CN111591442A - Miniature detection device - Google Patents

Abstract

A micro-detection device includes a flying body, at least one fluid actuation system, an image capture system, and a controller. The fluid actuating system includes: the driving module consists of a plurality of flow guide units; the flow guide channel is provided with a plurality of branch channels, and each branch channel is communicated with a plurality of connecting channels; a confluence cavity communicated between the two corresponding branch channels; the valves are correspondingly arranged in the corresponding connecting channels; and a fluid output area communicated with the connecting channel. The controller controls the on-off state of the valve to provide the driving force required by the flying body during flying, controls the flying state of the flying body and controls the operation of the image capturing system.

Description

Miniature detection device

Technical Field

The present invention relates to a detection device, and more particularly, to a micro detection device capable of flying in a remote control manner.

Background

At present, in all fields, no matter in medicine, computer technology, printing, energy and other industries, products are developed toward refinement and miniaturization, wherein a fluid conveying structure included in a product such as a micropump, a sprayer, an ink jet head, an industrial printing device and the like is a key technology thereof.

In various industries, such as the medical industry, the electronic industry, the printing industry, the energy industry, or even the conventional industry in general, many instruments or devices that require pneumatic power driving are usually provided with conventional motors and pneumatic valves for gas delivery. However, the volume of the conventional motor and the gas valve is limited, so that it is difficult to reduce the volume of the whole device, i.e. to achieve the goal of thinning, and further, the portable purpose of the apparatus cannot be achieved. In addition, the conventional driving devices usually have a large volume to accommodate various complicated driving cores in order to achieve the required kinetic energy, and generate large noise or flying dust pollution while operating, which causes inconvenience and discomfort in use.

The driving device of the conventional detecting device has the above-mentioned problems, and how to improve the disadvantages of the conventional detecting device by means of the innovative structure is the key point of the present development.

Disclosure of Invention

The present invention provides a remote-controlled flying miniature detection device, which is driven by a fluid actuating system to form a fluid transmission operation with high transmission capacity, high efficiency and high flexibility according to the requirements of various gas transmission flow rates, so as to provide the driving force required during flying, and has the advantages of miniaturization, portability, low noise, low pollution, convenient use, etc.

To achieve the above objective, a broader aspect of the present invention is to provide a micro inspection device, which includes a flying body, at least one fluid moving system, an image capturing system and a controller. The fluid actuating system is arranged in the flying main body and comprises a driving module, a flow guide channel, a confluence chamber, a plurality of valves and a fluid output area. The driving module is composed of a plurality of flow guide units, and each flow guide unit is controlled to be actuated so as to transmit fluid. The flow guide channel is provided with a plurality of branch channels, and each branch channel is communicated with a plurality of connecting channels so as to divide the fluid to form the required transmission quantity. The confluence chamber is communicated between the two corresponding branch channels for accumulating fluid therein. Each valve is correspondingly arranged in the corresponding connecting channel so as to control the on-off state of the connecting channel. The fluid output area is communicated with the connecting channel to collect fluid so as to output the required transmission quantity. The image capturing system is used for capturing an external image of the micro-detection device. The controller controls the on-off state of the valve to provide the driving force required by the flying body during flying, controls the flying state of the flying body and controls the operation of the image capturing system.

Drawings

FIG. 1 is a schematic perspective view of the present micro-detection device.

Fig. 2 is a system schematic diagram of a fluid actuating system of the micro detection device.

Fig. 3A is a schematic cross-sectional view of a flow guiding unit of the fluid actuating system of the present invention.

Fig. 3B is a schematic perspective view of an actuating body of the flow guide unit.

Fig. 3C and fig. 3D are schematic operation diagrams of the flow guide unit according to the present disclosure.

Fig. 4A is a schematic structural diagram of an arrangement of driving modules of the fluid actuating system of the present invention.

Fig. 4B is a schematic structural view illustrating a plurality of flow guide units arranged in series according to the present disclosure.

Fig. 4C is a schematic structural diagram of a plurality of flow guide units arranged in parallel according to the present disclosure.

Fig. 4D is a schematic structural diagram of a plurality of flow guide units arranged in series-parallel connection according to the present disclosure.

Fig. 5 is a schematic structural diagram of another arrangement of the driving modules of the fluid actuating system.

Fig. 6 is a schematic structural diagram of another arrangement of driving modules of the fluid actuating system of the present invention.

Fig. 7A and 7B are operation schematic diagrams of an embodiment of a valve of the present fluid actuation system.

Fig. 8A and 8B are schematic operation diagrams of another embodiment of a valve of the present fluid actuation system.

Description of the reference numerals

1: flying body

10: miniature detection device

2: fluid actuating system

21: drive module

21 a: flow guiding unit

211: intake plate

211 a: inlet orifice

212: base seat

212 a: connecting channel

213: resonance board

213 a: hollow hole

213 b: movable part

213 c: fixing part

214: spacing body

214 a: buffer chamber

215: actuating body

215 a: suspension part

215 b: outer frame part

215 c: connecting part

215 d: voids

215 e: piezoelectric element

216: outflow plate

216 a: cavity plate

216 b: cover plate

216 c: outflow chamber

216 d: outflow opening

22: flow guide channel

22 a: first branch channel

22 b: second branch channel

22 c: first group of connecting channels

221 c: first connecting channel

222 c: third connecting channel

22 d: second set of connecting channels

221 d: second connecting channel

222 d: fourth connecting channel

23: confluence chamber

24a, 24b, 24c, 24 d: valve with a valve body

241: channel base

241 a: first through hole

241 b: second through hole

241 c: chamber

241 d: first outlet

241 e: second outlet

242: piezoelectric actuator

242 a: support plate

242 b: piezoelectric material

243: connecting rod

243 a: blocking part

25: fluid delivery area

3: controller

31: power supply unit

32: processing unit

4: image acquisition system

5: electrical connection circuit unit

5 a: a first electrical connection circuit

5 b: the second electrical connection circuit

g: thickness of

V: direction of vibration

Detailed Description

Exemplary embodiments that embody features and advantages of this disclosure are described in detail below in the detailed description. It will be understood that the present disclosure is capable of various modifications without departing from the scope of the disclosure, and that the description and drawings are to be regarded as illustrative in nature, and not as restrictive.

Referring to fig. 1 and 2, a remote-controlled flying micro-detection device 10 is provided, which converts electric energy into kinetic energy, can fly by using specific fluid pressure and specific fluid flow generated by the kinetic energy, and performs a detection task by using a mounted image capturing device. In the present embodiment, the micro detection device 10 includes: a flying body 1, at least one fluid actuating system 2, a controller 3, an image capturing system 4 and an electrical connection circuit unit 5. In the present embodiment, the number of the at least one fluid actuating system 2 is three, but not limited thereto, and the number thereof may vary according to design requirements. In addition, each fluid actuating system 2 has the same structure, and the following description will be made only with reference to the structure of a single fluid actuating system 2 for avoiding redundancy.

Referring to fig. 2 and fig. 3A, in the present embodiment, the fluid actuating system 2 is disposed inside the flying body 1, and includes a driving module 21, a diversion channel 22, a confluence chamber 23, a plurality of valves 24a, 24b, 24c, 24d, and a fluid output area 25. In the present embodiment, the driving module 21 is composed of a plurality of flow guiding units 21a, and each flow guiding unit 21a is a piezoelectric pump. In the present embodiment, each flow guiding unit 21a is formed by sequentially stacking a flow inlet plate 211, a base 212, a resonance plate 213, a spacer 214, an actuating body 215 and a flow outlet plate 216.

Referring to fig. 3A, in the present embodiment, the flow inlet plate 211 has at least one flow inlet 211 a. The base 212 is stacked on the flow inlet plate 211 and has a communication channel 212a, and the communication channel 212a is communicated with the flow inlet 211a of the flow inlet plate 211. The resonator plate 213 is stacked on the base 212 and has a hollow hole 213a, a movable portion 213b and a fixed portion 213 c. The hollow hole 213a is provided at a central position of the resonator plate 213 corresponding to a position of the communication passage 212a of the base 212 and communicates with the communication passage 212a of the base 212. The movable portion 213b is disposed around the hollow hole 213a, and forms a flexible structure at a portion not contacting the base 212. The fixing portion 213c is provided at a portion connected and in contact with the base 212. The spacer 214 is stacked on the fixing portion 213c of the resonator plate 213 and has a buffer chamber 214a recessed at the center. The actuating body 215 is stacked on the spacer body 214, such that the spacer body 214 is disposed between the resonator plate 213 and the actuating body 215, and the depth of the buffer chamber 214a may be determined by a thickness g of the spacer body 214.

Referring to fig. 3B, in the present embodiment, the actuator 215 is a hollow suspension structure, and has a suspension portion 215a, an outer frame portion 215B, a plurality of connecting portions 215c, a plurality of gaps 215d, and a piezoelectric element 215 e. The suspension portion 215a is connected to the outer frame portion 215b through the connecting portion 215c, so that the connecting portion 215c supports the suspension portion 215a and the suspension portion 215a is elastically displaced. The gap 215d is interposed between the suspending portion 215a and the outer frame portion 215b, and allows fluid to flow therethrough. The piezoelectric element 215e is attached to one surface of the suspension portion 215 a. The arrangement, implementation and number of the suspending portion 215a, the outer frame portion 215b, the connecting portion 215c and the gap 215d are not limited thereto, and may vary according to design requirements.

Referring to fig. 3A and 3B, in the present embodiment, the outflow plate 216 is formed by stacking a cavity plate 216a and a cover plate 216B. The cavity plate 216a is stacked on the actuating body 215 and has an outflow cavity 216c in the center. The cover plate 216b covers the floating portion 215a, the connecting portion 215c, the gap 215d, the piezoelectric element 215e, and a partial region of the outer frame portion 215b of the actuating body 215, and has an outlet 216d, and the outlet 216d communicates with the outlet chamber 216 c.

In the present embodiment, the base 212 of the current guiding unit 21a includes a driving circuit (not shown) for electrically connecting the positive electrode (not shown) and the negative electrode (not shown) of the piezoelectric element 215e, thereby providing a driving power to the piezoelectric element 215e, but not limited thereto. In other embodiments, the driving circuit may be disposed at any position inside the flow guiding unit 21a, and may vary according to design requirements.

In the embodiment, the flow guiding unit 21a can be manufactured by a conventional machining process, a micro-electromechanical process, or a semiconductor process, but not limited thereto, and can be manufactured by different processes according to product requirements.

In the embodiment of the present disclosure, the flow guiding units 21a may be made of millimeter-sized materials, and the size of each flow guiding unit 21a ranges from 1 mm to 999 mm; the flow guide units 21a may also be made of micron-sized materials, and the size of each flow guide unit 21a ranges from 1 micron to 999 microns; the flow guiding units 21a may be made of nano-scale materials, and the size of each flow guiding unit 21a ranges from 1 nm to 999 nm, but not limited thereto, the size of the flow guiding unit 21a may vary according to the product requirements.

Referring to fig. 3C and fig. 3D, in the present embodiment, the guiding unit 21a is actuated in such a way that when a voltage is applied to the piezoelectric element 215e, the piezoelectric element deforms, so as to drive the actuating body 215 to perform reciprocating vibration along a vibration direction V. As shown in fig. 3C, when the piezoelectric element 215e is actuated by a voltage to generate a deformation, at this time, the floating portion 215a of the actuating body 215 is influenced by the deformation of the piezoelectric element 215e to displace in a direction away from the base 212, and the movable portion 213b of the resonator plate 213 is driven to displace in a direction away from the base 212, so that the volume of the buffer chamber 214a of the spacer 214 is increased to generate a suction force, and the fluid is sucked from the inlet 211a of the inlet plate 211, sequentially passes through the communication channel 212a of the base 212 and the hollow hole 213a of the resonator plate 213, and finally collects in the buffer chamber 214a for temporary storage. Next, as shown in fig. 3D, when the piezoelectric element 215e is further actuated by voltage to deform, the floating portion 215a of the actuating body 215 is displaced in a direction approaching the base 212 under the influence of the deformation of the piezoelectric element 215e, and the floating portion 215a of the actuating body 215 compresses the volume of the buffer chamber 214a, so that the fluid temporarily stored in the buffer chamber 214a is collected to both sides, and flows into the outflow chamber 216c through the gap 215D to be collected. As shown in fig. 3C, when the piezoelectric element 215e is actuated by the voltage again and deforms again, the suspension portion 215a of the actuator 215 vibrates under the influence of the deformation of the piezoelectric element 215e and displaces in a direction away from the base 212, so that the fluid in the outflow chamber 216C is discharged from the outflow port 216d of the outflow plate 216 to the outside of the flow guide unit 21a, and the fluid is transported. By repeating the operation shown in fig. 3C and fig. 3D, the fluid can be continuously discharged from the inlet 211a to the outlet 216D under pressure, so as to achieve the fluid transmission.

It should be noted that in the present embodiment, the frequency of the reciprocating vibration of the resonance plate 213 may be the same as the vibration frequency of the actuating body 215, that is, both may be displaced in the same direction at the same time, and may vary according to the practical implementation, and is not limited to the operation manner shown in the present embodiment. In addition, the fluid flows at a high speed due to the pressure gradient generated by the flow channel design of the flow guide unit 21a in the present embodiment, and is transmitted from the inlet 211a to the outlet 216d through the impedance difference in the inlet and outlet directions of the flow channel, and the fluid can be continuously pushed out under the pressure state of the outlet 216d, and the effect of silence can be achieved.

Referring to fig. 4A to 6, in the present embodiment, the diversion unit 21a can adjust the total fluid transmission amount and the transmission speed output by the driving module 21 according to a specific arrangement manner. As shown in fig. 4A and 4B, in the first arrangement, the flow guiding units 21a are arranged in series to increase the total transmission amount of the fluid output by the driving module 21. As shown in fig. 4C, in the second arrangement, the flow guiding units 21a are disposed in parallel to increase the transmission speed of the fluid output from the outlet 216 d. As shown in fig. 4D, the flow guiding units 21a are arranged in series and parallel, so as to simultaneously increase the total transmission amount of the fluid output by the driving module 21 and the transmission speed of the fluid output from the outlet 216D. As shown in fig. 5, the diversion unit 21a is disposed in a ring shape, which can also increase the total transmission amount of the fluid output by the driving module 21. As shown in fig. 6, the diversion units 21a are disposed in a honeycomb manner, which can also increase the total transmission amount of the fluid output by the driving module 21.

It should be noted that, in the present embodiment, in response to the requirement of large flow rate of the total fluid transmission, the flow guiding unit 21a may be connected to the driving circuit and simultaneously enabled to transmit the fluid. In addition, each flow guiding unit 21a can also be controlled to operate or stop independently, for example: one of the flow guiding units 21a is activated, the other flow guiding unit 21a is deactivated, or alternatively operated, but not limited to this, so as to meet the requirement of fluid transmission and greatly reduce the power consumption.

Referring back to fig. 2, fig. 3A and fig. 4A, the flow guide channel 22 is connected to the outflow port 216d of the flow guide unit 21a for receiving the fluid discharged from the flow guide unit 21 a. The flow guiding channel 22 comprises a plurality of branch channels, each branch channel is further connected to a plurality of connecting channels, and finally the connecting channels are collected and output to the fluid output area 25, so as to form the required total fluid transmission amount. In the embodiment, the branched channels are only illustrated as a first branched channel 22a and a second branched channel 22b, but not limited thereto; the connecting channels are only illustrated as a first set of connecting channels 22c and a second set of connecting channels 22d, but not limited thereto. The first set of connecting channels 22c connects a first connecting channel 221c and a third connecting channel 222c, and the second set of connecting channels 22d connects a second connecting channel 221d and a fourth connecting channel 222 d. It should be noted that the length and width of the branched channel can be preset according to the specific required delivery amount, that is, the length and width of the first branched channel 22a and the second branched channel 22b can affect the flow rate and the delivery amount, i.e. the required length and width can be calculated according to the specific required delivery amount.

It should be noted that, in the embodiment, although the first branch channel 22a and the second branch channel 22b are disposed in a parallel arrangement, the disclosure is not limited thereto, the first branch channel 22a and the second branch channel 22b may also be disposed in a series arrangement, or the first branch channel 22a and the second branch channel 22b may also be disposed in a series-parallel arrangement.

It should be noted that, in the embodiment, the first connecting channel 221c and the third connecting channel 222c are arranged in parallel to communicate with the first branch channel 22a, but not limited thereto, the first connecting channel 221c and the third connecting channel 222c may be arranged in series to communicate with the first branch channel 22a, or the first connecting channel 221c and the third connecting channel 222c may also be arranged in series and parallel to communicate with the first branch channel 22 a. Similarly, the second connecting channel 221d and the fourth connecting channel 222d are arranged in parallel to communicate with the second branch channel 22b, but not limited thereto, the second connecting channel 221d and the fourth connecting channel 222d may be arranged in series to communicate with the second branch channel 22b, or the second connecting channel 221d and the fourth connecting channel 222d may also be arranged in series and parallel to communicate with the second branch channel 22 b.

Referring to fig. 2, in this embodiment, the confluence chamber 23 is connected between the first branch channel 22a and the second branch channel 22b, so that the fluid can be accumulated in the confluence chamber 23 and stored, and can be transmitted to the diversion channel 22 for output when the fluid actuation system 2 controls the output, thereby increasing the total transmission amount of the fluid.

Referring to fig. 2, in the present embodiment, a valve 24a, 24b, 24c, 24d is disposed between each connecting channel and the fluid output area 25, and the controller 3 controls the on/off state thereof to control the fluid output to the fluid output area 25. The valves 24a, 24b, 24c, and 24d may be active valves or passive valves, in this embodiment, the valves 24a, 24b, 24c, and 24d are active valves and are respectively disposed in the first connecting channel 221c, the second connecting channel 221d, the third connecting channel 222c, and the fourth connecting channel 222d in sequence. When the valve 24a is opened, the first connecting channel 221c can be opened to output the fluid to the fluid output area 25; when the valve 24b is opened, the second connection channel 221d may be opened to output the fluid to the fluid output area 25; when the valve 24c is opened, the third connecting channel 222c may be opened to output the fluid to the fluid output area 25; and when the valve 24d is opened, the fourth connection passage 222d may be opened to output the fluid to the fluid output area 25.

Referring to fig. 7A and 7B, the valve 24a is disposed in the first connecting channel 221c, and the valves 24B, 24c, and 24d disposed in the other second connecting channel 221d, the third connecting channel 222c, and the fourth connecting channel 222d have the same structure and operation, and therefore are not described in detail. In the present embodiment, the valve 24a includes a channel base 241, a piezoelectric actuator 242, and a rod 243. The channel base 241 has a first through hole 241a, a second through hole 241b, a first outlet 241d and a second outlet 241 e. The first and second through holes 241a and 241b communicate with the first connection passage 221c and are spaced apart from each other. The channel base 241 is recessed with a cavity 241c, the cavity 241c is communicated with the first through hole 241a through the first outlet 241d, and the cavity 241c is communicated with the second through hole 241b through the second outlet 241 e. The piezoelectric actuator 242 includes a carrier 242a and a piezoelectric material 242b, the carrier 242a is made of flexible material and covers the cavity 241 c. The piezoelectric material 242b is attached to a surface of the carrier 242a and electrically connected to the controller 3. The connecting rod 243 is connected to the other surface of the carrier plate 242a, and penetrates into the second outlet 241e, and can freely move along a direction perpendicular to the carrier plate 242a, and one end of the connecting rod 243 has a blocking portion 243a with a cross-sectional area larger than the aperture of the second outlet 241e, so as to close the second outlet 241 e. In this embodiment, the blocking portion 243a may be a flat plate or a mushroom, but not limited thereto.

In one embodiment of the valve 24a, as shown in FIG. 7A, the rod 243 is in an initial position when the piezoelectric actuator 242 is de-energized for the valve 24 a. At this time, a flow space is formed between the blocking portion 243a and the second outlet 241e, so that the second through hole 241b, the chamber 241c and the first through hole 241a communicate with the first connecting channel 221c through the flow space, so that the fluid can pass through. On the contrary, as shown in fig. 7B, when the piezoelectric actuator 242 is activated, the piezoelectric material 242B drives the carrier plate 242a to bend and deform in a direction away from the channel base 241, the connecting rod 243 is linked by the carrier plate 242a and moves in a direction away from the channel base 241, so that the blocking portion 243a blocks the aperture of the second outlet 241 e. At this time, the blocking portion 243a blocks the second outlet 241e, so that the fluid cannot pass therethrough. By the above-mentioned operation, the valve 24a can maintain the open state of the first connection channel 221c in the disabled state, and close the first connection channel 221c in the enabled state; that is, the valve 24a controls a switching state of the second through hole 241b, thereby controlling the fluid output from the first connecting channel 221 c.

Referring to fig. 8A and 8B, in another embodiment of the valve 24a, as shown in fig. 8A, the rod 243 is at an initial position when the piezoelectric actuator 242 is not energized in the valve 24 a. At this time, the blocking portion 243a blocks the aperture of the second outlet 241e, so that the fluid cannot pass through. As shown in fig. 8B, when the piezoelectric actuator 242 is activated, the piezoelectric material 242B drives the carrier plate 242a to bend and deform in a direction approaching the channel base 241, and the connecting rod 243 is moved in a direction approaching the channel base 241 by the linkage of the carrier plate 242a, at this time, a flow space is formed between the blocking portion 243a and the second outlet 241e, so that the second through hole 241B, the chamber 241c and the first through hole 241a are communicated with the first connecting channel 221c through the flow space, and the fluid can pass through the flow space. By the above-mentioned operation, the valve 24a can maintain the closed state of the first connection channel 221c in the disabled state, and open the first connection channel 221c in the enabled state; that is, the valve 24a controls a switching state of the second through hole 241b, and further controls the fluid output from the first connection channel 221 c.

Referring to fig. 2, in the present embodiment, the controller 3 is configured to control the on/off states of the valves 24a, 24b, 24c, and 24d to provide the driving force required by the flying body 1 during flying, control the flying state of the flying body 1, and control the operation of the image capturing system 4. In the present embodiment, the controller 3 includes a power supply unit 31 and a processing unit 32. The power supply unit 31 is used for outputting electric energy to the driving operation of the diversion unit 2 and the image capturing system 4. In the embodiment, the power supply unit 31 may be an energy absorption electrode that converts light energy into electric energy for output, a graphene battery, or a rechargeable battery, but not limited thereto, and the type of the power supply unit 31 may be changed according to design requirements. The processing unit 32 is used for performing data operations and transmission operations. The data calculation includes, but is not limited to, the opening and closing states of the valves 24a, 24b, 24c, and 24d, the flight state of the flying subject 1, and the image processing of the image capturing system 4. The transmission operation includes, but is not limited to, the transmission of remote control signals of the flying subject 1 and the transmission of images by the image capturing system 4.

Referring to fig. 2, in this embodiment, the image capturing system 4 is used to capture an external image of the micro inspection device 10. In the present embodiment, the image captured by the image capturing system 4 can be a photo, a film, or any special image for scientific observation (e.g., infrared thermal image), but not limited thereto. In the present embodiment, the image capturing system 4 is a micro-camera, but not limited thereto, and the type of the image capturing system 4 may be changed according to the use requirement.

Referring to fig. 2, in the present embodiment, the electrical connection circuit unit 5 is electrically connected between the controller 3 and the valves 24a, 24b, 24c, 24 d. In this embodiment, the electrical connection circuit unit 5 has a first electrical connection circuit 5a and a second electrical connection circuit 5b, the first electrical connection circuit 5a is electrically connected to the valves 24a, 24d, and the second electrical connection circuit 5b is electrically connected to the valves 24b, 24 c. In this way, the valves 24a, 24b, 24c, and 24d can be driven by the controller 3 to control the communication states of the corresponding first connecting channel 221c, second connecting channel 221d, third connecting channel 222c, and fourth connecting channel 222d, so as to control the output of the fluid to the fluid output area 25.

In summary, the micro-detection device provided by the present invention, driven by the fluid actuating system, forms a fluid transmission operation with high transmission capacity, high efficiency and high flexibility in response to the requirements of various gas transmission flow rates, so as to provide a sufficient driving force required during flight, and has the advantages of miniaturization, portability, low noise, low pollution, convenient use, and the like, and can simultaneously perform external environment detection of the micro-detection device by using the image capturing system, thereby having great industrial applicability.

Various modifications may be made by those skilled in the art without departing from the scope of the invention as defined by the appended claims.

Claims (26)

1. A miniature detection device, comprising:

a flying body;

at least one fluid actuation system disposed within the flying body, comprising:

the driving module consists of a plurality of flow guide units, and each flow guide unit is controlled to be actuated so as to transmit fluid;

a flow guide channel with multiple branch channels, each branch channel connected to multiple connecting channels to divide the fluid to form the required transmission quantity;

a confluence chamber which is communicated between the two corresponding branch channels and is used for accumulating fluid;

each valve is correspondingly arranged in the corresponding connecting channel so as to control the on-off state of the connecting channel; and

a fluid output area which is connected with the plurality of connecting channels and is used for collecting fluid to output the required transmission quantity;

an image capturing system for capturing an external image of the micro-detection device; and

and the controller is used for controlling the on-off states of the valves to provide the driving force required by the flying main body during flying, controlling the flying state of the flying main body and controlling the operation of the image capturing system.

2. The micro inspection device of claim 1, wherein each flow guide unit comprises:

a flow inlet plate with at least one inlet;

a base, stacked on the flow inlet plate and having a channel for communicating with the inlet;

a resonator plate stacked on the base and having a hollow hole, a movable portion and a fixed portion, wherein the hollow hole is disposed at the center of the resonator plate and corresponds to the communication channel of the base, the movable portion is disposed at the periphery of the hollow hole and forms a flexible structure at the portion not in contact with the base, and the fixed portion is disposed at the portion in connection contact with the base;

a spacer stacked on the fixing portion of the resonator plate and having a buffer chamber at the center;

an actuator stacked on the spacer and having a suspension portion, an outer frame portion, a plurality of connecting portions, a plurality of gaps and a piezoelectric element, wherein the suspension portion is connected to the outer frame portion through the connecting portions so that the suspension portion can be elastically displaced, the gaps are disposed between the suspension portion and the outer frame portion for fluid circulation, and the piezoelectric element is attached to a surface of the suspension portion; and

a flow outlet plate, which is composed of a cavity plate stacked on the actuating body and provided with an outlet chamber at the center, and a cover plate covering the actuating body and having an outlet communicated with the outlet chamber;

the piezoelectric element of the actuating body is driven to drive the suspension part to generate reciprocating vibration between the outflow chamber and the buffer chamber, so that a pressure difference is formed between the outflow chamber and the buffer chamber, fluid enters the communication channel from the inflow port of the inflow plate, flows through the hollow hole of the resonance plate, enters the buffer chamber to be compressed, is guided into the outflow chamber through the gaps of the actuating body, and is finally guided out from the outflow port of the outflow plate.

3. The micro detecting device of claim 2, wherein the depth of the buffer chamber is determined by the thickness of the spacer.

4. The detecting device for detecting the rotation of a motor rotor as claimed in claim 1, wherein the length of the diverging passages is predetermined according to the required transmission amount.

5. The detecting device of claim 1, wherein the width of the diverging passage is predetermined according to the required throughput.

6. The micro detection device of claim 1, wherein each valve comprises:

a channel base having a first through hole, a second through hole, a first outlet and a second outlet, the first through hole and the second through hole being spaced from each other, the first through hole and the second through hole being communicated with the connecting channel, the channel base being concavely provided with a chamber, the chamber being communicated with the first through hole through the first outlet, the chamber being communicated with the second through hole through the second outlet;

the piezoelectric actuator comprises a carrier plate and a piezoelectric material, wherein the carrier plate is covered on the cavity, and the piezoelectric material is attached to one surface of the carrier plate and is electrically connected with the controller; and

a connecting rod connected to the other surface of the carrier plate and penetrating into the second outlet to freely displace along a direction perpendicular to the carrier plate, wherein one end of the connecting rod is provided with a blocking part with a sectional area larger than the aperture of the second outlet so as to seal the second outlet;

the piezoelectric actuator is actuated to drive the carrier plate to move, and then the blocking part of the connecting rod is linked to move, so that the opening and closing state of the second outlet is controlled.

7. The apparatus of claim 1, wherein the plurality of flow-guiding units are disposed in a series arrangement in the driving module.

8. The apparatus of claim 1, wherein the plurality of flow-guiding units are disposed in parallel arrangement with the driving module.

9. The apparatus of claim 1, wherein the plurality of flow-guiding units are disposed in a series-parallel arrangement on the driving module.

10. The micro detecting device of claim 1, wherein the plurality of flow guiding units are disposed in a ring shape on the driving module.

11. The micro sensor device as claimed in claim 1, wherein the plurality of flow guiding units are disposed in a honeycomb arrangement on the driving module.

12. The micro sensor device of claim 1, wherein the plurality of flow guide elements are fabricated by conventional machining processes.

13. The detecting device of claim 1, wherein the plurality of flow-guiding units are fabricated by micro-electro-mechanical process.

14. The micro inspection device of claim 1, wherein the plurality of flow guide elements are fabricated by a semiconductor process.

15. The micro inspection device of claim 1, wherein the plurality of flow cells are fabricated from a material of millimeter construction.

16. The micro detection device of claim 15, wherein each flow cell has a size ranging from 1 mm to 999 mm.

17. The micro inspection device of claim 1, wherein the plurality of flow guide cells are fabricated from micron-sized materials.

18. The micro detection device of claim 17, wherein each flow cell has a size in a range of 1 micron to 999 microns.

19. The micro inspection device of claim 1, wherein the plurality of flow guide cells are fabricated from nano-scale structured materials.

20. The micro detection device of claim 19, wherein each flow cell has a size in a range of 1 nm to 999 nm.

21. The apparatus of claim 1, wherein the image capturing system is a micro-camera.

22. The apparatus of claim 1, wherein the controller comprises a power supply unit for outputting power to the plurality of current guiding units and the image capturing system.

23. The detecting device of claim 22, wherein the power unit is an energy absorbing electrode that converts light energy into electrical energy for output.

24. The detecting device of claim 22, wherein the power unit is a graphene battery.

25. The detecting device of claim 22, wherein the power unit is a rechargeable battery.

26. The apparatus of claim 1, wherein the controller comprises a processing unit for performing data operations and transmission operations.

Images