JPS60137717A - Conveyance device for purification - Google Patents

Abstract

PURPOSE:To prevent spray of purifying liquid or the like by forming the captioned device for automatic purification of a wafer or the like in such a manner as a vertically mobile table with a swiveling arm, for suspending a carrier, is provided on a base which moves horizontally along a purifying tub. CONSTITUTION:A base 1 is horizontally moved and stopped at a position of each purifying tub, and an unillustrated carrier suspending arm is swiveled to above the purifying tub by means of a driving shaft 17 fitted to a housing 15. Subsequently, a table 14 is lowered through a motor 10, sprocket 11, chain 12 and a screw rod 8, and the unillustrated carrier is immersed in the purifying tub to be purified. After completion of purification, the table 14 is elevated and the arm is swiveled to be returned, while the base 1 is moved to the next purifying tub to repeat the same operation. Due to this structure, spray of purifying liquid or the like can be prevented.

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a transfer device in an apparatus for automatically cleaning wafers and the like.

In an automatic cleaning device for wafers, etc., as shown in Fig. 1, a plurality of cleaning tanks (a) are arranged in parallel, and a carrier (b) containing wafers, etc. is attached to the tip of a rotating arm (d) via a suspension mechanism (C). The drive shaft θ of this rotating arm d is attached to a moving table (not shown) provided inside the cover f, and is configured to slide in the water direction 1' along the washing tank a. .

Then, the carrier b is moved to a predetermined position by the moving table, and the rotating arm d is rotated to immerse the carrier b in the cleaning tank a, and after cleaning with chemicals, the rotating arm is rotated in the opposite direction. The carrier b is then pulled up from the cleaning tank a, and this series of operations is repeated to sequentially wash the carrier b in a plurality of cleaning tanks a.

In this case, the cover f is provided with a slit hole g so that the drive shaft e can slide therein, and the drive shaft e is formed so that the chemical solution or gas in the cleaning tank a does not scatter and enter the inside of the cover f. The slit hole g is always closed by a band-shaped sealing member that moves together with the slit hole g.

However, since the carrier b is moved in and out of each washing tank a by the rotational movement of the rotating arm d, the carrier b
Since the centrifugal force acts on the gear rear b and the rotation angle of the gear rear b is large, the adhered chemicals and gases are likely to scatter and enter the cover f through the small gap between the slit hole g and the seal member, or the cover f. It adhered to the area around the front side and caused corrosion.

The present invention (i+1) is to provide a 17 x 6" action conveying device which is made to eliminate such conventional disadvantages and which suppresses the circular arc movement of the carrier to a small extent and prevents the scattering of chemical liquids and gases during cleaning. With the goal.

In view of this, the present invention provides a table that can be moved vertically on a base that moves horizontally along the septic tank, and a rotating table that suspends the carrier on the table. 9 is a configuration in which the drive shaft of the arm is attached.

Hereinafter, the present invention will be explained in detail with reference to the illustrated embodiments.
It is designed so that it can move horizontally along this guide rail 3. 4 is a drive motor fixed to the base IV, and a pinion 5 is attached to its rotation 1I1111, and this pinion &:L is meshed with a rack 6 provided along the guide rail 3, The base 1 can be moved a predetermined distance by the pinion. Reference numeral 7 denotes a gate-shaped frame attached to the upper part of the base 1, and a threaded rod 8 is attached to the center thereof so as to be rotatable in forward and reverse directions, and a sprocket 9 is provided at one end of this threaded rod. The sprocket 11 of a drive motor 10 fixed to the side of the base 1 is wound around the sprocket 11 of the drive motor 10 by a chain 12. Idle bars 13 are provided on both sides of the threaded rod 8, and their upper ends are fixed to the frame 7, respectively. M Ir,,J: A table with a housing 15 attached to the center of the top surface and cylinders 16 on both sides, the housing 15 being screwed onto the threaded rod 8, and the cylinders 16 sliding onto the guide bar 13. They are fitted together so that the table 14 can move up and down within the frame 7 when the motor 10 is driven. Reference numeral 17 denotes a drive shaft attached to the housing 15, and as in the conventional example, this drive shaft projects to the front side through the slit hole of the force/grace, and is adapted to attach a rotating arm that suspends the carrier. There is.

Note that +8 and ]9 are cylinders attached to the table 1/l, and the gears 20 and 21 can be rotated in the forward and reverse directions, respectively, by the operation of the piston rod. The suspension mechanism can be driven by transmitting power to the suspension mechanism of the movable arm. The size is 22°23117L in the figure.This is the gear that transmits power to the drive shaft 17.

The cleaning conveyance device according to the present invention is constructed as described above.
1. The cleaning work for wafers, etc. is performed by horizontally (X-axis) movement of the base 1 and 1. As shown in FIG. Arm rotation (R)
, ilj movement, and vertical (Z-axis) movement of the table 14. That is, the base 1 is moved in the X-axis direction 1(-
to stop at point A, then rotate the arm to stop the carrier at point B, and from this state, move table 1 to Zill.
Lower the carrier in the + direction and immerse it in the cleaning tank h'J L
(0 point), after cleaning, the table 1/I is raised twice and returned from the 0 point to the D point, and the arm is rotated and returned from the D point to the B point - the cycle ends. Then, TG->F→0→H
A cycle is performed in the next cleaning tank in the order of →■→J, and the cleaning work is performed continuously in this manner.

In this case, the gear carriers 71 are moved in and out of each cleaning tank by vertical movement, which prevents the cleaning chemicals and gas that have landed on the carriers from scattering as much as possible compared to the conventional case where the arm rotates only. be able to. and,
The chemical solution dripping from the carrier is returned to the cleaning tank, so
It is possible to prevent the surrounding area of the cleaning tank from being contaminated with chemical solution. The angle of rotation of the arm is 1. "Conventional": Because it is small, the centrifugal force applied to the gear rear is small, which prevents the chemical solution from scattering and the carrier from swinging, making it possible to perform cleaning operations safely and reliably.

As explained above, the present invention adds Z-axis (up and down) movement to the transport device in an automatic cleaning device for wafers, etc., so that it is possible to reliably prevent the cleaning chemical solution and gas from scattering.
Corrosion caused by chemicals inside and outside the cover can be prevented, and the effect is enormous. Well, the number of movements required for Z-axis movement is not that large, so it is only necessary to make the width (height) of the slit hole formed in the cover slightly larger than before, so there is no need to significantly change the sealing mechanism. There is no risk of deterioration in sealing performance.

4. flti fl'- explanation of the same song Figure 1 is an external view of an automatic cleaning device, Figure 2 is a front view of the main parts showing an embodiment of the present invention, and Figure 3 is the same < (lul
Figures 1 and 1 are explanatory diagrams showing operations during cleaning work.

1 Base, 7... Frame, 8 Threaded rod, 9... Striped rocket, 10...
Motor, 11... - Sujirocket, 12... Chain, 13... Gaitonogu-114... Table,
15...)\Unong, 16 ・Nring, 17
...Drive shaft.

Claims (1)

[Claims] A base that moves horizontally along a plurality of cleaning tanks arranged in parallel is provided with a table that moves downward, and a drive shaft for a rotating arm that suspends the carrier is attached to this table. Conveyance device for cleaning.