CN111366102B - Refraction type color confocal measuring head structure for measuring surface appearance of inner hole - Google Patents
Refraction type color confocal measuring head structure for measuring surface appearance of inner hole Download PDFInfo
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- CN111366102B CN111366102B CN202010319860.7A CN202010319860A CN111366102B CN 111366102 B CN111366102 B CN 111366102B CN 202010319860 A CN202010319860 A CN 202010319860A CN 111366102 B CN111366102 B CN 111366102B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
Abstract
The invention discloses a measuring head structure for measuring the surface appearance of an inner hole in a refraction type color confocal manner, and relates to the technical field of optical surface detection. The dispersion lens comprises a right-angle prism, a dispersion lens and a hollow rotating mechanism, wherein the right-angle prism is arranged in an inner hole piece, one end of the dispersion lens is fixedly connected with the right-angle prism through a screw, and the other end of the dispersion lens is embedded in the hollow rotating mechanism; the dispersion lens consists of a cylinder, a collimating lens, a dispersion lens and a focusing lens. This measurement head structure of colored confocal measurement hole surface appearance of refraction formula through setting up miniature rotatory reduction gear of cavity and miniature DC motor, has realized efficient advantage, drives the dispersion camera lens that sets up on miniature rotatory reduction gear of cavity through miniature DC motor's rotary motion, and then drives right angle prism and rotates, scans the inner wall surface of hole spare to this measures hole surface appearance, has the efficient effect of measurationing.
Description
Technical Field
The invention relates to the technical field of optical surface detection, in particular to a measuring head structure for measuring the surface appearance of an inner hole in a refraction type color confocal manner.
Background
In the conventional measurement technology, contact-type measurement methods such as three-coordinate measurement and gauge measurement are mainly adopted, while optical measurement equipment is favored by many enterprises due to the advantages of short measurement time, no abrasion to workpieces due to non-contact measurement, multiple sizes obtained by one-time measurement and the like, and measurement equipment used daily comprises a projector, an imager, a full-automatic optical measurement system and the like, but the currently used optical measurement equipment has the following defects:
1. the measuring process is complex, the use is very limited, the measuring accuracy is limited, and the surface of the workpiece defect cannot be obtained;
2. the position of a part on the part cannot be measured or is difficult to measure, so that the measuring range and the measuring precision are influenced;
3. the technique for measuring the distribution of the light intensity of the workpiece relative to the light-emitting angle is achieved by scanning each light-emitting angle with a photodetector, and only measuring the forward light of the workpiece, so that it is impossible to check whether the light-emitting angle range of the light-emitting element is normal.
Disclosure of Invention
Technical problem to be solved
Aiming at the defects of the prior art, the invention provides the measuring head structure for measuring the surface morphology of the inner hole in a refraction type color confocal manner, which has the advantages of high efficiency, capability of meeting the measurement conditions and requirements, reduction of measurement errors and the like, and solves the problems in the background art.
(II) technical scheme
In order to realize the purposes of high efficiency, meeting measurement conditions and requirements and reducing measurement errors, the invention provides the following technical scheme: a refraction type color confocal measuring head structure for measuring the surface appearance of an inner hole comprises a right-angle prism, a dispersion lens and a hollow rotating mechanism, wherein the right-angle prism is arranged in an inner hole piece, one end of the dispersion lens is fixedly connected with the right-angle prism through a screw, and the other end of the dispersion lens is embedded in the hollow rotating mechanism;
the dispersion lens consists of a cylinder, a collimating lens, a dispersion lens and a focusing lens, wherein the collimating lens, the dispersion lens and the focusing lens are all arranged in the cylinder, the dispersion lens is positioned below the collimating lens, and the focusing lens is positioned below the dispersion lens;
the hollow rotating mechanism is composed of a miniature hollow rotating speed reducer, a miniature direct current motor, an encoder and an optical path rotating coupling joint, the miniature direct current motor is fixedly installed on the miniature hollow rotating speed reducer, the encoder is fixedly installed on the outer side of the miniature direct current motor, and the optical path rotating coupling joint is fixedly installed on the miniature hollow rotating speed reducer.
As a preferred technical scheme of the invention, the top end of the right-angle prism is provided with an imaging access port and is connected with the dispersion lens through the imaging access port, and the right side of the right-angle prism is provided with an imaging mirror surface.
As a preferred technical solution of the present invention, the dispersion lens is in a long tube shape, a white light access point is disposed at a top end of the dispersion lens, a connector is disposed at a bottom end of the dispersion lens, and is connected to the right-angle prism through the connector, and the collimating lens, the dispersion lens, and the focusing lens are all located on a same axis.
As a preferred technical scheme of the present invention, a middle hole is provided in the middle of the miniature hollow rotation speed reducer, and the upper end of the dispersive lens is provided in the middle hole.
As a preferred technical scheme of the invention, a section of the dispersion lens, which is close to the bottom of the middle hole, is sleeved with a lower miniature dense ball bearing and is fixedly connected with the middle hole through the lower miniature dense ball bearing.
As a preferred technical scheme of the invention, a section of the dispersion lens, which is close to the top of the middle hole, is sleeved with a micro dense ball bearing and is fixedly connected with the middle hole through the micro dense ball bearing.
As a preferred technical solution of the present invention, the top end of the dispersion lens is connected to an optical path rotary coupling joint, and a light projection port is disposed outside the optical path rotary coupling joint.
As a preferable technical solution of the present invention, the optical path rotary coupling joint is disposed in an inclined shape, and an end portion of an output shaft of the micro dc motor is in transmission connection with the micro hollow rotary speed reducer through a coupling.
(III) advantageous effects
Compared with the prior art, the invention provides a refractive color confocal measuring head structure for measuring the surface morphology of an inner hole, which has the following beneficial effects:
1. this confocal gauge head structure of measuring hole surface morphology of refraction formula through setting up miniature cavity rotation reducer and miniature DC motor, has realized efficient advantage, drives the dispersion camera lens that sets up on miniature cavity rotation reducer through miniature DC motor's rotary motion, and then drives right angle prism and rotate, scans the inner wall surface of interior hole spare to this measures hole surface morphology, has the efficient effect of measurationing.
2. The measuring head structure for measuring the surface morphology of the inner hole in a refraction type color confocal manner has the advantages that measuring conditions and requirements are met by arranging the encoder, the encoder is placed at the tail part of the miniature direct current motor to measure the rotating phase, and the encoder can be combined with the position information of the dispersion lens to form point cloud positions of all positions on the inner wall of the inner hole piece, so that high-precision measuring conditions are formed.
3. This measurement head structure of hole surface appearance is measured to refraction formula chromatic confocal, through setting up light path rotary coupling joint, realized reducing measuring error's advantage, light path rotary coupling joint fixes on miniature cavity rotary reducer, and its bottom is connected to the white light access point of dispersion camera lens through miniature dense pearl bearing on the embedding, and the light projecting mouth on it is connected to white light LED light source, can realize that white light inserts and feedback does not receive rotatory influence to reduce measuring error.
Drawings
Fig. 1 is a schematic structural diagram of a structure of a measuring head for refractive color confocal measurement of the surface topography of an inner hole according to the present invention;
FIG. 2 is a front view of a refractive color confocal measurement head for measuring the surface topography of an inner hole according to the present invention;
FIG. 3 is a diagram of the measurement effect of the inner hole member of the probe structure for refractive color confocal measurement of the surface morphology of the inner hole according to the present invention;
FIG. 4 is a front view of an inner hole member of a probe structure for refractive color confocal measurement of the surface morphology of an inner hole according to the present invention;
fig. 5 is an optical measurement effect diagram of a dispersion lens of a probe structure for refractive color confocal measurement of surface morphology of an inner hole according to the present invention.
In the figure: 1. a right-angle prism; 2. a dispersion lens; 3. a hollow rotating mechanism; 4. an inner bore member; 5. a barrel; 6. a collimating lens; 7. a dispersive lens; 8. a focusing lens; 9. a miniature hollow rotary speed reducer; 10. a micro direct current motor; 11. an encoder; 12. an optical path rotary coupling joint; 13. an imaging access port; 14. an imaging mirror; 15. a white light access point; 16. a connecting port; 17. a middle hole; 18. a lower miniature dense-ball bearing; 19. a miniature dense-ball bearing is arranged; 20. a light projecting port.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be obtained by a person skilled in the art without making any creative effort based on the embodiments in the present invention, belong to the protection scope of the present invention.
Referring to fig. 1-5, a refractive color confocal measurement head structure for measuring the surface morphology of an inner hole comprises a right-angle prism 1, a dispersion lens 2 and a hollow rotating mechanism 3, wherein the right-angle prism 1 is arranged in an inner hole part 4, one end of the dispersion lens 2 is fixedly connected with the right-angle prism 1 through a screw, and the other end of the dispersion lens 2 is embedded in the hollow rotating mechanism 3;
the dispersion lens 2 consists of a cylinder 5, a collimating lens 6, a dispersion lens 7 and a focusing lens 8, wherein the collimating lens 6, the dispersion lens 7 and the focusing lens 8 are all arranged in the cylinder 5, the dispersion lens 7 is positioned below the collimating lens 6, and the focusing lens 8 is positioned below the dispersion lens 7;
the hollow rotating mechanism 3 is composed of a miniature hollow rotating speed reducer 9, a miniature direct current motor 10, an encoder 11 and a light path rotating coupling joint 12, the miniature direct current motor 10 is fixedly arranged on the miniature hollow rotating speed reducer 9, the miniature hollow rotating speed reducer 9 and the miniature direct current motor 10 are arranged, the advantage of high efficiency is realized, the rotating motion of the miniature direct current motor 10 drives a dispersion lens 2 arranged on the miniature hollow rotating speed reducer 9, and then drives a right-angle prism 1 to rotate, so as to scan the inner wall surface of an inner hole piece 4, so that the inner hole surface appearance is measured, the measuring effect of high efficiency is realized, the encoder 11 is fixedly arranged at the outer side of the miniature direct current motor 10, the advantage of meeting the measuring conditions and requirements is realized by arranging the encoder 11, the encoder 11 is arranged at the tail part of the miniature direct current motor 10, so as to measure the rotating phase, the optical path rotary coupling joint 12 is fixedly arranged on the miniature hollow rotary speed reducer 9, the advantage of reducing the measurement error is realized by arranging the optical path rotary coupling joint 12, the optical path rotary coupling joint 12 is fixed on the miniature hollow rotary speed reducer 9, the bottom end of the optical path rotary coupling joint is connected to a white light access point 15 of the dispersion lens 2 through an embedded miniature dense ball bearing 19, and a light projection port 20 on the optical path rotary coupling joint is connected to a white light LED light source, so that the white light access and feedback are not influenced by rotation, and the measurement error is reduced.
As a specific technical solution of this embodiment, the top end of the right-angle prism 1 is provided with an imaging access port 13, and is connected with the chromatic dispersion lens 2 through the imaging access port 13, and the right side of the right-angle prism 1 is provided with an imaging mirror surface 14.
In the embodiment, the white light is introduced to the right-angle prism 1 through the dispersion lens 2 after being accessed, and is fed back to the inner wall surface of the inner hole element 4 through the imaging mirror surface 14, so as to measure the surface appearance of the inner hole.
As a specific technical solution of this embodiment, the dispersion lens 2 is in a long cylinder shape, the top end of the dispersion lens 2 is provided with a white light access point 15, the bottom end of the dispersion lens 2 is provided with a connection port 16 and is connected to the right-angle prism 1 through the connection port 16, and the collimating lens 6, the dispersion lens 7 and the focusing lens 8 are all located on the same axial line.
In the embodiment, the white light LED is generated by an LED chip, transmitted to the focus of the collimating lens 6 through an optical fiber, and collimated by the collimating lens 6 to emit white light, the collimated white light passes through the dispersing lens 7 to form color distribution varying with different refraction angles, the focusing lens 8 realizes color distribution along the axial direction, and the position of the object to be measured is calculated according to the wavelength at different positions.
As a specific technical solution of this embodiment, a middle hole 17 is disposed in the middle of the miniature hollow rotation speed reducer 9, and the upper end of the dispersive lens 2 is disposed in the middle hole 17.
In this embodiment, the dispersion lens 2 is embedded into the middle hole 17 of the miniature hollow rotation speed reducer 9, so as to connect and fix the dispersion lens 2, wherein the model of the miniature hollow rotation speed reducer 9 is CK6085-5, and the model of the miniature dc motor 10 is XD-WS37GB 3650.
As a specific technical solution of this embodiment, a section of the dispersion lens 2 near the bottom of the middle hole 17 is sleeved with a lower micro dense-ball bearing 18, and is fastened and connected with the middle hole 17 through the lower micro dense-ball bearing 18.
In this embodiment, the lower miniature dense-ball bearing 18 can ensure that the optical fiber coupling of the dispersion lens 2 keeps stable access and feedback of white light under high-speed rotation.
As a specific technical solution of this embodiment, a section of the dispersion lens 2 near the top of the middle hole 17 is sleeved with an upper micro dense-ball bearing 19, and is fastened and connected with the middle hole 17 through the upper micro dense-ball bearing 19.
In this embodiment, the bottom end of the optical path rotary coupling joint 12 is connected to the white light access point 15 of the dispersive lens 2 through the embedded upper micro dense ball bearing 19, and the light projection port 20 thereof is connected to the white light LED light source, wherein the upper micro dense ball bearing 19 can ensure that the optical fiber coupling of the two access ends keeps stable access and feedback of white light under high-speed rotation.
As a specific technical solution of this embodiment, the top end of the dispersing lens 2 is connected to the optical path rotary coupling joint 12, and a light projection port 20 is disposed outside the optical path rotary coupling joint 12.
In this embodiment, the white light LED is generated by an LED chip, transmitted to the optical path rotary coupling joint 12 through an optical fiber, and projected to the focal point of the collimating lens 6 through the light projection port 20.
As a specific technical solution of this embodiment, the optical path rotary coupling joint 12 is disposed in an inclined manner, and an end portion of an output shaft of the micro dc motor 10 is in transmission connection with the micro hollow rotary speed reducer 9 through a coupling.
In this embodiment, the optical path rotary coupling joint 12 is disposed in an inclined shape for avoiding the position, so as to prevent the optical path rotary coupling joint 12 from interfering with the micro dc motor 10, and the dispersion lens 2 disposed on the micro hollow rotary reducer 9 is driven by the rotation of the micro dc motor 10, so as to drive the right-angle prism 1 to rotate to scan the inner wall surface of the inner hole member 4.
The working principle and the using process of the invention are as follows: when in use, the right-angle prism 1 is aligned to the inner hole member 4 to be measured, the dispersion lens 2 arranged on the miniature hollow rotary reducer 9 is driven by the rotary motion of the miniature direct current motor 10, and then the right-angle prism 1 is driven to rotate to scan the inner wall surface of the inner hole member 4, so as to measure the surface appearance of the inner hole, wherein the white light LED is generated by an LED chip, is transmitted to the light path rotary coupling joint 12 through an optical fiber and is projected to the focus of the collimating lens 6 through the light projecting port 20, the collimation of the white light is realized through the collimating lens 6, the collimated white light passes through the dispersion lens 7 to form color distribution which changes along with different refraction angles, the focusing lens 8 realizes the color distribution along the axial direction, the position of the measured object is calculated through the wavelength of different positions, the encoder 11 is arranged at the tail part of the miniature direct current motor 10 to measure the rotary phase, and thereby combining the position information of the dispersion lens 2, the point cloud positions of all positions on the inner wall of the inner hole piece 4 are combined to form high-precision measurement conditions, the high-precision measurement conditions are fixed on the miniature hollow rotary speed reducer 9 through the light path rotary coupling joint 12, the bottom end of the high-precision hollow rotary speed reducer is connected to the white light access point 15 of the dispersion lens 2 through the embedded miniature dense ball bearing 19, and the light projection port 20 on the high-precision hollow rotary speed reducer is connected to the white light LED light source, so that the white light can be accessed and fed back without being influenced by rotation, and the measurement error can be reduced.
To sum up, the refractive color confocal measurement probe structure for measuring the surface morphology of an inner hole realizes the advantage of high efficiency by arranging the miniature hollow rotary speed reducer 9 and the miniature direct current motor 10, the rotary motion of the miniature direct current motor 10 drives the dispersion lens 2 arranged on the miniature hollow rotary speed reducer 9 to further drive the right-angle prism 1 to rotate so as to scan the inner wall surface of the inner hole piece 4, thereby measuring the surface morphology of the inner hole, and has high-efficiency measurement effect, the encoder 11 is arranged to realize the advantages of meeting measurement conditions and requirements, the encoder 11 is arranged at the tail part of the miniature direct current motor 10 to measure the rotating phase, and can combine the position information of the dispersion lens 2 to form point cloud positions at various positions on the inner wall of the inner hole piece 4 to form high-precision measurement conditions, and by arranging the optical path rotary coupling joint 12, the advantage of reducing measurement errors is realized, the light path rotary coupling joint 12 is fixed on the miniature hollow rotary speed reducer 9, the bottom end of the light path rotary coupling joint is connected to the white light access point 15 of the dispersion lens 2 through the embedded miniature dense ball bearing 19, the light projection port 20 on the light path rotary coupling joint is connected to a white light LED light source, and white light access and feedback are not influenced by rotation so as to reduce measurement errors.
It should be noted that, in this document, terms such as "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus. Without further limitation, an element defined by the phrase "comprising an … …" does not exclude the presence of other identical elements in a process, method, article, or apparatus that comprises the element.
Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.
Claims (8)
1. The utility model provides a refraction formula chromatic confocal measuring head structure of hole surface morphology, includes rectangular prism (1), dispersion lens (2) and cavity rotary mechanism (3), its characterized in that: the right-angle prism (1) is arranged in the inner hole piece (4), one end of the dispersion lens (2) is fixedly connected with the right-angle prism (1) through a screw, and the other end of the dispersion lens (2) is embedded in the hollow rotating mechanism (3); the dispersion lens (2) is composed of a cylinder body (5), a collimating lens (6), a dispersion lens (7) and a focusing lens (8), the collimating lens (6), the dispersion lens (7) and the focusing lens (8) are all arranged in the cylinder body (5), the dispersion lens (7) is positioned below the collimating lens (6), and the focusing lens (8) is positioned below the dispersion lens (7);
the hollow rotating mechanism (3) is composed of a miniature hollow rotating speed reducer (9), a miniature direct current motor (10), an encoder (11) and a light path rotating coupling joint (12), the miniature direct current motor (10) is fixedly installed on the miniature hollow rotating speed reducer (9), the encoder (11) is fixedly installed on the outer side of the miniature direct current motor (10), and the light path rotating coupling joint (12) is fixedly installed on the miniature hollow rotating speed reducer (9).
2. A refractive color confocal measurement probe structure for measuring the surface morphology of an inner hole according to claim 1, wherein: the top of right angle prism (1) is equipped with the formation of image and inserts mouth (13), and inserts mouth (13) through the formation of image and be connected with chromatic dispersion camera lens (2), the right side of right angle prism (1) is equipped with formation of image mirror surface (14).
3. A refractive color confocal measurement probe structure for measuring the surface morphology of an inner hole according to claim 1, wherein: the dispersion lens (2) is in a long cylinder shape, a white light access point (15) is arranged at the top end of the dispersion lens (2), a connecting port (16) is arranged at the bottom end of the dispersion lens (2) and is connected with the right-angle prism (1) through the connecting port (16), and the collimating lens (6), the dispersion lens (7) and the focusing lens (8) are all located on the same axis.
4. A refractive color confocal measurement probe structure for measuring the surface morphology of an inner hole according to claim 1, wherein: the middle of the miniature hollow rotary speed reducer (9) is provided with a middle hole (17), and the upper end of the dispersion lens (2) is arranged in the middle hole (17).
5. A refractive color confocal measurement probe structure according to claim 4, wherein the refractive color confocal measurement probe structure comprises: a section of the dispersion lens (2) close to the bottom of the middle hole (17) is sleeved with a lower micro dense ball bearing (18) and is fixedly connected with the middle hole (17) through the lower micro dense ball bearing (18).
6. A refractive color confocal measurement head structure according to claim 4, wherein: a section of the dispersion lens (2) close to the top of the middle hole (17) is sleeved with a miniature dense ball bearing (19) and is fixedly connected with the middle hole (17) through the miniature dense ball bearing (19).
7. A refractive color confocal measurement probe structure for measuring surface topography of an inner hole according to claim 1, wherein: the top end of the dispersion lens (2) is connected with the optical path rotary coupling joint (12), and a light projecting port (20) is arranged on the outer side of the optical path rotary coupling joint (12).
8. A refractive color confocal measurement probe structure for measuring surface topography of an inner hole according to claim 1, wherein: the light path rotary coupling joint (12) is arranged in an inclined manner, and the end part of an output shaft of the miniature direct current motor (10) is in transmission connection with the miniature hollow rotary speed reducer (9) through a coupler.
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| Application Number | Priority Date | Filing Date | Title |
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| CN202010319860.7A CN111366102B (en) | 2020-04-22 | 2020-04-22 | Refraction type color confocal measuring head structure for measuring surface appearance of inner hole |
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| CN202010319860.7A CN111366102B (en) | 2020-04-22 | 2020-04-22 | Refraction type color confocal measuring head structure for measuring surface appearance of inner hole |
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| CN111366102B true CN111366102B (en) | 2022-07-26 |
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| CN113758442A (en) * | 2021-09-27 | 2021-12-07 | 中国科学院沈阳自动化研究所 | Non-contact type small-diameter tube inner cavity morphology detection device and method based on low coherence interference |
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| US8212997B1 (en) * | 2011-02-23 | 2012-07-03 | Mitutoyo Corporation | Chromatic confocal point sensor optical pen with extended measuring range |
| CN103278919B (en) * | 2013-05-28 | 2015-08-26 | 上海理工大学 | A kind of color solid region confocal microscopic imaging method |
| CN103411560B (en) * | 2013-08-15 | 2015-11-11 | 哈尔滨工业大学 | The servo-actuated pin hole detection microstructure measuring device of angular spectrum scanning lighting fluorescent and method |
| ES2747305T3 (en) * | 2015-10-14 | 2020-03-10 | Sturm Maschinen & Anlagenbau Gmbh | Sensor device and procedure for inspecting the surface of a hollow cylindrical receptacle |
| TWI636231B (en) * | 2016-06-27 | 2018-09-21 | 國立臺灣大學 | Optical system and method of surface and internal surface profilometry using the same |
| CN108489388A (en) * | 2018-04-03 | 2018-09-04 | 电子科技大学 | A kind of small internal surface of hole three-dimensional imaging detecting system based on Spectral Confocal displacement measuring technology |
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