CN116399082A - Helium recovery liquefaction system for plume ultralow temperature experiment - Google Patents
Helium recovery liquefaction system for plume ultralow temperature experiment Download PDFInfo
- Publication number
- CN116399082A CN116399082A CN202310113790.3A CN202310113790A CN116399082A CN 116399082 A CN116399082 A CN 116399082A CN 202310113790 A CN202310113790 A CN 202310113790A CN 116399082 A CN116399082 A CN 116399082A
- Authority
- CN
- China
- Prior art keywords
- helium
- liquid
- purity
- heat sink
- pressure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000001307 helium Substances 0.000 title claims abstract description 580
- 229910052734 helium Inorganic materials 0.000 title claims abstract description 580
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 title claims abstract description 580
- 238000002474 experimental method Methods 0.000 title claims abstract description 52
- 238000011084 recovery Methods 0.000 title claims abstract description 49
- 239000007788 liquid Substances 0.000 claims abstract description 175
- 239000007789 gas Substances 0.000 claims abstract description 92
- 238000003860 storage Methods 0.000 claims abstract description 67
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims abstract description 32
- 238000005057 refrigeration Methods 0.000 claims abstract description 29
- 238000001816 cooling Methods 0.000 claims abstract description 16
- 229910052757 nitrogen Inorganic materials 0.000 claims abstract description 16
- 238000000746 purification Methods 0.000 claims abstract description 12
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims abstract description 6
- 239000001257 hydrogen Substances 0.000 claims abstract description 6
- 229910052739 hydrogen Inorganic materials 0.000 claims abstract description 6
- 239000001301 oxygen Substances 0.000 claims abstract description 6
- 229910052760 oxygen Inorganic materials 0.000 claims abstract description 6
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims abstract description 5
- 229910052799 carbon Inorganic materials 0.000 claims abstract description 5
- 125000004435 hydrogen atom Chemical class [H]* 0.000 claims abstract 2
- 239000006200 vaporizer Substances 0.000 claims description 42
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 24
- 230000000087 stabilizing effect Effects 0.000 claims description 12
- 239000003638 chemical reducing agent Substances 0.000 claims description 9
- 239000004215 Carbon black (E152) Substances 0.000 claims description 5
- 238000000605 extraction Methods 0.000 claims description 5
- 229930195733 hydrocarbon Natural products 0.000 claims description 5
- 150000002430 hydrocarbons Chemical class 0.000 claims description 5
- 238000005086 pumping Methods 0.000 claims description 4
- 238000001914 filtration Methods 0.000 claims description 3
- 238000010792 warming Methods 0.000 claims description 3
- 238000001035 drying Methods 0.000 claims description 2
- 238000000926 separation method Methods 0.000 claims description 2
- 238000004064 recycling Methods 0.000 claims 1
- 238000000034 method Methods 0.000 abstract description 3
- 238000012544 monitoring process Methods 0.000 description 5
- 230000000694 effects Effects 0.000 description 4
- 238000012360 testing method Methods 0.000 description 4
- 150000002431 hydrogen Chemical class 0.000 description 3
- 238000007689 inspection Methods 0.000 description 3
- 230000000737 periodic effect Effects 0.000 description 3
- 239000002699 waste material Substances 0.000 description 3
- 238000005238 degreasing Methods 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 238000002360 preparation method Methods 0.000 description 2
- 238000010992 reflux Methods 0.000 description 2
- 102220238268 rs1343544501 Human genes 0.000 description 2
- 238000004088 simulation Methods 0.000 description 2
- 230000001502 supplementing effect Effects 0.000 description 2
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005265 energy consumption Methods 0.000 description 1
- 238000011049 filling Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 238000010606 normalization Methods 0.000 description 1
- 230000008092 positive effect Effects 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Images
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25J—LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
- F25J3/00—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification
- F25J3/06—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification by partial condensation
- F25J3/063—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification by partial condensation characterised by the separated product stream
- F25J3/0685—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification by partial condensation characterised by the separated product stream separation of noble gases
- F25J3/069—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification by partial condensation characterised by the separated product stream separation of noble gases of helium
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25J—LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
- F25J5/00—Arrangements of cold exchangers or cold accumulators in separation or liquefaction plants
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Mechanical Engineering (AREA)
- Thermal Sciences (AREA)
- General Engineering & Computer Science (AREA)
- Separation By Low-Temperature Treatments (AREA)
Abstract
The invention discloses a helium recovery liquefaction system for plume ultralow temperature experiments, belonging to the field of vacuum science; the method comprises the following steps: helium stored in the high-purity helium storage system is liquefied and refrigerated through the helium refrigerating and liquefying system, the helium is conveyed into the liquefier, the purity of helium produced by the liquefier is detected by utilizing the helium purity analysis system, and when the helium is pure helium, the helium is stored in the liquid helium storage system and is used for cooling by the liquid helium heat sink system. Otherwise, starting a helium recovery system, purifying the helium by using a helium purification system, and returning to the helium refrigeration and liquefaction system again; the liquid helium heat sink system utilizes liquid helium or low-temperature helium to realize temperature control of the liquid helium heat sink according to plume experiment requirements, and absorbs multi-component plume gases such as carbon, hydrogen, oxygen, nitrogen and the like to complete an ultrahigh vacuum plume experiment; meanwhile, the liquid helium heat sink system is connected with the helium refrigerating and liquefying system, so that closed circulation of helium and real-time liquefaction and refrigeration of helium are realized.
Description
Technical Field
The invention belongs to the technical field of vacuum science, and relates to a helium recovery liquefaction system for plume ultralow temperature experiments.
Background
The vacuum plume effect experiment is mainly used for plume experiment research of a spacecraft attitude and orbit control engine, can simulate the vacuum plume effect of an electric propulsion engine or a chemical propulsion engine, and has very strict vacuum requirements on the cabin environment, such as extremely low background environment temperature (below 260 ℃ below zero) and ultra-high environment vacuum degree (1.0E-6 Pa), in order to effectively simulate the working state of the engine in a vacuum cryogenic environment.
In order to meet the vacuum cryogenic test requirement, a large-area liquid helium heat sink is arranged in the cabin, and meanwhile ultra-low Wen Yehai is introduced into the liquid helium heat sink for refrigeration, so that a liquid helium conveying system meeting the plume test requirement is required to be configured.
The liquid helium conveying system has the main functions of providing liquid helium refrigeration for the liquid helium heat sink in the cabin, enabling the temperature of the liquid helium heat sink to be lower than 10K, keeping the temperature of the liquid helium heat sink uniform, being used for adsorbing gas which cannot be adsorbed by the liquid nitrogen heat sink in the cabin, keeping extremely high vacuum degree and extremely low-temperature environment in the cabin, and being used for simulating real space environment of plume when an engine works.
At present, a vacuum plume effect experiment system on the market, such as a liquid helium conveying system and a grading method of a large-size multi-section liquid helium heat sink with the application number of 201310242837.2, realizes liquid helium supply to the liquid helium heat sink, but the invention adopts an open liquid helium conveying system to directly discharge cold helium gas after liquid helium passes through the liquid helium heat sink to the atmosphere, so that recovery and reuse of helium gas cannot be realized, the liquid helium consumption of a single plume experiment is large (the liquid helium consumption of a single experiment is more than 5 cubic), the liquid helium preparation time is long, the requirements of normalization and multi-frequency experiment of the plume experiment cannot be met, and the experiment cost is high due to the waste of scarce helium gas resources. Meanwhile, the liquid helium supply quantity is limited, the supply period is long, the consumption of single continuous 300h experiment cannot be met, and the helium must be recycled.
In addition, large-scale vacuum environment simulation test equipment specially used for researching an engine plume test does not exist in China, traditional low-temperature simulation is realized by liquid nitrogen refrigeration, the lowest temperature can only reach a liquid nitrogen temperature region (77K), engine plume gases (nitrogen, oxygen, hydrogen and the like) cannot be adsorbed, and high environment vacuum degree cannot be guaranteed.
Disclosure of Invention
In order to solve the problems, the invention provides a helium recovery liquefaction system for plume ultralow temperature experiments, which is used for carrying out closed circulation and recovery on helium, realizing real-time refrigeration, real-time liquefaction and real-time recovery of helium during engine plume experiments, greatly reducing the plume ultralow temperature experiment cost and the liquid helium demand during the experiment, and meeting the system operation by only preparing a small amount of helium before the experiment, and greatly shortening the experiment preparation time.
The helium recovery liquefaction system comprises: a high purity helium storage system 1, a helium refrigeration and liquefaction system 2, a helium recovery system 3, a helium purification system 4, a helium purity analysis system 5, a liquid helium storage system 6 and a liquid helium heat sink system 7.
The high-purity helium storage system 1 stores high-purity helium in advance, and the helium is liquefied and refrigerated by the helium refrigerating and liquefying system 2; and the helium gas is conveyed into a liquefying machine, the purity of the helium gas produced by the liquefying machine is detected by utilizing a helium gas purity analysis system 5, and when the sum of nitrogen, water vapor and hydrocarbon in the helium gas is less than 50ppm, the purity of the helium gas is more than 99.995%, and the helium gas is stored in a liquid helium storage system 6 for cooling by a liquid helium heat sink system 7.
Otherwise, starting the helium recovery system 3 to complete recovery and storage of the impure helium, purifying the impure helium with the helium purity less than 99.995% into high-purity helium with the helium purity more than or equal to 99.999% by using the helium purification system 4, storing the high-purity helium into the high-purity helium storage system 1, and returning to the helium refrigeration and liquefaction system 2 again.
The liquid helium heat sink system 7 utilizes liquid helium or low-temperature helium gas to realize temperature control of the liquid helium heat sink according to plume experiment requirements, adsorbs multi-component plume gases such as carbon, hydrogen, oxygen, nitrogen and the like, and completes an ultrahigh vacuum plume experiment;
meanwhile, the inlet and outlet pipeline of the liquid helium heat sink system 7 is connected with the helium refrigerating and liquefying system 2, so that unused helium is returned, and closed circulation of helium and real-time liquefaction and real-time refrigerating of helium are realized.
The liquid helium heat sink system 7 is a 100 liquid helium heat sink, is positioned in the vacuum cabin, is cooled and refrigerated by liquid helium or cold helium, and is used for ultralow-temperature vacuum air extraction in plume experiments;
the high-purity helium storage system 1 is a 101-type pressure stabilizing tank with valves arranged at the front and back and is used for storing high-pressure pure nitrogen;
the helium refrigerating and liquefying system 2 comprises a 102 circulation compressor, a 103 oil removing system and a 105 helium liquefier;
the 102 circulation compressor is used for pressurizing and circulating helium output by the 101 surge tank and outputting the helium to the 103 oil removal system for oil-water filtration and separation, so that the helium is oilless and kept dry; after meeting the requirement of a 105 helium liquefier, the 105 helium liquefier cools normal temperature helium gas to a specified temperature or liquefies the normal temperature helium gas into liquid helium for storage, and finally the liquid helium gas is conveyed to a 100 liquid helium heat sink to select a working mode according to the requirement:
when the cooling capacity requirement of the 100 liquid helium heat sink is less than 480W/h, adopting a refrigeration mode, and realizing the cooling of the liquid helium heat sink by conveying low-temperature cold helium gas; when the cooling capacity requirement of the 100 liquid helium heat sink is more than or equal to 480W/h, the normal temperature helium gas is liquefied into liquid helium which is stored in the 106 liquid helium Dewar by adopting a liquefying mode, and the deep cooling air extraction of the liquid helium heat sink is realized by conveying large-flow liquid helium.
The helium purity analysis system 5 selects 104 helium purity analyzer; the device is connected with an outlet pipeline of the 103 oil removal system through an analyzer inlet valve, and enters a 105 helium liquefier after the purity of helium at the outlet of the oil removal system is detected and the use requirement is met; after the requirements are not met, the gas is connected with a 107 first vaporizer outlet pipeline through an analyzer inlet valve to recycle the impure helium;
the helium recovery system 3 comprises a first vaporizer 107, a second vaporizer 108, an electric heater 109, a helium gas gasbag 110, a high-pressure compressor 111, an oil-water separator 112 and a helium gas high-pressure storage tank 113;
the first vaporizer is connected with the 100 liquid helium heat sink, the second vaporizer is positioned at the rear part of the first vaporizer 107, and the two vaporizers are used for warming low-temperature helium to room temperature; the 109 electric heater is connected in series at the rear part of the 108 second vaporizer to heat helium to 20 ℃ so as to ensure the normal operation of the 110 helium gasbag; the 110 helium balloon is used for temporarily storing impure helium; a 111 high pressure compressor located at the rear of the 110 helium balloon for compressing the temporarily stored impure helium; the 112 oil-water separator is positioned at the rear part of the 111 high-pressure compressor and is used for removing oil and water in the compressed helium gas; the 113 helium high-pressure storage tank is positioned at the rear part of the 112 oil-water separator and is used for storing high-pressure impure helium;
the helium purification system 4 comprises 114 a pressure reducer, 115 a dryer, and 116 a helium purifier;
the 114 pressure reducer is positioned at the rear part of the 113 helium high-pressure storage tank, the 115 dryer is positioned at the rear part of the 114 pressure reducer and is used for reducing the pressure of high-pressure impure helium to below 2MPa, and the high-pressure impure helium is dried and then is input into the 116 helium purifier connected with the rear part for purification into high-purity helium; the 116 helium purifier is connected with the 101 surge tank and stores the purified high-purity helium;
the liquid helium storage system 6 is a 106 liquid helium Dewar which is positioned at the tail end of the 105 helium liquefier and is used for storing liquid helium generated by the liquefier and used for a liquid helium heat sink; simultaneously connecting an inlet pipeline of the 100 liquid helium heat sink, and conveying liquid helium to the 100 liquid helium heat sink;
the invention has the advantages and positive effects that:
1. the helium recovery liquefaction system for plume ultralow temperature experiments is a closed circulation recovery system, realizes real-time liquefaction, real-time refrigeration and real-time recovery of helium, greatly saves helium resources, and does not need to prepare a large amount of helium before the experiment;
2. the helium recovery liquefaction system for plume ultralow temperature experiments can provide ultralow temperature refrigeration for a liquid helium heat sink at any temperature of 4.2K-80K;
3. the helium recovery liquefaction system for plume ultralow temperature experiments is provided with a high-purity helium storage system for storing high-purity helium with the purity of 5N (99.999 percent), and the storage pressure of a pressure stabilizing tank is maximally 12.7bar;
4. a helium recovery liquefaction system for plume ultralow temperature experiment is equipped with helium refrigeration and liquefaction system, through with liquid helium heat sink access & exit pipeline with helium refrigeration and liquefaction system send the return air pipeline to link to each other, realize the closed circulation of helium, can realize real-time liquefaction, the real-time refrigeration of helium, with helium recycle, practiced thrift the helium resource, reduced the experiment cost by a wide margin.
5. The helium recovery and liquefaction system for plume ultralow temperature experiments is provided with a helium recovery system for recovering and storing impure helium, otherwise, a helium liquefier is damaged; the outlet of the high-pressure compressor is provided with a one-way valve, so that the damage of the compressor caused by the backflow of high-pressure helium at the outlet of the compressor to the compressor when the compressor is stopped is prevented;
6. the helium recovery liquefaction system for plume ultralow temperature experiments is clear in principle, and has less helium required by the experiments and low long-term experiment cost compared with the existing open liquid helium system.
Drawings
FIG. 1 is a diagram of a helium recovery liquefaction system for plume ultralow temperature experiments provided by the invention.
Detailed Description
The invention will be described in further detail with reference to the drawings and examples.
The helium recovery liquefaction system for the plume ultralow temperature experiment can be applied to experimental study of the vacuum plume effect of the attitude and orbit control rocket engine, and can also be applied to ultralow temperature vacuum experiments in other technical fields.
The helium recovery liquefaction system comprises: a high purity helium storage system 1, a helium refrigeration and liquefaction system 2, a helium recovery system 3, a helium purification system 4, a helium purity analysis system 5, a liquid helium storage system 6 and a liquid helium heat sink system 7. And equipment, pipelines and valves are arranged according to a system flow chart to form a helium recovery liquefaction system, so that real-time liquefaction, real-time refrigeration and real-time recovery of helium are realized.
The high-purity helium storage system 1 stores high-purity helium in advance, and the helium is liquefied and refrigerated by the helium refrigerating and liquefying system 2; and the helium gas is conveyed into a liquefying machine, the purity of the helium gas produced by the liquefying machine is detected by utilizing a helium gas purity analysis system 5, and when the sum of nitrogen, water vapor and hydrocarbon in the helium gas is less than 50ppm, the purity of the helium gas is more than 99.995%, and the helium gas is stored in a liquid helium storage system 6 for cooling by a liquid helium heat sink system 7.
Otherwise, starting the helium recovery system 3 to complete recovery and storage of the impure helium, purifying the impure helium with the helium purity less than 99.995% into high-purity helium with the helium purity more than or equal to 99.999% by using the helium purification system 4, storing the high-purity helium into the high-purity helium storage system 1, and returning to the helium refrigeration and liquefaction system 2 again.
The liquid helium heat sink system 7 utilizes liquid helium or low-temperature helium gas to realize temperature control of the liquid helium heat sink according to plume experiment requirements, adsorbs multi-component plume gases such as carbon, hydrogen, oxygen, nitrogen and the like, and completes an ultrahigh vacuum plume experiment;
meanwhile, the inlet and outlet pipeline of the liquid helium heat sink system 7 is connected with the helium refrigerating and liquefying system 2, so that unused helium is returned, and closed circulation of helium and real-time liquefaction and real-time refrigerating of helium are realized.
The high-purity helium storage system 1 is mainly used for storing high-purity helium, and the high-purity helium with the purity of 5N (99.999%) purchased in the market is stored in a pressure stabilizing tank before an experiment, and the storage pressure of the pressure stabilizing tank is 12.7bar at maximum so as to meet the use requirement of a 102 helium gas circulating compressor.
As shown in fig. 1, the high purity helium storage system 1 includes a 101 surge tank, a V12 surge tank outlet valve, a V50 surge tank inlet valve, a V51 first relief valve shut-off valve, and a V52 first relief valve.
Filling high-purity helium into a 101 surge tank through a V50 surge tank air inlet valve until the pressure reaches 12.7bar; the V52 first safety valve is used for preventing the pressure of the 101 surge tank from being too high, and the pressure of the exhaust gas is 15bar; a first safety valve stop valve of the V51 is arranged between the pressure stabilizing tank 101 and the first safety valve of the V52, and is in a full-open state at ordinary times, and is closed only when the first safety valve of the V52 is used for periodic quality inspection.
The helium refrigerating and liquefying system 2 is mainly used for helium liquefaction and refrigeration, and two experimental modes of a helium liquefying mode and a helium refrigerating mode are selected according to the plume experimental requirements of an engine. When the cooling capacity requirement of the liquid helium heat sink is less than 480W/h, adopting a refrigeration mode, and realizing the cooling of the liquid helium heat sink by conveying low-temperature cold helium gas; when the cold energy requirement of the liquid helium heat sink is more than or equal to 480W/h, the normal temperature helium gas is liquefied into liquid helium which is stored in the 106 liquid helium Dewar, and the liquid helium heat sink is subjected to deep cooling air extraction by conveying high-flow liquid helium, so that the high cold energy requirement of the liquid helium heat sink is met. The two working modes can be automatically or manually controlled by a computer;
the helium refrigerating and liquefying system 2 comprises a 102 circulating compressor, a 103 degreasing system, a 105 helium liquefier, a V13 high-pressure air receiving valve, a V14 low-pressure air supplementing valve, a V15 large bypass valve, a V16 small bypass valve, a V18 liquefier high-pressure air inlet valve, a V19 liquefier low-pressure air returning valve, a V20 liquefier liquid outlet valve, a V21 Du Wahui air valve, a V23 first low-temperature air returning valve, a V24 second low-temperature air returning valve, a V25 third low-temperature air returning valve, a V26 first refrigerating valve, a V27 second refrigerating valve, a 107 first vaporizer, a V1 first vaporizer inlet valve, a V5 first vaporizer outlet valve, a T1 first vaporizer inlet pipeline temperature sensor, a T2 first vaporizer outlet pipeline temperature sensor, a T3 first low-temperature air returning valve pipeline temperature sensor, a T4 second low-temperature air returning valve pipeline temperature sensor and a T5 third low-temperature air returning valve pipeline temperature sensor.
The system comprises a V12 pressure stabilizing tank, a 102 circulating compressor, a 105 helium liquefier, a pressure stabilizing tank and a pressure stabilizing pump, wherein the 102 circulating compressor is helium pressurization circulation output through the pressure stabilizing tank air outlet valve and provides a power source for the 105 helium liquefier to work, the helium pressure at the inlet of the 102 circulating compressor is 1.05-1.1bar (gauge pressure), and the helium pressure at the outlet of the 102 circulating compressor is 14.7bar (absolute pressure); 103 the oil removal system is positioned at the outlet of the 102 circulating compressor and is used for filtering and separating oil and water of helium coming out of the circulating compressor, so that the oil and water amount is as low as 1ppm level, and the working requirement of a 105 helium liquefier is met; the 105 helium liquefier is used for refrigerating normal-temperature helium to a specified temperature or liquefying the normal-temperature helium into liquid helium for storage, the low-temperature refrigerating temperature range is 80K-4.5K, the liquefying temperature is 4.2K, the automatic control mode is adopted, and the working mode is selected according to the requirement of a liquid helium heat sink;
the V13 high-pressure air collecting valve is used for recovering helium to the 101 surge tank, and after the circulating compressor is stopped, the high-purity helium is automatically recovered to the 101 surge tank for storage, so that the waste of helium is avoided; the V14 low-pressure air compensating valve is used for supplementing helium to the inlet of the 102 circulating compressor, so that the phenomenon that the normal operation of the 105 helium liquefier is influenced due to the shutdown protection of the 102 circulating compressor caused by the too low inlet pressure is avoided; the V15 large bypass valve and the V16 small bypass valve are used for self-circulation starting of the 102 circulation compressor, initial working pressure of the 102 circulation compressor is built, when the 102 circulation compressor is started, the V16 small bypass valve is firstly automatically opened, the circulation compressor is slowly started, when the helium flow reaches 60% of a rated value, the V15 large bypass valve is automatically opened, and the V16 small bypass valve is closed until the helium flow and the pressure reach steady operation, and in order to ensure stable starting of the 102 circulation compressor, the diameter size of the V16 small bypass valve is half of that of the V15 large bypass valve; the V18 liquefying machine high-pressure air inlet valve is mainly used for high-pressure air inlet of the 105 helium liquefying machine, and the 103 degreasing system is connected with an air inlet pipeline of the 105 helium liquefying machine through a pipeline; the low-pressure return valve of the V19 liquefying machine is mainly used for returning helium to the low-pressure inlet of the 102 circulating compressor, and the low-pressure return port of the 105 helium liquefying machine is connected with the low-pressure inlet of the 102 circulating compressor through a pipeline, so that closed circulation of the circulating compressor and the helium liquefying machine is realized; the liquid outlet valve of the V20 liquefier is used for conveying the produced liquid helium to the 106 liquid helium Dewar; the V21 Dewar return valve is used for returning the cold helium gas amplified in the 106 liquid helium Dewar to the 105 helium liquefier, so that cold energy recovery and helium gas recovery are realized, and energy sources and helium gas are saved; the V23 first low-temperature air return valve is used for 40K-80K cold helium gas backflow; the V24 second low-temperature air return valve is used for refluxing 20K-40K cold helium gas; the V25 third low-temperature air return valve is used for refluxing 5K-20K cold helium gas, so that cold energy recovery is completed, energy consumption is reduced, and refrigeration efficiency is improved; the V26 first refrigeration valve is used for supplying 60K-level cold helium gas, the V27 second refrigeration valve is used for supplying 20K-level cold helium gas, and the cold helium gas is sent to the 100 liquid helium heat sink inlet through the conveying pipeline, so that the 100 liquid helium heat sink is cooled and refrigerated; the opening degree of the V26 first refrigeration valve and the opening degree of the V27 second refrigeration valve can be automatically adjusted through a measurement and control system, so that arbitrary flow mixing of two paths of cold energy is realized, and the temperature of cold helium gas at the inlet of the 100 liquid helium heat sink can be adjusted in an arbitrary temperature region of 20K-80K through automatic control of the V26 first refrigeration valve and the V27 second refrigeration valve;
the first vaporizer is used for heating the cold helium gas with the temperature of more than or equal to 80K output in the 100 liquid helium heat sink to normal temperature, and when the temperature of the cold helium gas at the outlet of the 100 liquid helium heat sink is more than or equal to 80K, the helium gas is required to be sent to the first vaporizer through a pipeline, and cannot be directly sent to the liquefier, so that the refrigerating efficiency of the liquefier is affected; the V1 first vaporizer inlet valve is used for controlling the helium amount entering the first vaporizer and has two states of full open and full closed; the V5 first vaporizer outlet valve is used for controlling the helium amount entering the circulating compressor and has two states of full open and full closed; the temperature sensor of the inlet pipeline of the first vaporizer is positioned at the front end of the three-way pipeline of the inlet of the first vaporizer and is used for monitoring the temperature of helium at the position, entering the pipeline of the helium liquefier when the temperature of the helium is less than 80K, and entering the inlet pipeline of the first vaporizer when the temperature of the helium is more than or equal to 80K; the temperature sensor of the outlet pipeline of the T2 first vaporizer is positioned at the position of the outlet three-way pipeline of the first vaporizer and is used for monitoring the temperature of helium at the position, so that the condition that the temperature of the helium at the inlet of the circulating compressor is too low to cause shutdown protection of the circulating compressor is avoided, the temperature of the helium at the inlet of the circulating compressor is required to be more than or equal to 5 ℃, and if the temperature is lower than 5 ℃, the helium is led to the 108 second vaporizer; the temperature sensor of the pipeline of the first low-temperature air return valve T3 is positioned on the pipeline where the front end of the first low-temperature air return valve V23 is positioned and is used for detecting the temperature of helium in the pipeline, when the temperature of the helium is 40K-80K, the first low-temperature air return valve V23 is opened, and the helium enters the liquefying machine to recover cold energy; the temperature sensor of the pipeline of the T4 second low-temperature air return valve is positioned on the pipeline where the front end of the V24 second low-temperature air return valve is positioned and is used for detecting the temperature of helium in the pipeline, when the temperature of the helium is 20K-40K, the V24 second low-temperature air return valve is opened, and the helium enters the liquefying machine to recover cold energy; and when the temperature of helium is 5K-20K, opening the V25 third low-temperature return valve, and allowing the helium to enter the liquefying machine to recover cold when the temperature of the helium is 5K-20K.
The helium recovery system 3 is mainly used for recovering and storing impure helium, and the maximum storage pressure of the high-pressure storage tank is 20MPa. When the purity of the helium passing through the liquid helium heat sink or the purity of the helium at the outlet of the 103 oil removing system cannot meet the operation requirement of the 105 helium liquefier, starting the helium recovery system 3 to complete recovery and storage of the helium, otherwise, damaging the 105 helium liquefier.
The helium recovery system 3 comprises a 108 second vaporizer, a 109 electric heater, a 110 helium gasbag, a 111 high-pressure compressor, a 112 oil-water separator, a 113 helium high-pressure storage tank, a V2 second vaporizer inlet valve, a V6 high-pressure compressor inlet valve, a D7 high-pressure compressor outlet check valve, a V7 high-pressure compressor outlet valve, a V8 helium high-pressure storage tank inlet valve, a V26 helium high-pressure storage tank outlet valve, a V60 high-pressure storage tank evacuation valve, a V61 second safety valve stop valve, a V62 second safety valve and a V72 third safety valve.
108 a second vaporizer is positioned at the rear part of the first vaporizer 107 and is used for further warming the low-temperature helium gas to room temperature; the 109 electric heater is arranged at the rear part of the 108 second vaporizer and is connected in series with the 108 second vaporizer to prevent the temperature of the helium at the outlet of the 108 second vaporizer from being too low due to long-time work, so that the helium is heated to 20 ℃, the normal work of the 110 helium gas bag is ensured, and the low Wen Donglie of the gas bag is avoided; the 110 helium gas bag is positioned at the rear part of the 109 electric heater and is used for temporarily storing impure helium gas, the volume of the helium gas bag is more than or equal to 200 cubic meters, and the helium gas bag is stored at normal pressure; the 111 high-pressure compressor is positioned at the rear part of the 110 helium balloon and is used for compressing helium temporarily stored in the 110 helium balloon to a high-pressure storage tank, compressing the helium at high pressure, occupying no volume, adopting an automatic control mode, automatically starting the helium high-pressure compressor for pumping and compressing when the volume of the helium in the helium balloon is not less than two thirds of the total volume of the helium balloon, and automatically stopping the helium high-pressure compressor when the volume of the helium in the helium balloon is not more than one fifth of the total volume of the helium balloon;
the 112 oil-water separator is positioned at the rear part of the 111 helium high-pressure compressor and is used for removing oil and water in the helium after passing through the high-pressure compressor; the 113 helium high-pressure storage tank is positioned at the rear part of the 112 oil-water separator and is used for storing high-pressure impure helium, the maximum storage pressure is less than or equal to 20MPa, and the storage tank volume is more than or equal to 10 cubic meters; the V2 second vaporizer inlet valve is positioned at the rear part of the first vaporizer and used for controlling the helium quantity entering the second vaporizer, and has two states of full open and full closed, and when the helium is impure, the second vaporizer is fully opened and the helium is conveyed to the second vaporizer; the V6 high-pressure compressor inlet valve is positioned at the high-pressure compressor inlet and is used for controlling the air inflow entering the compressor; the outlet check valve of the D7 high-pressure compressor is positioned at the outlet of the high-pressure compressor, so that the damage of the compressor caused by the backflow of high-pressure helium at the outlet of the compressor to the compressor when the compressor is stopped is prevented; the V7 high-pressure compressor outlet valve is positioned at the rear part of the high-pressure compressor outlet check valve and is used for controlling the helium amount entering the oil-water separator; the inlet valve of the V8 helium high-pressure storage tank is positioned at the outlet of the oil-water separator and is used for controlling the quantity of helium entering the helium high-pressure storage tank; the outlet valve of the V26 helium high-pressure storage tank is positioned at the outlet of the helium high-pressure storage tank and is used for controlling the gas outlet quantity of the high-pressure storage tank; the V60 high-pressure storage tank evacuating valve is positioned at the lower part of the high-pressure storage tank body and is used for vacuum pumping of the high-pressure storage tank, the KF interface is used for pumping air in the high-pressure storage tank before helium is fed, the high-pressure storage tank is evacuated to below 100 Pa by utilizing the vacuum pump, so that the influence of excessive air on the purity of the helium is avoided, and the subsequent purification of the helium is not facilitated; the V62 second safety valve is used for preventing the pressure of the high-pressure storage tank from being too high, and the pressure of the exhaust gas is 20.5Mpa; a V61 second safety valve stop valve is arranged between the high-pressure storage tank and the V62 second safety valve, and the second safety valve stop valve is in a full-open state at ordinary times, and is closed only when the V61 second safety valve stop valve is subjected to periodic quality inspection, so that helium in the high-pressure storage tank is not required to be emptied when the safety valve is subjected to periodic quality inspection, and the method can save helium resources and reduce experimental cost; the third safety valve V72 is positioned on the helium gas balloon outlet pipeline to avoid the overpressure of the balloon, and the pressure of the gas discharged is 1.05bar.
The helium purification system 4 is mainly used for purifying impure helium with helium purity less than 99.995% into high-purity helium with helium purity more than or equal to 99.999%, and storing the high-purity helium in a helium pressure stabilizing tank so as to meet the use requirement of a helium liquefier.
The helium purification system includes 114 a pressure reducer, 115 a dryer, 116 a helium purifier, a V9 dryer inlet valve, a V10 dryer outlet valve, and a V11 helium purifier outlet valve.
The 114 pressure reducer is positioned at the rear part of the helium high-pressure storage tank and is used for reducing the pressure of high-pressure gas in the high-pressure storage tank to below 2MPa so as to meet the use requirement of the helium purifier; a dryer 115 is positioned at the rear of the pressure reducer 114 for drying the helium gas and removing residual water vapor in the helium gas; the 116 helium purifier is positioned at the rear part of the 115 dryer and is used for purifying the impure helium into high-purity helium, and the purity of the helium passing through the 116 helium purifier is more than or equal to 99.999%; the 116 helium purifier is connected with the 101 surge tank and stores the purified high-purity helium; v9 dryer inlet valve is positioned at the dryer inlet for controlling the flow of helium gas into the 115 dryer; a V10 dryer outlet valve is located 115 at the dryer outlet for controlling the flow of helium gas out of the dryer; the V11 helium purifier outlet valve is located 116 at the helium purifier outlet for controlling the flow of helium out of the purifier.
The helium purity analysis system 5 is used for detecting the purity of helium, can carry out ppm-level analysis on nitrogen, water vapor and hydrocarbon in the helium, and when the sum of the three is less than 50ppm, the purity of the helium is greater than 99.995%, so that the use requirement of a 105 helium liquefier is met, otherwise, a helium recovery system is started, and impure helium is stored in a high-pressure storage tank to be purified for use.
The helium purity analysis system includes a 104 helium purity analyzer, a V17A analyzer first inlet valve, a V17B analyzer second inlet valve, and a V17C analyzer outlet valve.
The 104 helium purity analyzer is used for analyzing the purity of helium, and can analyze the ppm level of nitrogen, water and hydrocarbon contained in the helium, so that the purity of the helium is ensured to be reliable; one end of a first inlet valve of the V17A analyzer is connected with an outlet pipeline of the 103 oil removal system, and the other end of the first inlet valve is connected with an inlet of the 104 helium purity analyzer and is used for detecting the purity of helium at an outlet of the oil removal system, and the helium purity meets the use requirement of a 105 helium liquefier and can enter the liquefier; one end of a second inlet valve of the V17B analyzer is connected with a 107 first evaporator outlet pipeline, and the other end of the second inlet valve is connected with a 104 helium purity analyzer inlet and is used for detecting the purity of helium at the first evaporator outlet, and the helium purity can enter the circulating compressor after meeting the use requirement of the circulating compressor; one end of an outlet valve of the V17C analyzer is connected with an inlet pipeline of the helium gas gasbag, the other end of the outlet valve is connected with an outlet of the 104 helium gas purity analyzer, and the helium gas detected by the helium gas purity analyzer is continuously recovered by utilizing the 110 helium gas gasbag, so that the waste of the helium gas is avoided, and the resource is saved.
The liquid helium storage system 6 is used for storing liquid helium, and stores the liquid helium produced by the helium liquefier into the liquid helium Dewar for cooling the liquid helium heat sink.
The liquid helium storage system comprises a 106 liquid helium Dewar, a V28 liquid helium Du Wasong liquid valve, a T6 liquid helium Du Wajin liquid pipeline temperature sensor and a T7 liquid helium Dewar liquid pipeline temperature sensor.
The 106 liquid helium Dewar is positioned at the tail end of the 105 helium liquefier and is used for storing liquid helium generated by the liquefier and providing the liquid helium for a liquid helium heat sink; one end of a V28 liquid helium Du Wasong liquid valve is connected with an inlet pipeline of the 100 liquid helium heat sink, and the other end of the V28 liquid helium Du Wasong liquid valve is connected with a 106 liquid helium Dewar liquid outlet pipeline and is used for conveying liquid helium to the 106 liquid helium heat sink; the T6 liquid helium Du Wajin liquid pipeline temperature sensor is arranged on a liquid inlet pipeline of the 106 liquid helium Dewar and is used for monitoring the helium temperature of the pipeline; the T7 liquid helium Dewar liquid feeding pipeline temperature sensor is arranged on the liquid helium Dewar liquid feeding pipeline of 106 liquid helium Dewar and is used for monitoring the helium temperature of the pipeline.
The liquid helium heat sink system 7 is mainly used for ultralow temperature adsorption of plume gas, and according to the requirement of plume experiments, the liquid helium or low-temperature helium is utilized to realize temperature control of the liquid helium heat sink, and the multi-component plume gas such as carbon, hydrogen, oxygen, nitrogen and the like is adsorbed to complete the ultrahigh vacuum plume experiments.
The liquid helium heat sink system comprises a 100 liquid helium heat sink, a V3 liquid helium heat sink pipeline inlet valve, a V4 liquid helium heat sink pipeline outlet valve and a T8 liquid helium heat sink pipeline inlet temperature.
The 100 liquid helium heat sink is positioned in the vacuum cabin body, is cooled and refrigerated by liquid helium or cold helium and is used for ultralow-temperature vacuum air extraction of plume experiments; the V3 liquid helium heat sink pipeline inlet valve is positioned in the liquid helium heat sink inlet pipeline and is used for controlling the flow of liquid helium or cold helium entering the liquid helium heat sink; the V4 liquid helium heat sink pipeline outlet valve is positioned in the liquid helium heat sink outlet pipeline and is used for controlling the liquid helium flow or the cold helium flow of the effluent liquid helium heat sink; the inlet temperature of the T8 liquid helium heat sink pipeline is arranged in the liquid helium heat sink inlet pipeline and is used for monitoring the helium temperature at the liquid helium heat sink inlet, so that the system measurement and control are facilitated.
Claims (6)
1. A helium recovery liquefaction system for plume ultralow temperature experiment, its characterized in that specifically includes: the system comprises a high-purity helium storage system (1), a helium refrigerating and liquefying system (2), a helium recycling system (3), a helium purifying system (4), a helium purity analyzing system (5), a liquid helium storage system (6) and a liquid helium heat sink system (7);
the high-purity helium storage system (1) stores high-purity helium in advance, and the helium is liquefied and refrigerated through the helium refrigerating and liquefying system (2); the helium gas is conveyed into a liquefying machine, the purity of helium gas produced by the liquefying machine is detected by utilizing a helium gas purity analysis system (5), and when the sum of nitrogen, water vapor and hydrocarbon in the helium gas is less than 50ppm, the purity of the helium gas is greater than 99.995 percent, and the helium gas is stored in a liquid helium storage system (6) for cooling a liquid helium heat sink system (7);
otherwise, starting a helium recovery system (3) to complete recovery and storage of the impure helium, purifying the impure helium with the helium purity less than 99.995% into high-purity helium with the helium purity more than or equal to 99.999% by using a helium purification system 4, storing the high-purity helium in a high-purity helium storage system (1), and returning to a helium refrigeration and liquefaction system (2) again;
and the liquid helium heat sink system (7) utilizes liquid helium or low-temperature helium gas to realize temperature control of the liquid helium heat sink according to plume experiment requirements, adsorbs carbon, hydrogen, oxygen and nitrogen multi-component plume gases and completes the ultrahigh vacuum plume experiment.
2. The helium recovery liquefaction system for plume ultralow temperature experiments according to claim 1, wherein an inlet and outlet pipeline of the liquid helium heat sink system (7) is connected with a helium refrigerating and liquefying system (2) to return unused helium, so that closed circulation of the helium and real-time liquefaction and real-time refrigeration of the helium are realized.
3. The helium recovery liquefaction system for the plume ultralow temperature experiment according to claim 1, wherein the liquid helium heat sink system (7) is a liquid helium heat sink (100) which is positioned in the vacuum cabin body, is cooled and refrigerated by liquid helium or cold helium and is used for the plume experiment ultralow temperature vacuum pumping;
the high-purity helium storage system (1) is characterized in that a pressure stabilizing tank (101) with valves arranged at the front and the back is selected for storing high-pressure pure nitrogen;
the helium refrigerating and liquefying system (2) comprises a circulating compressor (102), an oil removing system (103) and a helium liquefier (105);
the circulating compressor (102) is used for pressurizing and circulating helium gas output by the pressure stabilizing tank (101) and outputting the helium gas to the oil removing system (103) for oil-water filtration and separation, so that the helium gas is oilless and kept dry; after meeting the requirements of the helium liquefier (105), the helium liquefier (105) cools normal-temperature helium gas to a specified temperature or liquefies the normal-temperature helium gas into liquid helium for storage, and finally the liquid helium is conveyed to a liquid helium heat sink (100) to select a working mode according to the requirements:
the helium purity analysis system (5) selects a helium purity analyzer (104); the device is connected with an outlet pipeline of the oil removing system (103) through an inlet valve of the analyzer, and enters a helium liquefier (105) after the purity of helium at the outlet of the oil removing system is detected and the use requirement is met; after the requirements are not met, the gas is connected with an outlet pipeline of the first vaporizer (107) through an analyzer inlet valve, and the recovery of the impure helium is carried out;
the helium recovery system (3) comprises a first vaporizer (107), a second vaporizer (108), an electric heater (109), a helium balloon (110), a high-pressure compressor (111), an oil-water separator (112) and a helium high-pressure storage tank (113);
the helium purification system (4) comprises a pressure reducer (114), a dryer (115) and a helium purifier (116);
the liquid helium storage system (6) is a liquid helium Dewar (106) which is positioned at the tail end of the helium liquefier (105) and is used for storing liquid helium generated by the liquefier and used for a liquid helium heat sink; and simultaneously connects with an inlet pipeline of the liquid helium heat sink (100), and conveys liquid helium to the liquid helium heat sink (100).
4. A helium recovery liquefaction system for plume ultralow temperature experiments as claimed in claim 3, wherein said mode of operation is:
when the cooling capacity requirement of the liquid helium heat sink (100) is less than 480W/h, adopting a refrigeration mode, and realizing cooling of the liquid helium heat sink by conveying low-temperature cold helium gas; when the cooling capacity requirement of the liquid helium heat sink (100) is more than or equal to 480W/h, the normal-temperature helium gas is liquefied into liquid helium and stored in the liquid helium Dewar (106) in a liquefaction mode, and the liquid helium heat sink is subjected to deep cooling air extraction by conveying high-flow liquid helium.
5. A helium recovery liquefaction system for plume ultra-low temperature experiments according to claim 3, wherein the first vaporizer (107) is connected to a liquid helium heat sink (100), the second vaporizer (108) is located at the rear of the first vaporizer (107), and both vaporizers are used for warming low temperature helium gas to room temperature; the electric heater (109) is connected in series with the rear part of the second vaporizer (108) to heat helium to 20 ℃ so as to ensure the normal operation of the helium gas bag (110); a helium balloon (110) for temporarily storing impure helium; a high pressure compressor (111) located at the rear of the helium balloon (110) for compressing the temporarily stored impure helium gas; the oil-water separator (112) is positioned at the rear part of the high-pressure compressor (111) and is used for removing oil and water in the compressed helium gas; a helium high pressure tank (113) is located at the rear of the oil-water separator (112) for storing high pressure impure helium.
6. A helium recovery liquefaction system for plume ultra-low temperature experiments according to claim 3, wherein the pressure reducer (114) is positioned at the rear part of the helium high-pressure storage tank (113), the dryer (115) is positioned at the rear part of the pressure reducer (114) and is used for reducing the pressure of high-pressure impure helium to below 2MPa and inputting the high-pressure impure helium into the helium purifier (116) connected at the rear part after drying to purify the high-pressure impure helium into high-purity helium; the helium purifier (116) is connected with the surge tank (101) and stores the purified high-purity helium.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210398045 | 2022-04-12 | ||
| CN2022103980453 | 2022-04-12 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN116399082A true CN116399082A (en) | 2023-07-07 |
Family
ID=87011230
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202310113790.3A Pending CN116399082A (en) | 2022-04-12 | 2023-02-15 | Helium recovery liquefaction system for plume ultralow temperature experiment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN116399082A (en) |
-
2023
- 2023-02-15 CN CN202310113790.3A patent/CN116399082A/en active Pending
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN100436965C (en) | Method for cooling a product, particularly, for liquefying a gas, and device for implementing this method | |
| CN104961109B (en) | A kind of cryonetic wind tunnel nitrogen gas recovering apparatus and recovery method | |
| CN103075868B (en) | A kind of liquefaction system of natural gas and liquifying method | |
| CN103561846A (en) | Method and system for recovering high-value components from waste gas streams adsorption | |
| CN111533095A (en) | Equipment and process for purifying helium from BOG gas | |
| CN114739055B (en) | Liquid oxygen/liquid methane comprehensive supercooling system and method based on liquid oxygen refrigeration capacity | |
| CN109059419A (en) | Liquefaction of hydrogen pre-cooling technique | |
| CN109631494A (en) | A kind of helium production system and production method | |
| CN102606882B (en) | Double-heat-sink closed liquid nitrogen transporting system and working method thereof | |
| CN103075869A (en) | Dual-refrigerant liquefaction system and method for NG (Natural Gas) | |
| CN104748463B (en) | A kind of mix refrigerant is reclaimed and compensation process and device | |
| CN116399082A (en) | Helium recovery liquefaction system for plume ultralow temperature experiment | |
| KR100869518B1 (en) | Method and apparatus for Cryogenic Helium Purification | |
| US20130291585A1 (en) | Installation and Method for Producing Liquid Helium | |
| CN109760809B (en) | Life support system of underwater aircraft | |
| CN107677045B (en) | Internal purifier research system | |
| KR20240032909A (en) | Equipment and methods for liquefying hydrogen | |
| CN112129040B (en) | Liquid xenon cooling and reliquefaction skid-mounted device and method thereof | |
| CN115745713A (en) | High-density hydrogen-oxygen propellant synchronous preparation system and method thereof | |
| CN212942175U (en) | Vehicle-mounted electronic grade high-purity special gas tail gas liquefaction recovery device | |
| CN114791202A (en) | Super-flow helium refrigerator with adsorber regeneration pipeline | |
| CN204083795U (en) | Liquid residual air reclaiming system more than a kind of natural gas tank car | |
| CN208237485U (en) | Crystal industrial park safety and energy-saving ring-type ultralow pressure air supply system | |
| CN106052300B (en) | Gas purification system | |
| Li et al. | Helium recovery and purification at CHMFL |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination |