CN111531394A - Large-stroke fast cutter servo device - Google Patents

Large-stroke fast cutter servo device Download PDF

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Publication number
CN111531394A
CN111531394A CN202010377041.8A CN202010377041A CN111531394A CN 111531394 A CN111531394 A CN 111531394A CN 202010377041 A CN202010377041 A CN 202010377041A CN 111531394 A CN111531394 A CN 111531394A
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China
Prior art keywords
knife
rest
flexible
cutter
tool rest
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CN202010377041.8A
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Inventor
关朝亮
彭小强
雍嘉浩
戴一帆
刘俊峰
胡皓
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National University of Defense Technology
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National University of Defense Technology
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Publication of CN111531394A publication Critical patent/CN111531394A/en
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23QDETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q5/00Driving or feeding mechanisms; Control arrangements therefor
    • B23Q5/22Feeding members carrying tools or work
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23QDETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q5/00Driving or feeding mechanisms; Control arrangements therefor
    • B23Q5/22Feeding members carrying tools or work
    • B23Q5/28Electric drives

Abstract

The invention discloses a large-stroke fast knife servo device which comprises a mounting frame, a knife rest, a flexible guide assembly, a knife and two pieces of piezoelectric ceramics, wherein the knife rest is mounted on the mounting frame through the flexible guide assembly, so that the knife rest can reciprocate along a straight line, the knife is arranged on the knife rest, and the two pieces of piezoelectric ceramics are oppositely arranged on the mounting frame and used for pushing the knife rest to reciprocate. The large-stroke fast knife servo device is simple in structure, convenient to operate and capable of meeting requirements of large stroke and high frequency response.

Description

Large-stroke fast cutter servo device
Technical Field
The invention relates to the technical field of ultra-precision machining equipment, in particular to a large-stroke fast cutter servo device.
Background
With the rapid development of optical and optoelectronic technologies, rotationally symmetric optical elements have been unable to meet the requirements of optical systems with increasingly complex structures and more abundant functions, and some optical elements with special microstructure surfaces have been widely applied in the fields of national defense and military industry, aerospace, fiber-optic communication, biomedicine and other civil fields due to the fact that they can realize special imaging functions such as integration, array and wave surface, and have become essential core components in optical systems. The traditional mechanical manufacturing method is difficult to be competent for the manufacturing tasks of the microarray elements, and the current processing technology mainly comprises a micro-nano manufacturing method and diamond cutting processing. The micro-nano manufacturing method comprises photoetching, laser direct writing technology, etching method, holographic method and the like, and the methods have certain defects in the aspects of processing range, processing precision, processing efficiency and the like and are difficult to realize the mass and high-precision production of the microstructure optical element. At present, a Fast Tool Servo (FTS) technology based on single-point diamond cutting gradually becomes a mainstream method for realizing high-precision and high-efficiency processing of micro-nano structure devices at home and abroad.
The existing fast knife servo device is based on the driving principle that a single piezoelectric ceramic pushes a knife to move, a knife rest with flexible guide is adopted to transmit the power output of the piezoelectric ceramic, and the flexible guide knife rest needs to provide the force (restoring force) for the knife to follow the return stroke of the piezoelectric ceramic while accurately transmitting the high-frequency motion of the piezoelectric ceramic to the knife. According to research, the increase of the rigidity of the flexible guide is beneficial to improving the tracking performance of the tool rest on complex surface shapes, and is also beneficial to improving the natural frequency of the whole fast tool system. However, the maximum output displacement of the piezoelectric ceramic is also influenced by the flexible guide rigidity, so that the Δ L is0Is the maximum output displacement of the piezoelectric ceramic when in no-load, and is the actual maximum output displacement of the piezoelectric ceramic, kpThe rigidity of the piezoelectric ceramic is adopted, k is the flexible guide rigidity, and the actual maximum output displacement and the maximum output displacement of the piezoelectric ceramic per se satisfy the relational expression
Figure BDA0002480524530000011
It is known that the increase of the rigidity of the flexible guide causes the displacement loss of the piezoelectric ceramic, reduces the maximum output displacement of the system, and the larger the rigidity of the flexible guide is, the larger the displacement loss of the piezoelectric ceramic isThe smaller the maximum output displacement of the system.
In conclusion, the selection of the rigidity of the flexible guide has great influence on the performance of the fast cutter servo system, and the higher the rigidity is, the better the dynamic performance is; the smaller the stiffness, the greater the maximum output displacement of the system. The contradiction between the maximum output displacement and the system frequency response is caused, and the inherent defects of the single piezoelectric ceramic fast knife servo system are difficult to overcome only by optimizing the structure and the rigidity of the flexible guide. Therefore, how to overcome the inherent defect and simultaneously meet the requirements of large stroke and high frequency response of the FTS processing technology is a problem to be solved by those skilled in the art.
Disclosure of Invention
The invention aims to overcome the defects of the prior art and provides a large-stroke fast knife servo device which is simple in structure, convenient and fast to operate and capable of meeting the requirements of large stroke and high frequency response.
In order to solve the technical problems, the invention adopts the following technical scheme:
the utility model provides a fast sword servo device of big stroke, includes mounting bracket, knife rest, flexible direction subassembly, cutter and two piezoceramics, the knife rest passes through flexible direction subassembly and installs on the mounting bracket for straight line reciprocating motion can be followed to the knife rest, on the knife rest was located to the cutter, two piezoceramics mutual disposition is on the mounting bracket for promote knife rest reciprocating motion.
As a further improvement of the above technical solution:
the control signal of one piece of piezoelectric ceramic is set to be VASaid V isA0.5asin (2 pi t) + a, and a control signal of the other piece of piezoelectric ceramic is set as VBSaid V isB0.5asin (2 pi t-pi) + a, wherein a is a corresponding voltage value when the pressure ceramic outputs the maximum displacement, and t is the working time of the pressure ceramic.
The tool rest is of a square frame structure, the two pieces of piezoelectric ceramics are arranged in the tool rest, the telescopic end of one piece of piezoelectric ceramics is abutted against one end of the tool rest, and the telescopic end of the other piece of piezoelectric ceramics is abutted against the other end of the tool rest.
And abutting screws are arranged at the abutting positions of the tool rest and the piezoelectric ceramics, and the abutting screws abut against the corresponding piezoelectric ceramics.
The abutting screw is provided with an abutting ball, a round hole is formed in the position, opposite to the abutting ball, of the piezoelectric ceramic, and the abutting screw abuts against the round hole through the abutting ball.
The flexible guide assembly comprises an even number of flexible pieces, the flexible pieces are symmetrically distributed on two sides of the tool rest and comprise mounting plates and flexible plates arranged on two sides of the mounting plates, the mounting plates are mounted on the mounting frame, and the flexible plates are connected between the mounting plates and the tool rest.
The flexible plate and the tool rest are integrally formed.
And the mounting frame is provided with a capacitance sensor for measuring the displacement of the cutter.
The cutter is arranged at one end of the cutter rest, and the capacitance sensor is arranged at the other end of the cutter rest.
The mounting bracket includes bottom plate and fixing base, fixing base detachably fixes on the bottom plate, two piezoceramics relatively fixed is in the both sides of fixing base.
Compared with the prior art, the invention has the advantages that:
1. the large-stroke fast knife servo device uses the thrust of another piezoelectric ceramic to replace a flexible guide component (such as a flexible hinge) in the traditional fast knife servo device (only one piezoelectric ceramic) to provide restoring force of a knife return stroke, namely, the influence of the rigidity of the flexible guide component on the dynamic performance of the device is reduced, so that a smaller rigidity value can be selected when the flexible guide component is designed, and compared with the traditional single-piezoelectric ceramic fast knife servo device, according to the relational expression
Figure BDA0002480524530000031
Due to the maximum output displacement DeltaL when the piezoelectric ceramic is unloaded0When the two devices adopt the same piezoelectric ceramic, the rigidity k of the flexible guide component of the device is unchangedpThe actual output displacement delta L of the piezoelectric ceramic can be obviously improved by selecting smaller displacement delta LThe working stroke of the fast knife servo device is effectively improved;
2. in the traditional single piezoelectric ceramic fast tool servo device, when the tool is fed, the tool rest driving the tool to move is subjected to resultant force of resistance caused by piezoelectric ceramic thrust and flexible hinge elastic force in opposite directions, and when the tool is withdrawn, the tool rest is only subjected to restoring force provided by the flexible hinge elastic force, so that the displacement transfer functions of the system during feeding and withdrawing are inconsistent, and great difficulty is brought to control;
3. the flexible guide assembly and the tool rest are symmetrical structures taking piezoelectric ceramics as symmetry axes, so that the flexible guide assembly can eliminate influence factors except the axial direction (the feeding direction of the tool) when transmitting thrust, only changes to the axial direction of the tool are reserved, and the precision of the tool in motion is improved.
Drawings
FIG. 1 is a first perspective view of a servo mechanism for a large-stroke fast knife according to the present invention.
Fig. 2 is a second view structural diagram of the large-stroke fast knife servo device of the present invention.
Fig. 3 is an enlarged view at a in fig. 2.
FIG. 4 is a combination view of the flexible guide assembly and tool post of the large stroke fast knife servo of the present invention.
FIG. 5 is a schematic structural diagram of a piezoelectric ceramic of the large-stroke fast knife servo device of the present invention.
Fig. 6 is a schematic structural diagram of a base plate of the large-stroke fast knife servo device of the invention.
Fig. 7 is a schematic structural diagram of a fixing seat of the large-stroke fast knife servo device of the invention.
FIG. 8 is a schematic view of the large stroke fast knife servo of the present invention in an intermediate position.
FIG. 9 is a schematic structural diagram of the large stroke fast knife servo device in the feeding state.
FIG. 10 is a schematic view of the large stroke fast knife servo device of the present invention in a retracted state.
The reference numerals in the figures denote:
1. a mounting frame; 11. a base plate; 12. a fixed seat; 2. a tool holder; 3. a flexible guide assembly; 31. a flexible member; 311. mounting a plate; 312. a flexible board; 4. a cutter; 5. piezoelectric ceramics; 51. a circular hole; 6. tightly abutting the screw; 61. tightly pressing the ball; 7. a capacitive sensor.
Detailed Description
The invention will be described in further detail below with reference to the drawings and specific examples.
Fig. 1 to 7 show an embodiment of a large-stroke fast knife servo device of the present invention, which includes a mounting frame 1, a knife rest 2, a flexible guide assembly 3, a knife 4 and two pieces of piezoelectric ceramics 5, wherein the knife rest 2 is mounted on the mounting frame 1 through the flexible guide assembly 3, such that the knife rest 2 can reciprocate along a straight line, the knife 4 is disposed on the knife rest 2, and the two pieces of piezoelectric ceramics 5 are oppositely disposed on the mounting frame 1, and are used for pushing the knife rest 2 to reciprocate. When the mounting rack is used, the mounting rack 1 is fixed on a Z-axis slide carriage of a machine tool and moves along with the Z-axis slide carriage of the machine tool. The large-stroke fast knife servo device uses the thrust of another piezoelectric ceramic 5 to replace a flexible guide component 3 (such as a flexible hinge) in the traditional fast knife servo device (only one piezoelectric ceramic 5) to provide the restoring force of the return stroke of the knife 4, namely, the influence of the rigidity of the flexible guide component 3 on the dynamic performance of the device is reduced, so that a smaller rigidity value can be selected when the flexible guide component 3 is designed, and compared with the traditional single piezoelectric ceramic fast knife servo device, according to the relational expression
Figure BDA0002480524530000041
Due to the maximum output displacement DeltaL when the piezoelectric ceramic 5 is unloaded0When the two devices adopt the same piezoelectric ceramic 5, the rigidity k of the flexible guide component 3 of the device can be selected to be smaller, and the actual output displacement delta L of the piezoelectric ceramic 5 can be obviously improved, so that the piezoelectric ceramic 5 is stable, and the piezoelectric ceramic device is convenient to use and has high reliabilityThe working stroke of the fast knife servo device is effectively improved; in the traditional single piezoelectric ceramic fast tool servo device, when the tool is fed, the tool rest 2 driving the tool 4 to move is subjected to the resultant force of the thrust of the piezoelectric ceramic 5 and the resistance caused by the elastic force of the flexible hinge in opposite directions, and when the tool is withdrawn, the tool rest 2 is only subjected to the restoring force provided by the elastic force of the flexible hinge, so that the displacement transfer functions of the system during feeding and withdrawing are inconsistent, and great difficulty is brought to control. The large-stroke fast knife servo device is simple in structure, convenient to operate and capable of meeting requirements of large stroke and high frequency response.
In this embodiment, the control signal of one piece of piezoelectric ceramic 5 is set to VA,VA0.5asin (2 pi t) + a, and the control signal of the other piece of piezoelectric ceramic 5 is set to VB,VB0.5asin (2 pi t-pi) + a, where a is the voltage value corresponding to the maximum displacement output by the pressure ceramic 5, and t is the working time of the pressure ceramic 5. Therefore, when one piezoelectric ceramic 5 extends and drives the cutter feeding process of the device, the other piezoelectric ceramic 5 shortens the same distance to complete the actions of cutter feeding and cutter retracting. The control signal amplitudes of the two pieces of piezoelectric ceramics 5 are the same, and the change rules are just opposite.
In this embodiment, as shown in fig. 4, the tool holder 2 is a square frame structure, two pieces of piezoelectric ceramics 5 are coaxially arranged in the tool holder 2, the telescopic end of one piece of piezoelectric ceramics 5 abuts against one end of the tool holder 2, and the telescopic end of the other piece of piezoelectric ceramics 5 abuts against the other end of the tool holder 2. The cutter 4 is arranged on the cutter frame 2 through a cutter seat, and the two pieces of piezoelectric ceramics 5 are used for enabling the cutter frame 2 to drive the cutter 4 to reciprocate in the feeding direction of the cutter 4.
In this embodiment, as shown in fig. 1 to 3, the tool holder 2 is provided with tightening screws 6 at the abutting portions with the piezoelectric ceramics 5, and each tightening screw 6 abuts on the corresponding piezoelectric ceramics 5. Through screwing the abutting screw 6, the pretightening force of the piezoelectric ceramics 5 can be adjusted, and the tool rest 2 is convenient to disassemble and assemble even if the pretightening force of the piezoelectric ceramics 5 is adjusted.
In this embodiment, as shown in fig. 1, fig. 2, fig. 3, and fig. 5, a fastening ball 61 is disposed on the fastening screw 6, a circular hole 51 is disposed at a position of the piezoelectric ceramic 5 opposite to the fastening ball 61, and the fastening screw 6 is abutted in the circular hole 51 through the fastening ball 61. Specifically, threaded holes are formed in two side end faces of the tool rest 2, each abutting screw 6 penetrates through the respective threaded hole and is in threaded connection with the threaded hole, the abutting ball 61 abuts against the round hole 51 in the end portion of the piezoelectric ceramic 5 at the tail portion of the abutting screw 6, and the pretightening force of the piezoelectric ceramic 5 is adjusted by adjusting the abutting screw 6.
In this embodiment, as shown in fig. 1, fig. 2 and fig. 4, the flexible guide assembly 3 includes an even number of flexible members 31, each flexible member 31 is symmetrically distributed on both sides of the tool post 2, each flexible member 31 includes a mounting plate 311 and a flexible plate 312 disposed on both sides of the mounting plate 311, the mounting plate 311 is mounted on the mounting frame 1, and the flexible plate 312 is connected between the mounting plate 311 and the tool post 2. Specifically, the number of the flexible members 31 is four, the four flexible members 31 are distributed in an axisymmetric manner with the piezoelectric ceramics 5, one end of the flexible plate 312 is integrally formed with the tool holder 2, and the other end is hinged to the mounting plate 311. The flexible plate 312 may be formed of a single plate spring, and functions to make the movement resistance of the tool post 2 in the feeding direction of the tool 4 sufficiently small and to make the displacement in the other direction sufficiently small, thereby ensuring high-precision linear movement of the tool 4 and high-precision machining amount. The flexible guide component 3 and the tool rest 2 are both of a symmetrical structure taking the piezoelectric ceramic 5as a symmetry axis, so that the flexible guide component 3 can eliminate influence factors except the axial direction (the feeding direction of the tool 4) when transmitting thrust, only the change of the axial direction of the tool 4 is reserved, and the precision of the tool 4 in motion is improved.
In this embodiment, as shown in fig. 1 to 3, the mounting frame 1 is provided with a capacitive sensor 7 for measuring the displacement of the cutter 4. Specifically, the tool 4 is provided at one end of the tool holder 2, and the capacitance sensor 7 is located at the other end of the tool holder 2. The mounting frame 1 is fixedly provided with a mounting table through bolts, a V-shaped groove is formed in the mounting table, the capacitance sensor 7 is fixed in the V-shaped groove of the mounting table, the measuring surface of the capacitance sensor is opposite to the side end face of the tool rest 2, and the capacitance sensor 7 is connected with a sensor power supply and a signal processing module.
In this embodiment, as shown in fig. 1, fig. 2, fig. 6, and fig. 7, the mounting bracket 1 includes a bottom plate 11 and a fixing base 12, the fixing base 12 is detachably fixed on the bottom plate 11 by bolts, and the two pieces of piezoelectric ceramics 5 are relatively fixed on two sides of the fixing base 12. Two ends of the piezoelectric ceramic 5 are limited by the fixing seat 12 and the abutting screw 6 respectively, and the pretightening force of the piezoelectric ceramic 5 is adjusted by adjusting the abutting screw 6. The tail part of the piezoelectric ceramic 5 (the head part is one end of the piezoelectric ceramic 5 abutted against the tool rest 2) is provided with a central threaded hole, the fixed seat 12 is provided with a through hole concentric with the central threaded hole at the tail part of the piezoelectric ceramic 5, and the tail part of the piezoelectric ceramic 5 is fixed on the fixed seat 12 through a bolt.
The working principle of the large-stroke fast knife servo device is shown in fig. 8-10, and fig. 8 is a structural diagram of the large-stroke fast knife servo device in the middle position; FIG. 9 is a schematic structural diagram of the large-stroke fast-cutting servo device in a cutting feed state; FIG. 10 is a schematic view of the large stroke fast knife servo device of the present invention in a retracted state. Wherein X is the feed direction. The principle is as follows:
1. the two pieces of piezoelectric ceramics 5 are simultaneously extended for a certain length from the initial length to reach the middle position (as shown in fig. 8), and then the same pretightening force is applied to the piezoelectric ceramics 5 through the pretightening screws 6 to complete the pretightening;
2. the piezoelectric ceramic 5 close to the cutter 4 continues to extend for a certain length, meanwhile, the piezoelectric ceramic 5 far from the cutter 4 contracts for the same length, and the cutter frame 2 drives the cutter 4 to complete the feeding action under the pushing of the piezoelectric ceramic 5 close to the cutter 4, so as to achieve the feeding state shown in fig. 9;
3. on the contrary, the piezoelectric ceramic 5 far away from the cutter 4 is extended by a certain length, meanwhile, the piezoelectric ceramic 5 close to the cutter 4 is contracted by the same length, and under the pushing of the piezoelectric ceramic 5 far away from the cutter 4, the tool rest 2 drives the cutter 4 to complete the feeding action, so as to reach the tool retracting state shown in fig. 10;
4. and (3) realizing the quick servo movement of the cutter 4 by repeatedly executing the step 2 and the step 3 so as to complete the cutting movement of the workpiece.
Although the present invention has been described with reference to the preferred embodiments, it is not intended to be limited thereto. Those skilled in the art can make numerous possible variations and modifications to the present invention, or modify equivalent embodiments to equivalent variations, without departing from the scope of the invention, using the teachings disclosed above. Therefore, any simple modification, equivalent change and modification made to the above embodiments according to the technical spirit of the present invention should fall within the protection scope of the technical scheme of the present invention, unless the technical spirit of the present invention departs from the content of the technical scheme of the present invention.

Claims (10)

1. The utility model provides a big stroke fast sword servo device which characterized in that: including mounting bracket (1), knife rest (2), flexible direction subassembly (3), cutter (4) and two piezoceramics (5), install on mounting bracket (1) through flexible direction subassembly (3) knife rest (2) for straight line reciprocating motion can be followed in knife rest (2), on knife rest (2) was located in cutter (4), two piezoceramics (5) relative arrangement was on mounting bracket (1) for promote knife rest (2) reciprocating motion.
2. The large stroke fast knife servo of claim 1 wherein: the control signal of one piece of piezoelectric ceramic (5) is set to VASaid V isA0.5asin (2 pi t) + a, and a control signal of the other piece of piezoelectric ceramic (5) is set as VBSaid V isB0.5asin (2 pi t-pi) + a, wherein a is a voltage value corresponding to the maximum displacement output by the pressure ceramic (5), and t is the working time of the pressure ceramic (5).
3. The large stroke fast knife servo of claim 1 wherein: the tool rest (2) is of a square frame structure, the two pieces of piezoelectric ceramics (5) are arranged in the tool rest (2), the telescopic end of one piece of piezoelectric ceramics (5) is abutted against one end of the tool rest (2), and the telescopic end of the other piece of piezoelectric ceramics (5) is abutted against the other end of the tool rest (2).
4. The large stroke fast knife servo of claim 3 wherein: the tool rest (2) is provided with abutting screws (6) at the abutting positions of the tool rest and the piezoelectric ceramics (5), and each abutting screw (6) abuts against the corresponding piezoelectric ceramics (5).
5. The large stroke fast knife servo of claim 4 wherein: the abutting screw (6) is provided with an abutting ball (61), a round hole (51) is formed in the position, opposite to the abutting ball (61), of the piezoelectric ceramic (5), and the abutting screw (6) abuts against the round hole (51) through the abutting ball (61).
6. The large stroke fast knife servo of claim 1 wherein: the flexible guide assembly (3) comprises an even number of flexible pieces (31), each flexible piece (31) is symmetrically distributed on two sides of the tool rest (2), each flexible piece (31) comprises an installation plate (311) and flexible plates (312) arranged on two sides of the installation plate (311), the installation plates (311) are installed on the installation frame (1), and the flexible plates (312) are connected between the installation plates (311) and the tool rest (2).
7. The large stroke fast knife servo of claim 6 wherein: the flexible plate (312) and the tool rest (2) are integrally formed.
8. The large stroke fast knife servo of claim 1 wherein: and the mounting rack (1) is provided with a capacitive sensor (7) for measuring the displacement of the cutter (4).
9. The large stroke fast knife servo of claim 8 wherein: the cutter (4) is arranged at one end of the cutter rest (2), and the capacitance sensor (7) is positioned at the other end of the cutter rest (2).
10. The large-stroke fast knife servo device according to any one of claims 1 to 9, wherein: mounting bracket (1) includes bottom plate (11) and fixing base (12), fixing base (12) detachably fixes on bottom plate (11), two piezoceramics (5) relatively fixed is in the both sides of fixing base (12).
CN202010377041.8A 2020-05-07 2020-05-07 Large-stroke fast cutter servo device Pending CN111531394A (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115194194A (en) * 2022-05-17 2022-10-18 吉林大学 Double-drive type double-freedom-degree large-stroke fast tool servo device

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Publication number Priority date Publication date Assignee Title
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CN103990998A (en) * 2014-05-20 2014-08-20 广东工业大学 Stiffness frequency adjustable two-dimensional micro-motion platform based on stress stiffening principle
CN207188806U (en) * 2017-07-28 2018-04-06 宁波大学 A kind of fine turning lathe knife rest with big cutting output
CN209077809U (en) * 2018-09-29 2019-07-09 宁波大学 A kind of five degree of freedom fast servo tool micromotion platform
CN110370060A (en) * 2019-07-12 2019-10-25 山东大学 A kind of fast tool servo device of Piezoelectric Ceramic, part system of processing and method
CN110919032A (en) * 2019-11-14 2020-03-27 宁波大学 Two-degree-of-freedom servo tool rest with large-stroke high-frequency response

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2108473B1 (en) * 2008-04-10 2011-03-23 Seco - E.P.B. Tool-holder equipped with shock-absorbing means
CN103990998A (en) * 2014-05-20 2014-08-20 广东工业大学 Stiffness frequency adjustable two-dimensional micro-motion platform based on stress stiffening principle
CN207188806U (en) * 2017-07-28 2018-04-06 宁波大学 A kind of fine turning lathe knife rest with big cutting output
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CN110370060A (en) * 2019-07-12 2019-10-25 山东大学 A kind of fast tool servo device of Piezoelectric Ceramic, part system of processing and method
CN110919032A (en) * 2019-11-14 2020-03-27 宁波大学 Two-degree-of-freedom servo tool rest with large-stroke high-frequency response

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115194194A (en) * 2022-05-17 2022-10-18 吉林大学 Double-drive type double-freedom-degree large-stroke fast tool servo device

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