CN111446527A - 基于立体电感的双层硅基滤波器的制作方法 - Google Patents
基于立体电感的双层硅基滤波器的制作方法 Download PDFInfo
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- CN111446527A CN111446527A CN202010273934.8A CN202010273934A CN111446527A CN 111446527 A CN111446527 A CN 111446527A CN 202010273934 A CN202010273934 A CN 202010273934A CN 111446527 A CN111446527 A CN 111446527A
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01P—WAVEGUIDES; RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE
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Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN112259942A (zh) * | 2020-08-31 | 2021-01-22 | 中国空间技术研究院 | 一种用于毫米波段的双工器及其制备方法 |
CN112420319A (zh) * | 2020-11-10 | 2021-02-26 | 山东傲天环保科技有限公司 | 一种立体悬空电感器及其制造方法 |
Citations (9)
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CN1334594A (zh) * | 2001-08-24 | 2002-02-06 | 清华大学 | 硅基单面加工悬浮结构微机械电感的制作方法 |
CN1564372A (zh) * | 2004-03-26 | 2005-01-12 | 华东师范大学 | 一种片上lc无源低通滤波器及其制备方法 |
WO2007055878A2 (en) * | 2005-11-02 | 2007-05-18 | Northrop Grumman Corporation | Compact printed filters with self-connected lc resonators |
CN101060027A (zh) * | 2007-05-15 | 2007-10-24 | 东南大学 | 抑制衬底涡流效应的微电子机械电感及其制备方法 |
CN102231452A (zh) * | 2011-04-15 | 2011-11-02 | 深圳市麦捷微电子科技股份有限公司 | 一种ltcc滤波器制作工艺及其制得的ltcc滤波器 |
CN102779807A (zh) * | 2012-01-16 | 2012-11-14 | 中国科学院上海微系统与信息技术研究所 | 一种与rdl工艺兼容的电感元件及制造方法 |
US20160126925A1 (en) * | 2014-11-03 | 2016-05-05 | Rf Micro Devices, Inc. | Semiconductor resonators with reduced substrate losses |
WO2017189592A1 (en) * | 2016-04-25 | 2017-11-02 | Kumu Networks, Inc. | Integrated delay modules |
CN207753006U (zh) * | 2018-01-15 | 2018-08-21 | 宁波大学 | 一种基于硅通孔技术的三维带通滤波器 |
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2020
- 2020-04-09 CN CN202010273934.8A patent/CN111446527B/zh active Active
Patent Citations (9)
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CN1334594A (zh) * | 2001-08-24 | 2002-02-06 | 清华大学 | 硅基单面加工悬浮结构微机械电感的制作方法 |
CN1564372A (zh) * | 2004-03-26 | 2005-01-12 | 华东师范大学 | 一种片上lc无源低通滤波器及其制备方法 |
WO2007055878A2 (en) * | 2005-11-02 | 2007-05-18 | Northrop Grumman Corporation | Compact printed filters with self-connected lc resonators |
CN101060027A (zh) * | 2007-05-15 | 2007-10-24 | 东南大学 | 抑制衬底涡流效应的微电子机械电感及其制备方法 |
CN102231452A (zh) * | 2011-04-15 | 2011-11-02 | 深圳市麦捷微电子科技股份有限公司 | 一种ltcc滤波器制作工艺及其制得的ltcc滤波器 |
CN102779807A (zh) * | 2012-01-16 | 2012-11-14 | 中国科学院上海微系统与信息技术研究所 | 一种与rdl工艺兼容的电感元件及制造方法 |
US20160126925A1 (en) * | 2014-11-03 | 2016-05-05 | Rf Micro Devices, Inc. | Semiconductor resonators with reduced substrate losses |
WO2017189592A1 (en) * | 2016-04-25 | 2017-11-02 | Kumu Networks, Inc. | Integrated delay modules |
CN207753006U (zh) * | 2018-01-15 | 2018-08-21 | 宁波大学 | 一种基于硅通孔技术的三维带通滤波器 |
Non-Patent Citations (1)
Title |
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李鸽: "基于TSV技术的集成开关滤波器研究", 《中国优秀硕士学位论文全文数据库 信息科技辑》 * |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN112259942A (zh) * | 2020-08-31 | 2021-01-22 | 中国空间技术研究院 | 一种用于毫米波段的双工器及其制备方法 |
CN112420319A (zh) * | 2020-11-10 | 2021-02-26 | 山东傲天环保科技有限公司 | 一种立体悬空电感器及其制造方法 |
CN112420319B (zh) * | 2020-11-10 | 2022-07-19 | 合肥德珑电子科技有限公司 | 一种立体悬空电感器及其制造方法 |
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