JP2019063981A - Fluid system - Google Patents

Abstract

To provide a fluid system that can have minimized volumes and can transport fluid at specific flow velocity and pressure and with a specific transport quantity.SOLUTION: The fluid system comprises a fluid operation region 10, a fluid flow path 20, a confluent chamber 30 and a plurality of valve members 50a, 50b, 50c and 50d. The fluid operation region 10 is constituted of at least one fluid guiding unit 10a, and the fluid guiding unit 10a is controlled so as to operate so that fluid to be transported is discharged through at lest one outlet hole. The fluid flow path 20, communicated with an outlet hole of the fluid guiding unit 10a in the fluid operation region 10, has a plurality of branched passages 20a, 20b, 21a, 21b, 22a and 22b and separates fluid transported from the fluid operation region 10 to make a required transportation quantity. The plurality of valve members, provided in the plurality of branched passages, control opening/closing states of the valve members so as to control transportation of the fluid from the branched passages.SELECTED DRAWING: Figure 1

Description

  The present invention relates to fluid systems, and more particularly to integrated and fabricated microfluidic control systems.

Prior art

  In recent years, products have been miniaturized in various fields such as medicine, computer technology, printing, energy industry and the like. Among them, the fluid transport structure contained in products such as micro pump, sprayer, inkjet head, industrial printing equipment is the most important structure, and how to obtain innovative structure, technology It is considered to be an important issue whether to

  With the rapid development of technology, the applications of fluid transport devices are increasingly diversified, such as industrial applications, biomedical applications, medicine, electronic heat dissipation, and are also used as wearable devices. Conventional fluid transport devices have gradually shown a trend of device miniaturization and maximization of flow velocity.

  However, although the current miniaturized fluid transport devices can transport gas continuously, there is a need to transport more gas in a chamber or flow path that is miniaturized and has a limited space, Its design is difficult. Thus, with a design having a valve member, not only can the airflow be controlled to be continuous or interrupted, but it can also control the flow in one direction, and the gas can be stored in a limited volume of chamber or flow path, It is required that the transport of the amount of gas can finally be improved. The present invention has been made in view of such circumstances.

  In order to solve the problem that the prior art can not meet the demand for miniaturization of fluid systems, the present invention provides fluid systems that are integrated and made. The fluid system includes a fluid operation area, a fluid flow path, a merging chamber, and a plurality of valve members. The valve member may be an active valve member or a passive valve member. The fluid operation area is composed of one or more fluid guiding units, each fluid guiding unit having an outlet hole. The fluid flow channel is in communication with the outlet holes of all the fluid guiding units in the fluid operation area, and has a plurality of branch passages to divert the fluid operation area and transport the fluid. The merging chamber is in fluid communication with the fluid flow path for fluid to accumulate within the merging chamber. A plurality of valve members are respectively provided in the plurality of branch passages, and fluid is exported from the branch passages by controlling the open / close state of the valve members.

  In one embodiment of the present invention, the plurality of valve members are active valve members. The fluid system may further include a control unit, which is electrically connected to the plurality of valve members, and can control the open / close state of the valve members. Further, the control unit and the fluid guiding unit are packaged in an integrated structure. The fluid operation area comprises a plurality of fluid induction units, and the plurality of fluid induction units are provided in a parallel-series arrangement to transport the fluid. The lengths and widths of the plurality of branch passages are pre-designed according to the needs of a specific fluid transport volume or flow rate, and the plurality of branch passages are provided in a series-parallel arrangement.

  The above design allows the fluid system of the present invention to have a miniaturized volume and to export the fluid at a specific flow rate, pressure and transport volume.

FIG. 1 is a structural conceptual view of a fluid system in one preferred embodiment of the present invention. FIG. 2A is a structural conceptual view of a fluid guiding unit in one preferred embodiment of the present invention. 2B to 2D show the state in which the fluid guiding unit shown in FIG. 2A is in operation. FIG. 3A is a structural conceptual view of a fluid operation area in one preferred embodiment of the present invention. FIG. 3B is a structural conceptual view of an arrangement in which the fluid induction units of the present invention are connected in series. FIG. 3C is a structural conceptual view of an arrangement in which the fluid induction units of the present invention are connected in parallel. FIG. 3D is a structural conceptual view of an arrangement in which the fluid induction units of the present invention are connected in series and in parallel. FIG. 4 is a structural conceptual view of a fluid operation area in another preferred embodiment of the present invention. FIG. 5 is a structural conceptual view of a fluid operation area in another preferred embodiment of the present invention. 6A and 6B are diagrams showing an operating state in the first embodiment of the valve member according to the present invention. FIGS. 7A and 7B are diagrams showing the operating state in the second embodiment of the valve member according to the present invention.

  Several exemplary embodiments which make the features and advantages of the present invention more concrete are described in detail in the following description. It is to be understood that the present invention is capable of various modifications in various aspects, and is not to be construed as limiting.

  See Figures 1-2D, 6A-7B. The present invention provides a fluid system 100 including at least one fluid operating area 10, at least one fluid guiding unit 10a, at least one outlet hole 160, at least one fluid flow path 20, and a plurality of branch paths 20a, 20b, 21a. , 21b, 22a, 22b, at least one merging chamber 30, at least one sensing element 40, a plurality of valve members 50, 50a, 50b, 50c, 50d, at least one passage base 51, at least one first through hole 511, at least one second through hole 512, at least one chamber 513, at least one first outlet 514, at least one second outlet 515, at least one piezoelectric actuator 52, at least one carrier 521, at least one piezoelectric Ceramics 522, less Comprising one 53, the blocking member 531 also. In the following embodiments, the fluid operation area 10, the fluid flow path 20, the merging chamber 30, the sensing element 40, the passage base 51, the first through hole 511, the second through hole 512, the chamber 513, the first outlet 514, the first Although the number of the two outlets 515, the piezoelectric actuator 52, the carrier 521, the piezoelectric ceramic 522, the connecting rod 53, and the blocking member 531 is described as an example, the present invention is not limited thereto. The fluid flow path 20, the merging chamber 30, the sensing element 40, the passage base 51, the piezoelectric actuator 52, and the connecting rod 53 may be combined.

  See FIG. FIG. 1 is a structural conceptual view of a fluid system in one preferred embodiment of the present invention. The fluid system 100 of the present invention includes a fluid operation area 10, a fluid flow path 20, a merging chamber 30, a sensing element 40, a plurality of valve members 50a, 50b, 50c, 50d, and a control unit 60. In a preferred embodiment of the present invention, all of the above described configurations are packaged in a substrate 11 to form an integrated microstructure, ie, all configurations are integrated and fabricated. Among them, the fluid operation area 10 is composed of one or more fluid induction units 10a, and these fluid induction units 10a are arranged in series, in parallel, or in series / parallel connection, and each fluid induction unit is After actuation, a pressure difference is generated inside each of them, so that the fluid which is a gas is sucked and pressurized and discharged through the provided outlet hole 160 (shown in FIG. 3C). This allows fluid transport to be achieved.

  In the present embodiment, the fluid operation area 10 includes four fluid induction units 10a, and the fluid induction units 10a are arranged in parallel and in series. The fluid flow channels 20 communicate with the outlet holes 160 (shown in FIG. 3C) of all the fluid guiding units 10a in the fluid operation area 10 and receive the fluid discharged from these fluid guiding units 10a. The structure, operation method and installation method of the fluid guiding unit 10a and the fluid flow passage 20 will be described later. The fluid flow passage 20 further includes a plurality of branch passages 20a and 20b, and the fluid discharged from the fluid operation area 10 is diverted to form a required transport amount. Although the embodiment is described using branch passages 20a and 20b, it is not limited thereto. The merging chamber 30 communicates with the branch passages 20a and 20b to communicate with the fluid flow passage 20 so that transport fluid may be accumulated inside the merging chamber 30 and the fluid flow may be controlled when the fluid system 100 needs to be controlled and exported. It can be supplied to the export of the passage 20 to increase the amount of fluid transport. Furthermore, a sensing element 40 is provided in the fluid flow channel 20 and used to sense and measure the fluid in the fluid flow channel 20.

  Regarding the method in which the branch passages 20a and 20b are in communication with the fluid flow passage 20, the figure shows that the branch passages 20a and 20b and the fluid flow passage 20 are arranged in parallel connection. Is not limited. A plurality of branch passages 20a and 20b may be connected in series, or a plurality of branch passages 20a and 20b may be connected in series and in parallel. Among them, the length and the width of the plurality of branch passages 20a, 20b can all be designed in advance according to the required specific transport volume, ie with regard to the length and the width of the branch passages 20a, 20b. The design affects the flow rate of the transport volume and some of the transport volume and is obtained by precalculating the length and width according to the specific transport volume required.

  In the present embodiment, as shown in the figure, the branch passage 20a includes two branch passages 21a and 22a that branch and communicate. Similarly, the branch passage 20b is also provided with two branch passages 21b and 22b that branch and communicate. In the figure, the branch passages 21a and 22a are disposed in series with the branch passages 20a and 20b which are branched and communicated, but the invention is not limited thereto. Furthermore, a plurality of branch passages 21a and 22a may be connected in parallel, or a plurality of branch passages 21a and 22a may be connected in series and in parallel. The plurality of valve members 50a, 50c, 50b and 50d are active valve members or passive valve members. In this embodiment, it is an active valve member, and is sequentially disposed in the branch passages 21a, 22a, 21b, and 22b, respectively. The valve members 50a, 50c, 50b and 50d can control the communication state of the provided branch passages 21a, 22a, 21b and 22b. For example, when the valve member 50a is opened, the branch passage 21a is opened to export the fluid to the export area A. When the valve member 50b is opened, the branch passage 21b is opened to export the fluid to the export area A. When the valve member 50c is opened, the branch passage 22a is opened to export the fluid to the export area A. When the valve member 50d is opened, the branch passage 22b is opened to export the fluid to the export area A. The control unit 60 has two electrical connection lines 610 and 620, and the electrical connection line 610 is electrically connected to control the open / close state of the valve members 50a and 50d, and is electrically connected. A wire 620 is electrically connected to control the open / close state of the valve members 50b, 50c. As a result, the valve members 50a, 50b, 50c and 50d are driven by the control unit 60 to control the communication state of the branch passages 21a, 22a, 21b, 22b provided correspondingly, and as a result, the fluid is exported It is possible to control exporting to area A.

  See Figure 2A. FIG. 2A is a structural conceptual view of a fluid guiding unit in one preferred embodiment of the present invention. In one preferred embodiment of the present invention, the fluid induction unit 10a may be a piezoelectric pump. As shown in the figure, each fluid guiding unit 10a is sequentially accumulated in the configuration of an inlet plate 17, a base 11, a resonance plate 13, an operation plate 14, a piezoelectric element 15, an outlet plate 16, and the like. Among them, the inlet plate 17 has at least one inlet hole 170, the resonant plate 13 has the hollow hole 130 and the movable member 131, and the movable member 131 has the resonant plate 13 fixed to the substrate 11. The hollow structure 130 is a flexible structure formed by a portion that is not formed, and a hollow hole 130 is provided in the vicinity of the position of the central portion of the movable member 131. A first chamber 12 is formed between the resonant plate 13 and the inlet plate 17. The actuating plate 14 has a hollow floating structure and has a levitation member 141, an outer frame member 142 and a plurality of air gaps 143. The levitation member 141 of the actuating plate 14 causes the levitation member 141 to float in the outer frame member 142 by a plurality of connecting members (not shown) being connected to the outer frame member 142 so that gas can flow. A plurality of air gaps 143 are formed between the levitation member 141 and the outer frame member 142. The installation method, embodiment and quantity of the levitation member 141, the outer frame member 142 and the air gap 143 are not limited thereto, and may be changed according to the actual situation. Preferably, the working plate 14 is formed of a thin film of metal material or a thin film of polysilicon, but is not limited thereto. There is a gap g0 between the operation plate 14 and the resonance plate 13 to form a second chamber 18. An outlet hole 160 is provided in the outlet plate 16 and a third chamber 19 is formed between the actuating plate 14 and the outlet plate 16.

  In a preferred embodiment of the present invention, the base 11 of the fluid guiding unit 10a further includes a drive circuit (not shown), and is used to be electrically connected to the positive electrode and the negative electrode of the piezoelectric element 15. Although this can provide a drive power supply to the piezoelectric element 15, it is not limited thereto. The drive circuit can be disposed at any position inside the fluid induction unit 10a and can be changed according to the actual situation.

  See Figures 2A-2C. 2B to 2D are diagrams showing the state in which the fluid guiding unit 10a shown in FIG. 2A is in operation. What is shown in FIG. 2A is a state in which the fluid guiding unit 10a is not in operation (that is, an initial state). When a voltage is applied to the piezoelectric element 15, deformation occurs, and the actuating plate 14 is driven to oscillate back and forth along the vertical direction. As shown in FIG. 2B, when the levitation member 141 of the actuating plate 14 vibrates upward, the volume of the second chamber 18 is increased, the pressure is reduced, and the fluid responds to the external pressure from the inlet hole 170 on the inlet plate 17. Flows into the first chamber 12, flows upward from a central hole 130 provided in the resonance plate 13 corresponding to the first chamber 12, and flows into the second chamber 18.

  Then, as shown in FIG. 2C, due to the vibration of the levitation member 141 of the operation plate 14, the resonance plate 13 resonates and the movable member 131 also vibrates upward. At this time, the levitation member 141 of the actuating plate 14 vibrates downward, and the movable member 131 of the resonance plate 13 adheres to and abuts below the levitation member 141 of the actuating plate 14. At this time, the flow-through gap between the central hole 130 of the resonance plate 13 and the second chamber 18 is closed, and the second chamber 18 is compressed to reduce its volume, and the pressure increases. On the other hand, the volume of the third chamber 19 increases and the pressure decreases. As a result, a pressure gradient is formed, and the fluid in the second chamber 18 receives pressure, flows on both sides, and flows into the third chamber 19 through the plurality of gaps 143 of the operation plate 14. As shown in FIG. 2D, the floating member 141 of the actuating plate 14 continues to vibrate downward, and the movable member 131 of the resonant plate 13 interlocks downward to further compress the second chamber 18, thereby making the fluid large. The part flows into the third chamber 19 for temporary storage.

  Finally, the levitation member 141 of the actuating plate 14 vibrates upward, and the third chamber 19 is compressed to reduce the volume and the pressure increases, and the fluid in the third chamber 19 is discharged from the outlet hole 160 of the outlet plate 16. It is drained and directed out of the outlet plate 16 to achieve fluid transport. The above-described operation completes the complete vibration operation when the actuating plate 14 oscillates back and forth. In a state where the piezoelectric element 15 is operated, the floating member 141 of the operation plate 14 and the movable member 131 of the resonance plate 13 repeatedly perform the above-described operation to discharge the fluid from the inlet hole 170 to the outlet hole 160 under pressure. Achieve fluid transport. In one embodiment of the present invention, the vertical reciprocating vibration frequency of the resonant plate 13 may be the same as the vibration frequency of the actuating plate 14, ie both may be simultaneously upward or downward, the actual situation It may be changed arbitrarily according to. It is not limited to the operation mode shown in the present embodiment.

  In the pressure gradient by the flow path of the fluid induction unit 10a of the present embodiment, the fluid flows at high speed, and the resistance in the flow direction of the flow path is different, transferring the inflow from the suction end to the discharge end and having pressure at the discharge end Even in this case, the fluid can be pushed out and noise can be suppressed.

  See FIG. 3A. FIG. 3A is a structural conceptual view of a fluid operation area in one preferred embodiment of the present invention. The fluid operation area 10 includes a plurality of fluid induction units 10a, and these fluid induction units 10a can adjust the transport amount of the fluid exported from the fluid operation area 10 in a specific arrangement manner. In form, these fluid guiding units 10a are arranged on the substrate 11 in a serial-parallel manner.

  See FIGS. 3B-3C. FIG. 3B is a view showing a structure in which the fluid induction units of the present invention are arranged in series. FIG. 3C is a view showing a structure in which fluid induction units of the present invention are arranged in a parallel manner. FIG. 3D is a view showing a structure in which the fluid induction units of the present invention are arranged in a series-parallel manner. As shown in FIG. 3B, the fluid induction units 10a in the fluid operation area 10 are arranged in series, and by arranging the fluid induction units 10a in series, the fluid in the outlet hole 160 of the fluid operation area 10 is The pressure can be raised. As shown in FIG. 3C, the fluid induction units 10a inside the fluid operation area 10 are arranged in a parallel manner, and by arranging the fluid induction units 10a in a parallel manner, the export fluid of the outlet hole 160 of the fluid operation area 10 The amount can be further increased. As shown in FIG. 3D, the fluid induction units 10a inside the fluid operation area 10 can be arranged in a serial-parallel manner, and the pressure value and the output of the fluid operation area 10 can be synchronously increased.

  See Figures 4 to 5. FIG. 4 is a view showing the structure of a fluid operation area in another preferred embodiment of the present invention. FIG. 5 is a view showing the structure of a fluid operation area in another preferred embodiment of the present invention. As shown in FIG. 4, the fluid induction unit 10a inside the fluid operation area 10 is disposed in an annular manner to transport fluid. As shown in FIG. 5, the fluid induction unit 10a inside the fluid operation area 10 is arranged in a honeycomb system.

  In the present embodiment, the fluid induction unit 10a of the fluid system 100 is coupled to a drive circuit, has excellent applicability, can be applied to various electronic components, and can simultaneously transport gas, and has a large capacity. It can meet the demand for transport of gases. Furthermore, it is also possible to separately control and operate the fluid guiding unit 10a and another fluid guiding unit 10a. For example, one fluid induction unit 10a may be activated and another fluid induction unit 10a may be deactivated or alternately activated. However, the present invention is not limited to this, and circulation of various gases can be easily realized, and power consumption can be significantly reduced.

  6A-6B show the valve member of the present invention operating in the first embodiment. The valve member 50 includes a passage base 51, a piezoelectric actuator 52, and a connecting rod 53. Although it will be described that the valve member 50 of the present embodiment described below is provided in the branch passage 21a, the structure and operation of the valve member 50 provided in the other branch passages 22a, 21b, 22b are the same. I will omit it. The passage base 51 is provided with a first through hole 511 and a second through hole 512, is in communication with the branch passage 21a, and is spaced apart from each other by the passage base 51. A chamber 513 is recessed above the passage base 51, and the chamber 513 is provided with a first outlet 514 communicating with the first through hole 511 and a second outlet 515 communicating with the second through hole 512. It is done. The piezoelectric actuator 52 includes a carrier 521 and a piezoelectric ceramic 522. The carrier 521 is made of a flexible material, and the piezoelectric ceramic 522 is attached to one surface of the carrier 521 and is electrically connected to the control unit 60. A piezoelectric actuator 52 covers the chamber 513 and is provided on the carrier 521. The connecting rod 53 is connected to the other surface of the carrier 521 and can be freely displaced in the vertical direction by inserting the second outlet 515. A blocking member 531 having a cross-sectional area larger than the diameter of the aperture of the second outlet 515 is provided at one end of the connecting rod 53 and is restricted by closing the communication of the second outlet 515. The blocking member 531 may be flat or dome-shaped.

  As shown in FIG. 6A, in the state where the piezoelectric actuator 52 is not actuated, the valve member 50 is in the initial position where the connecting rod 53 is always open. At this time, there is a gap between the blocking member 531 and the second outlet 515, and the second through hole 512, the chamber 513 and the first through hole 511 are communicated with each other by the gap and communicated with the branch passage 21a for transportation Fluid can pass through. On the other hand, as shown in FIG. 6B, when the piezoelectric actuator 52 is actuated, the piezoelectric ceramic 522 drives the carrier 521 to bend upward, and the connecting rod 53 moves upward by receiving the interlock of the carrier 521. And the blocking member 531 blocks the opening of the second outlet 515. At this time, the blocking member 531 blocks the second outlet 515 and does not pass the transport fluid. By the above-described operation method, the open state of the branch passage 21a can be maintained when the valve member 50 is not operated, and the branch passage 21a can be closed when the valve member 50 is operated. That is, the valve member 50 can control the export of fluid from the branch passage 21 a by controlling the open / close state of the second through hole 512.

  7A-7B show the valve member of the present invention operating in the second embodiment. Since the structure of the valve member 50 is the same, the description thereof will be omitted here, and the operation in the state of always closing when the valve member 50 is not in operation will be described.

  As shown in FIG. 7A, the valve member 50 is in the initial position in which the connecting rod 53 is always closed when the piezoelectric actuator 52 is not actuated. At this time, the blocking member 531 closes the opening of the second outlet 515 and does not pass the transport fluid. As shown in FIG. 7B, when the piezoelectric actuator 52 is actuated, the piezoelectric ceramic 522 drives the carrier 521 to bend downward, and the connecting rod 53 receives the interlock of the carrier 521 and moves downward as a blocking member. There is a flow space between 531 and the second outlet 515, and the second through hole 512, the chamber 513 and the first through hole 511 are communicated with each other by the fluid space, and are communicated with the branch passage 21a to pass the transport fluid. It can be done. According to the above-described operation method, it is possible to maintain the closed state of the branch passage 21a when the valve member 50 is not operated, and open the branch passage 21a when the valve member 50 is operated. That is, the valve member 50 can control the export of the fluid from the branch passage 21 a by controlling the open / close state of the second through hole 512.

  As described above, the fluid system provided by the present invention transports gas into the merging chamber via at least one fluid guiding unit, and the flow rate of fluid exported by the fluid system using the valve member in the branch passage. , Further control and adjust the flow rate and pressure. Furthermore, the present invention can meet the demand for various devices and gas transportation by the number of branch paths, the installation method and the drive method, etc., through the fluid induction unit, and the high transport amount, the efficiency, and the application It is possible to exhibit the effect of excellent in the sex.

  The changes and modifications made by those skilled in the art based on the above technical contents without departing from the scope of the technical solution of the present invention are equivalent embodiments equivalent to each other, without departing from the technical solution of the present invention. All simple modifications, equivalent changes, and modifications made to the above embodiments based on the subject matter of the present invention are all within the scope of the technical solution of the present invention.

1: Fluid system 10: fluid operation area 10a: fluid induction unit 11: base 12: first chamber 13: resonance plate 130: hollow hole 131: movable member 14: operating plate 141: levitation member 142: outer frame member 143: Air gap 15: Piezoelectric element 16: outlet plate 160: outlet hole 17: inlet plate 170: inlet hole 18: second chamber 19: third chamber 20: fluid flow passages 20a, 20b, 21a, 21b, 22a, 22b: branch passage 30: merging chamber 40: sensing element 50, 50a, 50b, 50c, 50d: valve member 51: passage base material 511: first through hole 512: first through hole 513: chamber 514: first outlet 515: second outlet 52: Piezoelectric actuator 521: Carrier 522: Piezoelectric ceramic 53: Coupling rod 531: Blocking member 60: Controller 61 , 620: electrical connection lines g0: Clearance A: Export area

Claims (13)

A fluid system, manufactured in an integrated manner, comprising a fluid operation area, a fluid flow path, a merging chamber, a sensing element, and a plurality of valve members,
The fluid operation area is composed of at least one fluid induction unit, and the fluid induction unit is controlled and operated to discharge transport fluid from at least one outlet hole.
The fluid flow channel communicates with the at least one outlet hole of the fluid operation area and has a plurality of branch passages, and diverts the fluid transported from the fluid operation area to form a required transport amount ,
The sensing element is provided in the fluid flow channel and used to sense and measure a fluid in the fluid flow channel.
The junction chamber is in communication with the fluid flow path, and fluid is accumulated inside the junction chamber,
The plurality of valve members are provided in the plurality of branch passages, and export the fluid in the plurality of branch passages by controlling the open / close state of the valve member,
The valve member includes a passage base, a piezoelectric actuator, and a connecting rod,
The passage base material has a first through hole and a second through hole, the first through hole and the second through hole are provided separately from each other, and are in communication with the branch flow passage, and the passage base The material further has a chamber recessed, and the chamber is provided with a first outlet communicating with the first through hole and a second outlet communicating with the second through hole,
The piezoelectric actuator is composed of a carrier and a piezoelectric ceramic adhered to the surface of the carrier, and the piezoelectric actuator covers the chamber.
The connecting rod is connected to the other surface of the carrier and can be freely displaced by inserting the second outlet, and one end of the connecting rod is a blocking member having a cross-sectional area larger than the diameter of the second outlet. And the second outlet can be closed,
When the piezoelectric actuator is actuated, the blocking member of the connection rod is interlocked to control the open / close state of the second outlet, and the fluid is exported from the branch channel.
A fluid system characterized by   The fluid system according to claim 1, wherein the fluid operation area transports fluid by providing a plurality of fluid induction units in series connection.   The fluid system according to claim 1, wherein the fluid operation area transports fluid by providing a plurality of fluid induction units in a parallel arrangement.   The fluid system according to claim 1, wherein the fluid operation area transports the fluid by providing a plurality of fluid induction units in a series-parallel arrangement.   The fluid system according to claim 1, wherein the fluid operation area transports fluid by arranging and providing a plurality of fluid induction units in an annular shape.   The fluid system according to claim 1, wherein the fluid operation area transports the fluid by arranging and providing a plurality of fluid guiding units in a honeycomb shape.   The fluid system according to claim 1, wherein the fluid induction unit is a piezoelectric pump.   The lengths of the plurality of branch paths are designed in advance according to the required specific transport amount, and the widths of the plurality of branch paths are designed in advance according to the required specific transport amount. The fluid system according to Item 1.   The fluid system according to claim 1, wherein the plurality of valve members are controlled in an open / close state by a control unit, and the control unit and the fluid guiding unit are packaged in an integrated structure.   The fluid system according to claim 1, wherein the plurality of branch paths are configured in any one of a series arrangement, a parallel arrangement, and a series-parallel arrangement.   The fluid system according to claim 1, wherein the blocking member of the connection rod is flat.   The fluid system according to claim 1, wherein the blocking member of the connection rod is dome-shaped. An integrated fluid system comprising at least one fluid operating area, at least one fluid flow path, at least one merging chamber, at least one sensing element, and a plurality of valve members ,
The at least one fluid operation area is composed of at least one fluid induction unit, and the fluid induction unit is controlled and operated to discharge the transport fluid from the at least one outlet hole,
The at least one fluid flow passage is in communication with the at least one outlet hole in the fluid operation area, and has a plurality of branch passages, and diverts the fluid transported from the fluid operation area to achieve a required transport amount Form
The at least one merging chamber is in communication with the fluid flow path, and fluid is accumulated inside the merging chamber.
The at least one sensing element is provided in the fluid flow channel and used to sense and measure the fluid in the fluid flow channel,
The plurality of valve members are provided in the branch passage, and export the fluid in the plurality of branch passages by controlling the open / close state of the valve member,
The valve member comprises at least one passage substrate, at least one piezoelectric actuator, and at least one connecting rod;
The at least one passage substrate has at least one first through hole and at least one second through hole, and the first through hole and the second through hole are provided apart from each other, and branched The passage base material is in communication with the flow passage, and the passage base material further dents at least one chamber, and the chamber is provided with a first outlet communicating with the first through hole and a second outlet communicating with the second through hole And
The at least one piezoelectric actuator comprises at least one carrier and at least one piezoelectric ceramic adhered to a surface of the carrier, and the piezoelectric actuator covers the chamber.
The at least one connecting rod is connected to the other side of the carrier and can be freely displaced by inserting the second outlet, one end of the connecting rod having a cross-sectional area larger than the diameter of the second outlet Having at least one blocking member and closing the second outlet,
When the piezoelectric actuator is actuated, the blocking member of the connection rod is interlocked to control the open / close state of the second outlet, and the fluid is exported from the branch channel.
A fluid system characterized by