CN111399202B - Spatial light modulator coupling device without zero-order diffraction light - Google Patents
Spatial light modulator coupling device without zero-order diffraction light Download PDFInfo
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- CN111399202B CN111399202B CN202010396839.7A CN202010396839A CN111399202B CN 111399202 B CN111399202 B CN 111399202B CN 202010396839 A CN202010396839 A CN 202010396839A CN 111399202 B CN111399202 B CN 111399202B
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B17/00—Systems with reflecting surfaces, with or without refracting elements
- G02B17/02—Catoptric systems, e.g. image erecting and reversing system
- G02B17/06—Catoptric systems, e.g. image erecting and reversing system using mirrors only, i.e. having only one curved mirror
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- G02B27/42—Diffraction optics, i.e. systems including a diffractive element being designed for providing a diffractive effect
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Abstract
The invention belongs to the field of spatial light field regulation and control, and relates to a spatial light modulator coupling device without zero-order diffraction light, which comprises a sealing box, an asymmetric triangular reflector and a spatial light modulator; the asymmetric triangular reflector and the spatial light modulator are oppositely arranged and are arranged in the sealing box; the sealing box is provided with a light inlet hole and a light outlet hole; the incident light is emitted from the light outlet after sequentially passing through the light inlet, the asymmetric triangular reflector, the spatial light modulator and the asymmetric triangular reflector. The invention provides a spatial light modulator coupling device without zero-order diffraction light, which can regulate and control a high-precision light field, can inhibit zero-order light beams without a spatial filter, is modularized and compact and is easy to combine with other systems.
Description
Technical Field
The invention belongs to the field of spatial light field regulation and control, relates to a spatial light modulator coupling device, and particularly relates to a spatial light modulator coupling device without zero-order diffracted light.
Background
The invention of the laser in 1960 greatly promoted the development of natural scientific research, such as laser life science, optical information processing, optical micro-nano processing and other scientific research fields based on laser. The main limitation of common commercial lasers is that the output mode is fixed, generally, a fundamental mode gaussian beam, and the requirements of modern scientific research and application on specific distribution of optical field amplitude, phase and polarization state cannot be met. The spatial light field regulation and control technology based on the spatial light modulator for regulating and controlling the spatial parameters of the light field converts the fundamental mode Gaussian beam into a novel light field with any structure, and promotes the rapid development of the fields of optical information storage, optical micro-nano processing, optical communication, optical microscopy, optical micro-manipulation and the like. The commonly used Light field modulation Device mainly includes a Digital Micromirror Device (DMD), a Deformable Mirror (DM), and a liquid crystal Spatial Light Modulator (SLM). In scientific research, the liquid crystal spatial light modulator is the most applied device due to high light energy utilization rate. The liquid crystal spatial light modulator modulates the phase distribution of the optical field by using the birefringence characteristics of liquid crystal molecules, and further controls the intensity and the polarization characteristics of the optical field. The optical anisotropy of the liquid crystal molecules causes the phase modulation depth of the optical field to be related not only to the optical axis orientation of the liquid crystal molecules, but also to the polarization state of the incident light. A liquid crystal spatial light modulator is a polarization selective device that modulates only incident light having a particular polarization state, typically linearly polarized in the horizontal direction. Among them, the most commonly used reflective liquid crystal spatial light modulator works in both normal incidence and small angle incidence, as shown in fig. 1 and fig. 2, respectively. For the normal incidence mode, a non-polarizing beam splitter prism (such as NPBS in fig. 1) is required to implement phase modulation, which results in the light energy utilization of the system being lower than 25%, and the low energy utilization makes the working mode less applicable. In order to maximize the use of light energy, researchers often use low angle incidence. Small angle incidence can reduce the precision of light field regulation. Theoretically, the greater the angle of incidence, the lower the accuracy. To ensure the accuracy of the light field modulation, the incident light angle is usually required to be small, for example, the german HoloEYE company requires an angle of less than 6 °, while the japan Hamamatsu company requires an angle of less than 10 °. The complete separation of the incident and emergent light in the small angle incidence mode may result in the need for the laser beam to travel a long distance, as shown at d1 in fig. 2. Considering the size of the optical elements for collimating and separating the two light beams, the system has the disadvantages of scattered light path and large occupied space, thereby reducing the stability of the system. In addition, due to the grid structure of the liquid crystal spatial light modulator, namely, the filling factor can not reach 100%, incident light is modulated by the spatial light modulator to generate unmodulated zero-order light beams, and the quality of a light field is reduced. Therefore, suppression of the zero order beam is required. A common approach is to block the zero order beam (the 0 order beam in fig. 3) by using a spatial filter (the stop in fig. 3) that allows only the modulated light field (the +1 order beam in fig. 3) to pass. This ensures that the final system has only a modulated light field distribution. The introduction of spatial filters not only adds complexity to the system, but is also difficult to implement in certain applications. In femtosecond laser processing, for example, an excessively high optical power density can burn out spatial filters placed at the focal plane of the lens. In addition, the introduction of the spatial filter increases the exit angle of the modulated light (+1 order), reducing the modulation accuracy.
Disclosure of Invention
In order to solve the problems of scattered system optical path and zero-order light beam filtering existing in the background technology, the invention provides a spatial light modulator coupling device which has high-precision light field regulation and control, can inhibit zero-order light beams without a spatial filter, is modularized and compact and is easy to combine with other systems and has no zero-order diffraction light.
In order to achieve the purpose, the invention adopts the following technical scheme:
a spatial light modulator coupling device free of zero order diffracted light, characterized by: the spatial light modulator coupling device without zero-order diffraction light comprises a sealed box, an asymmetric triangular reflector and a spatial light modulator; the asymmetric triangular reflector and the spatial light modulator are oppositely arranged and are arranged in the sealing box; the sealing box is provided with a light inlet hole and a light outlet hole; the incident light is emitted from the light outlet after sequentially passing through the light inlet, the asymmetric triangular reflector, the spatial light modulator and the asymmetric triangular reflector.
The position relation between the asymmetric triangular reflector and the spatial light modulator satisfies the following conditions: d2 is more than or equal to d 1;
wherein:
d1 is the vertical distance from the intersection point of the incident light to the spatial light modulator and the emergent light modulated by the spatial light modulator to the spatial light modulator;
d2 is the vertical distance from the vertex of the asymmetric triangular reflector to the spatial light modulator.
The relationship between the vertex angle alpha of the asymmetric triangular reflector and the emitting angle beta of the laser beam modulated by the spatial light modulator is as follows: α is 90 ° + β/2.
The asymmetric triangular reflector comprises a first reflecting waist surface and a second reflecting waist surface connected with the first reflecting waist surface; the incident light sequentially passes through the light inlet hole, the first reflecting waist surface, the spatial light modulator and the second reflecting waist surface and then is emitted from the light outlet hole; the vertex of the asymmetric triangular reflector is a connection point of the first reflecting surface and the second reflecting surface.
The included angle between the first reflecting waist surface and the axis of the seal box is 45 degrees; the included angle between the second reflecting waist surface and the axis of the seal box is gamma, and the gamma is 45 degrees + beta/2.
The vertex angle alpha of the asymmetric triangular reflector is 93-95 degrees, and the included angle gamma between the second reflecting waist surface and the axis of the sealing box is 48-50 degrees.
The first reflecting waist surface and the second reflecting waist surface are both plated with high-reflection films.
The light inlet hole and the light outlet hole are concentric.
The spatial light modulator coupling device without the zero-order diffraction light also comprises a threaded hole arranged on the sealing box.
The threaded holes are uniformly distributed in the circumferential direction of the light inlet hole and/or the circumferential direction of the light outlet hole by taking a connecting line of the light inlet hole and the light outlet hole as a center.
The invention has the advantages that:
the invention provides a spatial light modulator coupling device without zero-order diffraction light, which comprises a sealing box, an asymmetric triangular reflector and a spatial light modulator; the asymmetric triangular reflector and the spatial light modulator are oppositely arranged and are arranged in the sealing box; the sealing box is provided with a light inlet hole and a light outlet hole; the incident light is emitted from the light outlet after sequentially passing through the light inlet, the asymmetric triangular reflector, the spatial light modulator and the asymmetric triangular reflector. Light through holes through which incident light and emergent light pass are formed in two sides of the sealing box; the asymmetric triangular reflector is arranged on an incident light path and an emergent light path of the spatial light modulator and used for coupling incident light and emergent light, and the surfaces of two asymmetric surfaces of the asymmetric triangular reflector are plated with high-reflection films. The invention simultaneously realizes the vertical incidence of the laser beam and the small-angle emission of the modulated light beam, can inhibit the zero-order light beam without a spatial filter, and solves the problems of discrete components, unstable system, difficult zero-order light beam inhibition and the like commonly existing in the prior reflective spatial light field regulation system. On the premise of high-efficiency coupling of input and output laser beams, the interference of zero-order light beams is avoided, the occupied space of a space light field regulation and control light path is greatly compressed, the whole space light field regulation and control device is miniaturized and compacted, the volume and weight of the whole machine are greatly reduced, and the system is very favorable for modularization and instrumentation.
The invention utilizes the asymmetric triangular reflector to realize the vertical incidence of the laser beam to the spatial light modulator and the small-angle emergence of the modulated light; the asymmetric triangular reflector is used for restraining zero-order light beams which are not modulated by the spatial light modulator; the incident light and the emergent light can be guided and separated in the minimum distance by using the asymmetric triangular reflector; the reflection type space light field regulation and control module based on the coupling light beams of the asymmetric triangular reflector has high light energy utilization rate and wide band applicability, is suitable for light sources in a range from a visible light band to a middle infrared wavelength, and greatly expands the application range of the space light field regulation and control module. The incident light and the emergent light of the invention are parallel, which is very beneficial to the adjustment of the system light path and the continuous expansion of the function. The invention can be widely applied to all space light field regulation and control systems using the reflective spatial light modulator, such as an optical tweezers system, a structure illumination microscope system, an optical information processing and storing system and the like. The sealed box can shield diffraction light of each order generated after the laser beam is modulated by the SLM. In addition, the sealed sealing box is beneficial to isolating dust, and the SLM is prevented from being damaged and lowered due to the fact that the SLM adsorbs excessive dust, so that the SLM is effectively protected. The invention can set the vertex angle alpha of different asymmetric triangular reflectors and the angle gamma of the waist surface 22, meets the requirements of vertical incidence of laser beams and small-angle emergent of modulated light, and improves the accuracy of light field regulation and control.
Drawings
Fig. 1 is a schematic diagram of a spatial light modulator SLM in normal incidence in an optical system;
FIG. 2 is a schematic diagram of a small angle of incidence of a spatial light modulator SLM in an optical system;
FIG. 3 is a schematic diagram of zero order light blocking scheme in a small angle incidence mode;
FIG. 4 is a schematic diagram of a spatial light modulator coupling device without zeroth order diffracted light according to the present invention;
FIG. 5 is a schematic diagram of a configuration in which multiple spatial light modulators are used in series;
FIG. 6 is a schematic structural diagram of a preferred embodiment of the spatial light modulator coupling device without zeroth order diffracted light provided by the present invention.
Reference numerals:
1-a spatial light modulator; 2-asymmetric triangular reflector; 3-sealing the box; 21-a first reflective waist surface; 22-a second reflective waist surface; 31-a light incident hole; 32-light exit hole.
Detailed Description
The invention is described in further detail below with reference to the following figures and specific examples:
as shown in fig. 4, the present invention provides a spatial light modulator coupling device without zero-order diffracted light, which comprises a sealed box 3, an asymmetric triangular reflector 2 and a spatial light modulator 1; the asymmetric triangular reflector 2 and the spatial light modulator 1 are oppositely arranged and are arranged in the sealing box 3; the sealing box 3 is provided with a light inlet hole 31 and a light outlet hole 32; the incident light sequentially passes through the light inlet 31, the asymmetric triangular reflector 2, the spatial light modulator 1 and the asymmetric triangular reflector 2 and then exits from the light outlet 32.
The positional relationship between the asymmetric triangular reflector 2 and the spatial light modulator 1 satisfies: d2 is more than or equal to d 1;
wherein:
d1 is the vertical distance from the intersection point of the incident light incident on the spatial light modulator 1 and the emergent light modulated by the spatial light modulator 1 to the spatial light modulator 1 (i.e. d1 is the vertical distance from the two beam separation points to the SLM when the incident light and the emergent light are just separated);
d2 is the vertical distance from the apex of the asymmetric triangular reflector 2 to the spatial light modulator 1.
The relationship between the vertex angle α of the asymmetric triangular reflector 2 and the exit angle β of the laser beam modulated by the spatial light modulator 1 is: α is 90 ° + β/2.
The asymmetric triangular reflector 2 comprises a first reflecting waist surface 21 and a second reflecting waist surface 22 connected with the first reflecting waist surface 21; the incident light sequentially passes through the light inlet hole 31, the first reflection waist surface 21, the spatial light modulator 1 and the second reflection waist surface 22 and then is emitted from the light outlet hole 32; the vertex of the asymmetric triangular reflector 2 is a connection point of the first reflecting surface and the second reflecting surface.
The included angle between the first reflecting waist surface 21 and the axis of the seal box 3 is 45 degrees; the angle between the second reflecting waist surface 22 and the axis of the capsule 3 is γ, γ being 45 ° + β/2. The apex angle alpha of the asymmetric triangular reflector 2 is 93-95 degrees, and the included angle gamma between the second reflecting waist surface 22 and the axis of the sealing box 3 is 48-50 degrees. The first reflection waist surface 21 and the second reflection waist surface 22 are both plated with high reflection films. The light inlet hole 31 and the light outlet hole 32 are concentric.
The spatial light modulator coupling device without zero-order diffraction light further comprises threaded holes arranged on the sealing box, the threaded holes are uniformly distributed in the circumferential direction of the light inlet hole 31 and/or the circumferential direction of the light outlet hole 32 by taking a connecting line of the light inlet hole 31 and the light outlet hole 32 as a center, and the threaded holes can be conveniently butted with other optical components.
The two waist surfaces of the asymmetric triangular reflector 2 adopted by the invention are plated with high-reflection films, two sides of the sealing box 3 close to the two waist surfaces of the asymmetric triangular reflector 2 are respectively provided with light through holes as an input end and an output end of a whole space light field, namely a light inlet hole 31 and a light outlet hole 32 of the sealing box 3, and the light inlet hole 31 and the light outlet hole 32 are concentrically arranged; the positions and distances of the asymmetric triangular reflector 2 and the spatial light modulator 1 are adjusted and fixed in the sealing box 3, and the specific positions are set to be that two waist surfaces of the asymmetric triangular reflector 2 are arranged on an incident light path and an emergent light path of the spatial light modulator 1 and used for coupling incident light and emergent light.
The included angle between the first reflection waist surface 21 and the horizontal line NN 'is 45 degrees, and the angle of the laser beam vertical to the horizontal line NN' irradiated on the spatial light modulator after being reflected by the first reflection waist surface 21 is 0 degree, namely, the laser beam is vertically incident; an included angle gamma between the second reflecting waist surface 22 and the horizontal line NN' and an emergent angle beta of the laser beam after the laser beam is modulated by the spatial light modulator satisfy a relation gamma of 45 degrees + beta/2; the vertex angle alpha of the asymmetric triangular reflector 2 and the emitting angle beta of the laser beam after the laser beam is modulated by the spatial light modulator satisfy the relation alpha being 90 degrees + beta/2.
The two asymmetric waist surfaces of the asymmetric triangular reflector 2 are silver-plated reflecting surfaces, the incident light A is reflected by the first reflecting waist surface 21 and then vertically irradiates the spatial light modulator 1(SLM) to be modulated, and the modulated light irradiates the second reflecting waist surface 22 and is reflected out. From the geometric relationship, if the incident light is incident perpendicularly to the central line NN' of the asymmetric triangular reflector 2 and the spatial light modulator 1, the laser beam reflected by the first reflection waist surface 21 is perpendicularly incident on the liquid crystal panel of the spatial light modulator 1, the laser beam modulated by the spatial light modulator loaded with the blazed grating phase hologram is emitted at a small angle β, and is finally reflected by the second reflection waist surface 22, and the finally obtained emergent light B is parallel to the incident light a. The zero-order light beam C which is not modulated due to the grid structure of the spatial light modulator returns along the original path to irradiate the first reflection waist surface 21, and finally exits through the hole 31, so that the separation of the emergent light B is realized. An included angle γ between the second reflecting waist surface 22 and the horizontal line NN' and an emitting angle β of the laser beam modulated by the spatial light modulator satisfy a relation γ of 45 ° + β/2; the vertex angle α of the asymmetric triangular reflector 2 and the emission angle β of the laser beam modulated by the spatial light modulator satisfy the relation α being 90 ° + β/2. The small angle of 6-10 degrees of modulated laser beams is required to be emitted, the value range of gamma is 48-50 degrees, and the value range of alpha is 93-95 degrees. The vertex of the asymmetric triangular reflector 2 is placed at a position (such as point O in fig. 3, that is, d2 is d1) where the incident light and the emergent light are just separated as much as possible, so that the propagation distance of the laser beam can be greatly reduced, and the space occupied by the system is compressed.
The vertex angle of the asymmetric triangular reflector 2 may be designed to be α 93 °, so that the incident angle of the incident light on the spatial light modulator SLM is 0 °, and the exit angle of the laser beam modulated by the spatial light modulator SLM is 6 °. If the incident light spot diameter D is 10mm, the minimum distance at which the incident light and the outgoing light are completely separated is D1 ═ D/tan (β) ═ 8/tan (6 °) ≈ 95.1 mm. Considering the problem of processing precision of the vertex angle of the asymmetric triangular reflector 2, the actual distance d2 from the asymmetric triangular reflector 2 to the SLM liquid crystal panel may be set to 100 mm. The incident light and the emergent light are parallel, which is very beneficial to the adjustment of the system light path and the continuous expansion of the function.
According to the invention, the asymmetric triangular reflector 2 and the spatial light modulator SLM are arranged in the sealing box 3, so that a modular compact spatial light field regulation device can be formed, the quality of the spatial light field regulation device is effectively reduced, the system quality is reduced, the transfer convenience of the device is improved, and the modular device is beneficial to the instrumentation and commercialization of the system. Through the design, the whole space light field regulation and control module has very good compatibility and expansibility and can be easily combined with other optical systems; the compact design is also beneficial to the application of the space light field regulation and control technology in special fields, such as space experiments and the like with extremely high requirements on system quality and stability.
As shown in fig. 5, when the amplitude, phase and polarization state of the optical field need to be modulated simultaneously by connecting a plurality of spatial light modulators 1 in series, the present invention can simply and quickly connect a plurality of spatial light modulators 1 in series (the apparatus of the present invention (including the spatial light modulator 1) is connected in series by a relay system (for example, a 4f system, which is a common knowledge) in an optical system, thereby avoiding system redundancy and confusion caused by connecting a plurality of spatial light modulators 1 in series and avoiding system complexity caused by using a plurality of spatial filters.
As shown in FIG. 6, a PLUTO series spatial light modulator 1 and a 93-degree asymmetric triangular reflector 2 (bottom surface: 52.8 mm. times.25 mm, height: 25mm) from HoloeYE, Germany are mounted in a very small sealed box 3 (143 mm. times.76 mm. times.48 mm), two SM1 threads with a clear hole size of 1.035 inch-40 are provided with four 8X 4-40UNC threaded holes centered on the clear hole, and the threaded holes can be conveniently butted with other optical components, such as a 30mm cage system. The sealing box 3 can seal the whole device from dust, diffraction spots and the like.
Claims (9)
1. A spatial light modulator coupling device free of zero order diffracted light, characterized by: the spatial light modulator coupling device without zero-order diffraction light comprises a sealed box (3), an asymmetric triangular reflector (2) and a spatial light modulator (1); the asymmetric triangular reflector (2) and the spatial light modulator (1) are oppositely arranged and are arranged in the sealing box (3); the sealing box (3) is provided with a light inlet hole (31) and a light outlet hole (32); incident light sequentially passes through the light inlet (31), the asymmetric triangular reflector (2), the spatial light modulator (1) and the asymmetric triangular reflector (2) and then is emitted out of the light outlet (32); the asymmetric triangular reflector (2) comprises a first reflecting waist surface (21) and a second reflecting waist surface (22) connected with the first reflecting waist surface (21); the included angle between the first reflecting waist surface (21) and the axis of the seal box (3) is 45 degrees, the included angle between the second reflecting waist surface (22) and the axis of the seal box (3) is gamma, and gamma =45 degrees + beta/2.
2. The spatial light modulator coupling device without zero order diffracted light of claim 1, wherein: the position relation between the asymmetric triangular reflector (2) and the spatial light modulator (1) satisfies the following conditions: d2 is more than or equal to d 1;
wherein:
d1 is the vertical distance from the intersection point of the incident light entering the spatial light modulator (1) and the emergent light modulated by the spatial light modulator (1) to the spatial light modulator (1);
d2 is the vertical distance from the vertex of the asymmetric triangular reflector (2) to the spatial light modulator (1).
3. The spatial light modulator coupling device without zero order diffracted light according to claim 2, wherein: the relationship between the vertex angle alpha of the asymmetric triangular reflector (2) and the exit angle beta of the laser beam modulated by the spatial light modulator (1) is as follows: α =90 ° + β/2.
4. A spatial light modulator coupling device without zero order diffracted light according to claim 3, wherein: incident light sequentially passes through the light inlet hole (31), the first reflection waist surface (21), the spatial light modulator (1) and the second reflection waist surface (22) and then is emitted from the light outlet hole (32); the vertex of the asymmetric triangular reflector (2) is a connection point of the first reflecting surface and the second reflecting surface.
5. The device according to claim 4, wherein: the vertex angle alpha of the asymmetric triangular reflector (2) is 93-95 degrees, and the included angle gamma between the second reflecting waist surface (22) and the axis of the sealing box (3) is 48-50 degrees.
6. The device according to claim 5, wherein: the first reflection waist surface (21) and the second reflection waist surface (22) are both plated with high reflection films.
7. A spatial light modulator coupling means according to any one of claims 1 to 6 free of zero order diffracted light, wherein: the light inlet hole (31) and the light outlet hole (32) are concentric.
8. The device according to claim 7, wherein: the spatial light modulator coupling device without the zero-order diffraction light further comprises a threaded hole arranged on the sealing box.
9. The device according to claim 8, wherein: the threaded holes are uniformly distributed in the circumferential direction of the light inlet hole (31) and/or the circumferential direction of the light outlet hole (32) by taking a connecting line of the light inlet hole (31) and the light outlet hole (32) as a center.
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