CN107999458A - Full-automatic silicon wafer cleaning machine - Google Patents
Full-automatic silicon wafer cleaning machine Download PDFInfo
- Publication number
- CN107999458A CN107999458A CN201711242776.4A CN201711242776A CN107999458A CN 107999458 A CN107999458 A CN 107999458A CN 201711242776 A CN201711242776 A CN 201711242776A CN 107999458 A CN107999458 A CN 107999458A
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- fixed
- plate
- rinse bath
- rotating bar
- frame
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/04—Cleaning involving contact with liquid
- B08B3/045—Cleaning involving contact with liquid using perforated containers, e.g. baskets, or racks immersed and agitated in a liquid bath
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B13/00—Accessories or details of general applicability for machines or apparatus for cleaning
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/04—Cleaning involving contact with liquid
- B08B3/08—Cleaning involving contact with liquid the liquid having chemical or dissolving effect
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/04—Cleaning involving contact with liquid
- B08B3/10—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration
- B08B3/12—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration by sonic or ultrasonic vibrations
- B08B3/123—Cleaning travelling work, e.g. webs, articles on a conveyor
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- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Cleaning Or Drying Semiconductors (AREA)
Abstract
The invention discloses a kind of full-automatic silicon wafer cleaning machine, its key points of the technical solution are that：Including frame body, cleaning layer in frame body, is equipped with fixed frame in cleaning layer, several rinse baths is equipped with fixed frame, the bearing frame for putting silicon chip is equipped with rinse bath, fixed frame is equipped with the driving mechanism of drive bearing frame swing.It is an advantage of the invention that silicon chip can be allowed to come into full contact with collision friction with cleaning solution, the cleaning performance of silicon chip is improved.
Description
Technical field
The present invention relates to a kind of Wafer Cleaning equipment, more specifically to a kind of full-automatic silicon wafer cleaning machine.
Background technology
With the development of society, the application of silicon chip is more and more extensive, some is applied to solar power generation, and some is applied to system
Make the material of semiconductor.
Solar silicon wafers manufacturer of the current country single groove also in common use or multi-groove type combination cleaning by hand, silicon chip is put into clearly
Soaked in washing lotion, by silicon chip extracting after immersion a period of time.
It is opposing stationary motionless between silicon chip and cleaning solution under this cleaning way, mutual collision friction is very
It is few, and then the effect of Wafer Cleaning is not very good.
The content of the invention
The object of the present invention is to provide a kind of full-automatic silicon wafer cleaning machine, its advantage is that silicon chip can be allowed abundant with cleaning solution
Contact-impact friction, improves the cleaning performance of silicon chip.
The present invention above-mentioned technical purpose technical scheme is that：A kind of full-automatic silicon wafer cleaning
Machine, including frame body, cleaning layer in frame body are equipped with fixed frame in cleaning layer, and fixed frame is interior to be equipped with several rinse baths, in rinse bath
Equipped with the bearing frame for putting silicon chip, fixed frame is equipped with the driving mechanism for driving bearing frame to swing.
Through the above technical solutions, first cleaning solution will be put into rinse bath, in undertaking silicon chip being put into rinse bath
On frame, driving mechanism is finally opened, drive bearing frame to swing, allow mutual collision friction between cleaning solution and silicon chip, and then make silicon
Piece cleans cleaner.
The present invention is further arranged to：Driving mechanism includes the 3rd motor, rotating bar, bearing plate, slide, slide plate and L-type
Lift arm, is fixed with the bearing plate on the fixed frame of rinse bath both sides, slide is fixed on bearing plate, and slide plate slides are connected to
On slide, L-type lift arm long side, which is deep into rinse bath, to be fixed on bearing frame, and the short side of L-type lift arm is fixed on slide plate
On upper surface, rotating bar is located at the side of rinse bath, and rotating bar is fixed in the bearing block on fixed frame, and one end of bearing rod connects
It is connected on the 3rd motor, the both ends of bearing rod are fixed with belt wheel, and both sides of the rinse bath away from rotating bar one end are equipped with fixed station, Gu
Determine platform and be equipped with belt wheel, connected between the corresponding belt wheel in rinse bath both sides by belt, slide plate side wall is equipped with side plate, on side plate
Equipped with fixed plate, fixed plate compresses belt how on the lower surface of side plate.
Through the above technical solutions, when needing to drive bearing frame to swing, start the second motor, the second motor drives
Connecting rod is moved, and connecting rod rotates band movable belt pulley and rotates, and then drives belt to rotate, and belt movement will drive side plate and slide plate
It is mobile, and then bearing frame will be driven to move left and right, and then the silicon chip on bearing frame is preferably contacted with cleaning solution, improve silicon
The cleaning performance of piece.
The present invention is further arranged to：Driving mechanism can drive at the same time bearing frame in one group of rinse bath rise and under
Drop, actuating unit include guide holder, are fixed on guide rod, the first rectangular slab, the second rectangular slab, the lift arm of L-type, hinge into seat
Socket part, the first special-shaped articulated slab, the second special-shaped articulated slab, long hinge column, the first short hinge column, the second short hinge column, rotation axis,
3rd motor, retarder and rotating bar, fixed frame with first rinse bath in every group of groove and last cleaning groove sidewall
Corresponding position is equipped with fixed plate, and the fixed plate outer surface top of first rinse bath both sides is equipped with two parallel guiding
Seat, the fixed plate outer surface top of last rinse bath both sides are equipped with two parallel guide holders, and guide rod, which is arranged on, leads
Into seat, the upper end of guide rod is equipped with the first rectangular slab, and the lower end of guide rod is equipped with the second rectangular slab, the upper table of the first rectangular slab
Face is respectively equipped with supporting, and the long side of the lift arm of L-type is fixed on bearing frame, and the short side of the lift arm of L-type is fixed on undertaking
On part, articulated section is located at the lower end of fixed plate outer surface, and the first special-shaped articulated slab, the first special-shaped articulated slab are hinged with articulated section
Upper end is hinged with the roller contradicted with the first rectangular slab, long hinged column articulated in the lower part of the first special-shaped articulated slab, long hinge column
The first of two the same sides special-shaped articulated slab is linked together, the special-shaped hinge column lower end of first in the first fixed plate is equipped with two
Root hinge joint, one on the other, long hinged column articulated in upper link point, short hinge column is hinged on being hinged for lower end to two hinge joints
On point, rotating bar is rotatablely connected on the fixed frame in front of first rinse bath, and the second special-shaped articulated section is hinged on the two of rotating bar
End, the first short hinge column are horizontally hinged horizontally hinged special-shaped second in the lower part of the second special-shaped articulated slab, the second short hinge column
The top of articulated slab, the other end of the second short hinge column are hinged with the rotating member being socketed on the output shaft of retarder, retarder
It is connected with the 3rd motor.
Through the above technical solutions, when needing to drive bearing frame to swing up and down, start the 3rd motor, the conveying of retarder
Axis rotates, and then drives quasi- rolling rod to rotate, and rotating bar, which rotates, drives the second short inclined up and down motion of hinge column, and then drives
Second special-shaped articulated slab rotates, and the second special-shaped articulated slab carrys out back rotation and drives rotation axis to carry out back rotation, and rotation axis carrys out back rotation just
Power is transmitted to the opposite side of fixed frame, the special-shaped articulated slab of first in the fixed plate of such fixed frame both sides can rotate,
Rotation roller will move up and down first special-shaped articulated slab back and forth, and then promote rectangular slab to move up and down, and the first rectangular slab will
Promote guide rod to move up and down, and then the silicon chip on bearing frame and bearing frame can be driven to move up and down in groove, Jin Errang
Silicon chip is preferably contacted with cleaning solution, by the cleaner of Wafer Cleaning.
The present invention is further arranged to：The driving structure includes worm screw, turbine, belt wheel, skin and the 4th motor, fixed frame
Position corresponding with rinse bath both sides is equipped with fixed plate, and the outer surface of fixed plate is equipped with three parallel guide holders, three guiding
Guide rod is equipped with seat in the guide holder of both sides, worm screw is located in the guide holder of centre, and the upper end of worm screw and guide rod is fixed with drive
Movable plate, the lift arm of L-type is fixed with the upper surface of bearing frame both sides, and the long side of the lift arm of L-type is fixed on bearing frame, L
The short side of the lift arm of type is fixed in driving plate, and the middle part of fixed plate is equipped with fixed bearing block, and the axis of rolling is equipped with bearing block,
Turbine be socketed on the axis of rolling and and worm engaging, the axis of rolling be socketed with belt wheel close to rinse bath side, the end of rinse bath is set
There is rotating bar, the both ends of rotating bar are equipped with belt wheel, and the rotation axis upper belt-wheel of the same side is connected with axis of rolling upper belt-wheel by belt,
Rotation axis is fixed in retarder, and retarder is connected with the 4th motor.
Through the above technical solutions, after silicon chip is placed on and has been cleaned in rinse bath, start the 4th motor, the 4th motor turns
It is dynamic, drive the axis of rolling in retarder to rotate, rotation axis rotates band movable belt pulley and rotates, and into driving the axis of rolling to rotate, the axis of rolling turns
Dynamic to drive turbine rotation, turbine rotation drives worm screw to rise, and worm screw, which rises, drives the bearing frame in rinse bath to rise, and slowly rises
Hoisting frame, the water allowed on silicon chip slowly flows away, is then put on conveying mechanism, is transported in the strange mechanism of drying and is dried.
The present invention is further arranged to：The side wall of the cleaning layer is equipped with several exhaust outlets, and exhaust outlet is equipped with wind
Door.
Through the above technical solutions, can discharge the gas evaporated in rinse bath, reduction gas, which overflows, is scattered to sky
Possibility in gas.
The present invention is further arranged to：The air door is two, two air door flange form connections.
Through the above technical solutions, leaving area can be adjusted by mutually rotating two air doors, and then control exhaust energy
Power.
The present invention is further arranged to：The frame body outer cladding Germany import ecru layer of PVC.
Through the above technical solutions, German import ecru layer of PVC is tasteless, corrosion-resistant and anti-oxidant with totally nontoxic
The characteristics of, it can not only increase the service life of frame body, but it is very environmentally friendly.
The present invention is further arranged to：The cleaning part side is equipped with the drying portion dried to the silicon chip cleaned.
Through the above technical solutions, the silicon chip drying that drying portion will quickly can clean.
The present invention is further arranged to：It is alkali groove to have one in the rinse bath, and alkali groove is welded by NPP materials
's.
Through the above technical solutions, there is alkali groove made of NPP materials hygienic, nontoxic corrosion-resistant, non-scaling, high temperature resistant to protect
The advantages that energy saving and service life of temperature is long.
The present invention is further arranged to：Other rinse baths are made of stainless steel in addition to alkali groove in the rinse bath.
Through the above technical solutions, stainless steel have the characteristics that it is corrosion resistant, it is possible to reduce corrosion of the cleaning solution to rinse bath.
In conclusion the invention has the advantages that：
1st, silicon chip gripping body of the invention includes two gripping portions, and each gripping portion is equipped with 3 pairs of U-shaped clamping bars, and each pair is U-shaped
Clamping bar can grip a silicon chip, and then gripping body can once grip six silicon chips and be cleaned, and then greatly speed up
The cleaning efficiency of silicon chip；
2nd, the present invention includes cleaning part and drying portion, after silicon chip has cleaned in cleaning part, can be directly taken drying portion
In dried；
3rd, bearing frame is equipped with the rinse bath in cleaning part of the present invention, bearing frame can be transported up and down under the driving of driving mechanism
It is dynamic, and then the silicon chip on bearing frame can be driven to move up and down in cleaning solution, and then silicon chip can be allowed more preferable with cleaning solution
Contact, makes the cleaning performance of silicon chip more preferable.
Brief description of the drawings
Fig. 1 is the structure diagram of the present invention；
Fig. 2 is the schematic diagram for embodying the laterally driven structure of gripping body；
Fig. 3 is the schematic diagram for embodying gripping body structure；
Fig. 4 is to embody the schematic diagram for driving lifter rod lifting mechanism；
Fig. 5 is the schematic diagram for embodying clamping section structure；
Fig. 6 is the schematic diagram for embodying driving platform structure；
Fig. 7 is to embody vertical gripping plate and U-shaped clutch lever arrangements schematic diagram；
Fig. 8 is the schematic diagram for embodying cleaning Rotating fields；
Fig. 9 is the schematic diagram for embodying the first motion structure of bearing frame in rinse bath；
Figure 10 is the schematic diagram for embodying second of motion structure of bearing frame in rinse bath；
Figure 11 is the schematic diagram for embodying second of motion structure of bearing frame in rinse bath；
Figure 12 is the schematic diagram for embodying the third motion structure of bearing frame in rinse bath.
In figure, 1, frame body；11st, cleaning part；111st, cleaning layer；112nd, silicon chip gripping transfer layer；113rd, layer is driven；1131、
Adapting table；11311st, straight slot；114th, fixed frame；1141st, bearing plate；1142nd, slide；1143rd, slide plate；11431st, side plate；1144、
Bearing block；12nd, drying portion；13rd, layer of PVC；2nd, rinse bath；21st, feeding groove；22nd, ultrasonic rinse tank；23rd, AB liquid baths；24th, alkali groove；
25th, groove is lifted slowly；26th, bearing frame；261st, the lift arm of L-type；3rd, exhaust outlet；31st, air door；4th, silicon chip gripping conveying mechanism；41、
Gripping body；411st, loading plate；412nd, clamping section；4121st, fixed station；4122nd, bull stick；41221st, rotation section；4123rd, vertical folder
Take plate；4124th, fixing sleeve；4125th, U-shaped clamping bar；4126th, silicon chip；4127th, compressor arm；41271st, elastic component；42nd, engine
Structure；421st, babinet；4211st, cavity；422nd, the second guide rail；423rd, rectangular steel plates；424th, fixed part；425th, threaded sleeve；426、
Screw rod；427th, elevating lever；43rd, haulage gear；431st, channel steel；4311st, the first guide rail；432nd, plummer；4321st, right angle steel plate；
5th, hydraulic cylinder；51st, platform is driven；511st, drive rod；6th, the first motor；61st, the second motor；62nd, rotating bar；63rd, the 3rd motor；
64th, the 4th motor；65th, the 5th motor；7th, belt wheel；71st, belt；72nd, support base；8th, retarder；81st, rotating member；9th, fixed plate；
91st, articulated section；911st, the first special-shaped articulated slab；9111st, roller；92nd, guide holder；921st, guide rod；9211st, the first rectangular slab；
9212nd, the second rectangular slab；9213rd, driving plate；93rd, supporting；94th, the second special-shaped articulated slab；941st, the second short hinge column；95、
First short hinge column；96th, long hinge column；97th, worm screw；98th, turbine.
Embodiment
The present invention is described in further detail below in conjunction with attached drawing.
Embodiment：A kind of full-automatic silicon wafer cleaning machine, as depicted in figs. 1 and 2, includes the frame body 1 of a hollow cuboid,
1 outer cladding Germany import ecru layer of PVC 13 of frame body, is from left to right divided into two parts, is cleaning part 11 and drying portion respectively
12, it is cleaning layer 111 that cleaning part 11, which divides for three layers of upper, middle and lower, lower floor, and middle level grips transfer layer 112 for silicon chip, and upper strata is driving
Layer 113, cleaning layer 111 is interior to be equipped with several rinse baths 2（See Fig. 8）, silicon chip grips to be equipped with transfer layer 112 and driving layer 113
Silicon chip grips conveying mechanism 4, and silicon chip gripping conveying mechanism 4 includes gripping body 41, drives the drive of 41 horizontal movement of gripping body
Motivation structure 43 and the actuating unit 42 of driving 41 rise and fall of gripping body, when needing to clean silicon chip 4126, first
First rinse bath 2 is put into the gripping of groups of silicon chip 4126 by gripping body 41, by gripping after a period of time is cleaned
Mechanism 41 will get up in the gripping of silicon chip 4126 in groups, and silicon chip 4126 is put into equipped with different liquids under the driving of driving mechanism 43
Rinse bath 2 in cleaned, finally dried the silicon chip cleaned up 4126 is transported to drying portion 12.
As shown in figure 8, cleaning layer 111 is equipped with fixed frame 114,12 rinse baths 2 are equipped with fixed frame 114, from left to right
First is feeding groove 21, and second is ultrasonic rinse tank 22, and the 3rd to the 5th is A/B liquid baths, the 6th and the 8th
For ultrasonic rinse tank 22, the 7th is alkali groove 24, and the 9th to the 11st is ultrasonic rinse tank 22, and the 12nd is slow lifting groove
25, alkali groove 24 is welded for NPP materials, other grooves form to be stainless steel welded, and silicon chip 4126 is from left to right sequentially placed into not
With groove in cleaned, different cleaning solutions is placed with each groove, can to silicon chip 4126 groups reach different cleaning performances,
The side wall of cleaning layer 111 is equipped with several exhaust outlets 3, several exhaust outlets 3 are uniformly arranged on the side wall of cleaning layer 111
On, it can be discharged what is evaporated in rinse bath 2 for gas, reduction gas, which overflows, to be scattered in air, and exhaust outlet 3 is equipped with two
A damper 31, two 31 flange form of damper connections, leaving area can be adjusted by mutually rotating, and then the row of control
Gas ability.
As shown in figure 5 and figure 7, three 4126 gripping bodies 41 of silicon chip are equipped with gripping transfer layer, gripping body 41 includes
Loading plate 411, is equipped with two groups of clamping sections 412, every group of clamping section 412 can grip three pieces of silicon chips on 411 lower surface of loading plate
4126, two groups of clamping sections 412 are disposed in parallel on the lower surface of loading plate 411, and clamping section 412 includes fixed station 4121, bull stick
4122nd, gripping plate 4123, U-shaped clamping bar 4125, fixed station 4121 are fixed on the lower surface of loading plate 411, in a row set vertically
Putting, a fixed station 4121 of row two, a row is set close to 411 edge of loading plate, and another row is set close to the middle part of loading plate 411,
Bull stick 4122 is rotatably connected in fixed station 4121, is equipped with hydraulic cylinder 5 above the middle part at position between two bull sticks 4122,
Hydraulic stem passes through loading plate 411, and the driving platform 51 of cuboid is fixed with the hydraulic stem below loading plate 411（See Fig. 6）, drive
Dynamic 51 both sides of platform are respectively equipped with drive rod 511, and the drive rod 511 of both sides is one in front and one in back set, and are hinged with and turn on drive rod 511
Dynamic portion 41221, rotation section 41221 are fixed on bull stick 4122, and the vertical plate 4123 that grips is fixed on bull stick 4122, vertical gripping
Plate 4123 is equipped with fixing sleeve 4124, and 4124 fixing sleeve 4124 of fixing sleeve is connected on bull stick 4122, in gripping plate 4123 vertically
Lower part is fixed with three U-shaped clamping bars 4125, and the U-shaped clamping bar 4125 on two clamping plates of each clamping section 412 is mutually right
One should be formed and clamp combination, each rear and front end for clamping combination is respectively equipped with two compressor arms 4127, two compressor arms
4127 upper ends are fixed on loading plate 411, and elastic parts, two compressions are provided between compressor arm 4127 and loading plate 411
4127 lower end of bar is fixed with pressure strip.
As shown in figure 5, when need to pick up groups of silicon chip 4126 be put into rinse bath 2 when, drive loading plate first
411 decline, and when silicon chip 4126 is surrounded pressure strip by being compressed before and after silicon chip 4126 by clamping section 412, start hydraulic cylinder 5, hydraulic pressure
Bar drives driving platform 51 to move downward, and driving platform 51 drives rotation section 41221 to rotate while moving downward, rotation section 41221
Rotate and drive bull stick 4122 to rotate, and then bull stick 4122 drives vertical gripping plate 4123 to rotate, the vertical plate 4123 that grips rotates band
Move U-shaped clamping bar 4125 to rotate in opposite directions, be then lifted out loading plate 411 and rise, U-shaped clamping bar 4125 is connected to 4126 edge of silicon chip
In the groove of setting, silicon chip 4126 is driven to move up, then driving mechanism 43 can drive 411 transverse shifting of loading plate, by silicon
Piece 4126 moves the top of the different rinse bath 2 in road, then drives actuating unit 42, drives loading plate 411 to decline, by silicon chip
4126 are put into rinse bath 2, then start hydraulic cylinder 5, and hydraulic cylinder 5 rises, and drive bull stick 4122 and vertical gripping plate 4123
It is turned out, releases the compression to silicon chip 4126, allows silicon chip 4126 to be cleaned in rinse bath 2.
As shown in Figure 2 and Figure 4, drive 113 bottom of layer to be equipped with adapting table 1131, straight slot 11311 be equipped with adapting table 1131,
Straight slot 11311 penetrates through whole cleaning part 11, and the haulage gear that driving gripping body 41 moves is equipped with the both sides of straight slot 11311
43, haulage gear 43 includes channel steel 431, and 431 side wall of channel steel is equipped with sliding slot, first is fixed with the upper surface of channel steel 431
Guide rail 4311, slidably connects plummer 432 on the first guide rail 4311, and 432 side of plummer is fixed with right angle steel plate 4321, and two
The actuating unit 42 that driving gripping body 41 lifts is fixed between block right angle steel plate 4321, actuating unit 42 includes babinet 421,
Cavity 4211 is equipped with babinet 421, the rear wall of cavity 4211 is equipped with two the second parallel guide rails 422, and two second are led
Rectangular steel plates 423 are slidably connected on rail 422, steel plate is equipped with two fixed parts 424, and two fixed parts 424 are right one on the other
It should set, an elevating lever 427 is fixed with two fixed parts 424, the lower end of elevating lever 427 is fixed on loading plate 411
On upper surface, a worm screw 97 is equipped between two guide rails, 97 upper end of worm screw is pierced by babinet 421, is pierced by the worm screw of babinet 421
97 are fixed on the retarder 8 that 421 upper surface of babinet is equipped with, and 8 upper end of retarder is connected with a belt wheel 7, in the rear side of babinet 421
Wall top is equipped with the first motor 6, also is provided with belt wheel 7 on the output shaft of the first motor 6, the belt wheel 7 on 6 output shaft of the first motor with
Belt wheel 7 on retarder 8 is connected by belt 71, and rectangular steel plates 423 are equipped with threaded sleeve 425, screw thread towards 97 side of worm screw
Casing 425 is threadedly coupled with worm screw 97.
When the first motor 6 rotates, the rotating speed of the first motor 6 is slowed down by retarder 8, the drive of 8 slow-speed of revolution of retarder
Worm screw 97 rotates, and worm screw 97, which rotates, drives threaded sleeve 425 to move up and down, and then drives on rectangular steel plates 423 and elevating lever 427
Lower movement.
As shown in Fig. 2, being equipped with two support bases 72 on adapting table 1131, one in front and one in back correspondence is set two support bases 72
Put, the second motor 61 be fixed with support base 72 above, support base 72 below is equipped with belt wheel 7, the second motor 61 it is defeated
Belt wheel 7 is fixed with shaft, front and rear two belt wheels 7 are connected by belt 71, and the plummer 432 on the first guide rail 4311 is another
Side is equipped with fixed plate 9, and belt 71 is fixed on plummer 432 by fixed plate 9, and 61 positive and negative both direction of the second motor rotates, band
Dynamic belt 71 moves forward and backward, and then belt 71 drives plummer 432 and whole babinet 421 to move forward and backward.
As shown in Figure 2 and Figure 4, when needing to translate gripping body 41, the second motor 61, the second motor 61 are started
Band movable belt pulley 7 rotates, and then drives belt 71 to rotate, and belt 71, which moves forward and backward, drives plummer 432 to be moved on guide rail, at the same time
Plummer 432 drives babinet 421 to move, and babinet 421 drives elevating lever 427 to move again, and elevating lever 427 drives whole gripping body
41 movements, and then silicon chip 4126 can be gripped and cleaned in different rinse baths 2 by gripping body 41.
As shown in figure 9, two rectangle bearing frames 26 are set up side by side on 1 long side direction of vertical frame body in feeding groove 21,
The driving mechanism that driving bearing frame 26 moves is equipped with fixed frame 114, the both ends of bearing frame 26 are respectively and fixedly connected with the lifting of L-type
Arm 261,261 long side of lift arm of L-type are arranged in feeding groove 21 and are fixed with bearing frame 26, the short side of the lift arm 261 of L-type
Reach outside feeding groove 21, the long side of fixed frame 114 is being equipped with bearing plate 1141, bearing plate with 21 corresponding position of feeding groove
1141 are equipped with slide 1142, slidably connect slide plate 1143 on slide 1142, reach the lifting of the L-type outside feeding groove 21
Arm 261 is fixed on the upper surface of slide plate 1143, and slide plate 1143 horizontally slips on slide 1142, can be driven in feeding groove 21
Bearing frame 26 move left and right, 114 short side side of fixed frame is equipped with a rotating bar 62, and rotating bar 62 is close to 21 end of feeding groove
Set, 62 both sides of rotating bar are fixed in the bearing block 1144 that fixed frame 114 is equipped with, are respectively equipped with the both sides of rotating bar 62
One belt wheel 7, belt wheel 7 are equipped with fin, and both sides of the feeding groove 21 away from 62 one end of rotating bar are respectively equipped with a fixed station 4121, Gu
Determine platform 4121 and be equipped with two corresponding bearing blocks 1144, be fixed with belt wheel 7 on bearing block 1144,21 both sides of feeding groove are corresponding
Be equipped with a root skin band 71 between two belt wheels 7, belt 71 is equipped with fin, the fin on belt 71 can with it is convex on belt wheel 7
Rib is clamped, and is fixed with side plate 11431 on the side wall of slide plate 1143, and side plate 11431 is just in the top of belt 71, in belt 71
Lower section be equipped with two fixed plates 9, fixed plate 9 contacts side with belt 71 and is equipped with groove, groove and the fin card on belt 71
Connect, the both sides of fixed plate 9 are fixed by screws on side plate 11431, and then side plate 11431 and fixed plate 9 extrude belt 71
In centre, one end of rotation is connected with the 3rd motor 63, and the 3rd motor 63 is fixed on fixed frame 114.
When needing to drive bearing frame 26 to swing, start the 3rd motor 63, the 3rd motor 63 drives rotating bar 62 to transport
Dynamic, rotating bar 62 rotates band movable belt pulley 7 and rotates, and then drives belt 71 to rotate, and the movement of belt 71 will drive 11431 He of side plate
Slide plate 1143 moves, and then bearing frame 26 will be driven to move left and right, so make silicon chip 4126 on bearing frame 26 preferably with
Cleaning solution contacts, and improves the cleaning performance of silicon chip 4126.
As shown in Figure 10 and Figure 11, remaining groove is divided into four groups, and it is one group, the 5th that first group, which is second to the 4th,
It it is one group to the 8th, the 9th to the 11st is one group, and the 12nd is individually for one group, and bearing frame 26 drives in first three groups groove
Motivation structure is all identical, and fixed frame 114 is corresponding with first rinse bath 2 in every group of groove and last 2 side wall of rinse bath
Position is equipped with fixed plate 9, and every piece of fixed plate 9 is equipped with two guide holders 92, is parallel to each other between guide holder 92, in guide holder 92
Guide rod 921 is respectively equipped with, the upper end of every two guide rods 921 is fixed with the first rectangular slab 9211, every two guide rods 921
Lower end is all fixed with the second rectangular slab 9212, and supporting 93, bearing frame 26 are fixed with the first rectangular slab 9211 of front and rear upper end
On the short side of lift arm 261 of L-type be fixed on supporting 93.
As shown in Figure 10 and Figure 11, an articulated section 91 is respectively equipped with 9 lower end of the second fixed plate, is divided on two articulated sections 91
The first special-shaped articulated slab 911 is not hinged with, and the first special-shaped middle part of articulated slab 911 is hinged on articulated section 91, and first is special-shaped hinged
911 upper end of plate is hinged with roller 9111, and roller 9111 is contradicted with the second rectangular slab 9212 respectively, two first special-shaped articulated slabs
911 lower ends are hinged with a horizontally disposed long hinge column 96, and two first special-shaped articulated slabs 911 are connected to by long hinge column 96
Together, the first special-shaped 911 lower end of articulated slab in the first fixed plate 9 is equipped with two hinge joints, and two hinge joints are one on the other, long
Hinge column 96 is hinged in upper link point, and the hinge joint of lower end is hinged with the first short hinge column 95, in first front of rinse bath 2
Equipped with a rotating bar 62, rotating bar 62 is fixed in the bearing block 1144 that 114 both sides of fixed frame are equipped with, 62 both ends of rotating bar point
Not She You the second special-shaped articulated section 91, the middle part of the second special-shaped articulated slab 94 is hinged in rotating bar 62, the first short hinge column 95
It is horizontally hinged to have a second short hinge column in the lower part of the second special-shaped articulated slab 94, the upper articulation of the second special-shaped articulated slab 94
941, the other end of the second short hinge column 941 is hinged on a power set, and actuating unit 42 includes the 4th motor 64 and subtracts
Fast device 8 and rotating member 81, retarder 8 are fixed on support base 72, and the output shaft of the 4th motor 64 is connected with retarder 8, are rotated
Part 81 is socketed on the output shaft of retarder 8, and the output rotating speed of retarder 8 reduces after the deceleration of retarder 8, drives socket
Rotating member 81 on 8 output shaft of retarder rotates, and the side wall of 81 end of rotating member is equipped with protruding shaft, the second short hinge column 941
It is hinged in protruding shaft.
As shown in Figure 10 and Figure 11, when the 4th motor 64 works, the conveying axis of retarder 8 rotate, and then drive accurate turn
Moving part 81 rotates, and rotating bar 62, which rotates, drives the second short 941 inclined up and down motion of hinge column, and then drives the second abnormal shape hinged
Plate 94 rotates, and the second special-shaped articulated slab 94 carrys out back rotation and drives rotating bar 62 to carry out back rotation, and rotating bar 62 carrys out back rotation just will be dynamic
Power is transmitted to the opposite side of fixed frame 114, and the special-shaped articulated slab 911 of first in such 114 both sides fixed plate 9 of fixed frame can
Rotate, rotation roller 9111 will move up and down the first special-shaped articulated slab 911 back and forth, and then promote the second rectangular slab about 9212
Movement, the first rectangular slab 9211 will promote guide rod 921 to move up and down, and then can drive bearing frame 26 and bearing frame 26
On silicon chip 4126 move up and down in the rinse bath 2, and then allow silicon chip 4126 preferably to be contacted with cleaning solution, silicon chip 4126 is clear
That washes is cleaner.
As shown in figure 12, the 4th group of groove namely lifts the driving mechanism and the fortune of other grooves of the bearing frame 26 in groove 25 slowly
Flowing mode is different, and 114 both sides of fixed frame also are provided with fixed plate 9 with 25 corresponding position of slow lifting groove, and 9 top of two fixed plates is set
There are three parallel guide holders 92, guide rod 921, middle guide holder 92 are equipped with both sides guide holder 92 in three guide holders 92
In be equipped with worm screw 97, the upper end of worm screw 97 and guide rod 921 is fixed with driving plate 9211, and fixed L-type carries on bearing frame 26
The short side for rising arm 261 is fixed in driving plate 9211, is equipped with the axis of rolling at the middle part of fixed plate 9, right with worm screw 97 on the axis of rolling
The position answered is equipped with turbine 98, and the axis of rolling draws upgrading slot side to be socketed with belt wheel 7 close to slow, is equipped with and turns in 25 side of lifting groove slowly
Lever 62, rotating bar 62 are fixed on 114 both sides of fixed frame equipped with bearing block 1144, and 62 both sides of rotating bar are equipped with belt wheel 7, rotate
Belt wheel 7 on bar 62 is connected with the belt wheel 7 on the axis of rolling by belt 71, and rotating bar 62 is fixed in retarder 8, retarder 8
It is connected with the 5th motor 65, the 5th motor 65 rotates, and drives the rotating bar 62 in retarder 8 to rotate, and rotating bar 62, which rotates, to be driven
Belt wheel 7 rotates, and into driving the axis of rolling to rotate, the axis of rolling, which rotates, drives turbine 98 to rotate, and turbine 98, which rotates, drives worm screw 97 to rise
And decline, 97 raising and lowering of worm screw drive 26 raising and lowering of bearing frame in slow lifting groove 25.
After silicon chip 4126, which is placed on, have been cleaned in slow lifting groove 25, starts the 5th motor 65 and slowly drive hoisting frame to rise,
The water allowed on silicon chip 4126 slowly flows away, and is then put on conveying mechanism, is transported in drying portion 12 and is dried.
The course of work：When needing to clean groups of silicon chip 4126,4126 silicon of silicon chip is put into feeding groove 21
In, soaked, then drive the 3rd motor 63 of 21 side of feeding groove, the conveying axis of retarder 8 rotate, and then drive accurate turn
Lever 62 rotates, and rotating bar 62, which rotates, drives the second short 941 inclined up and down motion of hinge column, and then drives the second abnormal shape hinged
Plate 94 rotates, and the second special-shaped articulated slab 94 carrys out back rotation and drives rotating bar 62 to carry out back rotation, and rotating bar 62 carrys out back rotation just will be dynamic
Power is transmitted to the opposite side of fixed frame 114, and the special-shaped articulated slab 911 of first in such 114 both sides fixed plate 9 of fixed frame can
Rotating, rotation roller 9111 will move up and down the first special-shaped articulated slab 911 back and forth, and then under promoting 9211 on the first rectangular slab
Movement, the first rectangular slab 9211 will promote guide rod 921 to move up and down, and then can drive bearing frame 26 and bearing frame 26
On silicon chip 4126 move up and down in groove, and then allow silicon chip 4126 preferably to be contacted with cleaning solution, silicon chip 4126 carried out clearly
Wash.
After silicon chip 4126 has cleaned in feeding groove 21, the first motor 6 of driving layer 113 is opened, the first motor 6 drives
Belt wheel 7 rotates, and then drives belt 71 to rotate, and belt 71, which moves forward and backward, drives plummer 432 to be moved on slide 4311, at the same time
Plummer 432 drives babinet 421 to move, and babinet 421 drives elevating lever 427 to move again, and elevating lever 427 drives whole gripping body
41 move, and then gripping body 41 moves to the top of silicon chip 4126 in groups, then the second motor 61 in drive case 421,
Second motor 61 works, and the rotating speed of the second motor 61 is slowed down by retarder 8,426 turns of the drive screw rod of 8 slow-speed of revolution of retarder
Dynamic, screw rod 426, which rotates, drives threaded sleeve 425 to move up and down, and then drives rectangular steel plates 423 and elevating lever 427 to move up and down,
Move to always clamping section 412 by silicon chip 4126 surround compressor arm 4217 will silicon chip 4126 is front and rear compress when, start hydraulic cylinder 5,
Hydraulic stem drives driving platform 51 to move downward, and driving platform 51 drives rotation section 41221 to rotate while moving downward, rotation section
41221, which rotate drive bull stick 4122, rotates, and then bull stick 4122 drives vertical gripping plate 4213 to rotate, and vertical pressure takes 4213 turns of plate
It is dynamic to drive U-shaped clamping bar 4125 to rotate in opposite directions, the second motor 61 is then driven, drives elevating lever 427 to rise, and then lifts carrying
Plate 411, U-shaped clamping bar 4125 are connected in the groove of 4126 edge of silicon chip setting, drive silicon chip 4126 to move up.
Then the first motor 6 is being started, the first motor 6 drives belt 71 to rotate, and belt 71 drives babinet 421 to move, into
And drive elevating lever 427 and gripping body 41 to move back and forth, silicon chip 4126 is clipped into the top of different rinse baths 2 and then again by silicon
Cleaning on the bearing frame 26 that piece 4126 is put into different rinse baths 2, bearing frame 26 moves up and down during cleaning,
Allow silicon chip 4126 preferably to be contacted with cleaning solution, continue to carry silicon chip 4126 after cleaned, always by silicon chip
4126 all clean one time in 12 rinse baths 2, and finally silicon chip 4126 is put on conveyer belt again, silicon chip 4126 is transported to
Dried in drying baker.
This specific embodiment is only explanation of the invention, it is not limitation of the present invention, people in the art
Member as needed can make the present embodiment the modification of no creative contribution after this specification is read, but as long as at this
All protected in the right of invention be subject to Patent Law.
Claims (10)
1. a kind of full-automatic silicon wafer cleaning machine, including frame body (1), it is characterized in that：Frame body (1) interior cleaning layer (111), cleaning layer
(111) fixed frame (114) is equipped with, several rinse baths (2) are equipped with fixed frame (114), is equipped with rinse bath (2) and puts silicon
The bearing frame (26) of piece (4126), fixed frame (114) are equipped with the driving mechanism for driving bearing frame (26) to swing.
2. a kind of full-automatic silicon wafer cleaning machine according to claim 1, it is characterized in that：Driving mechanism includes the 3rd motor
(63), rotating bar (62), bearing plate (1141), slide (1142), slide plate (1143) and L-type lift arm（261）, rinse bath (2)
The bearing plate (1141) is fixed with the fixed frame (114) of both sides, slide (1142) is fixed on bearing plate (1141), slide plate
(1143) it is slidably connected on slide (1142), L-type lift arm（261）Long side is deep into rinse bath (2) and is fixed on bearing frame
(26) on, L-type lift arm（261）Short side be fixed on the upper surface of slide plate (1143), rotating bar (62) is located at rinse bath (2)
Side, rotating bar (62) is fixed on the bearing block (1144) on fixed frame (114) Nei, rotating bar（62）One end be connected to
On three motors (63), rotating bar（62）Both ends be fixed with belt wheel (7), both sides of the rinse bath (2) away from rotating bar (62) one end
Equipped with fixed station (4121), fixed station (4121) is equipped with belt wheel (7), passes through between the corresponding belt wheel (7) in rinse bath (2) both sides
Belt (71) connects, and slide plate (1143) side wall is equipped with side plate (11431), and side plate (11431) is equipped with fixed plate (9), fixed
Belt (71) is pressed on the lower surface of side plate (11431) by plate (9).
3. a kind of full-automatic silicon wafer cleaning machine according to claim 1, it is characterized in that：Driving mechanism can drive one at the same time
Bearing frame (26) raising and lowering in group rinse bath (2), actuating unit (42) include guide holder (92), are fixed on guide holder
（92）Interior guide rod (921), the first rectangular slab (9211), the second rectangular slab (9212), L-type lift arm (261), articulated section
(91), the first special-shaped articulated slab (911), the second special-shaped articulated slab (94), long hinge column (96), the first short hinge column (95), the
Two short hinge columns (941), rotating member（81）, the 3rd motor (63), retarder (8) and rotating bar (62), fixed frame (114) with
First rinse bath (2) and last corresponding position of rinse bath (2) side wall in every group of groove are equipped with fixed plate (9), and first
Fixed plate (9) outer surface top of a rinse bath (2) both sides is equipped with two parallel guide holders (92), last cleaning
Fixed plate (9) outer surface top of groove (2) both sides is equipped with two parallel guide holders (92), and guide rod (921), which is arranged on, leads
In to seat (92), the upper end of guide rod (921) is equipped with the first rectangular slab (9211), and the lower end of guide rod (921) is equipped with the second square
Shape plate (9212), the upper surface of the first rectangular slab (9211) are respectively equipped with supporting (93), and the long side of L-type lift arm (261) is consolidated
It is scheduled on bearing frame (26), the short side of L-type lift arm (261) is fixed on supporting (93), and articulated section (91) are located at fixed plate
(9) lower end of outer surface, is hinged with the first special-shaped articulated slab (911), first special-shaped articulated slab (911) upper end on articulated section (91)
The roller (9111) contradicted with the first rectangular slab (9211) is hinged with, long hinge column (96) is hinged on the first special-shaped articulated slab
(911) lower part, long hinge column (96) link together the first of two the same sides the special-shaped articulated slab (911), and first fixes
The first special-shaped articulated slab on plate (9)（911）Lower end is equipped with two hinge joints, two hinge joints one on the other, long hinge column
(96) it is hinged in upper link point, the first short hinge column（95）It is hinged on the hinge joint of lower end, rotating bar (62) rotation connection
On fixed frame (114) in front of first rinse bath (2), the second special-shaped articulated section (91) is hinged on the both ends of rotating bar (62),
First short hinge column（95）It is horizontally hinged in the lower part of the second special-shaped articulated slab (94), the second short hinge column（941）It is horizontally hinged
On the top of the second special-shaped articulated slab (94), second is short hinged（941）The other end and be socketed on the output shaft of retarder (8)
Rotating member (81) it is hinged, retarder (8) is connected with the 3rd motor (63).
4. a kind of full-automatic silicon wafer cleaning machine according to claim 1, it is characterized in that：The driving structure includes worm screw
(97), turbine (98), belt wheel (7), belt（7）It is corresponding with rinse bath (2) both sides with the 4th motor (64), fixed frame (114)
Position is equipped with fixed plate (9), and the outer surface of fixed plate (9) is equipped with three parallel guide holders (92), in three guide holders (92)
Guide rod (921) is equipped with both sides guide holder (92), worm screw (97) is located in the guide holder (92) of centre, worm screw (97) and guiding
The upper end of bar (921) is fixed with driving plate（9213）, the lift arm of L-type is fixed with the upper surface of bearing frame (26) both sides
(261), the long side of the lift arm (261) of L-type is fixed on bearing frame (26), and the short side of the lift arm (261) of L-type is fixed on drive
Movable plate（9213）On, the middle part of fixed plate (9) is equipped with fixed bearing block (1144), and the axis of rolling, whirlpool are equipped with bearing block (1144)
Wheel (98) is socketed on the axis of rolling and is engaged with worm screw (97), and the axis of rolling is socketed with belt wheel (7) close to rinse bath (2) side, clearly
The end of washing trough (2) is equipped with rotating bar (62), and the both ends of rotating bar (62) are equipped with belt wheel (7), the rotating bar of the same side（62）On
Belt wheel (7) is connected with axis of rolling upper belt-wheel (7) by belt (71), rotating bar（62）It is fixed in retarder (8), retarder
(8) it is connected with the 4th motor (64).
5. a kind of full-automatic silicon wafer cleaning machine according to claim 1, it is characterized in that：The side wall of the cleaning layer (111)
Several exhaust outlets (3) are equipped with, exhaust outlet (3) is equipped with air door (31).
6. a kind of full-automatic silicon wafer cleaning machine according to claim 5, it is characterized in that：The air door (31) be two, two
A air door (31) flange form connection.
7. a kind of full-automatic silicon wafer cleaning machine according to claim 1, it is characterized in that：Frame body (1) the outer cladding Germany
Import ecru layer of PVC (13).
8. a kind of full-automatic silicon wafer cleaning machine according to claim 1, it is characterized in that：Cleaning part (11) side is equipped with
The drying portion (12) dried to the silicon chip (4126) cleaned.
9. a kind of full-automatic silicon wafer cleaning machine according to claim 1, it is characterized in that：There is one in the rinse bath (2)
For alkali groove (24), alkali groove (24) is welded by NPP materials.
10. a kind of full-automatic silicon wafer cleaning machine according to claim 1, it is characterized in that：Alkali groove is removed in the rinse bath (2)
(24) other rinse baths (2) are made of stainless steel outside.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711242776.4A CN107999458B (en) | 2017-11-30 | 2017-11-30 | Full-automatic silicon wafer cleaning machine |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711242776.4A CN107999458B (en) | 2017-11-30 | 2017-11-30 | Full-automatic silicon wafer cleaning machine |
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| CN107999458A true CN107999458A (en) | 2018-05-08 |
| CN107999458B CN107999458B (en) | 2020-09-22 |
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ID=62055730
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| Application Number | Title | Priority Date | Filing Date |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111524831A (en) * | 2020-04-24 | 2020-08-11 | 江苏芯梦半导体设备有限公司 | Cleaning machine basket of flowers conveying mechanism |
| CN112827926A (en) * | 2020-12-30 | 2021-05-25 | 深圳沃夫特自动化设备有限公司 | Full-automatic flexible glue cleaning equipment |
| WO2023241734A1 (en) * | 2022-06-14 | 2023-12-21 | Tcl Zhonghuan Renewable Energy Technology Co., Ltd. | Lifting control apparatuses and cleaners including the same |
| CN118002553A (en) * | 2024-04-10 | 2024-05-10 | 江苏英思特半导体科技有限公司 | Silicon wafer cleaning machine with silicon wafer adjusting function |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104813438A (en) * | 2012-11-28 | 2015-07-29 | 盛美半导体设备（上海）有限公司 | Method and apparatus for cleaning semiconductor wafer |
-
2017
- 2017-11-30 CN CN201711242776.4A patent/CN107999458B/en active Active
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104813438A (en) * | 2012-11-28 | 2015-07-29 | 盛美半导体设备（上海）有限公司 | Method and apparatus for cleaning semiconductor wafer |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111524831A (en) * | 2020-04-24 | 2020-08-11 | 江苏芯梦半导体设备有限公司 | Cleaning machine basket of flowers conveying mechanism |
| CN111524831B (en) * | 2020-04-24 | 2022-04-15 | 江苏芯梦半导体设备有限公司 | Cleaning machine basket of flowers conveying mechanism |
| CN112827926A (en) * | 2020-12-30 | 2021-05-25 | 深圳沃夫特自动化设备有限公司 | Full-automatic flexible glue cleaning equipment |
| WO2023241734A1 (en) * | 2022-06-14 | 2023-12-21 | Tcl Zhonghuan Renewable Energy Technology Co., Ltd. | Lifting control apparatuses and cleaners including the same |
| CN118002553A (en) * | 2024-04-10 | 2024-05-10 | 江苏英思特半导体科技有限公司 | Silicon wafer cleaning machine with silicon wafer adjusting function |
| CN118002553B (en) * | 2024-04-10 | 2024-06-04 | 江苏英思特半导体科技有限公司 | Silicon wafer cleaning machine with silicon wafer adjusting function |
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| Publication number | Publication date |
|---|---|
| CN107999458B (en) | 2020-09-22 |
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