CN107144948A - A kind of spatial light modulator coupling device based on three corner reflectors - Google Patents
A kind of spatial light modulator coupling device based on three corner reflectors Download PDFInfo
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- CN107144948A CN107144948A CN201710453170.9A CN201710453170A CN107144948A CN 107144948 A CN107144948 A CN 107144948A CN 201710453170 A CN201710453170 A CN 201710453170A CN 107144948 A CN107144948 A CN 107144948A
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- 230000008878 coupling Effects 0.000 title claims abstract description 18
- 238000010168 coupling process Methods 0.000 title claims abstract description 18
- 238000005859 coupling reaction Methods 0.000 title claims abstract description 18
- 230000003287 optical effect Effects 0.000 claims description 27
- 230000033228 biological regulation Effects 0.000 abstract description 12
- 230000009286 beneficial effect Effects 0.000 abstract description 5
- 238000000280 densification Methods 0.000 abstract description 4
- 239000004973 liquid crystal related substance Substances 0.000 description 10
- 230000010287 polarization Effects 0.000 description 6
- 230000000694 effects Effects 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 239000000428 dust Substances 0.000 description 3
- 238000011161 development Methods 0.000 description 2
- 230000010365 information processing Effects 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 238000011160 research Methods 0.000 description 2
- 101100459910 Arabidopsis thaliana NCS1 gene Proteins 0.000 description 1
- 241001323321 Pluto Species 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 230000002596 correlated effect Effects 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
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- 230000005611 electricity Effects 0.000 description 1
- 230000008030 elimination Effects 0.000 description 1
- 238000003379 elimination reaction Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 239000010903 husk Substances 0.000 description 1
- 238000005286 illumination Methods 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 238000000879 optical micrograph Methods 0.000 description 1
- 238000012576 optical tweezer Methods 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 230000001629 suppression Effects 0.000 description 1
Classifications
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B17/00—Systems with reflecting surfaces, with or without refracting elements
- G02B17/02—Catoptric systems, e.g. image erecting and reversing system
- G02B17/023—Catoptric systems, e.g. image erecting and reversing system for extending or folding an optical path, e.g. delay lines
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B17/00—Systems with reflecting surfaces, with or without refracting elements
- G02B17/02—Catoptric systems, e.g. image erecting and reversing system
- G02B17/06—Catoptric systems, e.g. image erecting and reversing system using mirrors only, i.e. having only one curved mirror
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/0006—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 with means to keep optical surfaces clean, e.g. by preventing or removing dirt, stains, contamination, condensation
Abstract
Present invention relates particularly to a kind of spatial light modulator coupling device based on three corner reflectors, the problem of component of generally existing is discrete in Reflective spatial light field regulator control system, system is unstable at present is solved.Coupling device includes seal box, the isoceles triangle reflector and spatial light modulator being arranged in seal box；Seal box both sides are provided with the light hole that incident light and emergent light pass through；Isoceles triangle reflector is arranged in the input path and emitting light path of spatial light modulator, and for coupling incident light and emergent light, two of isoceles triangle reflector wait central plane surface to be coated with highly reflecting films.The present invention is on the premise of high efficiency coupling input and outgoing laser beam, the space-consuming that spatial light field regulates and controls light path is greatly reduced, so that whole spatial light field regulation device miniaturization and densification, substantially reduce the volume weight of complete machine, are very beneficial for the modularization and instrumentation of system.
Description
Technical field
Regulate and control field the present invention relates to spatial light field, and in particular to one kind couples input using three corner reflectors and output swashs
The spatial light modulator coupling device of light beam.
Background technology
The invention of nineteen sixty laser is greatly promoted the development of physicism, has emerged in large numbers a large amount of using laser as base
The scientific research of plinth, such as laser life science, optical information processing, optical micro/nano processing.But, most of lasers can only be defeated
Go out fundamental-mode gaussian beam, this single-mode is difficult to the research and application for meeting modern science, it is therefore desirable to basic mode Gauss light
Amplitude, phase and the polarization state of beam are regulated and controled.Spatial light field control technique can be converted to fundamental-mode gaussian beam any new
Grain husk space structure light field, be widely used at present optical information storage, optical micro/nano processing, optic communication, optical microphotograph and
The fields such as optical micro-manipulation.
The core devices of spatial light field regulation and control are spatial light modulators.Space light modulation can be controlled by computer programming
Device is modulated to the amplitude and phase of incident light, so that the light field output of arbitrary patterns is produced, with high flexibility.Its
Operation principle is, according to specific physical effect (such as acoustooptical effect, magneto-optic effect, electrooptic effect), to pass through optics or electricity
The physical characteristic of each modulating unit, makes the modulated unit of phase and amplitude of incident field in addressing control spatial light modulator
After change, finally give expected optical field distribution.Common spatial light modulator mainly has DMD
(Digital Micromirror Device, DMD), distorting lens (Deformable Mirror, DM) and liquid crystal spatial light modulation
Device (Spatial Light Modulator, SLM).DMD is intensity-type modulator part, with refresh rate is fast, light energy is utilized
Rate height and the high advantage of damage threshold, but the phase of incident field can not be modulated.DM is phase modulator, but its
Pixel number is fewer (tens to hundreds of), and single pixel dimension is larger, and spatial resolution is than relatively low.Liquid crystal spatial light
Modulator is then modulated before laser wave using LCoS chips, can enter the modulation of line phase and amplitude, and liquid crystal panel has in addition
The spatial resolution higher than DMD and DM and bigger phase modulation depth, are using most in current spatial light field regulator control system
Extensive modulator, wherein again the most commonly used with the reflective liquid crystal spatial light field modulation with high-light-energy utilization rate.
Liquid crystal molecule is a kind of uniaxial crystal, with birefringent characteristic.This optically anisotropic feature causes liquid crystal
It is not only related to the direction of optic axis of liquid crystal molecule to the phase modulation depth of light field, it is relevant also with the polarization state of incident light.Therefore,
LCD space light modulator is a kind of polarization selector, it is necessary to which incident light is the plane wave of linear polarization.Reflection type liquid crystal space
Occupation mode of the optical modulator in optical system has normal incidence and low-angle incident two kinds, respectively as depicted in figs. 1 and 2.It is right
In normal incidence mode, if being separated using polarization splitting prism to incident light and emergent light, Modulation and Amplitude Modulation can only be realized and
Phase-modulation can not be realized, so to realize the phase-modulation of light field, it is necessary to using unpolarized light splitting in normal incidence mode
Prism (NPBS in such as Fig. 1).However, because laser beam passes through unpolarized Amici prism, the utilization ratio of optical energy of system twice
To be less than 25%.In many applications, so low utilization ratio of optical energy is that researcher is undesirable.Therefore, based on anti-
The spatial light field regulator control system of emitting LCD space light modulator is generally by the way of low-angle is incident, and in order to ensure light
The degree of accuracy of field regulation and control, incident angle of light needs smaller.Different commercial space optical modulators requires different, such as German
HoloEYE companies require to be no more than 6 °, and Hamamatsu companies of Japan require to be no more than 10 °.At a so small angle
Make it that incident light and emergent light are completely separable in degree, while in view of the optical element for collimating and separating two light beams
Size, laser beam needs to propagate the dmin in a longer segment distance, such as Fig. 2.Thus easily lead to system light path it is loose,
In a jumble, so as to cause the volume and weight of whole system to greatly increase.On the one hand discrete light path system is unfavorable for the instrument of system
Device, on the other hand, because resonant frequency and its quality of object are negatively correlated, quality is bigger, and resonant frequency is lower, and general
Commercial optical vibration-isolating platform can only suppress more than tens hertz of resonant frequency.Spatial light field regulator control system is very accurate light
System, excessive quality can cause the resonant frequency of whole system there was only several hertz, so as to be difficult to be pressed down by optics vibration-isolating platform
System, causes the unstable of system.
The content of the invention
To solve at present, the component of generally existing is discrete, system is unstable in Reflective spatial light field regulator control system
Problem, the present invention proposes a kind of spatial light modulator coupling dress that the incidence of laser beam low-angle is realized based on three corner reflectors
Put, realize spatial light field regulation device modularization and densification, whole spatial light field regulator control system device can be made closely,
And be easy to be combined with other systems.
The technical scheme is that：
A kind of spatial light modulator coupling device based on three corner reflectors, including seal box, be arranged in seal box
Isoceles triangle reflector and spatial light modulator；Seal box both sides are provided with the light hole that incident light and emergent light pass through, described
Light hole is arranged concentrically；Two central planes of isoceles triangle reflector are arranged on the input path and emitting light path of spatial light modulator
On, for coupling incident light and emergent light, two of the isoceles triangle reflector wait central plane surface to be coated with highly reflecting films；Isosceles
The position relationship of three corner reflectors and spatial light modulator is met：D2 >=d1,
Wherein：D1 is the joint of incident light and emergent light to the vertical range of spatial light modulator；
D2 is the summit of isoceles triangle reflector to the vertical range of spatial light modulator；
Laser beam incide angle beta in spatial light modulator and isoceles triangle reflector apex angle α meet relation beta=
α-90°。
Further, isoceles triangle reflector is positioned over the joint of incident light and emergent light, i.e. d2=d1.By isosceles three
Corner reflector is positioned over incident light and emergent light just separated place, reduces the propagation distance of laser beam, pressure to the utmost
Space shared by compression apparatus.
Further, two of isoceles triangle reflector wait central plane to be silvered reflective face.
Further, be additionally provided with screwed hole on seal box, the screwed hole centered on the optical axis of light hole circumferentially
Direction is uniform, and the setting of screwed hole can be docked easily with other optical components.
Further, the apex angle α of isoceles triangle reflector is 96 °~100 °.
Advantages of the present invention is：
1. the present invention can be guided and separation incident light and emergent light in minimum distance using isoceles triangle reflector,
On the premise of high efficiency coupling input and outgoing laser beam, the space-consuming that spatial light field regulates and controls light path is greatly reduced, has been made
Whole spatial light field regulation device miniaturization and densification are obtained, the volume weight of complete machine is substantially reduced, is very beneficial for system
Modularization and instrumentation.
2. the Reflective spatial light field regulation and control module based on isoceles triangle reflector coupled light beam has high-light-energy utilization rate
With broadband applicability, it is applicable for the light source in the range of visible light wave range to middle infrared wavelength, greatly extends spatial light
The scope of application of field regulation and control module.
3. incident light of the present invention and outgoing parallel light, are very beneficial for the regulation of system light path and continue expanding function.
4. the present invention can be widely applied in the spatial light field regulator control system of all use reflective spatial light modulators,
Such as optical optical tweezers system, structured illumination microscopic system, optical information processing and storage system.
5. seal box can block the diffraction light of each level produced after laser beam is modulated by SLM in the present invention.In addition,
Sealed seal box helps to completely cut off dust, it is to avoid SLM causes the reduction of damage threshold because adsorbing excessive dust, so as to have
Effect ground protection SLM.
6. the present invention can set the apex angle α of different isoceles triangle reflectors, meeting the incidence of laser beam low-angle will
Ask, it is ensured that the degree of accuracy of light field regulation and control.
Brief description of the drawings
Fig. 1 is the schematic diagram of spatial light modulator SLM normal incidence modes in optical system；
Fig. 2 is the schematic diagram of spatial light modulator SLM low-angle incidences in optical system；
Fig. 3 is principle schematic diagram of the present invention：
Fig. 4 is the structural representation for being used in series multiple spatial light modulators；
Fig. 5 is the structural representation of the specific embodiment of the invention.
Reference：1- spatial light modulators, 2- isoceles triangle reflectors, 3- seal boxes, 21- silvered reflectives face, 22- platings
Silver-colored reflecting surface, 31- incidence holes, 32- light holes.
Embodiment
Present disclosure is described in further detail below in conjunction with the drawings and specific embodiments：
As shown in figure 3, the spatial light modulator coupling device based on three corner reflectors includes seal box 3, is arranged on sealing
Isoceles triangle reflector 2 and spatial light modulator 1 in box 3；It is high anti-that two of isoceles triangle reflector 2 wait central plane surface to be coated with
Film is penetrated, seal box 3 is respectively arranged with light hole as whole spatial light field close to the both sides of the grade central plane of isoceles triangle reflector 2
The incidence hole 31 and light hole 32 of input and output end, i.e. seal box 3, incidence hole 31 and light hole 32 are arranged concentrically；Isosceles
Three corner reflectors 2 and the adjustment good position of spatial light modulator 1 and distance are fixed in seal box 3, and specific position is set to
Two central planes of lumbar triangle reflector 2 are arranged in the input path and emitting light path of spatial light modulator 1, for coupling incident light
And emergent light；The position relationship of isoceles triangle reflector 2 and spatial light modulator 1 is met：D2 >=d1,
Wherein：D1 is that (i.e. d1 is incident light to the vertical range of spatial light modulator 1 for the joint of incident light and emergent light
Vertical range of the two light beam burble points to SLM when just being separated with emergent light),
D2 is the summit of isoceles triangle reflector 2 to the vertical range of spatial light modulator 1；
The apex angle α that laser beam incides angle beta and isoceles triangle reflector 2 in spatial light modulator 1 meets relation beta
=α -90 °.Screwed hole is provided with seal box 3, screwed hole is along the circumferential direction uniform centered on the optical axis of light hole, screwed hole
Setting easily can be docked with other optical components.
Two of isoceles triangle reflector 2 wait central plane to be silvered reflective face, after incident light reflects through silvered reflective face 21
It is irradiated in spatial light modulator 1 (SLM) and is modulated, is then irradiated to silvered reflective face 22 and is reflected, closed by geometry
System is known, if incident light is incident perpendicular to the center line NN ' of isoceles triangle reflector 2 and spatial light modulator 1, through silvered reflective
Laser beam can be incided on the liquid crystal panel of spatial light modulator 1 with certain low-angle after face 22 is reflected, swashing after being modulated
Light beam is finally reflected with same low-angle outgoing by silver-plated reflecting surface 22, and the emergent light finally given is put down with incident light
OK.The angle beta that laser beam is incided in spatial light modulator 1 depends on the apex angle α of isoceles triangle reflector 2, and both meet pass
It is formula β=α -90 °.The low-angle for meeting 6 °~10 ° of laser beam is incident, and α span is 96 °~100 °.By isosceles three
The summit of corner reflector 2, which is tried one's best, is positioned over incident light and emergent light just separated place (the O points in such as Fig. 3, i.e. d2=d1),
The propagation distance of laser beam can be reduced to the utmost, compressibility is taken up space.
The drift angle of isoceles triangle reflector 2 can be designed as α=96 °, then incident light is irradiated to spatial light modulator
SLM incidence angle is 6 °.If incident optical beam spot diameter D is 18mm, then the most narrow spacing that incident light and emergent light are kept completely separate
From being d1=D/sin (2 β) cos (β)=18/sin (12 °) cos (6 °) ≈ 86.1mm.In view of isoceles triangle reflector 2
The machining accuracy problem of drift angle, can be set to 96mm by the actual range d2 of isoceles triangle reflector 2 to SLM liquid crystal panels.It is incident
Light and outgoing parallel light, are very beneficial for the regulation of system light path and continue expanding function.
Isoceles triangle reflector 2 and spatial light modulator SLM are arranged in seal box 3 by the present invention, can constitute one
Modular spatial light field regulates and controls compact apparatus, effectively reduces the quality of spatial light field regulation device, the reduction of mass of system has
Help the resonant frequency of elimination or suppression system, and modular unit is then conducive to instrumentation and the commercialization of system, passes through
It is such to can be designed so that whole spatial light field regulation and control module has extraordinary compatibility and autgmentability, can easily with
Other optical systems are combined, and are reduced spatial light field regulator control system quality and be will be helpful to the control of its resonant frequency in optical table
In isolation frequency；The design of densification is also beneficial to development of the spatial light field control technique in special dimension, such as to mass of system
There is outer space experiment of high requirement etc. with stability.
As shown in figure 4, being modulated when the amplitude of light field, phase and polarization state needs multiple spatial light modulators 1 of connecting simultaneously
When, using the present invention quickly and easily multiple spatial light modulators 1 can be connected in an optical system, it is to avoid multiple
Spatial light modulator 1 connect caused by system redundancy with it is at random.
As shown in figure 5, the spatial light modulator 1 and 96 ° of isoceles triangles of the PLUTO series of German HoloEYE companies is anti-
(the bottom surface of emitter 2：55.5mm × 25mm is high：25mm) it is arranged in the seal box 3 of a very little (143mm × 76mm × 48mm),
Two light hole specifications are 1.035 inch -40 of SM1 screw threads, and four 8 × 4-40UNC screw threads are provided with centered on light hole
Hole, screwed hole can be docked easily with other optical components, such as be used cooperatively with 30mm cage systems.Seal box 3 can be with
Whole device is sealed to completely cut off dust and diffraction pattern etc..
Claims (5)
1. a kind of spatial light modulator coupling device based on three corner reflectors, it is characterised in that：Including seal box, be arranged on it is close
Isoceles triangle reflector and spatial light modulator in jacket；
Seal box both sides are provided with the light hole that incident light and emergent light pass through, and the light hole is arranged concentrically；
Two central planes of isoceles triangle reflector are arranged in the input path and emitting light path of spatial light modulator, the isosceles three
Two of corner reflector wait central plane surface to be coated with highly reflecting films；
The position relationship of isoceles triangle reflector and spatial light modulator is met：D2 >=d1,
Wherein：D1 is the joint of incident light and emergent light to the vertical range of spatial light modulator；
D2 is the summit of isoceles triangle reflector to the vertical range of spatial light modulator；
Laser beam incide angle beta in spatial light modulator and isoceles triangle reflector apex angle α meet relation beta=α-
90°。
2. the spatial light modulator coupling device according to claim 1 based on three corner reflectors, it is characterised in that：Isosceles
Three corner reflectors are positioned over the joint of incident light and emergent light, i.e. d2=d1.
3. the spatial light modulator coupling device according to claim 1 or 2 based on three corner reflectors, it is characterised in that：
Two of isoceles triangle reflector wait central plane to be silvered reflective face.
4. the spatial light modulator coupling device according to claim 3 based on three corner reflectors, it is characterised in that：It is described
Screwed hole is additionally provided with seal box, the screwed hole is along the circumferential direction uniform centered on the optical axis of light hole.
5. the spatial light modulator coupling device according to claim 4 based on three corner reflectors, it is characterised in that：Isosceles
The apex angle α of three corner reflectors is 96 °~100 °.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201710453170.9A CN107144948A (en) | 2017-06-15 | 2017-06-15 | A kind of spatial light modulator coupling device based on three corner reflectors |
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| CN201710453170.9A CN107144948A (en) | 2017-06-15 | 2017-06-15 | A kind of spatial light modulator coupling device based on three corner reflectors |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111399202A (en) * | 2020-05-12 | 2020-07-10 | 西安交通大学 | Spatial light modulator coupling device without zero-order diffraction light |
| CN113917717A (en) * | 2021-09-03 | 2022-01-11 | 中国科学院西安光学精密机械研究所 | Reflecting type liquid crystal spatial light modulator coupling device adopting right-angle prism group |
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| JPS6326648A (en) * | 1986-07-21 | 1988-02-04 | Minolta Camera Co Ltd | Mirror image forming device |
| JP2004070052A (en) * | 2002-08-07 | 2004-03-04 | Sun Tec Kk | Optical attenuator and optical attenuator array |
| WO2006035775A1 (en) * | 2004-09-27 | 2006-04-06 | Hamamatsu Photonics K.K. | Spatial light modulator, optical processor, coupling prism and method for using coupling prism |
| US20090116093A1 (en) * | 2007-11-06 | 2009-05-07 | Nikon Corporation | Illumination apparatus, illumination method, exposure apparatus, and device manufacturing method |
| WO2009128293A1 (en) * | 2008-04-14 | 2009-10-22 | 株式会社ニコン | Spatial light modulation unit, lighting optical system, exposure apparatus and method for manufacturing device |
| US20100253927A1 (en) * | 2007-12-17 | 2010-10-07 | Nikon Corporation | Spatial light modulating unit, illumination optical system, exposure apparatus, and device manufacturing method |
| CN104246574A (en) * | 2012-04-20 | 2014-12-24 | 浜松光子学株式会社 | Zoom lens |
| CN206906686U (en) * | 2017-06-15 | 2018-01-19 | 中国科学院西安光学精密机械研究所 | A kind of spatial light modulator coupling device based on three corner reflectors |
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2017
- 2017-06-15 CN CN201710453170.9A patent/CN107144948A/en active Pending
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6326648A (en) * | 1986-07-21 | 1988-02-04 | Minolta Camera Co Ltd | Mirror image forming device |
| JP2004070052A (en) * | 2002-08-07 | 2004-03-04 | Sun Tec Kk | Optical attenuator and optical attenuator array |
| WO2006035775A1 (en) * | 2004-09-27 | 2006-04-06 | Hamamatsu Photonics K.K. | Spatial light modulator, optical processor, coupling prism and method for using coupling prism |
| US20090116093A1 (en) * | 2007-11-06 | 2009-05-07 | Nikon Corporation | Illumination apparatus, illumination method, exposure apparatus, and device manufacturing method |
| US20100253927A1 (en) * | 2007-12-17 | 2010-10-07 | Nikon Corporation | Spatial light modulating unit, illumination optical system, exposure apparatus, and device manufacturing method |
| WO2009128293A1 (en) * | 2008-04-14 | 2009-10-22 | 株式会社ニコン | Spatial light modulation unit, lighting optical system, exposure apparatus and method for manufacturing device |
| CN104246574A (en) * | 2012-04-20 | 2014-12-24 | 浜松光子学株式会社 | Zoom lens |
| CN206906686U (en) * | 2017-06-15 | 2018-01-19 | 中国科学院西安光学精密机械研究所 | A kind of spatial light modulator coupling device based on three corner reflectors |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111399202A (en) * | 2020-05-12 | 2020-07-10 | 西安交通大学 | Spatial light modulator coupling device without zero-order diffraction light |
| CN111399202B (en) * | 2020-05-12 | 2020-12-15 | 西安交通大学 | Spatial light modulator coupling device without zero-order diffraction light |
| CN113917717A (en) * | 2021-09-03 | 2022-01-11 | 中国科学院西安光学精密机械研究所 | Reflecting type liquid crystal spatial light modulator coupling device adopting right-angle prism group |
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