CN111398872B - Magnetic sensor based on surface acoustic wave and magnetic torque effect and preparation method - Google Patents
Magnetic sensor based on surface acoustic wave and magnetic torque effect and preparation method Download PDFInfo
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- 238000010897 surface acoustic wave method Methods 0.000 title claims abstract description 57
- 230000000694 effects Effects 0.000 title claims abstract description 26
- 238000002360 preparation method Methods 0.000 title abstract description 10
- 239000000463 material Substances 0.000 claims description 31
- 239000010408 film Substances 0.000 claims description 18
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 claims description 10
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 claims description 10
- 238000004140 cleaning Methods 0.000 claims description 8
- 239000013078 crystal Substances 0.000 claims description 8
- 239000000758 substrate Substances 0.000 claims description 8
- 238000000151 deposition Methods 0.000 claims description 6
- 239000010949 copper Substances 0.000 claims description 5
- 238000000034 method Methods 0.000 claims description 5
- 238000000643 oven drying Methods 0.000 claims description 5
- 229920002120 photoresistant polymer Polymers 0.000 claims description 5
- 238000004528 spin coating Methods 0.000 claims description 5
- 239000010409 thin film Substances 0.000 claims description 5
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 4
- VQAPWLAUGBBGJI-UHFFFAOYSA-N [B].[Fe].[Rb] Chemical compound [B].[Fe].[Rb] VQAPWLAUGBBGJI-UHFFFAOYSA-N 0.000 claims description 4
- 239000011889 copper foil Substances 0.000 claims description 4
- 239000011888 foil Substances 0.000 claims description 4
- 239000010935 stainless steel Substances 0.000 claims description 4
- 229910001220 stainless steel Inorganic materials 0.000 claims description 4
- 229910003327 LiNbO3 Inorganic materials 0.000 claims description 3
- 229910012463 LiTaO3 Inorganic materials 0.000 claims description 3
- 229910000828 alnico Inorganic materials 0.000 claims description 3
- 229910052782 aluminium Inorganic materials 0.000 claims description 3
- 229910052804 chromium Inorganic materials 0.000 claims description 3
- 229910052802 copper Inorganic materials 0.000 claims description 3
- 229910052737 gold Inorganic materials 0.000 claims description 3
- 229910001092 metal group alloy Inorganic materials 0.000 claims description 3
- 229910052697 platinum Inorganic materials 0.000 claims description 3
- 229910000938 samarium–cobalt magnet Inorganic materials 0.000 claims description 3
- 229910052715 tantalum Inorganic materials 0.000 claims description 3
- 229910000859 α-Fe Inorganic materials 0.000 claims description 3
- 230000035945 sensitivity Effects 0.000 abstract description 9
- 239000010410 layer Substances 0.000 description 14
- 238000004519 manufacturing process Methods 0.000 description 3
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- 239000012790 adhesive layer Substances 0.000 description 2
- 239000007772 electrode material Substances 0.000 description 2
- 239000011159 matrix material Substances 0.000 description 2
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 238000001755 magnetron sputter deposition Methods 0.000 description 1
- 229910052701 rubidium Inorganic materials 0.000 description 1
- IGLNJRXAVVLDKE-UHFFFAOYSA-N rubidium atom Chemical compound [Rb] IGLNJRXAVVLDKE-UHFFFAOYSA-N 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R33/00—Arrangements or instruments for measuring magnetic variables
- G01R33/0011—Arrangements or instruments for measuring magnetic variables comprising means, e.g. flux concentrators, flux guides, for guiding or concentrating the magnetic flux, e.g. to the magnetic sensor
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R33/00—Arrangements or instruments for measuring magnetic variables
- G01R33/0052—Manufacturing aspects; Manufacturing of single devices, i.e. of semiconductor magnetic sensor chips
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R33/00—Arrangements or instruments for measuring magnetic variables
- G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
- G01R33/038—Measuring direction or magnitude of magnetic fields or magnetic flux using permanent magnets, e.g. balances, torsion devices
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R33/00—Arrangements or instruments for measuring magnetic variables
- G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
- G01R33/10—Plotting field distribution ; Measuring field distribution
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- Condensed Matter Physics & Semiconductors (AREA)
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Abstract
一种基于声表面波和磁扭矩效应的磁传感器及其制备方法，包括固定底座、声表面波发生结构、悬臂梁结构和磁铁；悬臂梁结构的一端设置在固定底座的顶部，磁铁设置在悬臂梁结构的另一端；声表面波发生结构设置在悬臂梁结构表面；本发明的声表面波磁传感器通过引入扭矩效应，放大了磁场对声表面波中心频率的影响，有效的提高了声表面波磁传感器的灵敏度。这种新的声表面波磁传感器不仅使磁传感器的灵敏度提高近十倍，而且不需要额外的直流偏置磁场，这就使传感器的结构更加简单，而且减少了损耗。
A magnetic sensor based on surface acoustic wave and magnetic torque effect and a preparation method thereof, comprising a fixed base, a surface acoustic wave generating structure, a cantilever beam structure and a magnet; one end of the cantilever beam structure is arranged on the top of the fixed base, and the magnet is arranged on the cantilever. The other end of the beam structure; the surface acoustic wave generating structure is arranged on the surface of the cantilever beam structure; the surface acoustic wave magnetic sensor of the present invention amplifies the influence of the magnetic field on the center frequency of the surface acoustic wave by introducing the torque effect, and effectively improves the surface acoustic wave. Magnetic sensor sensitivity. This new SAW magnetic sensor not only increases the sensitivity of the magnetic sensor by a factor of nearly ten, but also does not require an additional DC bias magnetic field, which makes the sensor structure simpler and reduces losses.
Description
Technical Field
The invention belongs to the technical field of magnetic sensors, and particularly relates to a magnetic sensor based on surface acoustic waves and a magnetic torque effect and a preparation method thereof.
Background
With the development of the internet of things, a magnetic sensor with high sensitivity and low loss is more and more urgent in various occasions. Acoustic wave based magnetic sensors provide a viable path for the development of high sensitivity magnetic sensors. Currently, acoustic wave-based magnetic sensors are classified into two major types, one being surface acoustic wave magnetic sensors and the other being bulk acoustic wave-based magnetic sensors. The magnetic sensor based on bulk acoustic waves needs a deep silicon etching process in the process, so that the difficulty and the cost of production and manufacturing are increased. When the frequency is less than 2GHz, the surface acoustic wave magnetic sensor is widely researched due to simple process and good performance. However, the sensitivity of the current surface acoustic wave magnetic sensor is far lower than that of the bulk acoustic wave magnetic sensor.
Disclosure of Invention
The invention aims to provide a magnetic sensor based on surface acoustic wave and magnetic torque effects and a preparation method thereof, so as to solve the problems.
In order to achieve the purpose, the invention adopts the following technical scheme:
a magnetic sensor based on surface acoustic wave and magnetic torque effects comprises a fixed base, a surface acoustic wave generating structure, a cantilever beam structure and a magnet; one end of the cantilever beam structure is arranged at the top of the fixed base, and the magnet is arranged at the other end of the cantilever beam structure; the surface acoustic wave generating structure is arranged on the surface of the cantilever beam structure;
the surface acoustic wave generating structure comprises interdigital electrodes and piezoelectric materials; the piezoelectric material is arranged on the surface of the cantilever beam structure, and the plurality of interdigital electrodes are arranged on the piezoelectric material.
Furthermore, the piezoelectric material is piezoelectric single crystal or piezoelectric film, and the piezoelectric material is LiNbO3、LiTaO3(iii), ST-quar, PZT, ZnO or AlN.
Further, the surface acoustic wave generating structure is a single port or delay line structure.
Furthermore, the interdigital electrode consists of an electrode film and an adhesion layer, wherein the electrode film is positioned on the adhesion layer; the electrode thin film is one of Au, Al, Pt or Cu; the adhesion layer is one of Ta or Cr.
Further, the material of the cantilever beam is one of copper foil or stainless steel foil.
Further, the number of magnets is composed of a plurality of blocks; the magnets are stacked in parallel or on the upper and lower surfaces of the cantilever beam; the magnet is one of a ferrite magnet, a rubidium-iron-boron magnet, an alnico magnet, a samarium-cobalt magnet, or a metal alloy magnet.
Further, a preparation method of a magnetic sensor based on surface acoustic wave and magnetic torque effects comprises the following steps:
1) pretreatment of the piezoelectric single crystal or piezoelectric thin film substrate: sequentially cleaning with ethanol and acetone, and oven drying;
2) defining an interdigital electrode pattern: and spin-coating photoresist on the piezoelectric material, exposing, depositing an electrode adhesion layer and an electrode layer, and finally peeling to obtain an interdigital electrode pattern.
3) And bonding the surface acoustic wave generating structure on the cantilever beam structure, and curing.
4) The magnet is placed at the free end of the cantilever beam.
Compared with the prior art, the invention has the following technical effects:
the surface acoustic wave magnetic sensor of the invention amplifies the influence of a magnetic field on the center frequency of the surface acoustic wave by introducing the torque effect, and effectively improves the sensitivity of the surface acoustic wave magnetic sensor. The new surface acoustic wave magnetic sensor not only improves the sensitivity of the magnetic sensor by nearly ten times, but also does not need an additional direct current bias magnetic field, thereby simplifying the structure of the sensor and reducing the loss.
Drawings
FIG. 1 is a block diagram of the present invention;
Detailed Description
The invention is further described below with reference to the accompanying drawings:
referring to fig. 1, the surface acoustic wave magnetic sensor of the present invention includes a substrate 1, and a cantilever beam 2 fixed on the substrate 1; the surface acoustic wave generating device 3 is bonded on the cantilever beam 2; the surface acoustic wave generating device 3 is composed of a piezoelectric material 4 and interdigital electrodes 5. A magnet 6 is placed at the free end of the cantilever beam 2.
The base body 1 is a fixed base of the cantilever beam 2.
The cantilever beam 2 is a copper foil or a stainless steel foil, but is not limited thereto.
The surface acoustic wave generating device 3 is one of a single port, a delay line, and the like.
The piezoelectric material is composed of piezoelectric single crystal or piezoelectric film, and the piezoelectric material is LiNbO3，LiTaO3ST-quar, PZT, ZnO, AlN, etc.
The interdigital electrode material consists of an electrode film and an adhesion layer.
The electrode thin film is made of one of Au, Al, Pt, Cu and the like.
The adhesion layer of the electrode material is made of one of Ta, Cr, and the like.
The number of magnets is made up of a plurality of pieces.
The magnets are stacked in parallel or up and down.
The magnet is one of ferrite magnet, rubidium iron boron magnet, alnico magnet, samarium cobalt magnet metal alloy magnet, etc.
According to the magnetic sensor based on the surface acoustic wave and the torque effect, the torque effect is introduced, so that the changes of the Young modulus and the sound velocity of the piezoelectric material under the action of a magnetic field are amplified, the movement of the central frequency of the surface acoustic wave is enlarged, and finally the sensitivity is increased.
The invention relates to a preparation process of a magnetic sensor based on surface acoustic wave and torque effect, which comprises the following steps:
1) cleaning a piezoelectric single crystal or piezoelectric thin film substrate: respectively cleaning with ethanol and acetone, and oven drying;
2) defining an interdigital electrode pattern: and spin-coating photoresist on the piezoelectric material, exposing, depositing an electrode adhesion layer and an electrode layer, and finally peeling to obtain an interdigital electrode pattern. The present embodiment selects a single port surface acoustic wave device, but is not limited thereto.
3) And bonding the surface acoustic wave generating structure on the cantilever beam structure, and curing.
4) The magnet is placed at the free end of the cantilever beam. In this embodiment, two magnets are selected and stacked one above the other, but not limited thereto.
Example 1
Referring to fig. 1, a magnetic sensor based on surface acoustic wave and magnetic torque effect and a method for manufacturing the same includes a substrate 1, and a cantilever beam 2 fixed on the substrate 1; the surface acoustic wave generating device 3 is bonded on the cantilever beam 2; the surface acoustic wave generating device 3 is composed of a piezoelectric material 4 and interdigital electrodes 5. A magnet 6 is placed at the free end of the cantilever beam 2.
The base body 1 is a fixed base of the cantilever beam 2. The cantilever 2 is a copper foil. The surface acoustic wave generating device 3 is a single port. The piezoelectric material being a piezoelectric single crystal
InterdigitalThe electrode is composed of an electrode film Cu and an adhesive layer Ta, the thickness of the Cu film is 100nm, and the thickness of the Ta film is 5 nm. The magnet material is rubidium iron boron, the number of the magnet material is two, and the magnet material is stacked by adopting an upper structure and a lower structure.
According to the magnetic sensor based on the surface acoustic wave and the torque effect, the cantilever beam with the magnet is bent under an external magnetic field by introducing the torque effect, and the deformation is transmitted to the piezoelectric layer in the surface acoustic wave structure, so that the Young modulus of the piezoelectric material is changed finally. According to the formula
Where f is the center frequency of the SAW device, v is the acoustic velocity, E is the effective piezoelectric modulus, p is the interdigital electrode aperture, and ρ is the effective density. f is proportional to E and p generally does not change, so the torque effect amplifies the shift in center frequency caused by the magnetic field, thereby increasing sensitivity.
The invention relates to a preparation process of a magnetic sensor based on surface acoustic wave and torque effect, which comprises the following steps:
1) cleaning of the piezoelectric single crystal: respectively cleaning with ethanol and acetone, and oven drying;
2) defining an interdigital electrode pattern: and spin-coating photoresist on the piezoelectric material, exposing, depositing an electrode adhesion layer and an electrode layer, and finally peeling to obtain an interdigital electrode pattern.
3) And bonding the surface acoustic wave generating structure on the cantilever beam structure, and curing for 24 hours.
4) Two magnets are taken and stacked up and down at the free end of the cantilever beam
Example 2
A magnetic sensor based on surface acoustic wave and magnetic torque effect and its preparation method, including the matrix 1, fix the cantilever beam 2 on matrix 1; the surface acoustic wave generating device 3 is bonded on the cantilever beam 2; the surface acoustic wave generating device 3 is composed of a piezoelectric material 4 and interdigital electrodes 5. A magnet 6 is placed at the free end of the cantilever beam 2.
The base body 1 is a fixed base of the cantilever beam 2. The cantilever beam 2 is a stainless steel foil. The surface acoustic wave generating device 3 is a delay line structure. The piezoelectric material is a piezoelectric film ZnO with the thickness of 5 μm. The interdigital electrode consists of an electrode film Al and an adhesive layer Ta, wherein the thickness of the Al film is 100nm, and the thickness of the Ta film is 5 nm. The magnet material is rubidium, iron and boron, the number of the magnet material is two, and the magnet material is stacked in a parallel structure.
The invention relates to a preparation process of a magnetic sensor based on surface acoustic wave and torque effect, which comprises the following steps:
1) cleaning of the piezoelectric film substrate: respectively cleaning with ethanol and acetone, and oven drying;
2) depositing a ZnO film by magnetron sputtering with the power of 100W and the pressure of 1Pa for 2 hours.
2) Defining an interdigital electrode pattern: and spin-coating photoresist on the piezoelectric material, exposing, depositing an electrode adhesion layer and an electrode layer, and finally peeling to obtain an interdigital electrode pattern. The present embodiment selects a single port surface acoustic wave device, but is not limited thereto.
3) And bonding the surface acoustic wave generating structure on the cantilever beam structure, and curing for 24 hours.
4) Two magnets are taken and stacked in parallel at the free end of the cantilever beam.
Claims (5)
1. A magnetic sensor based on surface acoustic wave and magnetic torque effects is characterized by comprising a fixed base, a surface acoustic wave generating structure, a cantilever beam structure and a magnet; one end of the cantilever beam structure is arranged at the top of the fixed base, and the magnet is arranged at the other end of the cantilever beam structure; the surface acoustic wave generating structure is arranged on the surface of the cantilever beam structure;
the surface acoustic wave generating structure comprises interdigital electrodes and piezoelectric materials; the piezoelectric material is arranged on the surface of the cantilever beam structure, and the plurality of interdigital electrodes are arranged on the piezoelectric material;
the cantilever beam is made of one of copper foil or stainless steel foil;
the piezoelectric material is piezoelectric single crystal or piezoelectric film, and the piezoelectric material is LiNbO3、LiTaO3ST-quar, PZT, ZnO or AlN.
2. A magnetic sensor based on SAW and magnetic torque effects as claimed in claim 1, wherein the SAW generating structure is a single port or delay line structure.
3. A magnetic sensor based on surface acoustic wave and magnetic torque effect as claimed in claim 1, wherein the interdigital electrode is composed of an electrode film and an adhesion layer, the electrode film is located on the adhesion layer; the electrode film is one of Au, Al, Pt or Cu; the adhesion layer is one of Ta or Cr.
4. A magnetic transducer based on surface acoustic wave and magnetic torque effects as claimed in claim 1, wherein the number of magnets is made up of a plurality of pieces; the magnets are stacked in parallel or on the upper and lower surfaces of the cantilever beam; the magnet is one of a ferrite magnet, a rubidium-iron-boron magnet, an alnico magnet, a samarium-cobalt magnet, or a metal alloy magnet.
5. A method for preparing a magnetic sensor based on surface acoustic wave and magnetic torque effects is characterized in that the magnetic sensor based on surface acoustic wave and magnetic torque effects as claimed in any one of claims 1 to 4 comprises the following steps:
1) pretreatment of the piezoelectric single crystal or piezoelectric thin film substrate: sequentially cleaning with ethanol and acetone, and oven drying;
2) defining an interdigital electrode pattern: spin-coating photoresist on the piezoelectric material, exposing, depositing an electrode adhesion layer and an electrode layer, and finally stripping to obtain an interdigital electrode pattern;
3) bonding the surface acoustic wave generating structure on the cantilever beam structure, and curing;
4) the magnet is placed at the free end of the cantilever beam.
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|---|---|---|---|---|
| CN101762352A (en) * | 2010-01-12 | 2010-06-30 | 东华大学 | Wavelet transform type yarn tension sensor based on surface acoustic waves |
| CN201653603U (en) * | 2010-03-11 | 2010-11-24 | 卢子譞 | Acoustic surface wave force sensor based on cantilever beam |
| CN202093043U (en) * | 2011-05-18 | 2011-12-28 | 中国电子科技集团公司第二十六研究所 | SAW-MEMES (surface acoustic wave micro-electromechanical system) acceleration sensor |
| CN106569155A (en) * | 2016-05-20 | 2017-04-19 | 中国计量大学 | Cantilever beam interdigital capacitance magnetic field sensing probe based on super magnetic induced shrinkage or elongation film |
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| CN102193001A (en) * | 2011-05-18 | 2011-09-21 | 中国电子科技集团公司第二十六研究所 | SAW-MEMS (surface acoustic waves-micro electro mechanical system) acceleration sensor and manufacturing method thereof |
| CN102435959A (en) * | 2011-10-11 | 2012-05-02 | 电子科技大学 | A kind of magnetoacoustic surface wave magnetic field sensor and preparation method thereof |
| CN106154186B (en) * | 2016-06-20 | 2020-01-17 | 瑞声声学科技(常州)有限公司 | Surface acoustic wave magnetic sensor and preparation method thereof |
| CN107238431A (en) * | 2017-06-08 | 2017-10-10 | 中电科技德清华莹电子有限公司 | A kind of wireless passive sonic surface wave vibrating sensor |
| CN107907205A (en) * | 2017-10-30 | 2018-04-13 | 中国科学院声学研究所 | A kind of wireless passive sonic surface wave vibrating sensor |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101762352A (en) * | 2010-01-12 | 2010-06-30 | 东华大学 | Wavelet transform type yarn tension sensor based on surface acoustic waves |
| CN201653603U (en) * | 2010-03-11 | 2010-11-24 | 卢子譞 | Acoustic surface wave force sensor based on cantilever beam |
| CN202093043U (en) * | 2011-05-18 | 2011-12-28 | 中国电子科技集团公司第二十六研究所 | SAW-MEMES (surface acoustic wave micro-electromechanical system) acceleration sensor |
| CN106569155A (en) * | 2016-05-20 | 2017-04-19 | 中国计量大学 | Cantilever beam interdigital capacitance magnetic field sensing probe based on super magnetic induced shrinkage or elongation film |
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