CN111524831A - Cleaning machine basket of flowers conveying mechanism - Google Patents
Cleaning machine basket of flowers conveying mechanism Download PDFInfo
- Publication number
- CN111524831A CN111524831A CN202010331491.3A CN202010331491A CN111524831A CN 111524831 A CN111524831 A CN 111524831A CN 202010331491 A CN202010331491 A CN 202010331491A CN 111524831 A CN111524831 A CN 111524831A
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- flower basket
- limiting
- fixing frame
- basket
- vertical
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
- H01L21/6704—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing
- H01L21/67057—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing with the semiconductor substrates being dipped in baths or vessels
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B13/00—Accessories or details of general applicability for machines or apparatus for cleaning
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67766—Mechanical parts of transfer devices
Abstract
The invention discloses a flower basket conveying mechanism of a cleaning machine, which comprises a flower basket for bearing a wafer to be cleaned, a driving assembly for driving the flower basket to swing in the circumferential direction, a vertical limiting assembly for limiting the stroke of the flower basket in the vertical direction, and a horizontal limiting assembly for limiting the stroke of the flower basket in the horizontal direction, wherein the horizontal limiting assembly is movably connected with the vertical limiting assembly, and the flower basket is movably connected with the vertical limiting assembly; under the matching action of the horizontal limiting component and the vertical limiting component, the swinging of the flower basket in the circumferential direction is decomposed and converted into movement in the horizontal direction and the vertical direction. According to the invention, by adding the mechanical limiting structures in the horizontal direction and the vertical direction, the circular motion of the flower basket in the swinging process of the swing arm is converted into the linear motion in the two directions, so that the overall mechanical relation of the mechanism is improved, and the use stability of the mechanism is obviously improved.
Description
Technical Field
The invention relates to a product conveying mechanism, in particular to a flower basket conveying mechanism of a cleaning machine, which is adaptive to a two-tank type semi-automatic cleaning machine, and belongs to the technical field of industrial automation.
Background
A wafer, also called a silicon wafer, is a product processed from a silicon ingot, and is applied to various industries such as semiconductors, silicon carbide, sapphire, solar photovoltaics, and the like. Due to the special structure of the wafer, millions of transistors can be etched on the wafer by a special processing technology, so that the wafer is widely used in the processing and manufacturing of integrated circuits.
In the process of processing the wafer, an essential preorder treatment process is to clean the wafer, and the process mainly has the effects of removing impurities such as atoms, ions, molecules, organic stains or particles and the like attached to the surface of the wafer, obtaining a clean surface, and realizing polishing, directional corrosion and the like of the wafer. It can be said that the cleaning effect of the wafer will directly affect the quality of the final product.
In order to ensure the cleaning quality, it is necessary to ensure that the cleaning solution in the reaction tank is always in a flowing state, so as to drive the flow of the cleaning solution on the surface of the wafer, supplement the consumption of the concentration of the reaction solution, and obtain a consistent reaction process. Also, due to the stringent standards and requirements of this operation, in the prior art, automatic/semi-automatic equipment is generally used to perform the corresponding operation.
Taking a common two-tank type semi-automatic cleaning machine in each processing enterprise as an example, the cleaning machine uses a swing arm type conveying mechanism to carry a flower basket bearing wafer workpieces to and fro between two cleaning tanks of the cleaning machine. In long-term practice, however, the skilled person has found that the oscillating arm type transport mechanisms used in such machines suffer from several significant drawbacks: firstly, the instability problem commonly existing in the swing arm type structure can cause the flower basket to shake in the conveying process, so that the instability of the whole mechanism is increased. Secondly, the speed control of the swing arm type conveying mechanism during driving is extremely difficult; the too high speed of the swing arm can cause the flower basket to shake violently, so that a wafer carried in the flower basket collides with a machine table of the cleaning machine, and the product is scrapped and the structure of the machine table of the equipment is damaged; and too low speed of the swing arm can greatly prolong the time of cleaning operation, and the production efficiency of processing enterprises and the production rhythm are seriously influenced.
In summary, how to provide a cleaning machine basket conveying mechanism adapted to a two-tank type semi-automatic cleaning machine based on the prior art, and to address the above-mentioned deficiencies in the prior art, the present invention provides a corresponding improvement and improvement, and thus the problem to be solved by the technical staff in the art is still needed.
Disclosure of Invention
In view of the above-mentioned drawbacks of the prior art, the present invention provides a flower basket conveying mechanism adapted to a two-tank semi-automatic cleaning machine, which is as follows.
A flower basket conveying mechanism of a cleaning machine comprises a flower basket used for bearing wafers to be cleaned, a driving assembly used for driving the flower basket to swing in the circumferential direction, a vertical limiting assembly used for limiting the stroke of the flower basket in the vertical direction, and a horizontal limiting assembly used for limiting the stroke of the flower basket in the horizontal direction, wherein the horizontal limiting assembly is movably connected with the vertical limiting assembly, and the flower basket is movably connected with the vertical limiting assembly; under the cooperation of the horizontal limiting assembly and the vertical limiting assembly, the swinging of the flower basket in the circumferential direction is decomposed and converted into movement in the horizontal direction and the vertical direction.
Preferably, the driving assembly comprises a driving motor, the setting direction of a motor shaft of the driving motor is parallel to the setting direction of the whole flower basket, the central axis of an output shaft of the driving motor is not coincident with the central axis of the flower basket, and the flower basket is in transmission connection with the output shaft of the driving motor through a swing arm; under the operating state of the driving motor, an output shaft of the driving motor drives the swing arm to rotate, and the swing arm drives the flower basket to swing in the circumferential direction.
Preferably, the vertical limiting assembly comprises a flower basket fixing frame, a first vertical limiting plate and a second vertical limiting plate; the flower basket fixing frame is composed of two fixing frame side plates and a fixing frame cross beam, wherein the two fixing frame side plates are respectively connected with two ends of the flower basket fixing frame, and the two fixing frame side plates are connected through the fixing frame cross beam to form a whole.
Preferably, two sets of direction groups are symmetrically arranged on two sides of the first vertical limiting plate and the second vertical limiting plate, each guide group comprises a plurality of guide rollers arranged in rows along the edge of the limiting plate, the first vertical limiting plate and the second vertical limiting plate are arranged in parallel, and the distance between the two sets of direction groups on each limiting plate is matched with the width of the side plate of the fixing frame.
Preferably, a circle of limiting groove is formed in the periphery of each guide roller, each fixing frame side plate is embedded in two groups of the guide groups on the limiting plates on the same side, and the edges of the fixing frame side plates are in contact with the limiting grooves in the periphery of the guide rollers.
Preferably, the first vertical limiting plate is arranged between the flower basket fixing frame and the swing arm, a movable groove in the vertical direction is formed in the first vertical limiting plate, and a limiting rod is connected to the flower basket fixing frame; the gag lever post movably wears to locate the activity inslot, the one end of gag lever post with be close to first perpendicular limiting plate mount curb plate fixed connection the other end of gag lever post with the one end fixed connection of swing arm the other end of swing arm with driving motor's output shaft fixed connection.
Preferably, the horizontal limiting assembly comprises two guide rods arranged in parallel and two guide connecting boxes, each guide connecting box is internally and movably sleeved with one guide rod, the upper end parts of the first vertical limiting plate and the second vertical limiting plate are respectively and fixedly connected with one guide connecting box.
Preferably, a guide wheel matched with the guide rod is arranged in the guide connecting box; through the rotation of the guide wheel, the guide connection box moves on the guide rod in a reciprocating mode.
Compared with the prior art, the invention has the advantages that:
according to the flower basket conveying mechanism of the cleaning machine, the mechanical limiting structures in the horizontal direction and the vertical direction are additionally arranged, so that circular motion of the flower basket in the swinging process of the swing arm is converted into linear motion in the two directions, the position state of the flower basket does not depend on self gravity, the mechanical relation of the whole mechanism is improved, and the use stability of the mechanism is obviously improved.
Meanwhile, in the using process of the invention, the swing arm speed is not limited by the swinging of the flower basket, the cleaning processing flow of the wafer can be effectively accelerated, and the production efficiency of enterprises is improved. The structure of the invention also avoids collision contact between the wafer and the cleaning machine table, thereby ensuring the yield of products and protecting the cleaning machine, and further avoiding the maintenance cost of processing enterprises.
In addition, the whole structure of the invention is simple, all parts used by the invention are mostly common machining parts with mature technology on the market, and all production enterprises can obtain the technical scheme of the invention by simply assembling the existing parts, thereby not only meeting the use requirements of users to the maximum extent, but also effectively reducing the production cost of the whole mechanism and saving the production resources of the enterprises.
The invention also provides reference for other related problems in the same field, can be expanded and extended on the basis of the reference, is applied to other technical schemes of similar conveying mechanisms, and has very wide application prospect.
The following detailed description of the embodiments of the present invention is provided in connection with the accompanying drawings for the purpose of facilitating understanding and understanding of the technical solutions of the present invention.
Drawings
FIG. 1 is a schematic view of the overall structure of the present invention;
wherein: 1. a flower basket; 2. a drive motor; 3. swinging arms; 4. a flower basket fixing frame; 5. a first vertical limiting plate; 51. a movable groove; 6. a second vertical limiting plate; 7. a guide roller; 8. a limiting rod; 9. a guide bar; 10. and a guide connection box.
Detailed Description
The invention discloses a flower basket conveying mechanism of a cleaning machine, which is adaptive to a two-tank semi-automatic cleaning machine and comprises a conveying mechanism body and a conveying mechanism body.
As shown in fig. 1, a basket conveying mechanism of a cleaning machine is fixedly installed on an existing cleaning machine, and includes a basket 1 for carrying a wafer to be cleaned and a driving assembly for driving the basket 1 to swing in a circumferential direction.
The cleaning machine flower basket conveying mechanism further comprises a vertical limiting assembly and a horizontal limiting assembly, wherein the vertical limiting assembly is used for limiting the stroke of the flower basket in the vertical direction, the horizontal limiting assembly is used for limiting the stroke of the flower basket in the horizontal direction, the horizontal limiting assembly is movably connected with the vertical limiting assembly, and the flower basket 1 is movably connected with the vertical limiting assembly. Under the cooperation of the horizontal limiting component and the vertical limiting component, the swinging of the flower basket 1 in the circumferential direction is decomposed and converted into movement in the horizontal direction and the vertical direction.
In this embodiment, the driving assembly includes a driving motor 2, a setting direction of a motor shaft of the driving motor 2 is parallel to a setting direction of the whole body of the flower basket 1, a central axis of an output shaft of the driving motor 2 is not coincident with a central axis of the flower basket 1, and the flower basket 1 is in transmission connection with the output shaft of the driving motor 2 through a swing arm 3. Under the running state of the driving motor 2, the output shaft of the driving motor 2 drives the swing arm 3 to rotate, and the swing arm 3 drives the flower basket 1 to swing in the circumferential direction.
The vertical limiting assembly comprises a flower basket fixing frame 4, a first vertical limiting plate 5 and a second vertical limiting plate 6. The flower basket fixing frame 4 is composed of two fixing frame side plates and a fixing frame cross beam, wherein the two fixing frame side plates are respectively connected with two ends of the flower basket fixing frame 4, and the two fixing frame side plates are connected through the fixing frame cross beam to form a whole.
The equal symmetry in both sides of first perpendicular limiting plate 5 and the second perpendicular limiting plate 6 two is provided with two sets of direction groups, every group the direction group all includes a plurality of guide rollers 7 that set up in a row along the limiting plate edge, first perpendicular limiting plate 5 reaches two sets of on the second perpendicular limiting plate 6 the direction group is equal parallel arrangement and every limiting plate on two sets of the distance between the direction group with the width phase-match of mount curb plate.
In order to guarantee the limiting effect of the flower basket fixing frame 4 in the vertical direction, in this embodiment, a circle of limiting groove is formed in the periphery of the guide roller 7, each fixing frame side plate is embedded in two groups of the guide groups arranged on the limiting plates on the same side, and the edge of each fixing frame side plate is in contact with the limiting groove in the periphery of the guide roller 7.
The first vertical limiting plate 5 is arranged between the flower basket fixing frame 4 and the swing arm 3, a movable groove 51 in the vertical direction is formed in the first vertical limiting plate 5, and the flower basket fixing frame 4 is connected with a limiting rod 8. Stop lever 8 movably wears to locate in the activity inslot 51, stop lever 8's one end with be close to first perpendicular limiting plate 5 mount curb plate fixed connection the stop lever 8's the other end with the one end fixed connection of swing arm 3 the other end of swing arm 3 with driving motor 2's output shaft fixed connection.
Horizontal spacing subassembly includes two parallel arrangement's guide bar 9 and two direction connecting box 10, every equal movably cover is located in the direction connecting box 10 on the guide bar 9, first perpendicular limiting plate 5 reaches the upper end of the two of the perpendicular limiting plate of second respectively with one direction connecting box 10 fixed connection.
A plurality of guide wheels matched with the guide rods 9 are arranged in the guide connecting box 10 in pairs. By the rotation of the guide wheel, the guide connection box 10 is reciprocated on the guide bar 9.
In conclusion, the cleaning machine flower basket conveying mechanism provided by the invention has the advantages that the mechanical limiting structures in the horizontal direction and the vertical direction are additionally arranged, the circular motion of the flower basket in the swinging process of the swing arm is converted into the linear motion in the two directions, and the position state of the flower basket does not depend on the gravity of the flower basket, so that the integral mechanical relation of the mechanism is improved, and the use stability of the mechanism is obviously improved.
Meanwhile, in the using process of the invention, the swing arm speed is not limited by the swinging of the flower basket, the cleaning processing flow of the wafer can be effectively accelerated, and the production efficiency of enterprises is improved. The structure of the invention also avoids collision contact between the wafer and the cleaning machine table, thereby ensuring the yield of products and protecting the cleaning machine, and further avoiding the maintenance cost of processing enterprises.
In addition, the whole structure of the invention is simple, all parts used by the invention are mostly common machining parts with mature technology on the market, and all production enterprises can obtain the technical scheme of the invention by simply assembling the existing parts, thereby not only meeting the use requirements of users to the maximum extent, but also effectively reducing the production cost of the whole mechanism and saving the production resources of the enterprises.
The invention also provides reference for other related problems in the same field, can be expanded and extended on the basis of the reference, is applied to other technical schemes of similar conveying mechanisms, and has very wide application prospect.
It will be evident to those skilled in the art that the invention is not limited to the details of the foregoing illustrative embodiments, and that the present invention may be embodied in other specific forms without departing from the spirit or essential attributes thereof. The present embodiments are therefore to be considered in all respects as illustrative and not restrictive, the scope of the invention being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein, and any reference signs in the claims are not intended to be construed as limiting the claim concerned.
Furthermore, it should be understood that although the present description refers to embodiments, not every embodiment may contain only a single embodiment, and such description is for clarity only, and those skilled in the art should integrate the description, and the embodiments may be combined as appropriate to form other embodiments understood by those skilled in the art.
Claims (8)
1. The utility model provides a cleaning machine basket of flowers conveying mechanism, includes that one is used for bearing the weight of the basket of flowers (1) of waiting to wash the wafer and one is used for driving basket of flowers (1) carry out the wobbling drive assembly of circumferencial direction, its characterized in that: the flower basket is characterized by further comprising a vertical limiting assembly used for limiting the vertical direction stroke of the flower basket (1) and a horizontal limiting assembly used for limiting the horizontal direction stroke of the flower basket (1), wherein the horizontal limiting assembly is movably connected with the vertical limiting assembly, and the flower basket (1) is movably connected with the vertical limiting assembly; under the cooperation of the horizontal limiting component and the vertical limiting component, the swinging of the flower basket (1) in the circumferential direction is decomposed and converted into movement in the horizontal direction and the vertical direction.
2. The washer basket carrying mechanism of claim 1 wherein: the driving assembly comprises a driving motor (2), the setting direction of a motor shaft of the driving motor (2) is parallel to the setting direction of the whole flower basket (1), the central axis of an output shaft of the driving motor (2) is not coincident with the central axis of the flower basket (1), and the flower basket (1) is in transmission connection with the output shaft of the driving motor (2) through a swing arm (3); under the running state of the driving motor (2), an output shaft of the driving motor (2) drives the swing arm (3) to rotate, and the swing arm (3) drives the flower basket (1) to swing in the circumferential direction.
3. The washer basket carrying mechanism of claim 2 wherein: the vertical limiting assembly comprises a flower basket fixing frame (4), a first vertical limiting plate (5) and a second vertical limiting plate (6); the flower basket fixing frame (4) is composed of two fixing frame side plates and a fixing frame cross beam, wherein the two fixing frame side plates are respectively connected with two ends of the flower basket fixing frame (4), and the two fixing frame side plates are connected into a whole through the fixing frame cross beam.
4. The washer basket carrying mechanism of claim 3 wherein: first perpendicular limiting plate (5) and the equal symmetry in both sides of the perpendicular limiting plate of second (6) is provided with two sets of direction groups, every group the direction group all includes a plurality of guide rollers (7) that set up in a row along the limiting plate edge, first perpendicular limiting plate (5) reaches on the perpendicular limiting plate of second (6) two sets of on the equal parallel arrangement of direction group and every limiting plate the distance between the direction group with the width phase-match of mount curb plate.
5. The washer basket carrying mechanism of claim 4 wherein: the periphery of the guide roller (7) is provided with a circle of limiting groove, each fixing frame side plate is embedded into two groups of the guide groups arranged on the limiting plates on the same side, and the edge of each fixing frame side plate is in contact with the limiting groove on the periphery of the guide roller (7).
6. The washer basket carrying mechanism of claim 4 wherein: the first vertical limiting plate (5) is arranged between the flower basket fixing frame (4) and the swing arm (3), a movable groove (51) in the vertical direction is formed in the first vertical limiting plate (5), and a limiting rod (8) is connected to the flower basket fixing frame (4); gag lever post (8) movably wears to locate in activity groove (51), the one end of gag lever post (8) with be close to first perpendicular limiting plate (5) mount curb plate fixed connection the other end of gag lever post (8) with the one end fixed connection of swing arm (3) the other end of swing arm (3) with the output shaft fixed connection of driving motor (2).
7. The washer basket carrying mechanism of claim 4 wherein: horizontal spacing subassembly includes guide bar (9) and two direction connection box (10) of two parallel arrangement, every equal movably cover is located in direction connection box (10) on guide bar (9), first perpendicular limiting plate (5) reach the upper end of the two of the perpendicular limiting plate of second (6) respectively with one direction connection box (10) fixed connection.
8. The washer basket carrying mechanism of claim 7 wherein: a guide wheel matched with the guide rod (9) is arranged in the guide connecting box (10); by the rotation of the guide wheel, the guide connection box (10) moves on the guide rod (9) in a reciprocating manner.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010331491.3A CN111524831B (en) | 2020-04-24 | 2020-04-24 | Cleaning machine basket of flowers conveying mechanism |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010331491.3A CN111524831B (en) | 2020-04-24 | 2020-04-24 | Cleaning machine basket of flowers conveying mechanism |
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| CN111524831A true CN111524831A (en) | 2020-08-11 |
| CN111524831B CN111524831B (en) | 2022-04-15 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN202010331491.3A Active CN111524831B (en) | 2020-04-24 | 2020-04-24 | Cleaning machine basket of flowers conveying mechanism |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117438347A (en) * | 2023-12-15 | 2024-01-23 | 山东联盛电子设备有限公司 | Wafer etching device |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117438347A (en) * | 2023-12-15 | 2024-01-23 | 山东联盛电子设备有限公司 | Wafer etching device |
| CN117438347B (en) * | 2023-12-15 | 2024-03-12 | 山东联盛电子设备有限公司 | Wafer etching device |
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| Publication number | Publication date |
|---|---|
| CN111524831B (en) | 2022-04-15 |
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