CN111394694A

CN111394694A - Mask plate

Info

Publication number: CN111394694A
Application number: CN202010418985.5A
Authority: CN
Inventors: 邱岳
Original assignee: Kunshan Govisionox Optoelectronics Co Ltd
Current assignee: Kunshan Govisionox Optoelectronics Co Ltd
Priority date: 2020-05-18
Filing date: 2020-05-18
Publication date: 2020-07-10

Abstract

The invention provides a mask plate which comprises a frame and at least one mask body arranged on the frame, wherein the frame is enclosed by a plurality of frames, the area where the frames are located is a frame area, and the area enclosed by the frames is an evaporation area. The two ends of the mask body are respectively positioned on the at least two frames, at least part of the mask body is positioned in the evaporation area, and the frames are connected with the mask body through welding spots. The frame is provided with a blocking piece, the blocking piece is positioned on one side of the welding spot close to the evaporation area, and the height of at least part of the blocking piece is greater than that of the welding spot. The invention can effectively reduce the wrinkles generated by the mask body in the evaporation area and improve the fit degree of the mask body and the substrate to be evaporated, thereby reducing the evaporation shadow and improving the thickness uniformity of the evaporation film layer.

Description

Mask plate

Technical Field

The invention relates to the technical field of display, in particular to a mask plate.

Background

At present, a mask plate is often adopted for evaporation, and evaporation materials are evaporated to a preset position of a substrate by utilizing a mask plate pattern to form an evaporation film layer.

The mask generally includes a Frame (Frame) and sheets (Sheet) welded to the Frame, and the sheets are arranged at predetermined positions inside the Frame to form an opening structure having various shapes at different positions. In the evaporation process, evaporation materials are deposited on the substrate to be evaporated through the opening structure. In order to adjust the arrangement position of the sheets in the frame, a clamping jaw (Finger) is usually arranged at the end of each sheet, and a certain force is applied to the sheets by the clamping jaws so as to pull the end of each sheet to achieve the purpose of adjusting the arrangement position of the sheets. Meanwhile, the overlapped part of the thin sheet and the frame is welded together for fixing the position of the thin sheet after the adjustment.

However, the existing thin sheet has large stress inside, so that wrinkles are easily formed in an evaporation area inside a frame, the attaching degree of the thin sheet and a substrate to be evaporated is affected, evaporation shadows are generated, and the thickness uniformity of an evaporation film layer and the accuracy of evaporation are affected.

Disclosure of Invention

In order to solve at least one problem mentioned in the background art, the invention provides a mask plate, which can effectively reduce wrinkles generated in an evaporation zone by a mask body and improve the attaching degree of the mask body and a substrate to be evaporated, thereby reducing evaporation shadows and improving the uniformity of the thickness of an evaporation film layer.

In order to achieve the above object, in a first aspect, the present invention provides a mask plate, including a frame and at least one mask body disposed on the frame, where the frame is surrounded by a plurality of frames, a region in which the frames are located is a frame region, and a region surrounded by the frames is an evaporation region.

Two ends of the mask body are respectively positioned on at least two frames, at least part of the mask body is positioned in the evaporation area, and the frames are connected with the mask body through welding spots;

the frame is provided with a blocking piece, the blocking piece is positioned on one side of the welding spot close to the evaporation area, and the height of at least part of the blocking piece is greater than that of the welding spot.

According to the mask plate provided by the invention, the two ends of the mask body are arranged on the at least two frames, so that the two ends of the mask body are supported and fixed by the frames, the stability of the arrangement of at least part of the mask body in the evaporation area is ensured, and the arrangement positions of the mask body in the evaporation area can be adjusted by the clamping jaws. Through solder joint connection mask body and frame on the frame, the solder joint is close to coating by vaporization district one side and sets up and stops the piece, utilizes to stop that the stress that mask body and frame solder joint department produced transmits to the mask body in the coating by vaporization district on to reduce the phenomenon that the fold takes place because stress concentration of the mask body in the coating by vaporization district, thereby improve the coating by vaporization district in the mask body with treat the laminating degree of coating by vaporization base plate, reduce the coating by vaporization shadow, improve the homogeneity of coating by vaporization layer thickness.

In the mask plate, optionally, the frame at least includes a first step and a second step disposed on the first step, and the blocking member is disposed on the second step.

Through setting up first step and second step with the frame, thereby improve the mechanical strength of frame through the size of adjusting first step and second step, guarantee the stability that the mask body set up.

In the mask plate, optionally, the blocking member and the second step are integrally formed.

Through setting the piece of stopping to with second step integrated into one piece, it is comparatively firm to stop the connection between piece and the second step, when stopping the effort that receives the mask body, can not produce relative displacement between piece and the second step, and then avoids causing stress to the mask body and makes the mask body that is located the coating by vaporization district take place the fold.

In the mask plate, optionally, the blocking part includes a blocking portion and an extending portion, the height of the blocking portion is greater than that of the welding spot, and the height of the extending portion gradually decreases along a direction away from the blocking portion.

Through setting up blockking that the piece sets up to stop portion and extension, utilize the portion of stopping to stop on the stress transmission to the mask body in the coating by vaporization district of welding point department, guarantee the roughness of the mask body in the coating by vaporization district and with the laminating degree of treating the coating by vaporization base plate.

In the mask plate, optionally, the extending portion includes a first extending portion disposed on one side of the blocking portion away from the evaporation region, the first extending portion extends along a direction away from the evaporation region, and the welding spot is disposed on the first extending portion.

The first extending part is arranged on one side, close to the frame area, of the blocking part, and the first extending part is utilized to reduce the gap between the mask body and the step structure of the frame, so that the connection stability of the mask body and the frame is improved. Meanwhile, the welding spot is arranged on the first extending part, so that the situation that stress is conducted to the mask body located in the evaporation area due to the welding spot on one side, close to the evaporation area, of the blocking part is avoided, and wrinkles are avoided.

In the mask plate, optionally, the extending portion includes a second extending portion disposed on one side of the blocking portion close to the evaporation region, and the second extending portion extends in a direction away from the evaporation region.

One side through being close to the coating by vaporization district at the stop part sets up the second extension, utilizes the second extension to play the supporting role to the mask body that is close to the coating by vaporization district to improve the stability that the mask body set up.

In the mask plate, optionally, at least one protruding portion is arranged on the surface of the blocking member close to one side of the mask body, and a recessed portion matched with the protruding portion is arranged on the mask body at a position corresponding to the protruding portion; at least part of the outer surface of the convex part is attached to at least part of the inner surface of the concave part.

Through establishing protruding portion in the mask body with the embedding, can improve the stability of being connected between mask body and the frame on the one hand, on the other hand can improve and block the effect of blockking the welding point stress of holding piece, and locate the protruding portion on the blocking portion, can effectively avoid the influence to the welding region.

In the mask plate, optionally, the depth of the concave portion is less than or equal to half of the thickness of the mask body. The arrangement can avoid the sunken part formed to reduce the strength of the mask body, thereby ensuring the structural stability of the mask body.

In the mask plate, optionally, in a first direction, the height of the protruding portion is gradually reduced from the middle of the protruding portion to two ends of the protruding portion, and the first direction is perpendicular to the extending direction of the two ends of the mask body;

optionally, the height of the protruding portion gradually decreases from the center of the protruding portion to the periphery of the protruding portion.

The setting can ensure that the blocking part can effectively block the internal stress at the two ends of the mask body from being transmitted to the mask body in the mask region, and ensure the flatness of the mask body in the mask region.

The construction of the present invention and other objects and advantages thereof will be more apparent from the following description of the preferred embodiments taken in conjunction with the accompanying drawings.

Drawings

In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below, and it is obvious that the drawings in the following description are some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to these drawings without creative efforts.

Fig. 1 is a schematic structural diagram of a mask according to a first embodiment of the present invention;

fig. 2 is a schematic view of a connection structure between a frame and a mask body of a mask plate without a blocking member according to a first embodiment of the present invention;

fig. 3 is a schematic view of a connection structure between a frame provided with a blocking member and a mask body in a mask plate according to a first embodiment of the present invention;

fig. 4 is a schematic view of a connection structure of a frame, a blocking member and a mask body of a mask plate according to a second embodiment of the present invention;

fig. 5 is a schematic structural view of a blocking member of a mask according to a second embodiment of the present invention;

fig. 6 is a schematic view of a connection structure of a frame, a blocking member and a mask body of a mask plate according to a third embodiment of the present invention;

FIG. 7 is a detail view of part A of FIG. 6 according to a third embodiment of the present invention;

fig. 8 is a schematic structural diagram of a section B-B in fig. 6 according to a third embodiment of the present invention.

Description of reference numerals:

100-a mask plate;

10-a frame;

11-a frame;

111-a first step;

112-a second step;

12-a vapor deposition zone;

20-a mask body;

21-a clamping point;

22-a recess;

30-a barrier;

31-a barrier;

311-a boss;

32-a first extension;

40-welding points;

50-clamping jaw.

Detailed Description

In the process of practical research, the inventor of the present invention finds that, in the current mask plate, when the clamping jaws are clamped on the sheet of the frame, the area of the sheet near the clamping point of the clamping jaws generates large stress, and the stress can be transmitted along the sheet. And when welding frame and mask body back, can have great stress near the solder joint equally, when stress transmits to the sheet in the coating by vaporization district, lead to the interior sheet of this coating by vaporization district to take place the fold, thereby reduced the laminating degree of sheet and treating the coating by vaporization base plate, and produce the clearance between the two, thereby treat that the coating by vaporization material gets into this clearance position easily in the coating by vaporization in-process, lead to treating that the coating by vaporization material shifts preset position, and the coating by vaporization layer thickness homogeneity that forms is also relatively poor. The conventional solution is to adjust the position of the sheet in the evaporation zone by adjusting the clamping force at the two ends of the sheet through the clamping jaws, and ensure that the position of the sheet where wrinkles are generated avoids the area to be evaporated as much as possible.

In view of this, in the embodiment of the present invention, the two ends of the mask body are respectively disposed on the at least two frames, so that the two ends of the mask body are supported and fixed by the frames, thereby ensuring the stability of the arrangement of at least a part of the mask body located in the evaporation region, and facilitating the adjustment of the arrangement position of the mask body in the evaporation region by the clamping jaws. Through solder joint connection mask body and frame, the solder joint is close to evaporation coating zone one side and sets up and stops the piece, utilizes to stop that the stress that solder joint department produced transmits to the mask body in the evaporation coating zone on to reduce the mask body in the evaporation coating zone and take place the phenomenon of fold because stress concentration, thereby improve the laminating degree of mask body in the evaporation coating zone and treating the evaporation coating base plate, reduce the evaporation coating shadow, improve the homogeneity of the pixel structure thickness after the evaporation coating is accomplished.

In order to make the objects, technical solutions and advantages of the present invention clearer, the technical solutions in the embodiments of the present invention will be described in more detail below with reference to the accompanying drawings in the preferred embodiments of the present invention. In the drawings, the same or similar reference numerals denote the same or similar components or components having the same or similar functions throughout. The described embodiments are only some, but not all embodiments of the invention. The embodiments described below with reference to the drawings are illustrative and intended to be illustrative of the invention and are not to be construed as limiting the invention. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention. Embodiments of the present invention will be described in detail below with reference to the accompanying drawings.

Example one

Fig. 1 is a schematic structural diagram of a mask according to a first embodiment of the present invention. Fig. 2 is a schematic view of a connection structure between a frame and a mask body of a mask plate without a blocking member according to an embodiment of the present invention. Fig. 3 is a schematic view of a connection structure between a frame provided with a blocking member and a mask body in a mask plate according to an embodiment of the present invention.

Referring to fig. 1 to 3, an embodiment of the present invention provides a mask plate 100, where the mask plate 100 includes a frame 10 and at least one mask body 20 disposed on the frame 10, the frame 10 is surrounded by a plurality of frames 11, a region where the frames 11 are located is a frame region, and a region evaporation region 12 surrounded by the frames 11 is provided.

Two ends of the mask body 20 are respectively positioned on at least two frames 11, at least part of the mask body 20 is positioned in the evaporation area 12, and the frames 11 and the mask body 20 are connected through welding points 40;

the frame 11 is provided with a blocking member 30, the blocking member 30 is located on one side of the welding point close to the evaporation region 12, and the height of at least part of the blocking member 30 is greater than that of the welding point 40.

It should be noted that, referring to fig. 1, the frame 10 provided in this embodiment may include a plurality of frames 11, where "a plurality" in this embodiment may mean two or more frames 11, and the frames 11 are sequentially connected end to form a closed frame 10, and a region surrounded by the frames 11 is the evaporation region 12. During the evaporation process, the material to be evaporated is deposited in this evaporation zone 12. In the present embodiment, the frame 10 is described as an example in which the frame 10 has four borders 11, and the four borders 11 enclose a rectangular shape, in practical use, the number of the borders 11 and the shape of the frame 10 may be determined according to the needs of the user, and the present embodiment does not limit this. Generally, the frame 10 may be made of a metal material, so that the frame 10 has a certain mechanical strength to support the mask bodies 20.

In the process of manufacturing the mask 100, a plurality of mask bodies 20 are generally fixed on the frame 10 by a screen process, and a mesh structure is formed in the evaporation region 12 in the frame 10, and the mesh region corresponds to a deposition region of a material to be evaporated. It will be understood by those skilled in the art that the boundary of the mesh region is formed by the edge of the mask body 20, and thus the conformity of the edge of the mask body 20 to the substrate to be evaporated determines the regularity of the boundary of the mesh region. The higher the regularity of the boundary of the mesh region, the higher the accuracy of evaporation. That is, the accuracy of the mask 100 determines the positional accuracy of the vapor-deposited film layer formed on the substrate. After the accuracy of evaporation is improved, the evaporation shadow is reduced to some extent, and the uniformity of the thickness of the evaporation film is ensured.

Wherein, the two ends of the mask body 20 are respectively arranged on at least two frames 11, the two ends of the mask body 20 are provided with clamping jaws 50, and the clamping jaws 50 are clamped on the clamping points 21 of the mask body 20. Generally, the extending direction of the mask body 20 is a direction in which the mask body is bridged across both ends of the opposing frame 11, and the clamping jaws 50 are clamped at both ends of the mask body 20 perpendicular to the extending direction, that is, when the extending direction is along the longitudinal direction of the mask body 20, the clamping points 21 are located at both sides of the end of the mask body 20 in the width direction. The mask body 20 is pulled by the clamping jaws 50 exerting an action F at the clamping points 21 to adjust the arrangement position of the mask body 20 in the evaporation zone 12, thereby adjusting the position, shape and size of the area to be evaporated. This applied force F may be represented by the solid arrows in fig. 1.

When the force F pulls both ends of the mask body 20 in the width direction, the mask body 20 itself is very likely to generate stress therein because of its small thickness. In the preparation process of the mask plate 100, the mask body 20 may be made of a metal material, and the mask body 20 and the frame 11 may be connected by welding, so that stress may occur in the welding process. The stress can be represented by the open arrows in fig. 1, and the stress concentration on a partial region of the mask body 20 may cause a phenomenon that the mask body 20 is wrinkled. The stress is transmitted along the mask body 20, so that the mask body 20 in the evaporation region 12 is susceptible to stress and wrinkles, thereby affecting the uniformity of the thickness of the pixel structure after evaporation and the accuracy of the pixel position.

Furthermore, welding points 40 are arranged between the mask body 20 and the frame 11, and the welding points 40 are located on a side between the mask body 20 and the frame 11 away from the evaporation area 12.

The solder 40 may be a solder area between the mask body 20 and the frame 11, and the solder 40 is away from the evaporation area 12, so that the influence of the stress generated by the solder on the mask body 20 in the evaporation area 12 can be reduced, and the phenomenon that the mask body 20 in the evaporation area 12 is wrinkled due to stress concentration can be avoided.

In this embodiment, the mask body 20 is connected to the frame 11 by the welding point 40, the blocking member 30 is disposed on the side of the welding point 40 close to the evaporation region 12, and the height of at least a partial region of the blocking member 30 is greater than the height of the welding point 40, that is, the distance from the partial surface of the blocking member 30 away from the side of the frame 11 to the surface of the frame 11 is greater than the distance from the surface of the welding point 40 away from the side of the frame 11 to the surface of the frame 11, based on the surface of the frame. The two opposite sides of at least part of the blocking member 30 can be attached to the frame 11 and the mask body 20, and based on that the height of at least part of the blocking member 30 is greater than the height of the welding point 40, one side of the blocking member 30 attached to the mask body 20 can prevent the stress at the welding point 40 caused by welding from being transmitted to the mask body 20 in the evaporation region 12, and the phenomenon that the mask body 20 in the evaporation region 12 is wrinkled due to stress concentration is avoided. As an implementation manner, the blocking member 30 may be made of the same metal material as the mask body 20 and the frame 11, so that the three components may be connected by welding, thereby reducing the manufacturing difficulty. The blocking member 30 is located on the side of the welding point 40 close to the evaporation region 12, so that the influence on the connection process of the mask body 20 and the frame 11 can be reduced.

It should be noted that the height of the welding point 40 is the same as the height of the blocking member 30, and the heights of the welding point 40 and the blocking member 30 are much smaller than the thicknesses of the mask body 20 and the frame 11, so that when the height of the blocking member 30 is higher than the height of the welding point 40, the mask body 20 and the frame 11 can be connected through the welding point 40, and the welding performance between the mask body 20 and the frame 11 is not affected. The drawings of the present embodiment are only examples, and the thicknesses of the solder joint 40, the barrier member 30, the mask body 20 and the frame 11 are not limited by the drawings.

Specifically, the frame 11 at least includes a first step 111 and a second step 112 disposed on the first step 111, the solder 40 is disposed on the second step 112, and the mask body 20 is connected to the second step 112 through the solder 40.

It should be noted that the frame 11 may include a first step 111 and a second step 112 stacked together, where the first step 111 is a lower step, the second step 112 is an upper step, and the second step 112 protrudes from the first step 111, and the two steps may be integrally formed to ensure that the frame 11 has high mechanical strength. The thickness of the first step 111 may be greater than the thickness of the second step 112. On the premise that the mask plate 100 meets the requirement of the evaporation machine, that is, under the condition that the thickness of the mask plate 100 is constant, the mass of the first step 111 is larger than the whole mass of the frame 10, and the mass of the second step 112 is smaller than the whole mass of the frame 10, so that the thickness of the first step 111 at the bottom is larger, and the strength and stability of the frame 10 are improved.

Specifically, the blocking member 30 and the second step 112 are integrally formed. It should be noted that, based on that the blocking member 30 and the frame 11 can be made of a metal material, and the blocking member 30 is located on the second step 112, in the process of preparing the mask plate, the blocking member 30 can be integrally formed with the second step 112, so as to increase the connection strength between the blocking member 30 and the second step 112, when the mask body 20 is moved by the traction force of the clamping jaw 50, the traction force is transmitted to the blocking member 30, and the arrangement of integrally forming the blocking member 30 and the second step 112 can prevent the blocking member 30 and the second step 112 from generating relative displacement, so as to further prevent the blocking member 30 from generating stress on the mask body 20, and thus prevent the mask body 20 in the evaporation region from generating wrinkles. Moreover, the barrier member 30 prevents the stress near the clamping jaw 50 in the frame region and the stress at the welding point 40 from being transmitted to the mask body 20 of the evaporation region 12, so that the mask body 20 in the evaporation region 12 is prevented from being wrinkled due to the stress. Meanwhile, the blocking member 30 can also reinforce the second step 112, so that the mechanical strength of the second step 112 is improved, and the support stability of the frame 11 on the mask body 20 is increased.

Example two

Fig. 4 is a schematic view of a connection structure of a frame, a blocking member and a mask body of a mask plate according to a second embodiment of the present invention. Fig. 5 is a schematic structural diagram of a blocking member of a mask according to a second embodiment of the present invention. Referring to fig. 4 and 5, on the basis of the first embodiment, a mask 100 with another structure is provided in a second embodiment of the present invention, and compared with the first embodiment, the difference between the first embodiment and the second embodiment is: the structures of the barriers 30 in the mask 100 are different.

Specifically, the blocking member 30 may include a blocking portion 31 and an extending portion, wherein the height of the blocking portion 31 is greater than the height of the welding point, and the height of the extending portion gradually decreases in a direction away from the blocking portion 31.

It should be noted that, based on that the mask body 20 and the frame 11 are connected, the frame 11 has the first step 111 and the second step 112, and based on that the barrier 31 is located between the mask body 20 and the second step 112 and the height of the barrier is higher than the height of the solder joint, a gap is formed between the mask body 20 and the second step 112. When the mask body 20 is welded to the second step 112, the gap may cause a cold joint problem during the welding process, thereby reducing the stability of the connection between the two. And the position of the mask body 20 in the gap may droop due to gravity, thereby generating deformation stress, which is also transmitted to the mask body 20 in the evaporation region 12, and affecting the evaporation process.

In contrast, the extending portion includes a first extending portion 32 disposed on a side of the barrier portion away from the evaporation region 12, an end of the first extending portion 32 extends toward the frame region, and a solder 40 is disposed on the first extending portion 32. The extending portion may further include a second extending portion provided on a side of the barrier portion 31 close to the evaporation region 12, an end of the second extending portion extending toward the evaporation region 12.

It should be noted that the extending portion of the present embodiment includes a first extending portion 32 and a second extending portion (not shown in the drawings), the barrier portion 31 can block the stress from being transmitted to the mask body 20 in the evaporation region 12, and the height of the first extending portion 32 gradually decreases from the side close to the barrier portion 31 to the side far from the barrier portion 31, so as to adapt to the gap between the mask body 20 and the frame 11. The height of the second extension portion gradually decreases from the side close to the barrier portion 31 to the side far from the barrier portion 31, so as to adapt to the setting of the mask body 20 in the evaporation region 12. With such an arrangement, on one hand, the mask body 20 in the frame region can be supported by the first extension portion 32, and the mask body 20 in the evaporation region 12 can be supported by the second extension portion, so that the mask body 20 is prevented from sagging at the gap position or in the evaporation region 12 due to gravity, and the mask body 20 is prevented from being deformed and generating a deformation stress therein; on the other hand, this clearance can effectively be filled to first extension 32, has increased the area of being connected of mask body 20 with frame 11, increases the stability that both are connected to guarantee the roughness of the mask body 20 in the coating by vaporization district 12 and with the laminating degree of treating the coating by vaporization base plate, improve the position accuracy nature on the coating by vaporization layer after the coating by vaporization is accomplished, reduce the formation of coating by vaporization shadow, guaranteed the homogeneity of coating by vaporization layer thickness.

The solder points 40 can be disposed on the first extending portion 32, and based on the first extending portion 32 being located on the side of the blocking portion 31 away from the evaporation region 12, the solder points 40 can be located on the first extending portion 32 to ensure that the solder points 40 are as far away from the evaporation region 12 as possible, so as to reduce the influence of the stress generated near the solder points 40 on the mask body 20 in the evaporation region 12, and avoid the mask body 20 in the evaporation region 12 from being wrinkled due to stress concentration.

Other technical features are the same as those of the first embodiment and can achieve the same technical effects, and are not described in detail herein.

EXAMPLE III

Fig. 6 is a schematic view of a connection structure of a frame, a blocking member, and a mask body of a mask plate according to a third embodiment of the present invention. Fig. 7 is a detailed view of a portion a in fig. 6 according to a third embodiment of the present invention. Fig. 8 is a schematic structural diagram of a section B-B in fig. 6 according to a third embodiment of the present invention. Referring to fig. 6 to 8, on the basis of the first embodiment or the second embodiment, a third embodiment of the present invention provides another mask 100, and compared with the first embodiment or the second embodiment, the third embodiment of the present invention is different in that: the structures of the barriers 30 of the mask 100 are different.

Specifically, at least one protrusion 311 is disposed on a surface of the blocking member 30 close to the mask body 20, and a recess 22 matched with the protrusion 311 is disposed on the mask body 20 at a position corresponding to the protrusion 311.

It should be noted that the convex portion 311 and the concave portion 22 are matched, and when the blocking member 30 is disposed between the mask body 20 and the frame 11, the convex portion 311 is embedded in the concave portion 22. The protrusion 311 is embedded in the recess 22, so that an engagement structure is formed between the blocking portion 31 and the mask body 20, and therefore, the connection stability of the blocking portion 31 and the mask body is increased, and the fixing stability of the mask body 20 on the frame 11 is ensured. Further, since the stress is transmitted inside the mask body 20, the protrusion 311 protrudes into the recess 22, which can improve the blocking effect on the transmission of the stress inside the mask body 20, and prevent the stress on the mask body 20 outside the evaporation region 12 from being transmitted to the evaporation region 12.

In practical use, as an achievable implementation manner, the number of the protruding portions 311 and the recessed portions 22 may be provided in multiple pairs, the specific number of the protruding portions 311 may be set according to needs, the protruding portions 311 may be disposed at intervals on the blocking portion 31, for example, arranged in an array, and the number and the specific arrangement manner of the protruding portions 311 and the recessed portions 22 are not limited in this embodiment. As another realizable embodiment, the convex portion 311 and the concave portion 22 may be provided as only one pair, that is, only one convex portion 311 is provided on the barrier member 30, and one concave portion 22 corresponding to the convex portion 311 is provided on the mask body 20. Since the opening of the recessed portions 22 increases the structural unevenness of the mask body 20 itself, and the mechanical strength of the mask body 20 in the vicinity of the recessed portions 22 tends to be lowered, the stress in the mask body 20 increases if the number of the recessed portions 22 is too large.

As an achievable embodiment, at least part of the outer surface of the projection 311 is conformed over at least part of the inner surface of the recess 22. The arrangement that a part of the outer surface of the convex part 311 is attached to a part of the inner surface of the concave part 22 or the whole outer surface of the convex part 311 is attached to the whole inner surface of the concave part 22 can improve the attaching degree of the blocking member 30 and the mask body 20, avoid a gap between the outer surface of the convex part 311 and the inner surface of the concave part 22, support the concave part 22 by the convex part 311, prevent the mask body 20 from sagging or deforming at the position of the concave part 22, and avoid deformation stress in the region.

As an achievable embodiment, the depth of the recess 22 is less than or equal to half the thickness of the mask body 20. Based on the thickness of the mask body 20 affected by the recessed portion 22, the configuration of the present embodiment can avoid the recessed portion 22 formed to reduce the strength of the mask body 20, thereby ensuring the structural stability of the mask body 20, and simultaneously preventing the mask body 20 from deforming and generating deformation stress at the position of the recessed portion 22 due to too small thickness. In practical use, the depth of the recess 22 can be set according to the actual thickness of the mask body 20 and the needs of the user, which is not limited in this embodiment. The thickness of the mask body 20 may be denoted by a in fig. 7, and the depth of the recess 22 may be denoted by b in fig. 7.

Further, referring to fig. 6 and 7, in the first direction, the height of the protrusion 311 is gradually decreased from the middle of the protrusion 311 to both ends of the protrusion 311;

the first direction is perpendicular to the extending direction of both ends of the mask body 20.

Of course, the height of the protrusion 311 may be further set to gradually decrease from the center of the protrusion 311 to the periphery of the protrusion 311. In an implementation, the surface of the protrusion 311 close to the mask body 20 may be a spherical surface or a cambered surface structure with a high middle height and a low periphery height.

It should be noted that, as shown in fig. 1 of the first embodiment, the extending direction of the two ends of the mask body 20 in this embodiment may be the length direction of the mask body 20 itself, that is, the direction shown by L1 in fig. 1 and 6, and the first direction may be the width direction of the mask body 20 itself, that is, the direction shown by L2 in fig. 1 and 8, based on the clamping jaws 50 clamping the two ends of the mask body 20 in the width direction, the two ends of the mask body 20 are relatively flat in the width direction, and the middle position is relatively concentrated in stress due to the lack of pulling of the acting force in the middle, for this, the middle height of the protruding portion 311 is set to be greater than the height of the two ends of the protruding portion 311, and the height of the protruding portion 311 is gradually reduced from the middle of the protruding portion 311 to the two ends of the protruding portion 311, so that the stress in the middle of the width direction of the mask body 20 is relatively small, and the thickness of the corresponding protruding portion 311 in the first direction L1 is relatively small, so that the weight of the mask body 20 can be reduced, and the cost of the whole mask can be reduced, and the cost of the mask can be reduced.

The raised part 311 can be in one of a semi-circle, a rectangle or a trapezoid in the cross section parallel to the length direction L1 of the mask body 20 itself, such an arrangement not only makes the raised part 311 and the recessed part 22 on the mask body 20 easy to match and not easy to fall off, but also has a large contact surface between the raised part 311 and the recessed part 22, which can effectively block the stress from being transferred to the mask body 20 in the evaporation region 12, and ensure the flatness of the mask body 20 in the evaporation region 12.

Other technical features are the same as those of the first embodiment or the second embodiment, and the same technical effects can be achieved, which are not described in detail herein.

In the description of the embodiments of the present invention, it should be understood that the terms "mounted," "connected," and "connected" are to be construed broadly and may include, for example, a fixed connection, an indirect connection through intervening media, a connection between two elements, or an interaction between two elements, unless expressly stated or limited otherwise. The specific meanings of the above terms in the present invention can be understood by those skilled in the art according to specific situations. The terms "upper", "lower", "front", "rear", "vertical", "horizontal", "top", "bottom", "inner", "outer", and the like, indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience in describing and simplifying the description, but do not indicate or imply that the referred devices or elements must have a specific orientation, be constructed in a specific orientation, and be operated, and thus, should not be construed as limiting the present invention. In the description of the present invention, "a plurality" means two or more unless specifically stated otherwise.

The terms "first," "second," "third," "fourth," and the like in the description and in the claims of the present application and in the drawings described above, if any, are used for distinguishing between similar elements and not necessarily for describing a particular sequential or chronological order. It is to be understood that the data so used is interchangeable under appropriate circumstances such that the embodiments of the application described herein are, for example, capable of operation in sequences other than those illustrated or otherwise described herein. Furthermore, the terms "comprises," "comprising," and "having," and any variations thereof, are intended to cover a non-exclusive inclusion, such that a process, method, system, article, or apparatus that comprises a list of steps or elements is not necessarily limited to those steps or elements expressly listed, but may include other steps or elements not expressly listed or inherent to such process, method, article, or apparatus.

Finally, it should be noted that: the above embodiments are only used to illustrate the technical solution of the present invention, and not to limit the same; while the invention has been described in detail and with reference to the foregoing embodiments, it will be understood by those skilled in the art that: the technical solutions described in the foregoing embodiments may be modified, or some or all of the technical features may be equivalently replaced; and the modifications or the substitutions do not make the essence of the corresponding technical solutions depart from the scope of the technical solutions of the embodiments of the present invention.

Claims

1. A mask plate comprises a frame and at least one mask body arranged on the frame, the frame is enclosed by a plurality of frames, the area of the frame is a frame area, the area enclosed by the frames is an evaporation area, the mask plate is characterized in that,

two ends of the mask body are respectively positioned on at least two frames, at least part of the mask body is positioned in the evaporation area, and the frames are connected with the mask body through welding points;

2. A mask according to claim 1, wherein the frame comprises at least a first step and a second step arranged on the first step, and the blocking member is arranged on the second step.

3. A mask according to claim 2, wherein the stop and the second step are integrally formed.

4. A mask plate according to claim 2, wherein the blocking part comprises a blocking part and an extending part, the height of the blocking part is greater than that of the welding spot, and the height of the extending part is gradually reduced along the direction far away from the blocking part.

5. A mask plate according to claim 4, wherein the extension part comprises a first extension part, the first extension part extends along a direction far away from the evaporation region, and the welding spot is arranged on the first extension part.

6. A mask according to claim 4 or 5, wherein the extension part comprises a second extension part, and the second extension part extends along the direction close to the evaporation region.

7. A mask plate according to any one of claims 1 to 5, wherein at least one convex part is arranged on the surface of the blocking part close to one side of the mask body, and a concave part matched with the convex part is arranged on the mask body at a position corresponding to the convex part; at least part of the outer surface of the convex part is attached to at least part of the inner surface of the concave part.

8. A mask according to claim 7 wherein the depth of the recesses is less than or equal to half the thickness of the mask body.

9. A mask according to claim 8, wherein the height of the protrusions gradually decreases from the middle of the protrusions to both ends of the protrusions in a first direction, and the first direction is perpendicular to the extending direction of both ends of the mask body.

10. A mask according to claim 9, wherein in the first direction, the height of the raised portion gradually decreases from the center of the raised portion to the periphery of the raised portion.