a second buffer tank, a product tank, a liquid pouring pump and an analysis detector, wherein the raw material ammonia storage tank is connected with an inlet of the feed pump, an outlet of the feed pump is connected with an inlet of the vaporizer, a gas phase outlet of the vaporizer is connected with the filter through an ammonia pipeline, the filter is connected with the two-stage ammonia rectifying tower device, the analysis detector, the first buffer tank and the second buffer tank are sequentially connected onto a liquid ammonia pipeline connected with a product extraction outlet, an outlet of the first buffer tank and an outlet of the second buffer tank are connected with the product tank and the liquid pouring pump through liquid ammonia pipelines, and an outlet of the liquid pouring pump is connected with the raw material ammonia storage tank. When the product is fluctuated or abnormal, the product is timely adjusted to a second buffer tank, and is returned to the raw material ammonia storage tank for reprocessing, so that the purity of liquid ammonia in the product tank is improved.
Description
Technical Field
The invention relates to the field of ammonia production, in particular to a high-purity ammonia continuous production system and a production process thereof.
Background
High-purity ammonia (NH 3) is an important industrial base material and is widely applied to the industries of semiconductor Integrated Circuits (ICs), liquid Crystal Displays (LCDs), semiconductor Light Emitting Devices (LEDs), solar cells (PV) and the like.
The production of high-purity ammonia mainly uses industrial ammonia as raw material, and the high-purity product is obtained by purification means. The raw material ammonia contains solid particles, hydrocarbons, water, carbon dioxide, carbon monoxide, oxygen and the like. At present, the common production method of high-purity ammonia is an adsorption mode, a rectification mode or a combination mode of adsorption and rectification, but the method has high energy consumption and large exhaust emission, and is difficult to purify to high purity. Therefore, it is a technical problem in the art to provide a continuous production system and process control method for high quality and high purity ammonia.
Disclosure of Invention
Aiming at the problems in the prior art, the invention provides a high-quality high-purity ammonia continuous production system and a production process thereof, which adopt double-tower rectification and double-buffer tanks, greatly improve the fault tolerance rate in the production process, reach higher product purity and reach 99.99999 percent.
The aim of the invention can be achieved by the following technical scheme:
the utility model provides a high-purity ammonia continuous production system, a serial communication port, including raw materials ammonia storage tank, the feed pump, the vaporizer, a filter, two-stage ammonia rectifying tower device, first buffer tank, the second buffer tank, the product jar, the backing pump, analysis detector, raw materials ammonia storage tank links to each other with the feed pump entry, the feed pump export links to each other with the vaporizer entry, vaporizer gaseous phase export links to each other with the filter through the ammonia pipeline, the filter links to each other with two-stage ammonia rectifying tower device, the product outlet of two-stage ammonia rectifying tower device is connected with the liquid ammonia pipeline, analysis detector, first buffer tank and second buffer tank connect gradually on the liquid ammonia pipeline with product outlet connection, the export of first buffer tank, the second buffer tank passes through liquid ammonia pipeline connection product tank and backing pump, the export of backing pump links to each other with raw materials ammonia storage tank, two-stage ammonia rectifying tower device includes first rectifying tower and second rectifying tower, the top of first rectifying tower is equipped with first condenser, the top of second rectifying tower is equipped with the second condenser, the gaseous phase export of first rectifying tower is connected with the gaseous phase export and second rectifying tower, the second rectifying tower's bottom is connected with the gaseous phase export and second condenser is connected with the second condensate system.
The tail gas treatment system utilizes the characteristic that ammonia is very soluble in water, and adopts a water absorption mode to absorb the ammonia so as to reach qualified tail gas emission indexes.
Further, the first rectifying tower and the second rectifying tower are filled with corrugated silk screen packing.
Furthermore, the raw material ammonia storage tank, the vaporizer, the first rectifying tower, the second rectifying tower, the first buffer tank, the second buffer tank and the product tank are all provided with pressure gauges, thermometers and safety valves.
Further, a heating coil capable of being heated by water bath is attached in the vaporizer.
Further, the product tank, the first buffer tank and the second buffer tank are provided with chilled water jackets. The chilled water jacket is used for controlling the pressure of the product tank and the buffer tank, ensuring that the pressure difference exists between the ammonia infusion pipeline and the ammonia infusion pipeline, and conveying materials to the buffer tank and the product tank through the pressure difference.
A continuous production process of high-purity ammonia is characterized by comprising the following specific steps:
s1, discharging the qualified raw material ammonia to a raw material ammonia storage tank through a liquid ammonia pipeline, wherein the pressure of the raw material ammonia storage tank is generally 3-13Bar;
s2, conveying raw materials from a raw material ammonia storage tank to a vaporizer through a feed pump, wherein the feed pump is an oil-free conveying pump;
s3, heating and pressurizing the raw materials in a carburetor to ensure enough pressure, wherein the boosting principle of the carburetor is as follows: a hot water coil is attached in the vaporizer, raw ammonia is heated and pressurized by heat provided by the hot water coil, the temperature of hot water is controlled to be 30-45 ℃, and the pressure of the vaporizer is controlled to be 8-12Bar in the normal operation process;
s4, ammonia is changed from a liquid state to a gaseous state in the vaporizer, and the gaseous ammonia enters the filter from the vaporizer through an ammonia pipeline to remove part of particulate matters and oil components;
s5: the ammonia gas with oil content and particulate matters removed enters a first rectifying tower, descending condensate is provided by a condenser arranged at the top of the first rectifying tower, ascending steam is provided by a reboiler arranged at the bottom of the first rectifying tower, gas-liquid mass transfer and heat transfer of ammonia are realized in the rectifying tower, heavy component impurities in the ammonia are removed, the heavy component impurities are water, and the impurity water can be removed to be within 20 ppb;
s6, removing heavy component ammonia gas, namely enabling the heavy component ammonia gas to enter a second rectifying tower from the top of a first condenser of the first rectifying tower, providing descending condensate liquid through a second condenser arranged at the top of the second rectifying tower, providing ascending steam through a reboiler arranged at the bottom of the second rectifying tower, enabling ammonia to realize gas-liquid phase mass transfer and heat transfer in the second rectifying tower, and removing light component impurities in the ammonia, wherein the light component impurities comprise methane, carbon monoxide, carbon dioxide, oxygen, nitrogen and hydrogen;
s7, a product extraction port of the second rectifying tower is provided with an analysis sampling pipeline which is directly communicated with an analysis detector, the product quality is monitored on line for 24 hours, and the monitoring components are water, methane, carbon monoxide, carbon dioxide, oxygen, nitrogen and hydrogen;
s8: the ammonia gas purity after the analysis detector detects that the ammonia gas purity is up to 99.99999% after passing through the product outlet of the second rectifying tower, and enters a first buffer tank from the top, wherein the first buffer tank is provided with a cooling water jacket, and the pressure of the first buffer tank is 5-8Bar;
s9: liquid ammonia in the first buffer tank is extracted to a product tank from the bottom through pressure difference;
s10: when the production line is abnormal or the product quality is abnormal, the product extraction ports of the two-stage ammonia rectifying tower device are switched and connected to the second buffer tank, the process of the production line is checked, when the production line is recovered to be normal, the product extraction ports are switched back to the first buffer tank, and liquid ammonia in the second buffer tank can be poured to the raw material ammonia storage tank through the liquid pouring pump.
Further, in the step S5, the first rectifying tower is mainly controlled by pressure control, the tower pressure is controlled to be 6-9bar, and the pressure control is controlled by adjusting hot water of the reboiler.
Further, in the step S6, the second rectifying tower is mainly controlled by pressure control, the tower pressure is controlled to be 5-8bar, and the pressure control is controlled by adjusting hot water of the reboiler.
The liquid ammonia remained at the bottoms of the first rectifying tower and the second rectifying tower is low-purity liquid ammonia, and is directly discharged from a discharge pipe at the bottom of the tower and collected for reuse.
Compared with the prior art, the invention has the positive effects that:
1. the high-purity ammonia continuous production system adopts double-tower rectification, so that on one hand, high-flow production can be met, and on the other hand, the product purity can be higher and reaches 99.99999% according to the impurity components in the raw materials, namely the heavy components are removed from one tower and the light components are removed from the other tower.
2. Because of the product purity is high, adopt two buffer tanks, can realize when the product is undulant/unusual, the product in time adjusts the second buffer tank, returns to raw materials ammonia storage tank and reprocesss, and the first buffer tank of readjustment is returned after unusual condition handles, can avoid not up to standard product entering product tank like this, has polluted the product tank, realizes that the product lasts stable the purpose of taking to the product tank.
FIG. 1 is a schematic diagram of a high purity ammonia continuous production system.
In the figure, 1, a raw material ammonia storage tank; 2. a feed pump; 3. a vaporizer; 4. a filter; 5. a first buffer tank; 6. a second buffer tank; 7. a product tank; 8. pouring liquid pump; 9. an analytical detector; 10. a first rectifying column; 11. a second rectifying column; 12. a reboiler; 13. a first condenser; 14. a second condenser; 15. an exhaust gas treatment system.
Detailed Description
The following are specific embodiments of the present invention and the technical solutions of the present invention will be further described with reference to the accompanying drawings, but the present invention is not limited to these embodiments.
As shown in fig. 1, the high-purity ammonia continuous production system comprises a raw material ammonia storage tank 1, a feed pump 2, a vaporizer 3, a filter 4, a two-stage ammonia rectifying tower device, a first buffer tank 5, a second buffer tank 6, a product tank 7, a liquid pouring pump 8 and an analysis detector 9, wherein the raw material ammonia storage tank 1 is connected with the inlet of the feed pump 2, the outlet of the feed pump 2 is connected with the inlet of the vaporizer 3, a gas phase outlet of the vaporizer 3 is connected with the filter 4 through an ammonia pipeline, the filter 4 is connected with the two-stage ammonia rectifying tower device, a product extraction outlet of the two-stage ammonia rectifying tower device is connected with a liquid ammonia pipeline, the analysis detector 9, the first buffer tank 5 and the second buffer tank 6 are sequentially connected onto the liquid ammonia pipeline connected with the product extraction outlet, the outlet of the first buffer tank 5 and the second buffer tank 6 is connected with the liquid pouring pump 8 through the liquid ammonia pipeline, the outlet of the liquid pouring pump 8 is connected with the raw material ammonia storage tank 1, the two-stage ammonia rectifying tower device comprises a first rectifying tower 10 and a second rectifying tower 11, the top of the first rectifying tower 10 is provided with a first condenser 13, the top of the second rectifying tower 10 is provided with a second condenser 11, the top of the second rectifying tower 11 is provided with a second condenser 11, and the top of the second rectifying tower 11 is provided with a second condenser 11 is connected with a second condenser 11, and the top of the second rectifying tower 11 is provided with a second condenser 11, and the top of the second rectifying tower 11 is connected with a tail gas 11.
The first rectifying tower 10 and the second rectifying tower 11 are filled with corrugated silk screen packing. The raw material ammonia storage tank 1, the vaporizer 3, the first rectifying tower 10, the second rectifying tower 11, the first buffer tank 5, the second buffer tank 6 and the product tank 7 are all provided with pressure gauges, thermometers and safety valves. The vaporizer 3 is internally provided with a heating coil which can be heated by water bath. The product tank 7, the first buffer tank 5 and the second buffer tank 6 are provided with chilled water jackets. The chilled water jacket is used for controlling the pressure of the product tank 7 and the buffer tank, ensuring that a pressure difference exists between the ammonia infusion pipeline and the ammonia infusion pipeline, and conveying materials to the buffer tank and the product tank 7 through the pressure difference.
The continuous production process of the high-purity ammonia comprises the following specific steps:
s1, discharging the qualified raw material ammonia to a raw material ammonia storage tank 1 through a liquid ammonia pipeline, wherein the pressure of the raw material ammonia storage tank 1 is generally 3-13Bar;
s2, conveying raw materials from a raw material ammonia storage tank 1 to a vaporizer 3 through a feed pump 2, wherein the feed pump 2 is an oil-free conveying pump;
s3, heating and pressurizing raw materials in the vaporizer 3 to ensure enough pressure, wherein the pressurizing principle of the vaporizer 3 is as follows: a hot water coil is attached in the vaporizer 3, raw ammonia is heated and pressurized by heat provided by the hot water coil, the temperature of hot water is controlled at 30-45 ℃, and the pressure of the vaporizer 3 is controlled at 8-12Bar in the normal operation process;
s4, ammonia is changed from a liquid state to a gaseous state in the vaporizer 3, and the gaseous ammonia enters the filter 4 from the vaporizer 3 through an ammonia pipeline to remove part of particulate matters and oil components;
s5: the ammonia gas with oil content and particulate matters removed enters a first rectifying tower 10, descending condensate is provided by a condenser arranged at the top of the first rectifying tower 10, ascending steam is provided by a reboiler 12 arranged at the bottom of the first rectifying tower 10, gas-liquid mass transfer and heat transfer of ammonia are realized in the rectifying tower, heavy component impurities in the ammonia are removed, the heavy component impurities are water, and the impurity water can be removed to be within 20 ppb;
s6, removing heavy component ammonia gas, namely enabling the heavy component ammonia gas to enter a second rectifying tower 11 from the top of a first condenser 13 of the first rectifying tower 10, providing descending condensate through a second condenser 14 arranged at the top of the second rectifying tower 11, providing ascending steam through a reboiler 12 arranged at the bottom of the second rectifying tower 11, enabling ammonia to realize gas-liquid phase mass transfer and heat transfer in the second rectifying tower 11, and removing light component impurities in the ammonia, wherein the light component impurities comprise methane, carbon monoxide, carbon dioxide, oxygen, nitrogen and hydrogen;
s7, a product extraction port of the two-stage ammonia rectifying tower device is provided with an analysis sampling pipeline which is directly communicated with an analysis detector 9, the product quality is monitored on line for 24 hours, and the monitoring components are water, methane, carbon monoxide, carbon dioxide, oxygen, nitrogen and hydrogen;
s8: the ammonia purity after the analysis detector 9 detects that the ammonia purity is up to 99.99999 percent after passing through the product extraction outlet of the second rectifying tower 11, enters the first buffer tank 5 from the top, the first buffer tank 5 is provided with a cooling water jacket, and the pressure of the first buffer tank 5 is 5-8Bar;
s9: liquid ammonia in the first buffer tank 5 is extracted to the product tank 7 from the bottom through the pressure difference;
s10: when the production line is abnormal or the product quality is abnormal, the product extraction outlet of the second rectifying tower 11 is switched and connected to the second buffer tank 6, the process of the production line is checked, and when the production line is recovered to be normal, the product extraction outlet is switched back to the first buffer tank 5, and the liquid ammonia in the second buffer tank 6 can be poured into the raw material ammonia storage tank 1 through the liquid pouring pump 8.
In the above step S5, the first rectifying column 10 is mainly controlled by pressure control of 6 to 9bar in column pressure by adjusting the reboiler 12 to heat water.
In the above step S6, the second rectifying column 11 is controlled mainly by pressure control of 5 to 8bar in column pressure by adjusting the reboiler 12 to heat water.
The liquid ammonia remaining at the bottoms of the first rectifying column 10 and the second rectifying column 11 is low-purity liquid ammonia, and is directly discharged from a discharge pipe at the bottom of the column and collected for reuse. The high-purity ammonia continuous production system adopts double-tower rectification, so that on one hand, high-flow production can be met, and on the other hand, the product purity can be higher and reaches 99.99999% according to the impurity components in the raw materials, namely the heavy components are removed from one tower and the light components are removed from the other tower. Because of the product purity is high, adopt two buffer tanks, can realize when the product is undulant/unusual, the product in time adjusts second buffer tank 6, returns to raw materials ammonia storage tank 1 and reprocesss, and the inspection is adjusted back first buffer tank 5 after the maintenance again, can avoid not up to standard product entering product tank 7 like this, polluted product tank 7, realizes the purpose that the product continuously and stably produced to product tank 7.
Claims (8)
1. The utility model provides a high-purity ammonia continuous production system, its characterized in that, including raw materials ammonia storage tank (1), feed pump (2), vaporizer (3), filter (4), two-stage ammonia rectifying tower device, first buffer tank (5), second buffer tank (6), product tank (7), backing pump (8), analysis detector (9), raw materials ammonia storage tank (1) links to each other with feed pump (2) entry, feed pump (2) export links to each other with vaporizer (3) entry, vaporizer (3) gaseous phase export links to each other with filter (4) through the ammonia pipeline, filter (4) link to each other with two-stage ammonia rectifying tower device, the product extraction mouth of two-stage ammonia rectifying tower device is connected with the liquid ammonia pipeline, analysis detector (9), first buffer tank (5) and second buffer tank (6) are connected in proper order on the liquid ammonia pipeline with product extraction mouth connection, the export of first buffer tank (5), the export of second buffer tank (6) is through liquid ammonia pipeline connection product tank (7) and backing pump (8), the export of backing pump (8) links to each other with raw materials ammonia storage tank (1), the export and filter (4) link to each other through the ammonia pipeline, two-stage ammonia rectifying tower device (10) are equipped with first rectifying tower (11) and second rectifying tower (11) top (11), the bottoms of the first rectifying tower (10) and the second rectifying tower (11) are both connected with a reboiler (12), a gas phase outlet of the first condenser (13) is connected with an inlet of the second rectifying tower (11), and a gas phase outlet of the second condenser (14) is connected with a tail gas treatment system (15).
2. The continuous production system of high-purity ammonia according to claim 1, wherein the first rectifying tower (10) and the second rectifying tower (11) are filled with corrugated wire mesh packing.
3. The continuous production system of high-purity ammonia according to claim 1, wherein the raw ammonia storage tank (1), the vaporizer (3), the first rectifying tower (10), the second rectifying tower (11), the first buffer tank (5), the second buffer tank (6) and the product tank (7) are respectively provided with a pressure gauge, a thermometer and a safety valve.
4. A continuous production system of high purity ammonia according to claim 1, wherein said vaporizer (3) has a heating coil attached therein which can be heated in a water bath.
5. The continuous production system of high-purity ammonia according to claim 1, wherein the product tank (7), the first buffer tank (5) and the second buffer tank (6) are provided with chilled water jackets.
6. A continuous production process of high-purity ammonia is characterized by comprising the following specific steps:
s1, discharging the qualified raw material ammonia to a raw material ammonia storage tank (1) through a liquid ammonia pipeline, wherein the pressure of the raw material ammonia storage tank (1) is 3-13Bar;
s2, conveying raw materials from a raw material ammonia storage tank (1) to a vaporizer (3) through a feed pump (2), wherein the feed pump (2) is an oil-free conveying pump;
s3, heating and pressurizing raw materials in the vaporizer (3), and ensuring enough pressure, wherein the pressurizing principle of the vaporizer (3) is as follows: a hot water coil is attached in the vaporizer (3), raw ammonia is heated and pressurized by heat provided by the hot water coil, the temperature of hot water is controlled at 30-45 ℃, and the pressure of the vaporizer (3) is controlled at 8-12Bar in the normal operation process;
s4, ammonia is changed from a liquid state to a gaseous state in the vaporizer (3), and the gaseous ammonia enters the filter (4) from the vaporizer (3) through an ammonia pipeline to remove part of particulate matters and oil components;
s5: the ammonia gas with oil content and particulate matters removed enters a first rectifying tower (10), descending condensate is provided by a condenser arranged at the top of the first rectifying tower (10), ascending steam is provided by a reboiler (12) arranged at the bottom of the first rectifying tower (10), gas-liquid mass transfer and heat transfer of the ammonia are realized in the rectifying tower, heavy component impurities in the ammonia are removed, the heavy component impurities are water, and the impurity water is removed to be within 20 ppb;
s6, removing heavy component ammonia gas, namely enabling the heavy component ammonia gas to enter a second rectifying tower (11) from the top of a first condenser (13) of the first rectifying tower (10), providing descending condensate liquid through a second condenser (14) arranged at the top of the second rectifying tower (11), providing ascending steam through a reboiler (12) arranged at the bottom of the second rectifying tower (11), and enabling ammonia to realize gas-liquid phase mass transfer and heat transfer in the second rectifying tower (11) so as to remove light component impurities in the ammonia, wherein the light component impurities comprise methane, carbon monoxide, carbon dioxide, oxygen, nitrogen and hydrogen;
s7, a product extraction outlet of the second rectifying tower (11) is provided with an analysis sampling pipeline which is directly communicated with an analysis detector (9), the quality of the product is monitored on line for 24 hours, and the monitoring components are water, methane, carbon monoxide, carbon dioxide, oxygen, nitrogen and hydrogen;
s8: the ammonia purity after the qualified detection of the analysis detector (9) reaches 99.99999%, the ammonia enters a first buffer tank (5) from the top through a product extraction outlet of a second rectifying tower (11), a cooling water jacket is arranged on the first buffer tank (5), and the pressure of the first buffer tank (5) is 5-8Bar;
s9: liquid ammonia in the first buffer tank (5) is extracted to a product tank (7) from the bottom through a pressure difference;
s10: when the production line is abnormal or the product quality is abnormal, the product extraction port of the two-stage ammonia rectifying tower device is switched and connected to the second buffer tank (6), the process of the production line is checked, when the production line is recovered to be normal, the product extraction port is switched back to the first buffer tank (5), and liquid ammonia in the second buffer tank (6) is poured to the raw material ammonia storage tank (1) through the liquid pouring pump (8).
7. The continuous production process of high purity ammonia according to claim 6, wherein in the step S5, the first rectifying column (10) is mainly controlled by pressure control of 6 to 9bar, and the pressure control is controlled by adjusting the hot water of the reboiler (12).
8. The continuous production process of high purity ammonia according to claim 6, wherein in step S6, the second rectifying column (11) is mainly controlled by pressure, the column pressure is controlled to 5-8bar, and the pressure control is controlled by adjusting the reboiler (12) to hot water.
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| CN115215498B (en) * | 2022-08-02 | 2023-09-12 | 苏州思萃同位素技术研究所有限公司 | Device, method and application for hydrogen isotope wastewater treatment and resource utilization |
Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB713911A (en) * | 1952-08-26 | 1954-08-18 | Permutit Co Ltd | Improvements in the purification of the effluents from gas-producing plants |
| KR20090078214A (en) * | 2008-01-14 | 2009-07-17 | 대성산업가스 주식회사 | Method and apparatus for removing moisture from ammonia gas |
| CN102320623A (en) * | 2011-10-13 | 2012-01-18 | 周平 | Purification device and purification method for electronic grade ultra-pure ammonia |
| CN203033776U (en) * | 2012-10-31 | 2013-07-03 | 吴纳新 | Two-stage rectification depth water removal system for ultrapure ammonia |
| CN203461830U (en) * | 2013-08-12 | 2014-03-05 | 苏州金宏气体股份有限公司 | Device for recovering waste ammonia gas of light-emitting diode (LED) gallium nitride production furnace |
| CN105864630A (en) * | 2016-04-08 | 2016-08-17 | 海宁市英德赛电子有限公司 | High-purity ammonia filling system and filling method using filling system to fill high-purity ammonia |
| CN206553203U (en) * | 2017-03-16 | 2017-10-13 | 中化重庆涪陵化工有限公司 | Energy-conservation synthesis ammonia space division and instrument supply gas system |
| CN208948863U (en) * | 2018-08-30 | 2019-06-07 | 海宁市英德赛电子有限公司 | A kind of high-purity ammon continuous process system |
-
2018
- 2018-08-30 CN CN201811001607.6A patent/CN109231238B/en active Active
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB713911A (en) * | 1952-08-26 | 1954-08-18 | Permutit Co Ltd | Improvements in the purification of the effluents from gas-producing plants |
| KR20090078214A (en) * | 2008-01-14 | 2009-07-17 | 대성산업가스 주식회사 | Method and apparatus for removing moisture from ammonia gas |
| CN102320623A (en) * | 2011-10-13 | 2012-01-18 | 周平 | Purification device and purification method for electronic grade ultra-pure ammonia |
| CN203033776U (en) * | 2012-10-31 | 2013-07-03 | 吴纳新 | Two-stage rectification depth water removal system for ultrapure ammonia |
| CN203461830U (en) * | 2013-08-12 | 2014-03-05 | 苏州金宏气体股份有限公司 | Device for recovering waste ammonia gas of light-emitting diode (LED) gallium nitride production furnace |
| CN105864630A (en) * | 2016-04-08 | 2016-08-17 | 海宁市英德赛电子有限公司 | High-purity ammonia filling system and filling method using filling system to fill high-purity ammonia |
| CN206553203U (en) * | 2017-03-16 | 2017-10-13 | 中化重庆涪陵化工有限公司 | Energy-conservation synthesis ammonia space division and instrument supply gas system |
| CN208948863U (en) * | 2018-08-30 | 2019-06-07 | 海宁市英德赛电子有限公司 | A kind of high-purity ammon continuous process system |
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