CN208948863U - A kind of high-purity ammon continuous process system - Google Patents

A kind of high-purity ammon continuous process system Download PDF

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Publication number
CN208948863U
CN208948863U CN201821415300.6U CN201821415300U CN208948863U CN 208948863 U CN208948863 U CN 208948863U CN 201821415300 U CN201821415300 U CN 201821415300U CN 208948863 U CN208948863 U CN 208948863U
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China
Prior art keywords
surge tank
ammonia
raw material
vaporizer
tank
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Withdrawn - After Issue
Application number
CN201821415300.6U
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Chinese (zh)
Inventor
赵晓兰
丁高松
潘佳伟
鄢芝勇
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Zhejiang Yingdesai Semiconductor Materials Co ltd
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HAINING INDUSAIR ELECTRONICS Co Ltd
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Priority to CN201821415300.6U priority Critical patent/CN208948863U/en
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Abstract

The utility model provides a kind of high-purity ammon continuous process system, production system includes raw material ammonia storage tank, feed pump, vaporizer, filter, two-stage ammonia device of spiral-screen column, first surge tank, second surge tank, products pot, liquid pouring pump, analysis detection instrument, the raw material ammonia storage tank is connected with charging pump intake, charging pump discharge is connected with vaporizer entrance, vaporizer gaseous phase outlet is connected with filter by ammonia pipeline, filter is connected with two-stage ammonia device of spiral-screen column, analysis detection instrument, first surge tank and the second surge tank are connected in turn on the liquefied ammonia pipeline connecting with product extraction mouth, first surge tank, the outlet of second surge tank connects products pot and liquid pouring pump by liquefied ammonia pipeline, the outlet of liquid pouring pump is connected with raw material ammonia storage tank.Using double buffering tank, when product fluctuation/exception, product is adjusted to the second surge tank in time, is back to raw material ammonia storage tank and re-works, and improves liquefied ammonia purity in products pot.

Description

A kind of high-purity ammon continuous process system
Technical field
The utility model relates to ammonia production fields, and in particular to a kind of high-purity ammon continuous process system.
Background technique
High-purity ammon (NH3) is a kind of very important industrial foundation material, be widely used in semiconductor integrated circuit IC, The industries such as liquid crystal display LCD, light emitting semiconductor device LED and solar battery PV.
The production of high-purity ammon obtains high purity product by means of purification mainly using industrial ammonia as raw material.Contain in raw material ammonia There are solid particle, hydro carbons, water, carbon dioxide, carbon monoxide, oxygen etc..The common production method of high-purity ammon is absorption at present The mode of mode, the mode of rectifying or absorption in conjunction with rectifying, but this method energy consumption is very high and exhaust emissions amount is big, and And it is difficult to be purified to very high purity.Therefore it provides continuous process system and the technology controlling and process side of a kind of high-purity ammon of high quality Method is this field technical issues that need to address.
Utility model content
The purpose of this utility model is the presence of the above problem in view of the prior art, proposes a kind of high-purity ammon of high quality Continuous process system greatly improves the serious forgiveness in production process using two-tower rectification and double buffering tank, reaches higher product Purity, purity reach 99.99999%.
The purpose of this utility model can be realized by the following technical scheme:
A kind of high-purity ammon continuous process system, which is characterized in that including raw material ammonia storage tank, feed pump, vaporizer, filtering Device, two-stage ammonia device of spiral-screen column, the first surge tank, the second surge tank, products pot, liquid pouring pump, analysis detection instrument, the raw material ammonia Storage tank is connected with charging pump intake, and charging pump discharge is connected with vaporizer entrance, and vaporizer gaseous phase outlet and filter pass through ammonia Feed channel is connected, and filter is connected with two-stage ammonia device of spiral-screen column, and the product extraction mouth of two-stage ammonia device of spiral-screen column is connected with liquid Ammonia pipeline, analysis detection instrument, the first surge tank and the second surge tank are connected to the liquefied ammonia pipeline connecting with product extraction mouth in turn On, the outlet of the first surge tank, the second surge tank connects products pot and liquid pouring pump, the outlet and original of liquid pouring pump by liquefied ammonia pipeline Expect that ammonia storage tank is connected, two-stage ammonia device of spiral-screen column includes first rectifying column and Second distillation column, the top of the first rectifying column Equipped with the first condenser, the top of Second distillation column is equipped with the second condenser, first rectifying column, Second distillation column bottom connect It is connected to reboiler, the import of the gaseous phase outlet and Second distillation column of the first condenser connects, and the gaseous phase outlet of the second condenser connects Connect exhaust treatment system.
Exhaust treatment system is highly soluble in the characteristic of water using ammonia, is absorbed by the way of water absorption, reaches qualified Exhaust emissions index.
Further, first rectifying column, Second distillation column tower in be filled with ripple silk net filler.
Further, the raw material ammonia storage tank, vaporizer, first rectifying column, Second distillation column, the first surge tank, second Pressure gauge, thermometer and safety valve are provided on surge tank, products pot.
Further, with the heating coil of energy heating water bath in the vaporizer.
Further, the products pot, the first surge tank, the second surge tank are equipped with freezing water leg.Freeze water leg Effect be to control the pressure of products pot and surge tank, it is ensured that infusion ammonia pipeline and they between there are pressure differences, passing through pressure difference will Material is delivered to surge tank and products pot.
The liquefied ammonia for remaining in first rectifying column and Second distillation column bottom is low-purity liquefied ammonia, directly from the discharge of tower bottom Pipe is discharged and collects re-using.
Compared with prior art, the utility model has the effect of positive:
1. high-purity ammon continuous process system uses two-tower rectification, big flow production on the one hand can satisfy, on the other hand According to one tower of impurity composition in raw material except the other tower of heavy constituent removes light component, higher product purity, purity can achieve Reach 99.99999%.
2., using double buffering tank, may be implemented when product fluctuation/exception, product is adjusted in time because of product purity height Second surge tank is back to raw material ammonia storage tank and re-works, and adjusts back the first surge tank again after abnormal conditions processing, in this way can be with It avoids product not up to standard from entering products pot, polluted products pot, realize that product is continually and steadily produced to the purpose of products pot.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of high-purity ammon continuous process system.
In figure, 1, raw material ammonia storage tank;2, feed pump;3, vaporizer;4, filter;5, the first surge tank;6, the second buffering Tank;7, products pot;8, liquid pouring pump;9, analysis detection instrument;10, first rectifying column;11, Second distillation column;12, reboiler;13, One condenser;14, the second condenser;15, exhaust treatment system.
Specific embodiment
It is specific embodiment of the utility model and in conjunction with attached drawing below, the technical solution of the utility model is made further Description, but the utility model is not limited to these examples.
As shown in Figure 1, this high-purity ammon continuous process system, including raw material ammonia storage tank 1, feed pump 2, vaporizer 3, filter 4, two-stage ammonia device of spiral-screen column, the first surge tank 5, the second surge tank 6, products pot 7, liquid pouring pump 8, analysis detection instrument 9, it is described Raw material ammonia storage tank 1 is connected with 2 entrance of feed pump, and the outlet of feed pump 2 is connected with 3 entrance of vaporizer, 3 gaseous phase outlet of vaporizer and mistake Filter 4 is connected by ammonia pipeline, and filter 4 is connected with two-stage ammonia device of spiral-screen column, and the product of two-stage ammonia device of spiral-screen column is adopted Outlet is connected with liquefied ammonia pipeline, and analysis detection instrument 9, the first surge tank 5 and the second surge tank 6, which are connected in turn, produces mouth with product On the liquefied ammonia pipeline of connection, the outlet of the first surge tank 5, the second surge tank 6 connects products pot 7 and liquid pouring pump by liquefied ammonia pipeline 8, the outlet of liquid pouring pump 8 is connected with raw material ammonia storage tank 1, and two-stage ammonia device of spiral-screen column includes first rectifying column 10 and the second rectifying Tower 11, the top of the first rectifying column 10 are equipped with the first condenser 13, and the top of Second distillation column 11 is equipped with the second condenser 14, first rectifying column 10, Second distillation column 11 bottom be respectively connected with reboiler 12, the gaseous phase outlet of the first condenser 13 and The import of two rectifying columns 11 connects, and the gaseous phase outlet of the second condenser 14 connects exhaust treatment system 15.
First rectifying column 10, Second distillation column 11 tower in be filled with ripple silk net filler.The raw material ammonia storage tank 1, vaporization Device 3, Second distillation column 11, the first surge tank 5, the second surge tank 6, is provided with pressure on products pot 7 at first rectifying column 10 Table, thermometer and safety valve.Heating coil in the vaporizer 3 with energy heating water bath.The products pot 7, first buffers Tank 5, the second surge tank 6 are equipped with freezing water leg.The effect of freezing water leg is to control the pressure of products pot 7 and surge tank, Ensure be infused ammonia pipeline and they between there are pressure differences, material is delivered to by surge tank and products pot 7 by pressure difference.
Specific step is as follows for this high-purity ammon continuous process system:
S1: after the assay was approved through liquefied ammonia pipeline discharging to raw material ammonia storage tank 1,1 pressure of raw material ammonia storage tank generally exists raw material ammonia 3-13Bar;
S2: raw material is delivered to vaporizer 3 through feed pump 2 by raw material ammonia storage tank 1, and the feed pump 2 need to be defeated using oil free type Send pump;
S3: raw material is in vaporizer 3, pressure build up, it is ensured that enough pressure, 3 boosting principle of vaporizer are as follows: in vaporizer 3 With hot-water coil pipe, raw material ammonia carries out pressure build up by the heat that hot-water coil pipe provides, and hot water temperature controls at 30-45 DEG C, It is 8-12Bar that vaporizer 3, which controls pressure, in normal course of operation;
S4: ammonia becomes gaseous state from liquid in vaporizer 3, and gaseous ammonia enters filter 4 through ammonia pipeline by vaporizer 3 and removes Remove partial particulate substance and oil;
S5: the ammonia for removing oil and particulate matter enters first rectifying column 10, by being equipped at the top of first rectifying column 10 Condenser decline condensate liquid is provided, reboiler 12 that 10 bottom of first rectifying column is equipped with provides upflowing vapor, and ammonia is in rectifying column Interior realization liquid phase mass transfer, heat transfer, except the heavy constituent impurity in deammoniation, heavy constituent impurity is water, water impurity can except to 20ppb with It is interior;
S6: the ammonia of heavy constituent is removed by 13 top of the first condenser of first rectifying column 10, enters Second distillation column 11, decline condensate liquid is provided by the second condenser 14 being equipped at the top of Second distillation column 11,11 bottom of Second distillation column is equipped with Reboiler 12 provide upflowing vapor, ammonia is realized in Second distillation column 11 liquid phase mass transfer, conduct heat, except light group in deammoniation Divide impurity, light component impurity includes methane, carbon monoxide, carbon dioxide, oxygen, nitrogen, hydrogen;
S7: the product extraction mouth of two-stage ammonia device of spiral-screen column is provided with analytical sampling pipeline, is directly connected to analysis detection Instrument 9 carries out product quality 24 hours, and Always Online" monitoring, monitoring group is divided into water, methane, carbon monoxide, carbon dioxide, oxygen Gas, nitrogen, hydrogen;
S8: analysis detection instrument 9 detects the ammonia purity after qualification and reaches 99.99999%, the product through Second distillation column 11 Mouth is produced, the first surge tank 5 is entered by top, the first surge tank 5 is equipped with cooling water jecket, and 5 pressure of the first surge tank is 5- 8Bar;
Liquefied ammonia in S9: the first surge tank 5 is produced through bottom to products pot 7 by pressure difference;
S10: when exception or product quality exception occurs in production line, the product extraction mouth switching of Second distillation column 11 connects It is connected to the second surge tank 6, production-line technique is checked, when production line restores normal, it is slow that product extraction mouth switches back into first Tank 5 is rushed, the liquefied ammonia in the second surge tank 6 can be through liquid pouring pump 8, batch turning to raw material ammonia storage tank 1.
In above-mentioned step S5, first rectifying column 10 is main to be controlled by pressure, and control tower pressure is 6-9bar, pressure control System is by adjusting the control of 12 hot water of reboiler.
In above-mentioned step S6, Second distillation column 11 is main to be controlled by pressure, and control tower pressure is 5-8bar, pressure control System is by adjusting the control of 12 hot water of reboiler.
The liquefied ammonia for remaining in 11 bottom of first rectifying column 10 and Second distillation column is low-purity liquefied ammonia, directly from tower bottom Discharge pipe is discharged and collects re-using.This high-purity ammon continuous process system uses two-tower rectification, on the one hand can satisfy big stream Amount production, on the other hand can achieve higher according to one tower of impurity composition in raw material except the other tower of heavy constituent removes light component Product purity, purity reaches 99.99999%.Because product purity height, using double buffering tank, may be implemented when product fluctuation/it is different Chang Shi, product are adjusted to the second surge tank 6 in time, are back to raw material ammonia storage tank 1 and re-work, adjust again after maintenance and inspection The first surge tank 5 is returned, products pot 7 can be entered in this way to avoid product not up to standard, polluted products pot 7, realizes that product continues surely It is fixed to produce to the purpose of products pot 7.

Claims (5)

1. a kind of high-purity ammon continuous process system, which is characterized in that including raw material ammonia storage tank (1), feed pump (2), vaporizer (3), filter (4), two-stage ammonia device of spiral-screen column, the first surge tank (5), the second surge tank (6), products pot (7), liquid pouring pump (8), analysis detection instrument (9), the raw material ammonia storage tank (1) are connected with feed pump (2) entrance, feed pump (2) outlet and vaporizer (3) entrance is connected, and vaporizer (3) gaseous phase outlet is connected with filter (4) by ammonia pipeline, filter (4) and two-stage ammonia essence It evaporates tower apparatus to be connected, the product extraction mouth of two-stage ammonia device of spiral-screen column is connected with liquefied ammonia pipeline, and analysis detection instrument (9), first are delayed It rushes tank (5) and the second surge tank (6) is connected in turn on the liquefied ammonia pipeline connecting with product extraction mouth, the first surge tank (5), the The outlet of two surge tanks (6) passes through liquefied ammonia pipeline connection products pot (7) and liquid pouring pump (8), the outlet and raw material ammonia of liquid pouring pump (8) Storage tank (1) is connected, and two-stage ammonia device of spiral-screen column includes first rectifying column (10) and Second distillation column (11), the first rectifying column (10) top is equipped with the first condenser (13), and the top of Second distillation column (11) is equipped with the second condenser (14), the first rectifying Tower (10), Second distillation column (11) bottom be respectively connected with reboiler (12), the gaseous phase outlet and second of the first condenser (13) The import of rectifying column (11) connects, and the gaseous phase outlet of the second condenser (14) connects exhaust treatment system (15).
2. a kind of high-purity ammon continuous process system according to claim 1, which is characterized in that first rectifying column (10), Ripple silk net filler is filled in the tower of two rectifying columns (11).
3. a kind of high-purity ammon continuous process system according to claim 1, which is characterized in that the raw material ammonia storage tank (1), Vaporizer (3), first rectifying column (10), Second distillation column (11), the first surge tank (5), the second surge tank (6), products pot (7) On be provided with pressure gauge, thermometer and safety valve.
4. a kind of high-purity ammon continuous process system according to claim 1, which is characterized in that the vaporizer (3) is included There is the heating coil of energy heating water bath.
5. a kind of high-purity ammon continuous process system according to claim 1, which is characterized in that the products pot (7), first Surge tank (5), the second surge tank (6) are equipped with freezing water leg.
CN201821415300.6U 2018-08-30 2018-08-30 A kind of high-purity ammon continuous process system Withdrawn - After Issue CN208948863U (en)

Priority Applications (1)

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Application Number Priority Date Filing Date Title
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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109231238A (en) * 2018-08-30 2019-01-18 海宁市英德赛电子有限公司 A kind of high-purity ammon continuous process system and its production technology

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109231238A (en) * 2018-08-30 2019-01-18 海宁市英德赛电子有限公司 A kind of high-purity ammon continuous process system and its production technology
CN109231238B (en) * 2018-08-30 2023-08-15 浙江英德赛半导体材料股份有限公司 High-purity ammonia continuous production system and production process thereof

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Address after: No.38 Anjiang Road, Jianshan New District, Haining City, Jiaxing City, Zhejiang Province

Patentee after: Zhejiang yingdesai semiconductor materials Co.,Ltd.

Address before: No.38 Anjiang Road, Jianshan New District, Haining City, Jiaxing City, Zhejiang Province

Patentee before: HAINING INDUSAIR ELECTRONICS Co.,Ltd.

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Granted publication date: 20190607

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Granted publication date: 20190607

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