TWM581559U - Micro detecting device - Google Patents

Abstract

The present invention provides a miniature detecting device comprising a flying body, at least one fluid actuating system, an image capturing system and a controller. The fluid actuation system comprises: a driving module, which is composed of a plurality of guiding units; a guiding channel having a plurality of divergent channels, each of the diverging channels connecting a plurality of connecting channels; and a confluent chamber connected to the corresponding two Between the divergent channels; a plurality of valves, each valve correspondingly disposed in the corresponding connecting channel; and a fluid output region connecting the connecting channels. The controller controls the switching state of the valve to provide the driving force required by the flying body during flight, to control the flight state of the flying body, and to control the operation of the image capturing system.

Description

Micro detection device

The present invention relates to a detecting device, and more particularly to a miniature detecting device capable of remotely flying.

At present, in various fields, such as medicine, computer technology, printing, energy and other industries, the products are developing in the direction of refinement and miniaturization. Among them, products such as micro-pumps, sprayers, inkjet heads, industrial printing devices, etc. Fluid delivery structures are a key technology.

In various industries, such as the pharmaceutical industry, the electronics industry, the printing industry, the energy industry, or even the general traditional industries, many instruments or equipment that require pneumatic power drive are usually used to achieve their gas by conventional motors and pneumatic valves. The purpose of transportation. However, limited by the volume limitations of conventional motors and gas valves, it is difficult for such instruments to reduce the size of their overall devices, that is, it is difficult to achieve the goal of thinning, and it is impossible to achieve portable purposes. In addition, in order to achieve the kinetic energy required by these conventional driving devices, it is usually required to have a large volume to accommodate various complex driving cores, and at the same time as it operates, it generates a large amount of noise or flying dust and the like. , resulting in inconvenience and discomfort in use.

The driving device of the conventional detecting device has the above-mentioned problem, that is, how to improve the shortcomings of the conventional detecting device by an innovative structure is the focus of current development.

The purpose of this case is to provide a micro-detection device capable of remote flight, which is driven by a fluid actuation system to meet the needs of various gas transmission flows, and constitutes a high-transmission, high-performance, high-flexibility fluid transmission operation, and is capable of providing flight. The driving force required at the time, and has the advantages of miniaturization, portable, low noise, low pollution, and convenient use.

In order to achieve the above object, one of the more broad aspects of the present invention provides a miniature detecting device comprising a flying body, at least one fluid actuating system, an image capturing system and a controller. The fluid actuation system is disposed in the flight body and includes a drive module, a flow guiding channel, a confluence chamber, a plurality of valves, and a fluid output region. The drive module is composed of a plurality of flow guiding units, each of which is controlled to be actuated to transfer fluid. The flow guiding channel has a plurality of divergent channels, and each of the diverging channels communicates with a plurality of connecting channels, thereby diverting the fluid to constitute a required amount of transmission. The confluence chamber is connected between the corresponding two divergent passages for the fluid to accumulate therein. Each valve is correspondingly disposed in the corresponding connecting channel, thereby controlling the switching state of the connecting channel. The fluid output zone communicates with the connecting passage for collecting fluid to output a desired amount of delivery. The image capture system is used to capture external images of the micro detection device. The controller controls the switching state of the valve to provide the driving force required by the flying body during flight, to control the flight state of the flying body, and to control the operation of the image capturing system.

Some exemplary embodiments embodying the features and advantages of the present invention are described in detail in the following description. It is to be understood that the present invention is capable of various modifications in various aspects, and is not to be construed as a limitation.

Referring to FIG. 1 and FIG. 2, the present invention provides a remotely detectable micro-detection device 10, which is a device for converting electrical energy into kinetic energy, which can be used to fly with specific fluid pressure and specific fluid flow generated by the kinetic energy. And performing a detection task by the loaded image capturing device. In the embodiment of the present invention, the micro detection device 10 includes: a flight body 1, at least one fluid actuation system 2, a controller 3, an image capture system 4, and an electrical connection line unit 5. In the embodiment of the present invention, the number of the at least one fluid actuation system 2 is three, but not limited thereto, and the number thereof may vary according to design requirements. Further, each fluid actuating system 2 has the same structure, and the following description will be described only with the structure of the single fluid actuating system 2 in order to avoid redundancy.

Referring to FIG. 2 and FIG. 3A , in the embodiment of the present invention, the fluid actuation system 2 is disposed in the flying body 1 and includes a driving module 21 , a guiding channel 22 , a confluence chamber 23 , and a plurality of valves 24a, 24b, 24c, 24d and a fluid output zone 25. In the embodiment of the present invention, the driving module 21 is composed of a plurality of guiding units 21a, and each of the guiding units 21a is a piezoelectric pump. In the embodiment of the present invention, each of the flow guiding units 21a is formed by sequentially stacking a flow plate 211, a base 212, a resonance plate 213, a spacer 214, a moving body 215, and an outflow plate 216.

Referring to FIG. 3A, in the embodiment of the present invention, the inlet plate 211 has at least one inlet port 211a. The susceptor 212 is stacked on the inlet plate 211 and has a connecting passage 212a, and the connecting passage 212a communicates with the inlet 211a of the inlet plate 211. The resonant plate 213 is stacked on the base 212 and has a hollow hole 213a, a movable portion 213b and a fixing portion 213c. The hollow hole 213a is disposed at a center position of the resonance plate 213, corresponds to the position of the connection passage 212a of the base 212, and communicates with the connection passage 212a of the base 212. The movable portion 213b is disposed at a periphery of the hollow hole 213a, and forms a flexible structure at a portion not in contact with the susceptor 212. The fixing portion 213c is provided at a portion in contact with the susceptor 212. The spacer 214 is stacked on the fixing portion 213c of the resonance plate 213, and a buffer chamber 214a is recessed at the center. The actuator body 215 is stacked on the spacer 214. Thus, the spacer 214 is disposed between the resonance plate 213 and the actuation body 215, and the depth of the buffer chamber 214a can be determined by the thickness g of one of the spacers 214.

Referring to FIG. 3B, in the embodiment of the present invention, the actuating body 215 is a hollow suspension structure having a floating portion 215a, an outer frame portion 215b, a plurality of connecting portions 215c, a plurality of gaps 215d, and a piezoelectric element 215e. . The suspension portion 215a is connected to the outer frame portion 215b through the connection portion 215c, so that the connection portion 215c supports the suspension portion 215a to elastically displace the suspension portion 215a. The gap 215d is interposed between the floating portion 215a and the outer frame portion 215b for fluid communication. The piezoelectric element 215e is attached to one surface of the floating portion 215a. The arrangement, implementation, and number of the suspension portion 215a, the outer frame portion 215b, the connection portion 215c, and the gap 215d are not limited thereto, and may vary depending on design requirements.

Referring to FIG. 3A and FIG. 3B, in the embodiment of the present invention, the outflow plate 216 is formed by a cavity plate 216a stacked by a cover plate 216b. The cavity plate 216a is stacked on top of the actuating body 215 and is provided with an outflow chamber 216c at the center. The cover plate 216b covers a portion of the suspension portion 215a of the actuating body 215, the connecting portion 215c, the gap 215d, the piezoelectric element 215e and the outer frame portion 215b, and has an outflow port 216d, an outflow port 216d and an outflow chamber. Chambers 216c are in communication.

In the embodiment of the present invention, the pedestal 212 of the flow guiding unit 21a includes a driving circuit (not shown) for electrically connecting the positive electrode (not shown) and the negative electrode (not shown) of the piezoelectric element 215e. A driving power source is provided to the piezoelectric element 215e, but is not limited thereto. In other embodiments, the driving circuit can also be disposed at any position inside the flow guiding unit 21a, which can be changed according to design requirements.

In the embodiment of the present invention, the flow guiding unit 21a can be manufactured through a conventional mechanical processing process, or can be produced through a micro-electromechanical process, or can be produced through a semiconductor process, and is not limited thereto, and can be processed through different processes according to product requirements. Out.

In the embodiment of the present invention, the flow guiding unit 21a can be made of a material of a millimeter-scale configuration, and each of the flow guiding units 21a has a size ranging from 1 mm to 999 mm; and the flow guiding unit 21a can also be made of a material of a micron-scale configuration. And each of the flow guiding units 21a has a size ranging from 1 micrometer to 999 micrometers; the flow guiding unit 21a may be made of a material of a nano-scale configuration, and each of the flow guiding units 21a has a size ranging from 1 nm to 999 nm. However, not limited thereto, the size of the flow guiding unit 21a can be changed according to product requirements.

Referring to FIG. 3C and FIG. 3D, in the embodiment of the present invention, the flow guiding unit 21a is operated by applying a voltage to the piezoelectric element 215e, that is, deforming, thereby driving the actuating body 215 in a vibration direction V. Reciprocating vibration. As shown in FIG. 3C, when the piezoelectric element 215e is deformed by voltage actuation, at this time, the floating portion 215a of the actuator 215 is displaced in the direction away from the susceptor 212 by the deformation of the piezoelectric element 215e. The movable portion 213b of the resonator plate 213 is displaced in a direction away from the base 212, so that the volume of the buffer chamber 214a of the spacer 214 is increased to generate a suction force, and the fluid is sucked in from the inlet port 211a of the inlet plate 211. Then, it passes through the connecting passage 212a of the base 212 and the hollow hole 213a of the resonant plate 213, and finally collects into the buffer chamber 214a for temporary storage. Next, as shown in FIG. 3D, when the piezoelectric element 215e is again subjected to voltage actuation to cause deformation, at this time, the floating portion 215a of the actuator 215 is affected by the deformation of the piezoelectric element 215e toward the susceptor 212. Displacement, the suspension portion 215a of the actuating body 215 thus compresses the volume of the buffer chamber 214a, causes the fluid temporarily stored in the buffer chamber 214a to gather to both sides, and flows into the outflow chamber 216c via the gap 215d to collect. Further, as shown in FIG. 3C, when the piezoelectric element 215e is again subjected to voltage actuation and then deformed, the floating portion 215a of the actuating body 215 is vibrated by the deformation of the piezoelectric element 215e toward the direction away from the susceptor 212. The displacement causes the fluid in the outflow chamber 216c to be discharged from the outlet port 216d of the outflow plate 216 to the outside of the flow guiding unit 21a to complete the fluid transfer. Thus, the operation as shown in FIG. 3C and FIG. 3D is continuously repeated, that is, the fluid is continuously guided and discharged from the inflow port 211a to the outflow port 216d, and the fluid is transported.

It should be noted that, in the embodiment of the present invention, the frequency of the reciprocating vibration of the resonant plate 213 can be the same as the vibration frequency of the actuating body 215, that is, the two can be displaced in the same direction at the same time, and can be changed according to the actual application situation. It is not limited to the mode of action shown in the embodiment of this case. In addition, the pressure gradient generated by the flow channel design of the flow guiding unit 21a of the embodiment of the present invention causes the fluid to flow at a high speed and transmits the fluid from the inflow port 211a to the outflow port 216d through the difference in impedance of the flow path in and out of the flow path, and In the state where the outflow port 216d is under pressure, there is still the ability to continuously push out the fluid, and the effect of mute can be achieved.

Referring to FIG. 4A to FIG. 6 , in the embodiment of the present invention, the flow guiding unit 21 a can adjust the total fluid volume and the transmission speed of the fluid output by the driving module 21 according to a specific arrangement. As shown in FIG. 4A and FIG. 4B, in the first arrangement, the flow guiding units 21a are arranged in series to increase the total amount of fluid output by the driving module 21. As shown in FIG. 4C, in the second arrangement, the flow guiding units 21a are arranged in parallel to increase the transmission speed of the output fluid of the outlet 216d. As shown in FIG. 4D, the flow guiding unit 21a is arranged in series-parallel manner, thereby simultaneously increasing the total fluid output amount of the driving module 21 and the output speed of the output fluid of the outlet port 216d. As shown in FIG. 5, the flow guiding unit 21a is disposed in an annular manner, and can also increase the total amount of fluid outputted by the driving module 21. As shown in FIG. 6, the flow guiding unit 21a is disposed in a honeycomb manner, and can also increase the total amount of fluid outputted by the driving module 21.

It should be noted that in the embodiment of the present invention, the flow guiding unit 21a can cooperate with the connection of the driving circuit to simultaneously transmit the fluid in response to the large flow demand of the total fluid transmission. In addition, each of the flow guiding units 21a can also be individually controlled to operate or stop. For example, one of the flow guiding units 21a is activated, the other guiding unit 21a is stopped, or it can be alternately operated, but not limited thereto. The need for fluid transfer and a significant reduction in power consumption.

Returning to Fig. 2, Fig. 3A and Fig. 4A, the flow guiding passage 22 communicates with the outflow port 216d of the flow guiding unit 21a, thereby receiving the fluid discharged from the flow guiding unit 21a. The flow guiding channel 22 includes a plurality of divergent channels, each of which is connected to a plurality of connecting channels, and finally is outputted by the connecting channels to the fluid outputting zone 25, thereby constituting the total amount of fluid required. In the embodiment of the present invention, the divergent channel is only described by a first divergent channel 22a and a second divergent channel 22b, not limited thereto; the connecting channel only has a first group of connecting channels 22c and a second group of connecting channels. 22d for illustration, not limited to this. The first connecting channel 22c is connected to a first connecting channel 221c and a third connecting channel 222c, and the second group connecting channel 22d is connected to a second connecting channel 221d and a fourth connecting channel 222d. It should be noted that the length and width of the divergent channels can be preset according to the specific required transmission amount, that is, the length and width of the first divergent channel 22a and the second divergent channel 22b can affect the flow rate of the transmission volume and The amount of transmission, you can pre-calculate the length and width of the demand according to the specific demand transmission.

It should be noted that, in the embodiment of the present invention, although the first branch channel 22a and the second branch channel 22b are arranged in parallel, but not limited thereto, the first branch channel 22a and the second branch channel 22b may also be used. The first divergent channel 22a and the second divergent channel 22b may also be arranged in a series-parallel arrangement.

It should be noted that, in the embodiment of the present invention, the first connecting channel 221c and the third connecting channel 222c are connected in parallel to communicate with the first branch channel 22a, but not limited thereto, the first connecting channel 221c and the third The connecting channel 222c may be connected in series with the first branch channel 22a, or the first connecting channel 221c and the third connecting channel 222c may be connected in series and parallel to communicate with the first branch channel 22a. Similarly, the second connecting channel 221d and the fourth connecting channel 222d are connected in parallel to the second branching channel 22b, but not limited thereto, the second connecting channel 221d and the fourth connecting channel 222d may be arranged in series. The second branch channel 22b and the fourth connection channel 222d may be connected in series and parallel to communicate with the second branch channel 22b.

Referring to FIG. 2, in the embodiment of the present invention, the confluence chamber 23 is connected between the first divergent passage 22a and the second divergent passage 22b, so that the fluid is accumulated and stored in the confluence chamber 23, and is controlled by the fluid actuation system 2. When outputting, it can be transmitted to the output of the flow guiding channel 22 to increase the total fluid volume.

Referring to FIG. 2, in the embodiment of the present invention, valves 24a, 24b, 24c, 24d are disposed between each connecting passage and the fluid output region 25, and the switch state is controlled by the controller 3 to control fluid output to the fluid. Output area 25. The valve 24a, 24b, 24c, and 24d may be an active valve or a passive valve. In the embodiment of the present invention, the valves 24a, 24b, 24c, and 24d are active valves, and are respectively disposed in the first connecting passage 221c and the second connecting passage, respectively. 221d, the third connecting channel 222c and the fourth connecting channel 222d. When the valve 24a is opened, the first connecting passage 221c can be opened to output the fluid to the fluid output region 25; when the valve 24b is opened, the second connecting passage 221d can be opened to output the fluid to the fluid output region 25; when the valve 24c is opened, the third connection can be opened. The passage 222c outputs fluid to the fluid output region 25; and when the valve 24d is opened, the fourth connecting passage 222d can be opened to output fluid to the fluid output region 25.

Please refer to FIG. 7A and FIG. 7B. Hereinafter, the valve 24a is disposed in the first connecting passage 221c, and the other second connecting passage 221d, the third connecting passage 222c, and the fourth connecting passage 222d are provided with valves 24b, 24c, The structure and action of 24d are the same, so I won't go into details. In the embodiment of the present invention, the valve 24a includes a channel base 241, a piezoelectric actuator 242, and a link 243. The channel base 241 has a first through hole 241a, a second through hole 241b, a first outlet 241d and a second outlet 241e. The first through hole 241a and the second through hole 241b communicate with each other in the first connecting passage 221c and are spaced apart from each other. The channel base 241 is recessed with a chamber 241c, the chamber 241c communicates with the first through hole 241a through the first outlet 241d, and the chamber 241c communicates with the second through hole 241b through the second outlet 241e. The piezoelectric actuator 242 includes a carrier 242a and a piezoelectric material 242b. The carrier 242a is made of a flexible material and is sealed on the chamber 241c. The piezoelectric material 242b is attached to one surface of the carrier 242a and electrically connected to the controller 3. The connecting rod 243 is connected to the other surface of the carrier 242a and penetrates into the second outlet 241e, and is freely displaceable in a direction perpendicular to the carrier 242a, and one end of the connecting rod 243 has a cross-sectional area larger than the second outlet 241e. One of the apertures is a blocking portion 243a for closing the second outlet 241e. In the embodiment of the present invention, the blocking portion 243a may be in the form of a flat plate or a dome, but is not limited thereto.

As shown in Fig. 7A, in one embodiment of the valve 24a, the valve 24a is in an initial position in a state where the piezoelectric actuator 242 is not enabled. At this time, a flow space is formed between the blocking portion 243a and the second outlet 241e, so that the second through hole 241b, the chamber 241c, and the first through hole 241a are communicated with the first connecting passage 221c through the flow space, so that The fluid passes. On the other hand, as shown in FIG. 7B, when the piezoelectric actuator 242 is enabled, the piezoelectric material 242b drives the carrier 242a to be bent and deformed away from the channel base 241, and the link 243 is coupled to the carrier 242a. Moving away from the channel base 241, the blocking portion 243a blocks the aperture of the second outlet 241e. At this time, the blocking portion 243a closes the second outlet 241e, so that the fluid cannot pass. By the above-mentioned actuation mode, the valve 24a can maintain the open state of the first connecting passage 221c in the unenergized state, and close the first connecting passage 221c in the enabled state; that is, the second through hole is controlled by the valve 24a. One of the switching states of 241b can in turn control the flow of fluid from the first connecting passage 221c.

Referring to FIGS. 8A and 8B, another embodiment of the valve 24a, as shown in FIG. 8A, the valve 24a is in an initial position in a state where the piezoelectric actuator 242 is not enabled. At this time, the blocking portion 243a blocks the aperture of the second outlet 241e, so that the fluid cannot pass. As shown in FIG. 8B, when the piezoelectric actuator 242 is enabled, the piezoelectric material 242b drives the carrier plate 242a to be bent and deformed in a direction close to the channel base 241, and the link 243 is interlocked by the carrier plate 242a toward the channel base. The direction of the seat 241 is moved. At this time, a flow space is formed between the blocking portion 243a and the second outlet 241e, so that the second through hole 241b, the chamber 241c and the first through hole 241a are connected to the first space through the flow space. Channels 221c are in communication to allow fluid to pass. By the above-mentioned actuation mode, the valve 24a can maintain the closed state of the first connecting passage 221c in the unenergized state, and in the enabled state, the first connecting passage 221c is opened; that is, the second pass is controlled by the valve 24a. One of the holes 241b is in a switching state, and the fluid can be controlled to be output from the first connecting passage 221c.

Referring to FIG. 2, in the embodiment of the present invention, the controller 3 is used to control the switching states of the valves 24a, 24b, 24c, and 24d to provide the driving force required by the flying body 1 during flight, and to control the flight of the flying body 1. Status, and control of the operation of image capture system 4. In the embodiment of the present invention, the controller 3 includes a power supply unit 31 and a processing unit 32. The power supply unit 31 is configured to output power to the flow guiding unit 2 and the driving operation of the image capturing system 4. In the embodiment of the present invention, the power supply unit 31 may be an energy absorbing electric board, and convert the light energy into an electric energy output, or may be a graphene battery, or may be a rechargeable battery, but not limited thereto, the power supply unit The type of 31 can be changed according to the design requirements. The processing unit 32 is configured to perform data operations and transmission operations. The data calculation includes the switching state of the valves 24a, 24b, 24c, and 24d, the flight state of the flying body 1, and the image processing of the image capturing system 4, but is not limited thereto. The transmission operation includes the remote control signal transmission of the flight main body 1 and the image transmission of the image capture system 4, but is not limited thereto.

Referring to FIG. 2 , in the embodiment of the present invention, the image capturing system 4 is configured to capture an external image of the micro detecting device 10 . In the embodiment of the present invention, the image captured by the image capturing system 4 may be a photo, a film, or any special image for scientific observation (such as an infrared thermal image), but is not limited thereto. In the embodiment of the present invention, the image capturing system 4 is a miniature camera, but not limited thereto, the image capturing system 4 can be changed according to the needs of use.

Referring to FIG. 2, in the embodiment of the present invention, the electrical connection line unit 5 is electrically connected between the controller 3 and the valves 24a, 24b, 24c, and 24d. In the embodiment of the present invention, the electrical connection line unit 5 has a first electrical connection line 5a and a second electrical connection line 5b. The first electrical connection line 5a is electrically connected to the valves 24a, 24d, and the second electric The sexual connection line 5b is electrically connected to the valves 24b, 24c. In this way, the valves 24a, 24b, 24c, and 24d can be driven by the controller 3 to control the connected state of the corresponding first connecting passage 221c, second connecting passage 221d, third connecting passage 222c, and fourth connecting passage 222d. In turn, the fluid output is controlled to the fluid output zone 25.

In summary, the micro-detection device provided in the present case is driven by the fluid actuation system to meet the requirements of various gas transmission flows, and constitutes a high-transmission, high-performance, high-flexibility fluid transmission operation, and provides flight time. The need for sufficient driving force, miniaturization, portable, low noise, low pollution and ease of use, and the use of image capture system for external environment detection of micro-detection devices, highly industrial use .

This case has been modified by people who are familiar with the technology, but it is not intended to be protected by the scope of the patent application.

1‧‧‧Flying subject  10‧‧‧Micro-detection device  2‧‧‧Fluid actuation system  21‧‧‧Drive Module  21a‧‧‧Guide unit  211‧‧‧Intake plate  211a‧‧‧ Inlet  212‧‧‧Base  212a‧‧‧Connected  213‧‧‧Resonance board  213a‧‧‧ hollow holes  213b‧‧‧movable department  213c‧‧‧Fixed Department  214‧‧‧ spacers  214a‧‧‧buffer chamber  215‧‧‧Acoustic body  215a‧‧‧Floating Department  215b‧‧‧Outer frame  215c‧‧‧Connecting Department  215d‧‧‧ gap  215e‧‧‧Piezoelectric components  216‧‧‧ outflow board  216a‧‧‧ cavity plate  216b‧‧‧ cover  216c‧‧‧ outflow chamber  216d‧‧‧ outflow  22‧‧‧ Diversion channel  22a‧‧‧First divergent passage  22b‧‧‧Second divergence channel  22c‧‧‧The first set of connecting channels  221c‧‧‧ first connection channel  222c‧‧‧ third connection channel  22d‧‧‧Second group connection channel  221d‧‧‧second connection channel  222d‧‧‧fourth connection channel  23‧‧‧Confluence chamber  24a, 24b, 24c, 24d‧‧‧ valves  241‧‧‧Channel base  241a‧‧‧first through hole  241b‧‧‧second through hole  241c‧‧‧室  241d‧‧‧ first exit  241e‧‧‧second exit  242‧‧‧ Piezoelectric Actuator  242a‧‧‧ Carrier Board  242b‧‧‧Piezoelectric materials  243‧‧‧ Connecting rod  243a‧‧‧ Blocking  25‧‧‧Fluid output area  3‧‧‧ Controller  31‧‧‧Power supply unit  32‧‧‧Processing unit  4‧‧‧Image capture system  5‧‧‧Electrical connection line unit  5a‧‧‧First electrical connection line  5b‧‧‧Second electrical connection line  G‧‧‧thickness  V‧‧‧Vibration direction  

Figure 1 is a schematic perspective view of the micro-detection device of the present invention.  Figure 2 is a schematic diagram of the system of the fluid actuation system of the micro-detection device of the present invention.  Figure 3A is a schematic cross-sectional view of the flow guiding unit of the fluid actuation system of the present invention.  FIG. 3B is a schematic view showing the three-dimensional structure of the actuating body of the flow guiding unit of the present invention.  3C and 3D are schematic diagrams of the operation of the flow guiding unit of the present invention.  Fig. 4A is a structural schematic view showing a layout of a driving module of the fluid actuating system of the present invention.  Figure 4B is a schematic view showing the structure of a plurality of flow guiding units arranged in series in the present case.  Figure 4C is a schematic view showing the structure of a plurality of flow guiding units arranged in parallel in the present case.  The 4D figure is a structural schematic diagram of a plurality of flow guiding units arranged in series and parallel mode.  Fig. 5 is a structural schematic view showing another arrangement of the driving module of the fluid actuating system of the present invention.  Fig. 6 is a structural schematic view showing a further arrangement of the driving module of the fluid actuating system of the present invention.  Fig. 7A and Fig. 7B are schematic diagrams showing the operation of one of the valves of the fluid actuating system of the present invention.  8A and 8B are schematic views showing another embodiment of the valve of the fluid actuation system of the present invention.  

Claims (26)

A miniature detecting device comprising:  a flying subject;  At least one fluid actuation system disposed within the flight body, comprising:  a driving module is composed of a plurality of guiding units, each of which is controlled to be actuated to transmit a fluid;  a flow guiding channel having a plurality of divergent channels, each of the diverging channels connecting a plurality of connecting channels, thereby diverting the fluid to form a required amount of transmission;  a confluence chamber connected between the corresponding two divergent passages for accumulating fluid therein;  a plurality of valves, each valve correspondingly disposed in a corresponding connecting channel, thereby controlling a switching state of the connecting channel;  a fluid output zone connecting the connection channels for collecting fluid to output a required amount of transmission;  An image capture system for capturing an external image of the micro detection device;  A controller controls the switching states of the valves to provide the driving force required by the flying body during flight, control the flight state of the flying body, and control the operation of the image capturing system.   The micro-detection device of claim 1, wherein each flow guiding unit comprises:  a flow plate having at least one inlet;  a pedestal, the stacking structure is on the inflow plate, and has a connecting passage for communicating with the inflow port;  a resonant plate, the stacking structure is disposed on the base, and has a hollow hole, a movable portion and a fixing portion, wherein the hollow hole is disposed at a center of the resonant plate, corresponding to the position of the connecting channel of the base The movable portion is disposed at a periphery of the hollow hole, and forms a flexible structure at a portion not in contact with the base, and the fixed portion is disposed at a portion in contact with the base;  a spacer body, the stacking structure is in the fixing portion of the resonance plate, and a buffer chamber is recessed at the center;  a stacking body having a floating portion, an outer frame portion, a plurality of connecting portions, a plurality of gaps, and a piezoelectric element, wherein the floating portion is connected to the outer frame portion through the connecting portions Causing elastic displacement of the floating portion between the floating portion and the outer frame portion for fluid circulation, and the piezoelectric element is attached to a surface of the floating portion;  a venting plate, the cavity plate is composed of a cover stacking structure, the cavity plate stack is arranged on the actuating body, and an outflow chamber is arranged in the center, and the cover plate covers the actuation a body having an outflow port for communicating with the outflow chamber;  The piezoelectric element of the actuating body is driven to interlock with the floating portion to generate reciprocating vibration between the outflow chamber and the buffer chamber, so that the outflow chamber forms a pressure with the buffer chamber. Poorly, allowing fluid to enter the connecting passage from the inlet port of the inflow plate, and then flowing through the hollow hole of the resonance plate to be compressed into the buffer chamber, and introduced into the gap by the activator The outlet chamber is finally led out from the outlet of the outlet plate.   The micro-detection device of claim 2, wherein the depth of the buffer chamber is determined by the thickness of the spacer. The micro-detection device of claim 1, wherein the length of the divergent channel is preset according to a required amount of transmission. The micro-detection device of claim 1, wherein the width of the divergent channel is preset according to a required amount of transmission. The micro-detection device of claim 1, wherein each valve comprises:  a first through hole, a second through hole, a first outlet and a second outlet, the first through hole and the second through hole are spaced apart from each other, the first through hole and the first through hole a second through hole communicating with the connecting passage, the passage base recessing a chamber, the chamber communicating with the first through hole through the first outlet, the chamber passing through the second outlet and the second Through holes are connected;  A piezoelectric actuator comprising a carrier plate and a piezoelectric material, the carrier plate is capped on the chamber, and the piezoelectric material is attached to a surface of the carrier plate and electrically connected to the control And;  a connecting rod is connected to the other surface of the carrier plate and penetrates into the second outlet, is freely displaced along a direction perpendicular to the carrier plate, and one end of the connecting rod has a cross-sectional area larger than the second a barrier portion of the outlet aperture for closing the second outlet;  Wherein, the piezoelectric actuator is actuated to drive the displacement of the carrier, and the displacement of the blocking portion of the connecting rod is interlocked, thereby controlling the opening and closing state of the second outlet.   The micro-detection device of claim 1, wherein the flow guiding units are arranged in series in the driving module. The micro-detection device of claim 1, wherein the flow guiding units are arranged in parallel to arrange the driving module. The micro-detection device of claim 1, wherein the flow guiding units are arranged in series and in parallel in the driving module. The micro-detection device of claim 1, wherein the flow guiding units are arranged in an annular arrangement on the driving module. The micro-detection device of claim 1, wherein the flow guiding units are arranged in a honeycomb arrangement on the driving module. The micro-detection device of claim 1, wherein the flow guiding units are manufactured by a conventional mechanical processing process. The micro-detection device of claim 1, wherein the flow guiding units are manufactured by a micro-electromechanical process. The micro-detection device of claim 1, wherein the flow guiding units are manufactured through a semiconductor process. The micro-detection device of claim 1, wherein the flow guiding units are made of a material of a millimeter-scale configuration. The micro-detection device of claim 15, wherein each of the flow guiding units has a size ranging from 1 mm to 999 mm. The micro-detection device of claim 1, wherein the flow guiding units are made of a micron-sized material. The micro-detection device of claim 17, wherein each of the flow guiding units has a size ranging from 1 micrometer to 999 micrometers. The micro-detection device of claim 1, wherein the flow guiding units are made of a material of a nano-scale construction. The micro-detection device of claim 19, wherein each of the flow guiding units has a size ranging from 1 nm to 999 nm. The micro-detection device of claim 1, wherein the image capture system is a miniature camera. The micro-detection device of claim 1, wherein the controller comprises a power supply unit for outputting power to the flow guiding unit and the driving operation of the image capturing system. The micro-detection device of claim 22, wherein the power supply unit is an energy absorbing electric board, and the energy absorbing electric board converts light energy into electric energy output. The micro-detection device of claim 22, wherein the power supply unit is a graphene battery. The micro-detection device of claim 22, wherein the power supply unit is a rechargeable battery. The micro-detection device of claim 1, wherein the controller comprises a processing unit for performing data calculation and transmission operations.