CN108998756B - support bar - Google Patents
support bar Download PDFInfo
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- CN108998756B CN108998756B CN201810844279.XA CN201810844279A CN108998756B CN 108998756 B CN108998756 B CN 108998756B CN 201810844279 A CN201810844279 A CN 201810844279A CN 108998756 B CN108998756 B CN 108998756B
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- support bar
- present disclosure
- plane
- body part
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/04—Coating on selected surface areas, e.g. using masks
- C23C14/042—Coating on selected surface areas, e.g. using masks using masks
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
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- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Electroluminescent Light Sources (AREA)
Abstract
The present disclosure proposes a support bar that is secured to a mask frame along a plane. The support bar is provided with a body part, the body part is provided with two opposite side edges positioned on a plane, a plurality of cross areas are distributed on the body part at intervals, the parts of the two side edges corresponding to the cross areas are outwards protruded along the plane to form extension parts, and openings are respectively formed in the cross areas of the body part. The support bar provided by the disclosure is designed in such a way that the bending of the support bar in the net stretching process is greatly reduced on the premise of not changing the stretching rate of the support mask.
Description
Technical Field
The disclosure relates to the field of OLED device evaporation processes, and in particular relates to a supporting bar.
Background
In the existing evaporation process of the OLED device, particularly for a small-sized special-shaped OLED display panel, as shown in fig. 1, a Fine Metal Mask (FMM) is usually adopted to cooperate with a special-shaped support bar (Howling) to perform evaporation in a manner of shielding a special-shaped grooved area and a chamfer area of the OLED display panel. Specifically, as shown in fig. 1, the shielding mode generally adopts a full-pass etching fine metal Mask, a conventional shielding part (Cover Mask) and a special-shaped support bar to shield the edges, chamfer angles and special-shaped areas of the OLED display panel, so that the method has higher precision and has no problems in cleaning and welding.
However, due to the asymmetric special-shaped structure of the special-shaped support bars, the special-shaped support bars are easy to bend during net stretching, so that the relative position of the special-shaped support bars and the display panel is offset, and the evaporation accuracy is affected. Experiments prove that after the special-shaped support bar is stretched, the special-shaped support bar mainly deforms in two aspects, namely, the Y-direction stretching and the X-direction bending. For stretching in the Y direction, according to the simulation result and the stretching rate, sectional compensation can be performed to eliminate the influence caused by stretching when the special-shaped supporting bar is manufactured. However, the bending in the X direction cannot be eliminated by a compensation method, which is also a main cause of poor high incidence of the existing special-shaped support bar in the special-shaped region during vapor deposition.
In cities, bending of the special-shaped support bar in the X direction is generally reduced by a method of reducing the stretching force at present, but the stretching rate is reduced by reducing the stretching force, so that the sagging amount of the special-shaped support bar and the fine metal mask plate is increased, and the effect of supporting the fine metal mask plate cannot be achieved.
Disclosure of Invention
It is a primary object of the present disclosure to overcome at least one of the above-mentioned drawbacks of the prior art and to provide a brace bar that is effective in alleviating bending.
In order to achieve the above purpose, the present disclosure adopts the following technical scheme:
according to one aspect of the present disclosure, a support bar is provided that is secured to a mask frame along a plane. The support bar is provided with a body part, the body part is provided with two opposite side edges positioned on the plane, a plurality of crossing areas are distributed on the body part at intervals, the parts of the two side edges corresponding to the crossing areas are outwards protruded along the plane to form extension parts, and holes are formed in the crossing areas of the body part.
According to one embodiment of the present disclosure, the shape of the opening is rectangular, circular, elliptical or polygonal.
According to one embodiment of the present disclosure, one of the side edges of the body portion protrudes outward from the plane to form a shaped portion. Wherein the distance between the opening and the side edge provided with the special-shaped part is smaller than the distance between the opening and the other side edge.
According to one embodiment of the present disclosure, a plurality of openings are respectively formed in each of the intersecting regions of the body portion, and the plurality of openings formed in each of the intersecting regions define an opening region.
According to one embodiment of the present disclosure, a plurality of the openings in the opening area are uniformly arranged in an array.
According to one embodiment of the present disclosure, a portion of the open area corresponding to the extension portion extends outward to correspond to the extension portion shape.
According to one embodiment of the present disclosure, the opening area is located at a central position of a portion of the body portion where the extension is provided.
According to one embodiment of the present disclosure, the openings are square or circular in shape.
According to one embodiment of the present disclosure, one of the side edges of the body portion protrudes outward from the plane to form a shaped portion. The forming process of the special-shaped part is half-engraving.
According to one embodiment of the present disclosure, a connection portion between the extension portion and the body portion has a rounded structure.
According to the technical scheme, the supporting strip provided by the present disclosure has the advantages and positive effects that:
the support bar provided by the disclosure has the advantages that the body part of the support bar is provided with two opposite side edges, a plurality of crossing areas are distributed at intervals on the body part, the parts of the two side edges corresponding to the crossing areas are outwards protruded to form extension parts respectively, and the structure design of open holes are respectively formed in the crossing areas of the body part, so that the bending of the support bar in the net stretching process is greatly reduced on the premise of not changing the stretching rate of a support mask.
Drawings
Various objects, features and advantages of the present disclosure will become more apparent from the following detailed description of the preferred embodiments of the disclosure, when taken in conjunction with the accompanying drawings. The drawings are merely exemplary illustrations of the present disclosure and are not necessarily drawn to scale. In the drawings, like reference numerals refer to the same or similar parts throughout. Wherein:
FIG. 1 representatively illustrates a partial schematic view of a prior art mask structure;
FIG. 2 is a partial schematic view of a first embodiment of a brace presented in the present disclosure;
FIG. 3 is an X-direction curved state view of the support bar shown in FIG. 2 during a web tensioning process;
FIG. 4 is a partial schematic view of a second embodiment of a brace presented in the present disclosure;
FIG. 5 is a partial schematic view of a third embodiment of a brace presented in the present disclosure;
FIG. 6 is a partial schematic view of a fourth embodiment of a brace presented in the present disclosure;
FIG. 7 is a partial schematic view of a fifth embodiment of a brace bar as set forth in the present disclosure;
FIG. 8 is a partial schematic view of a sixth embodiment of a brace bar as set forth in the present disclosure;
fig. 9 is a partial structural schematic view of a seventh embodiment of a support bar according to the present disclosure.
The reference numerals are explained as follows:
the prior art scheme is as follows:
110. a special-shaped support bar;
111. a special-shaped structure;
120. a shielding part;
the scheme of the present disclosure is as follows:
210. a support bar;
211. a body portion;
2111. an intersection region;
212. an extension;
2121. a rounded corner structure;
213. opening holes;
214. a special-shaped part;
215. and (5) opening areas.
Detailed Description
Exemplary embodiments that embody features and advantages of the present disclosure are described in detail in the following description. It will be understood that the present disclosure is capable of various modifications in the various embodiments, all without departing from the scope of the present disclosure, and that the description and drawings are intended to be illustrative in nature and not to be limiting of the present disclosure.
In the following description of various exemplary embodiments of the present disclosure, reference is made to the accompanying drawings, which form a part hereof, and in which are shown by way of illustration various exemplary structures, systems, and steps in which aspects of the present disclosure may be practiced. It is to be understood that other specific arrangements of parts, structures, example devices, systems, and steps may be used, and structural and functional modifications may be made without departing from the scope of the present disclosure. Moreover, although the terms "between," "center," "outer," and the like may be used in this specification to describe various exemplary features and elements of the disclosure, these terms are used herein for convenience only, e.g., in accordance with the directions of the examples depicted in the drawings. Nothing in this specification should be construed as requiring a particular three-dimensional orientation of structures to fall within the scope of this disclosure.
Embodiment one
Referring to fig. 2, a partial structural schematic of a support bar 210 proposed by the present disclosure is representatively illustrated. In this exemplary embodiment, the support bar 210 proposed in the present disclosure is illustrated by taking the support bar 210 of a mask structure applied to an OLED device evaporation process as an example. Those skilled in the art will readily appreciate that various modifications, additions, substitutions, deletions, or other changes may be made to the embodiments described below in order to apply the relevant designs of the support bar 210 to vapor deposition processes of other types of semiconductor devices, and such changes remain within the principles of the support bar 210 set forth in the present disclosure.
As shown in fig. 2, in the present embodiment, the supporting bar 210 provided in the present disclosure is fixed on the mask frame along a plane, and cooperates with the fine metal mask plate and the shielding portion to shield the special-shaped grooved area and the chamfer area of the OLED display panel. The connection or matching relationship between the support bar 210 and the mask frame, the fine metal mask plate and the shielding portion can refer to the related design of the prior art, and will not be described herein. Referring to fig. 3 in conjunction, an X-direction bending state diagram of a support bar 210 embodying principles of the present disclosure during a web tensioning process is representatively illustrated in fig. 3. The X direction and the Y direction are directions defined on the plane, and the X direction is perpendicular to the Y direction, and the X direction is the width direction of the support bar 210, and the Y direction is the extending direction of the support bar 210. The structure, connection and functional relationship of the main components of the support bar 210 proposed in the present disclosure are described in detail below with reference to the above-mentioned drawings.
As shown in fig. 2, in the present embodiment, the supporting bar 210 has a body portion 211, and the body portion 211 has two opposite sides located at the above-mentioned plane. A plurality of intersecting regions 2111 are spaced apart in the Y direction on the main body 211, and these intersecting regions 2111 are the mutually covered regions where the support bar 210 intersects (e.g., perpendicularly intersects) each shielding portion. The portions of the two sides corresponding to the respective intersection regions 2111 project outwardly along the plane to form extensions 212, respectively. The cross regions 2111 of the main body 211 are each provided with an opening 213. Through the design, the support bar 210 can effectively adjust local stress through the opening of the opening 213, so that the stress borne by the support bar 210 tends to be symmetrically distributed, and the X-direction bending of the support bar during the net stretching process is reduced. In addition, the openings 213 can accommodate localized deformation without affecting critical areas of the brace bar 210.
In addition, as shown in fig. 2, in the present embodiment, the supporting bar 210 is described based on the structure of the conventional special-shaped supporting bar, that is, one side edge plane of the body portion 211 protrudes outward to form a special-shaped portion 214. On this basis, the distance of the opening 213 from the side provided with the shaped portion 214 is preferably smaller than the distance of the opening 213 from the other side. Through the design, the open holes 213 which are formed towards the special-shaped parts 214 in a biased way can further optimize the local stress born by the support bars 210, so that the stress born by the support bars 210 further tends to be distributed symmetrically, and the bending of the support bars in the X direction in the process of stretching the net is further reduced.
On the other hand, as shown in fig. 3, according to the simulation result, based on the design of the supporting bar 210 proposed in the present disclosure, the bending amount of the supporting bar 210 during the net stretching process can be effectively reduced, and the amplitude reduction can reach more than 60%.
Further, as shown in fig. 2, in the present embodiment, the opening 213 may preferably adopt a rectangular hole pattern. In other embodiments, the opening 213 may have other holes such as a circle, an ellipse, or a polygon, which is not limited in this embodiment.
Further, as shown in fig. 2, in the present embodiment, the connection between the extension portion 212 and the body portion 211 preferably adopts a rounded structure 2121. In other embodiments, the connection portion may also adopt a chamfer structure or other transition designs, and may be flexibly adjusted according to the corner shape of the OLED display panel.
Second embodiment
Referring to fig. 4, a partial structural schematic diagram of a second embodiment of the brace bar 210 proposed by the present disclosure is representatively illustrated. In this exemplary embodiment, the support bar 210 proposed in the present disclosure is substantially identical in structure to the support bar 210 described in the first embodiment, and the main difference between the two is that:
as shown in fig. 4, in the present embodiment, a plurality of openings 213 are formed in each of the intersecting regions 2111 of the body 211 of the support bar 210, that is, the plurality of openings 213 formed in each of the intersecting regions 2111 define an opening region 215. Through the design, the plurality of openings 213 in the opening area 215 can further disperse local stress on the support bar 210, so as to relieve local wrinkling of the support bar 210.
Further, as shown in fig. 4, in the present embodiment, the plurality of openings 213 in the opening area 215 are preferably opened in an array-like uniform arrangement.
Further, as shown in fig. 4, in the present embodiment, the opening 213 may preferably adopt a square hole pattern. In other embodiments, the opening 213 may have other holes such as rectangular, oval, or polygonal, but is not limited to this embodiment.
Further, as shown in fig. 4, in the present embodiment, based on the structural basis of the existing profiled support bar adopted by the support bar 210 in the first embodiment, the open area 215 may be preferably located at the center of the portion of the body portion 211 where the extension portion 212 is provided. Through the above design, the openings 213 are fixed in the opening area 215 in a central symmetrical manner at the portion of the body 211 where the extension 212 is provided, so that the problem of uneven stress in the chamfer area of the OLED display panel can be further alleviated, and the openings 213 can be further distributed, so that deformation accumulation is effectively prevented, and the bending amount of the central portion of the support bar 210 is further reduced.
Embodiment III
Referring to fig. 5, a partial structural schematic diagram of a third embodiment of the brace bar 210 proposed by the present disclosure is representatively illustrated. In this exemplary embodiment, the support bar 210 proposed in the present disclosure is substantially identical in structure to the support bar 210 described in the second embodiment, and the main difference between the two is that:
as shown in fig. 5, in the present embodiment, a portion of the opening region 215 corresponding to the extension 212 extends outward to correspond to the shape of the extension 212. For example, if the two opposite extending portions 212 and the portion of the main body 211 are approximately regarded as a cross-shaped structure, the open area 215 may be designed as a diamond-shaped structure or at least have two tip areas pointing to the two extending portions 212, and other preferable arrangements may be obtained in combination with simulation. . By the above design, the stress concentration phenomenon of the support bar 210 can be further relieved due to matching the open area 215 (i.e., the arrangement range of the open holes 213) with the actual shape of the product.
Fourth embodiment
Referring to fig. 6, a partial structural schematic diagram of a fourth embodiment of the brace bar 210 proposed by the present disclosure is representatively illustrated. In this exemplary embodiment, the support bar 210 proposed in the present disclosure is substantially identical in structure to the support bar 210 described in the third embodiment, and the main difference between the two is that:
in this embodiment, as shown in fig. 6, the opening 213 may preferably be a circular hole pattern. In other embodiments, the opening 213 may have other holes such as rectangular, oval, or polygonal, but is not limited to this embodiment.
Fifth embodiment
Referring to fig. 7, a partial structural schematic diagram of a fifth embodiment of the brace bar 210 proposed by the present disclosure is representatively illustrated. In this exemplary embodiment, the support bar 210 proposed in the present disclosure is substantially identical in structure to the support bar 210 described in the second embodiment, and the main difference between the two is that:
as shown in fig. 7, in the present embodiment, the supporting bar 210 is described based on the structure of the conventional special-shaped supporting bar, that is, one side edge plane of the body portion 211 is protruded outwards to form a special-shaped portion 214. On this basis, the distance of the opening area 215 from the side provided with the shaped portion 214 is preferably smaller than the distance of the opening area 215 from the other side. By the design, the open hole areas 215 which are arranged in a biased way towards the special-shaped parts 214 can further optimize the local stress to which the supporting bars 210 are subjected, so that the stress to which the supporting bars 210 are subjected further tends to be distributed symmetrically, and the bending of the supporting bars in the X direction in the process of stretching the net is further reduced.
Embodiment six
Referring to fig. 8, a schematic partial structure of a sixth embodiment of a brace bar 210 as set forth in the present disclosure is representatively illustrated. In this exemplary embodiment, the support bar 210 proposed in the present disclosure is substantially identical in structure to the support bar 210 described in the fourth embodiment, and the main difference between the two is that:
as shown in fig. 8, in the present embodiment, the supporting bar 210 is described based on the structure of the conventional special-shaped supporting bar, that is, one side edge of the body 211 is protruded outward from the plane to form a special-shaped portion 214. On this basis, the forming process of the shaped portion 214 preferably adopts a half-engraving process. By the above design, the bending of the support bar 210 can be further reduced, and the tensile force of the support bar 210 can be further reduced.
Embodiment seven
Referring to fig. 9, a partial structural schematic diagram of a seventh embodiment of the brace bar 210 proposed by the present disclosure is representatively illustrated. In this exemplary embodiment, the support bar 210 proposed in the present disclosure is substantially identical in structure to the support bar 210 described in the second embodiment, and the main difference between the two is that:
the various designs of the brace bar 210 proposed by the present disclosure are not limited to the structural basis of the brace bar 210 having the profiled portion 214 shown in fig. 2-8. That is, as shown in fig. 9, in the present embodiment, the shape of the shaped portion 214 of the supporting bar 210 is also flexibly adjusted according to different shapes of the shaped area of the OLED display panel.
It should be noted herein that the support bars shown in the drawings and described in this specification are only a few examples of the wide variety of support bars that can employ the principles of the present disclosure. It should be clearly understood that the principles of the present disclosure are in no way limited to any of the details of the support bar or any of the components of the support bar shown in the drawings or described in the present specification.
In summary, the support bar provided by the present disclosure has two opposite sides through the support bar body portion, the body portion is provided with a plurality of intersecting regions at intervals, portions of the two sides corresponding to the intersecting regions are respectively protruded outwards to form the extending portions, and the intersecting regions of the body portion are respectively provided with the structural design of opening holes, so that the bending of the support bar in the net stretching process is greatly reduced on the premise of not changing the stretching rate of the support mask.
Specifically, the support bar provided by the disclosure can reduce the X-direction bending by more than 60% on the premise of not changing the stretching rate, and ensures the evaporation accuracy of the special-shaped part. For support bars with wider sizes, the design of the present disclosure can effectively reduce the tensile force, thereby reducing the internal stress of the support bars and ensuring the design specification and parameters of the support mask. Furthermore, the tensile force of the mask frame is reduced based on the reduction of the tensile force of the supporting strips, so that the deformation is reduced, and the mask precision is improved as a whole. In addition, the X-direction bending of the supporting bar is reduced, and meanwhile, the internal stress of the supporting bar can be adjusted, so that the stress is uniformly distributed, and the local deformation of the supporting bar is reduced, and the folds and the warpage are reduced.
Exemplary embodiments of the support bar set forth in the present disclosure are described and/or illustrated in detail above. Embodiments of the present disclosure are not limited to the specific embodiments described herein, but rather, components and/or steps of each embodiment may be utilized independently and separately from other components and/or steps described herein. Each component and/or each step of one embodiment may also be used in combination with other components and/or steps of other embodiments. When introducing elements/components/etc. that are described and/or illustrated herein, the terms "a," "an," and "the" are intended to mean that there are one or more of the elements/components/etc. The terms "comprising," "including," and "having" are intended to be inclusive and mean that there may be additional elements/components/etc., in addition to the listed elements/components/etc.
While the support bars presented in this disclosure have been described in terms of various specific embodiments, those skilled in the art will recognize that the disclosure can be practiced with modification within the spirit and scope of the claims.
Claims (7)
1. The support bar is fixed on the mask frame along a plane and is characterized by comprising a body part, wherein the body part is provided with two opposite side edges positioned on the plane, a plurality of crossing areas are distributed on the body part at intervals, parts of the two side edges corresponding to the crossing areas respectively protrude outwards along the plane to form extension parts, and openings are respectively formed in the crossing areas of the body part; wherein, one side edge of the body part protrudes outwards along the plane to form a special-shaped part, and the distance between the opening and the side edge provided with the special-shaped part is smaller than the distance between the opening and the other side edge; wherein, a plurality of open pores are respectively arranged in each crossing region of the body part, and a plurality of open pores arranged in each crossing region define an open pore region.
2. The brace bar of claim 1, wherein the aperture is rectangular, circular, or oval in shape.
3. The brace bar of claim 1, wherein a plurality of the openings in the open area are uniformly arranged in an array.
4. The brace bar of claim 1, wherein a portion of the open area corresponding to the extension extends outwardly to correspond to the extension shape.
5. The brace bar of claim 1, wherein the perforated region is centered on a portion of the body portion where the extension is located.
6. The brace bar of claim 1, wherein one of the side edges of the body portion extends outwardly from the plane to form a contoured portion; the forming process of the special-shaped part is half-engraving.
7. The brace bar of claim 1, wherein the connection of the extension portion to the body portion is rounded.
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CN201810844279.XA CN108998756B (en) | 2018-07-27 | 2018-07-27 | support bar |
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CN201810844279.XA CN108998756B (en) | 2018-07-27 | 2018-07-27 | support bar |
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CN108998756A CN108998756A (en) | 2018-12-14 |
CN108998756B true CN108998756B (en) | 2023-08-29 |
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CN201810844279.XA Active CN108998756B (en) | 2018-07-27 | 2018-07-27 | support bar |
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Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
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CN110284107A (en) * | 2019-06-28 | 2019-09-27 | 武汉天马微电子有限公司 | Supporting strip and supporting device for display panel and evaporation method for display panel |
CN111509016B (en) * | 2020-04-28 | 2023-03-24 | 武汉华星光电半导体显示技术有限公司 | Mask and manufacturing method thereof |
CN111647846B (en) * | 2020-05-29 | 2022-02-22 | 昆山国显光电有限公司 | Support strip and mask |
CN113046686B (en) * | 2021-03-11 | 2022-08-19 | 京东方科技集团股份有限公司 | Mask plate assembly and evaporation equipment |
CN113684444B (en) * | 2021-08-06 | 2023-08-04 | 昆山国显光电有限公司 | Support bar and net stretching method |
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CN1625312A (en) * | 2003-12-02 | 2005-06-08 | 索尼株式会社 | Deposition mask and manufacturing method thereof |
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CN108004504A (en) * | 2018-01-02 | 2018-05-08 | 京东方科技集团股份有限公司 | A kind of mask plate |
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KR102420460B1 (en) * | 2016-01-15 | 2022-07-14 | 삼성디스플레이 주식회사 | Mask frame assembly, apparatus and method for manufacturing a display apparatus |
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CN1625312A (en) * | 2003-12-02 | 2005-06-08 | 索尼株式会社 | Deposition mask and manufacturing method thereof |
KR20180078486A (en) * | 2016-12-30 | 2018-07-10 | 주식회사 에스에프에이 | Heating unit, evaporation source having the same and method for assembling the same |
CN107460436A (en) * | 2017-07-25 | 2017-12-12 | 武汉华星光电半导体显示技术有限公司 | Metal otter board and evaporation mask device |
CN107523788A (en) * | 2017-08-31 | 2017-12-29 | 京东方科技集团股份有限公司 | A kind of mask plate and preparation method thereof |
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CN108004504A (en) * | 2018-01-02 | 2018-05-08 | 京东方科技集团股份有限公司 | A kind of mask plate |
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