CN201278063Y - Light intensity distribution regulating apparatus for focal point zone - Google Patents
Light intensity distribution regulating apparatus for focal point zone Download PDFInfo
- Publication number
- CN201278063Y CN201278063Y CNU2008201660901U CN200820166090U CN201278063Y CN 201278063 Y CN201278063 Y CN 201278063Y CN U2008201660901 U CNU2008201660901 U CN U2008201660901U CN 200820166090 U CN200820166090 U CN 200820166090U CN 201278063 Y CN201278063 Y CN 201278063Y
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- spatial light
- light modulator
- laser
- reflection type
- focus area
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Abstract
The utility model relates to a light intensity distribution adjusting device in a focus area, which comprises a linearly polarized laser light source, a laser beam expanding and shaping device, a polarization spectroscope, a one fourth wave plate, a reflection type spatial light modulator, a spatial light modulation controller and a focusing objective lens. The laser beam expanding and shaping device, the polarization spectroscope, the one fourth wave plate and the reflection type spatial light modulator are sequentially arranged in the forward direction of the emergent light beam of the linearly polarized laser light source; an angle of 45 degrees is formed by the optical axis direction of the one fourth wave plate and the linear polarization direction of the emergent light beam of the linearly polarized laser light source; the focusing objective lens is positioned on the modulated light emergent light path of the polarization spectroscope; the spatial light modulation controller is connected with the reflection type spatial light modulator; and the reflection type spatial light modulator can be a reflection type liquid crystal spatial light modulator or a a reflection type micro grating structural spatial light modulator . The utility model can conveniently adjust the light intensity distribution in the focus area and has the advantages of no mechanical moving part, convenient adjustment of light intensity distribution, good system flexibility and the like.
Description
Technical field:
The utility model belongs to optical technical field, relates to a kind of light distribution regulating device, and particularly a kind of focus area light distribution regulating device is mainly used in fields such as the little manipulation of optics, optical storage, optical microscope and Laser Processing.
Background technology:
In some Focused Optical systems, optical focus area light distribution regulation technology has a very important role.For example, the little control system of optics needs light distribution inhomogeneous, can produce significant optical gradient forces, forms stable light trapping, is used to catch and control molecule, and focus area light intensity control can increase the degree of flexibility that particulate is handled; In Laser Processing, wish that then the size of optical focus and depth of focus are all conveniently adjusted, the different optical that is content with very little processing request; In the optical storage optical system, HIGH-DENSITY OPTICAL STORAGE requires the optical focus size on horizontal in the optical system little, improves storage density, and it is big that the size on optical axis direction is wanted, and promptly have big depth of focus, reduction system control difficulty.Formerly in the technology, exist a kind of reflective phase type focus area light distribution regulating system (referring to patent: reflective phase type focus area light distribution regulating system, the patent No.: ZL200410018421.3), the method is to utilize spectroscope and catoptron that adjustable light phase is introduced in the light path, and the reflecting surface of catoptron is made of a plurality of axial transportable reflection part reflectings surface; The light that light source sends by the reverberator reflection, carries out phase modulation (PM) to light beam through behind the spectroscope; Reflected light enters object lens through spectroscope again, converges the formation focus; Accommodation reflex parts reflecting surface axial location can change the light distribution of focus area.Although the optical focus light distribution regulating system formerly in the technology has certain advantage, but, still exist not enough: 1) owing to change the Beam Wave-Front phase place by accommodation reflex parts reflecting surface axial location, deposit mechanical moving element in the system, reduce the stability and the reliability of system, increased the complexity and the difficulty of system mechanics location and control; 2) catoptron moves driver with mechanical moving element and is connected in the system, can control the light beam phase place on the optical axis direction, but laterally PHASE DISTRIBUTION is difficult to regulation and control, and it is not convenient to cause the light distribution of focus area to be regulated, and system flexibility is poor; 3) be merely able to the Beam Wave-Front phase place is regulated and control, can not regulate beam intensity, the operating position that in use is directed to the different light intensity requirement is difficult to satisfy, and has limited the usable range of system.
Summary of the invention:
The utility model is in order to solve above-mentioned prior art problems, provide a kind of no mechanical moving component, light distribution regulate convenient, system flexibility is good, stability is strong, reliability is high, widely used focus area light distribution regulating device.
The utility model solves the problems of the technologies described above the technical scheme that is adopted:
A kind of focus area light distribution regulating device, by the linearly polarized laser light source, laser beam expanding shaping device, polarization spectroscope, quarter-wave plate, reflective spatial light modulator, spatial light modulation controller and focusing objective len are formed, wherein, described laser beam expanding shaping device, polarization spectroscope, quarter-wave plate and reflective spatial light modulator are successively set on the working direction of linearly polarized laser light source outgoing beam, the optical axis direction of quarter-wave plate becomes miter angle with linearly polarized laser light source outgoing beam linear polarization, focusing objective len places on the light modulated emitting light path of polarization spectroscope, the spatial light modulation controller is connected with reflective spatial light modulator, is characterized in: reflective spatial light modulator is the reflection type liquid crystal spatial light modulator, reflective micro-nano optical grating construction spatial light modulator a kind of.
As preferably, described linearly polarized laser light source is a kind of in gas laser, solid state laser, dye laser, free electron laser, the semiconductor laser.
As preferably, described laser beam expanding shaping device expands bundle shaping device for becoming multiplying power.
As preferably, described focusing objective len is a kind of in flat-field achromatic objective lens, the flat field apochromatic objective.
As preferably, described reflective spatial light modulator is a kind of in reflection type liquid crystal spatial light modulator, the reflective micro-nano optical grating construction spatial light modulator.
Advantage and beneficial effect that the relative prior art of the utility model has are:
1) do not deposit mechanical moving element in the device, improved the stability and the reliability of system, reduced the complexity and the difficulty of system mechanics location and control, apparatus structure is simple;
2) can regulate beam axis to horizontal PHASE DISTRIBUTION, increased the device dirigibility, enlarged the adjustable degree of focus area light intensity;
3) not only can regulate the light beam PHASE DISTRIBUTION, can also regulate the reflectivity of light beam on reflective spatial light modulator, and then regulate light intensity, satisfy the different light intensity requirement, increase the device usable range.
Description of drawings:
Fig. 1 is the structural representation of the utility model embodiment;
Embodiment:
Below in conjunction with accompanying drawing the utility model is described in further detail, following examples are the reasonable application forms of the utility model, but following examples should not regarded as restriction of the present utility model.
Embodiment
Present embodiment has been described a kind of focus area light distribution regulating device:
As shown in Figure 1, this device is by transverse mode TM
00The linear polarization helium-neon laser 1 of mould, Galileo type beam expanding lens 2, polarization spectroscope 3, quarter-wave plate 5, reflection type liquid crystal spatial light modulator 6, spatial light modulation controller 7 and Nikon flat field apochromatic objective 4 are formed.The outgoing beam of linear polarization helium-neon laser 1 is along the O shown in the dotted line
1O
2Direction, O
1O
2Be disposed with linear polarization helium-neon laser 1, Galileo type beam expanding lens 2, polarization spectroscope 3, quarter-wave plate 5 and reflection type liquid crystal spatial light modulator 6 on the direction.The working face of reflection type liquid crystal spatial light modulator 6 and optical axis O
1O
2Vertically; Polarization spectroscope 3 plays the transmission effect for the linear polarization light beam of linear polarization helium-neon laser 1 outgoing, and the light beam vertical with linear polarization helium-neon laser 1 outgoing beam polarization direction for the polarization direction plays reflex; Nikon flat field apochromatic objective 4 is arranged on the light modulated emitting light path of polarization spectroscope 3, and the optical axis direction of quarter-wave plate 5 becomes miter angle with linear polarization helium-neon laser 1 outgoing beam linear polarization.Spatial light modulation controller 7 with reflection type liquid crystal spatial light modulator 6, be connected the phase place and the light intensity reflectivity of regulation and control reflection type liquid crystal spatial light modulator 6 incident beams.
During work, the linearly polarized laser light beam of linear polarization helium-neon laser 1 outgoing expands bundle and shaping through Galileo type beam expanding lens 2, pass through polarization spectroscope 3 again, polarization spectroscope 3 is for the linear polarization light beam transmission of linear polarization helium-neon laser 1 outgoing, transmitted light beam is through quarter-wave plate 5, because the optical axis direction of quarter-wave plate 5 becomes miter angle with linear polarization helium-neon laser 1 outgoing beam linear polarization, linearly polarized light beam is converted into circularly polarized light beam, on the working face of directive reflection type liquid crystal spatial light modulator 6,6 pairs of incident beams of spatial light modulation controller 7 control reflection type liquid crystal spatial light modulators are modulated, it is axial to regulate Beam Wave-Front, laterally phase place and light distribution, light beam after the modulated of reflection type liquid crystal spatial light modulator 6 reflected backs passes through quarter-wave plate 5 once more, be converted into linearly polarized light beam by circularly polarized light beam, the polarization direction becomes an angle of 90 degrees with linear polarization helium-neon laser 1 outgoing beam linear polarization, be reflected behind the directive polarization spectroscope 3, the modulated beam of light of reflection focuses on through Nikon flat field apochromatic objective 4, focus area light distribution and Beam Wave-Front are axial, laterally phase place is related with light distribution, focus area light distribution by 6 pairs of laser beam of spatial light modulation controller 7 control reflection type liquid crystal spatial light modulators is regulated, and is used for the little manipulation of optics, fields such as optics micro mirror and Laser Processing.
The utility model can also adopt reflective micro-nano optical grating construction spatial light modulator to substitute the reflection type liquid crystal spatial light modulator.
Present embodiment can conveniently be regulated the focus area light distribution, have no mechanical moving component, light distribution regulate convenient, system flexibility is good, stability is strong, reliability is high, be widely used, be easy to characteristics such as integrated.
Claims (5)
1, a kind of focus area light distribution regulating device, by the linearly polarized laser light source, laser beam expanding shaping device, polarization spectroscope, quarter-wave plate, reflective spatial light modulator, spatial light modulation controller and focusing objective len are formed, wherein, described laser beam expanding shaping device, polarization spectroscope, quarter-wave plate and reflective spatial light modulator are successively set on the working direction of linearly polarized laser light source outgoing beam, the optical axis direction of quarter-wave plate becomes miter angle with linearly polarized laser light source outgoing beam linear polarization, focusing objective len places on the light modulated emitting light path of polarization spectroscope, the spatial light modulation controller is connected with reflective spatial light modulator, it is characterized in that: reflective spatial light modulator is the reflection type liquid crystal spatial light modulator, reflective micro-nano optical grating construction spatial light modulator a kind of.
2, focus area light distribution regulating device according to claim 1 is characterized in that: described linearly polarized laser light source is a kind of in gas laser, solid state laser, dye laser, free electron laser, the semiconductor laser.
3, focus area light distribution regulating device according to claim 1 is characterized in that: described laser beam expanding shaping device expands bundle shaping device for becoming multiplying power.
4, focus area light distribution regulating device according to claim 1 is characterized in that: described focusing objective len is a kind of in flat-field achromatic objective lens, the flat field apochromatic objective.
5, focus area light distribution regulating device according to claim 1 is characterized in that: described reflective spatial light modulator is a kind of in reflection type liquid crystal spatial light modulator, the reflective micro-nano optical grating construction spatial light modulator.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNU2008201660901U CN201278063Y (en) | 2008-10-14 | 2008-10-14 | Light intensity distribution regulating apparatus for focal point zone |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNU2008201660901U CN201278063Y (en) | 2008-10-14 | 2008-10-14 | Light intensity distribution regulating apparatus for focal point zone |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN201278063Y true CN201278063Y (en) | 2009-07-22 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNU2008201660901U Expired - Fee Related CN201278063Y (en) | 2008-10-14 | 2008-10-14 | Light intensity distribution regulating apparatus for focal point zone |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN201278063Y (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102163792A (en) * | 2011-01-06 | 2011-08-24 | 中国科学院高能物理研究所 | Laser power control system and laser heating system |
| CN102928990A (en) * | 2012-11-21 | 2013-02-13 | 中国科学院上海光学精密机械研究所 | Device capable of changing two-dimensional distribution of polarization direction of light beam |
-
2008
- 2008-10-14 CN CNU2008201660901U patent/CN201278063Y/en not_active Expired - Fee Related
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102163792A (en) * | 2011-01-06 | 2011-08-24 | 中国科学院高能物理研究所 | Laser power control system and laser heating system |
| CN102163792B (en) * | 2011-01-06 | 2012-03-21 | 中国科学院高能物理研究所 | Laser power control system and laser heating system |
| CN102928990A (en) * | 2012-11-21 | 2013-02-13 | 中国科学院上海光学精密机械研究所 | Device capable of changing two-dimensional distribution of polarization direction of light beam |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C17 | Cessation of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20090722 Termination date: 20101014 |