CN111336956A - Optical measurement system and method for online measurement of workpiece surface roughness - Google Patents

Optical measurement system and method for online measurement of workpiece surface roughness Download PDF

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CN111336956A
CN111336956A CN202010095593.XA CN202010095593A CN111336956A CN 111336956 A CN111336956 A CN 111336956A CN 202010095593 A CN202010095593 A CN 202010095593A CN 111336956 A CN111336956 A CN 111336956A
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workpiece
measurement
cooling liquid
transparent window
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郭瑞鹏
边栋梁
赵敏
姚敏
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Nanjing University of Aeronautics and Astronautics
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/30Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces

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Abstract

本发明提供了一种在线测量工件表面粗糙度的光学测量系统及方法,测量系统包括激光器,透明窗模拟系统,采集屏以及数据采集和处理系统。透明窗模拟系统借助透明液体冲开冷却液,在待测工件表面上方冲出一个透明区域,使得测量激光束能够通过冷却液覆盖层到达待测工件表面实现测量。测量方法为:准直激光束通过透明窗模拟系统产生的透明测量区域,以一定角度斜入射到待测工件表面;拍摄位于激光束反射方向上的采集屏上的散射图像,提取出特征参数;利用特征参数和表面粗糙度之间的标定曲线,计算粗糙度数值。本发明通过在工件表面创造出一块透明测量区域,可以实现冷却液加工条件下的工件表面质量的在线检测。

Figure 202010095593

The invention provides an optical measurement system and method for online measurement of workpiece surface roughness. The measurement system includes a laser, a transparent window simulation system, an acquisition screen and a data acquisition and processing system. The transparent window simulation system uses the transparent liquid to flush out the cooling liquid, and a transparent area is punched out above the surface of the workpiece to be measured, so that the measurement laser beam can reach the surface of the workpiece to be measured through the cooling liquid coating to achieve measurement. The measurement method is as follows: the collimated laser beam passes through the transparent measurement area generated by the transparent window simulation system, and is obliquely incident on the surface of the workpiece to be measured at a certain angle; the scattering image on the acquisition screen located in the reflection direction of the laser beam is taken, and the characteristic parameters are extracted; Using the calibration curve between the characteristic parameters and the surface roughness, the roughness value is calculated. By creating a transparent measurement area on the surface of the workpiece, the invention can realize the on-line detection of the surface quality of the workpiece under the cooling liquid processing condition.

Figure 202010095593

Description

一种在线测量工件表面粗糙度的光学测量系统及方法Optical measurement system and method for online measurement of workpiece surface roughness

技术领域technical field

本发明涉及一种在线测量工件表面粗糙度的光学测量系统及方法,尤其适用于冷却液环境下金属工件表面粗糙度的在线检测。The invention relates to an optical measurement system and method for online measurement of workpiece surface roughness, which is especially suitable for online detection of metal workpiece surface roughness in a cooling liquid environment.

背景技术Background technique

工件表面的在线检测是指在加工工件的过程中,同时检测工件的质量。它可以主动地检测工件加工的质量情况并反馈给控制系统,从而形成闭环系统来控制整个加工过程,可极大地提高生产率并保证产品质量。The online inspection of the workpiece surface refers to the quality of the workpiece during the process of machining the workpiece. It can actively detect the quality of workpiece processing and feed it back to the control system, thus forming a closed-loop system to control the entire processing process, which can greatly improve productivity and ensure product quality.

现代制造行业中,工件的加工通常都要在冷却液环境下进行。目前在冷却液条件下对工件表面的在线检测主要有超声波方法和光学方法。Shin Y.C.等使用聚焦超声波束实现表面粗糙度的在线检测。但超声波是一种机械波,其测量分辨率不够,而且,其测量参数为平均效应参数,不能用于高精度表面的测量。董敏等使用光纤传感器作为激光束的载体,将光纤浸入冷却液中完成测量。但工件的转动及其尺寸的减小可能会引起探头附近冷却液的变化,从而影响测量结果。此外,还可以用压缩空气喷吹被测表面以消除冷却液的影响,但该方案容易在被测表面形成雾气。In the modern manufacturing industry, the machining of workpieces is usually carried out in a coolant environment. At present, there are mainly ultrasonic methods and optical methods for on-line detection of workpiece surfaces under the condition of coolant. Shin Y.C. et al. used a focused ultrasonic beam to achieve on-line inspection of surface roughness. But ultrasonic is a kind of mechanical wave, its measurement resolution is not enough, and its measurement parameters are average effect parameters, which cannot be used for high-precision surface measurement. Dong Min et al. used the optical fiber sensor as the carrier of the laser beam, and immersed the optical fiber in the cooling liquid to complete the measurement. However, the rotation of the workpiece and its reduction in size may cause changes in the coolant near the probe, which can affect the measurement results. In addition, compressed air can also be used to spray the measured surface to eliminate the influence of the cooling liquid, but this solution is prone to fog on the measured surface.

综上,针对冷却液环境下对工件表面在线测量的难题,不少学者提出了一些解决方案,但是这些方案都存在着某些不足,未能完全解决该问题。尤其是在光学测量方法中,由于冷却液的不透明性阻碍了光束的传播,限制了光学方法在工件表面在线测量中的应用。To sum up, many scholars have put forward some solutions for the problem of online measurement of workpiece surface in the coolant environment, but these solutions have some shortcomings and cannot completely solve the problem. Especially in the optical measurement method, the opacity of the cooling liquid hinders the propagation of the beam, which limits the application of the optical method in the on-line measurement of the workpiece surface.

发明内容SUMMARY OF THE INVENTION

发明目的:本发明的目的是针对上述现有技术存在的问题,提供一种在线测量工件表面粗糙度的光学测量系统及方法,以能够实现冷却液环境下加工工件表面粗糙度的光学在线测量,从而提高生产率并保证产品质量。Purpose of the invention: The purpose of the present invention is to provide a kind of optical measurement system and method for online measurement of workpiece surface roughness in view of the problems existing in the above-mentioned prior art, so as to realize the optical online measurement of workpiece surface roughness under cooling liquid environment, This increases productivity and guarantees product quality.

技术方案:本发明为实现上述目的,采用如下技术方案:Technical scheme: the present invention adopts the following technical scheme for realizing the above-mentioned purpose:

一种在线测量工件表面粗糙度的光学测量系统,包括:激光器,透明窗模拟系统,采集屏,数据采集和处理系统。其中,激光器用于发出准直激光束,透明窗模拟系统用于模拟冷却液环境下的透明窗测量方法,包括:冷却液储液罐、冷却液泵、冷却液流量计、冷却液接头、冷却液连接管、透明液体储液罐、透明液体泵、透明液体流量计、透明液体接头、透明液体连接管和透明窗模拟装置,所述冷却液储液罐、冷却液泵、冷却液流量计和冷却液接头通过冷却液连接管依次串联,冷却液接头设置于透明窗模拟装置的端板;透明液体储液罐、透明液体泵、透明液体流量计和透明液体接头通过透明液体连接管依次串联,透明液体接头设置于透明窗模拟装置的底板;待测工件位于透明窗模拟装置的底部;采集屏用于采集携带有金属表面粗糙度信息的散射图像,数据采集和处理系统用于拍摄采集屏上的散射图像并计算得到粗糙度数值。An optical measurement system for online measurement of workpiece surface roughness, comprising: laser, transparent window simulation system, acquisition screen, data acquisition and processing system. Among them, the laser is used to emit a collimated laser beam, and the transparent window simulation system is used to simulate the transparent window measurement method in the cooling liquid environment, including: the cooling liquid storage tank, the cooling liquid pump, the cooling liquid flow meter, the cooling liquid joint, the cooling liquid Fluid Connection Pipe, Clear Liquid Reservoir, Clear Liquid Pump, Clear Liquid Flow Meter, Clear Liquid Connector, Clear Liquid Connection Pipe and Clear Window Simulation Device, the Coolant Tank, Coolant Pump, Coolant Flow Meter and The cooling liquid joint is connected in series through the cooling liquid connecting pipe, and the cooling liquid joint is arranged on the end plate of the transparent window simulation device; the transparent liquid liquid storage tank, the transparent liquid pump, the transparent liquid flowmeter and the transparent liquid joint are connected in series through the transparent liquid connecting pipe. The transparent liquid joint is arranged on the bottom plate of the transparent window simulation device; the workpiece to be tested is located at the bottom of the transparent window simulation device; the acquisition screen is used to collect the scattered images carrying the roughness information of the metal surface, and the data acquisition and processing system is used to take pictures on the acquisition screen scatter image and calculate the roughness value.

所述的透明窗模拟装置由端板、侧板、底板和透明顶板构成一个相对封闭的腔体,冷却液填充在透明顶板和底板之间的空间内,通过调整冷却液和透明液体的流量使得待测工件表面上方至透明窗模拟装置顶板之间形成透明区域;使用后的冷却液和透明液体从透明窗模拟装置的出水口排出。所述的数据采集和处理系统包括:拍摄成像单元和数据处理单元,其中:拍摄成像单元用于拍摄采集屏上的散射图像并输出至数据处理单元;数据处理单元用于对图像进行处理提取特征参数,得出标定曲线以及粗糙度数值。The transparent window simulation device is composed of an end plate, a side plate, a bottom plate and a transparent top plate to form a relatively closed cavity, and the cooling liquid is filled in the space between the transparent top plate and the bottom plate. A transparent area is formed between the surface of the workpiece to be tested and the top plate of the transparent window simulation device; the used cooling liquid and transparent liquid are discharged from the water outlet of the transparent window simulation device. The data acquisition and processing system includes: a photographing and imaging unit and a data processing unit, wherein: the photographing and imaging unit is used for photographing the scattered image on the acquisition screen and output to the data processing unit; the data processing unit is used for processing the image to extract features parameters to obtain the calibration curve and the roughness value.

一种在线测量工件表面粗糙度的光学测量方法,包括如下步骤:An optical measurement method for online measurement of workpiece surface roughness, comprising the following steps:

第一步,激光器发出的准直光束通过透明窗模拟系统产生的透明测量区域,以一定角度入射到待测工件表面;所述的透明窗模拟系统产生的透明测量区域是指借助透明液体冲开冷却液,在待测工件表面上方冲出一个透明区域,使得测量激光束能够通过冷却液覆盖层到达待测工件表面实现测量。In the first step, the collimated beam emitted by the laser passes through the transparent measurement area generated by the transparent window simulation system, and is incident on the surface of the workpiece to be measured at a certain angle; The cooling liquid punches out a transparent area above the surface of the workpiece to be measured, so that the measurement laser beam can reach the surface of the workpiece to be measured through the cooling liquid coating to achieve measurement.

第二步,使用数据采集和处理系统的拍摄成像单元采集表面散射图像,进行处理,提取出特征参数;采集的表面散射图像是激光器发出的准直光束通过透明测量区域入射到待测表面发生反射和散射,反射和散射光通过透明测量区域后在空间所形成的呈带状分布的散射图像。The second step is to use the imaging unit of the data acquisition and processing system to collect the surface scattering image, process it, and extract the characteristic parameters; the collected surface scattering image is the reflection of the collimated beam emitted by the laser and incident on the surface to be measured through the transparent measurement area. And scattered, reflected and scattered light after passing through the transparent measurement area in the spatial distribution of the scattered image in the form of a band.

第三步,将特征参数代入标定曲线,计算待测工件表面粗糙度数值。The third step is to substitute the characteristic parameters into the calibration curve to calculate the surface roughness value of the workpiece to be measured.

有益效果:本发明与现有技术相比,有益效果体现在:Beneficial effects: Compared with the prior art, the present invention has the beneficial effects as follows:

1、本发明所述的透明窗模拟系统可在冷却液存在时创造出一块透明测量区域,以消除不透明的冷却液对光学测量的影响,使得冷却液环境下对工件表面质量的在线检测成为可能。1. The transparent window simulation system of the present invention can create a transparent measurement area in the presence of cooling liquid, so as to eliminate the influence of opaque cooling liquid on optical measurement, and make it possible to detect the surface quality of the workpiece on-line in the cooling liquid environment. .

2、本发明采用光学测量方法,激光束倾斜入射,采集表面散射图像并从中提取特征参数来完成测量,测量精度高,速度快,操作方便,成本低,应用于在线测量的前景好。2. The present invention adopts the optical measurement method, the laser beam is incident obliquely, the surface scattering image is collected and the characteristic parameters are extracted to complete the measurement.

附图说明Description of drawings

图1为本发明实施例公开的测量系统示意图。FIG. 1 is a schematic diagram of a measurement system disclosed in an embodiment of the present invention.

图2为本发明实施例中采集的透明测量区域对应不同粗糙度的表面散射图像。FIG. 2 is a surface scattering image corresponding to different roughnesses of a transparent measurement area collected in an embodiment of the present invention.

图3为本发明实施例中散射特征参数与表面粗糙度之间的关系图。FIG. 3 is a relationship diagram between scattering characteristic parameters and surface roughness in an embodiment of the present invention.

图4为本发明实施例中亮点比与表面粗糙度之间的关系图。FIG. 4 is a graph showing the relationship between the bright spot ratio and the surface roughness in an embodiment of the present invention.

图5为本发明实施例中亮点灰度比与表面粗糙度之间的关系图。FIG. 5 is a graph showing the relationship between the gray scale ratio of the bright spots and the surface roughness in an embodiment of the present invention.

具体实施方式Detailed ways

下面结合附图和具体实施例,进一步阐明本发明,应理解这些实例仅用于说明本发明而不用于限制本发明的范围,在阅读了本发明之后,本领域技术人员对本发明的各种等价形式的修改均落于本申请所附权利要求所限定的范围。Below in conjunction with the accompanying drawings and specific embodiments, the present invention will be further clarified. It should be understood that these examples are only used to illustrate the present invention and are not used to limit the scope of the present invention. Modifications in the form of valence all fall within the scope defined by the appended claims of the present application.

如图1所示,本实施例中,一种在线测量工件表面粗糙度的光学测量系统,包括:激光器1,透明窗模拟系统2,采集屏3,数据采集和处理系统4。As shown in FIG. 1 , in this embodiment, an optical measurement system for online measurement of workpiece surface roughness includes: a laser 1 , a transparent window simulation system 2 , an acquisition screen 3 , and a data acquisition and processing system 4 .

所述的激光器1发出准直激光束,以设定的角度(如30°)斜入射到待测金属表面。激光器的输出为:波长λ=632.8nm,功率5mW。The laser 1 emits a collimated laser beam, which is obliquely incident on the metal surface to be measured at a set angle (eg, 30°). The output of the laser is: wavelength λ=632.8nm, power 5mW.

所述的透明窗模拟系统2包括:冷却液储液罐5和透明液体储液罐9、冷却液泵6和透明液体泵10、冷却液流量计7和透明液体流量计11、冷却液接头8和透明液体接头12、连接管和透明窗模拟装置13,其中:冷却液储液罐5、冷却液泵6、冷却液流量计7和冷却液接头8通过连接管依次串联,冷却液接头8设置于透明窗模拟装置13的端板;透明液体储液罐9、透明液体泵10、透明液体流量计11和透明液体接头12通过连接管依次串联,透明液体接头12设置于透明窗模拟装置13的底板;待测工件位于透明窗模拟装置的底部。透明窗模拟装置13由端板、侧板、底板和透明顶板等构成一个相对封闭的腔体,冷却液填充在透明顶板和底板之间的空间内,通过调整冷却液和透明液体(如水)的流量使得待测工件表面上方至透明窗模拟装置13顶板之间形成透明区域;使用后的冷却液和透明液体从透明窗模拟装置13的出水口排出。所述的采集屏3为透射式硬质毛玻璃,放在反射方向上,采集携带有金属表面粗糙度信息的散射图像,且采集屏高度与激光器高度一致,由此保证散射光带的对称性。The transparent window simulation system 2 includes: a cooling liquid storage tank 5 and a transparent liquid storage tank 9, a cooling liquid pump 6 and a transparent liquid pump 10, a cooling liquid flowmeter 7 and a transparent liquid flowmeter 11, and a cooling liquid connector 8 And the transparent liquid joint 12, the connecting pipe and the transparent window simulation device 13, wherein: the cooling liquid storage tank 5, the cooling liquid pump 6, the cooling liquid flow meter 7 and the cooling liquid joint 8 are connected in series through the connecting pipe in sequence, and the cooling liquid joint 8 is set connected to the end plate of the transparent window simulation device 13; the transparent liquid storage tank 9, the transparent liquid pump 10, the transparent liquid flowmeter 11 and the transparent liquid joint 12 are connected in series through the connecting pipe in sequence, and the transparent liquid joint 12 is arranged on the side of the transparent window simulation device 13. Bottom plate; the workpiece to be tested is located at the bottom of the transparent window simulation device. The transparent window simulation device 13 is composed of end plates, side plates, bottom plates and transparent top plates, etc. to form a relatively closed cavity. The cooling liquid is filled in the space between the transparent top plate and the bottom plate. The flow rate is such that a transparent area is formed between the surface of the workpiece to be tested and the top plate of the transparent window simulation device 13 ; the used cooling liquid and transparent liquid are discharged from the water outlet of the transparent window simulation device 13 . The collection screen 3 is a transmissive hard frosted glass, which is placed in the reflection direction to collect scattered images carrying metal surface roughness information, and the height of the collection screen is consistent with the height of the laser, thereby ensuring the symmetry of the scattered light band.

所述的数据采集和处理系统4包括:拍摄成像单元和数据处理单元,其中:拍摄成像单元用于拍摄采集屏上的散射图像并输出至数据处理单元;数据处理单元用于对图像进行处理提取特征参数,得出标定曲线以及粗糙度数值。The data acquisition and processing system 4 includes: a photographing and imaging unit and a data processing unit, wherein: the photographing and imaging unit is used to photograph the scattered image on the acquisition screen and output to the data processing unit; the data processing unit is used to process and extract the image Characteristic parameters, get the calibration curve and roughness value.

本实施例中,一种在线测量工件表面粗糙度的光学测量方法是按如下步骤进行:In this embodiment, an optical measurement method for online measurement of the surface roughness of a workpiece is carried out according to the following steps:

第一步,激光器发出的准直光束通过透明窗模拟系统产生的透明测量区域,以一定角度入射到待测工件表面;In the first step, the collimated beam emitted by the laser passes through the transparent window to simulate the transparent measurement area generated by the system, and is incident on the surface of the workpiece to be measured at a certain angle;

所述的透明测量区域是指:利用透明窗模拟系统模拟冷却液环境下的透明窗测量方法,借助透明液体冲开冷却液,在待测工件表面上方冲出一个透明区域,使得测量激光束能够通过冷却液覆盖层到达待测工件表面实现测量。The transparent measurement area refers to: using the transparent window simulation system to simulate the transparent window measurement method in the cooling liquid environment, flushing the cooling liquid with the transparent liquid, and punching out a transparent area above the surface of the workpiece to be measured, so that the measurement laser beam can be measured. The measurement is achieved by the cooling liquid coating reaching the surface of the workpiece to be measured.

第二步,使用拍摄成像单元采集表面散射图像,进行处理,提取出特征参数;The second step is to use the imaging unit to collect surface scattering images, process them, and extract characteristic parameters;

所述的表面散射图像是指:第一步中的激光束入射到工件表面发生反射和散射,反射和散射光通过透明测量区域后在空间所形成的呈带状分布的散射图像。The surface scattering image refers to: in the first step, the laser beam incident on the workpiece surface is reflected and scattered, and the reflected and scattered light passes through the transparent measurement area to form a scattered image with a band-like distribution in space.

所述的特征参数是指:散射特征参数、亮点比和亮点灰度比。这三个参数都是在对散射图像进行预处理后根据一定的算法计算得到的。The characteristic parameters refer to: scattering characteristic parameters, bright spot ratio and bright spot gray ratio. These three parameters are calculated according to certain algorithms after preprocessing the scattering image.

所述的散射特征参数根据如下公式计算得到:The scattering characteristic parameters are calculated according to the following formula:

Figure BDA0002385236770000051
Figure BDA0002385236770000051

Figure BDA0002385236770000052
Figure BDA0002385236770000052

Figure BDA0002385236770000053
Figure BDA0002385236770000053

其中,n是长轴方向散射线上的像素数目,Ii是长轴方向散射线上第i个像素的灰度值,Pi是长轴方向散射线上第i个像素归一化的灰度值,

Figure BDA0002385236770000054
是长轴方向散射线上灰度数值的平均值,k是常数;其中长轴方向为散射图像中狭长光带的主方向,长轴方向散射线是通过计算垂直于长轴方向上不同位置处的灰度平均值得到的;where n is the number of pixels on the long-axis scattering line, I i is the gray value of the ith pixel on the long-axis scattering line, and P i is the normalized gray value of the ith pixel on the long-axis scattering line degree value,
Figure BDA0002385236770000054
is the average value of the gray value on the long-axis direction scattering line, and k is a constant; the long-axis direction is the main direction of the narrow and long light band in the scattering image, and the long-axis direction scattering line is calculated by calculating the different positions perpendicular to the long-axis direction. The grayscale average value of ;

所述亮点比为亮点的数目和整幅图像采样点的数目之比,亮点灰度比为亮点的灰度值之和与整幅图像灰度值之和的比值。The bright spot ratio is the ratio of the number of bright spots to the number of sampling points in the entire image, and the bright spot gray ratio is the ratio of the sum of the gray values of the bright spots to the sum of the gray values of the entire image.

第三步,将特征参数代入标定曲线,计算待测工件表面粗糙度数值。The third step is to substitute the characteristic parameters into the calibration curve to calculate the surface roughness value of the workpiece to be measured.

所述的标定曲线,使用标准粗糙度样块测量得到。选择已知粗糙度数值的磨削加工标准样块进行测量,每个样块采集多幅图像。针对每幅图像,按照第二步所述的方法,分别提取特征参数,然后求取每个特征参数的平均值。根据每个特征参数平均值随粗糙度数值的变化情况,分别进行曲线拟合,得到各个特征参数和表面粗糙度之间的标定曲线。实际测量时,分析采集的表面散射图像,提取特征参数,分别代入标定曲线即可计算出表面粗糙度数值。The calibration curve is obtained by using a standard roughness sample block. The grinding standard samples with known roughness values were selected for measurement, and multiple images were collected for each sample. For each image, according to the method described in the second step, the feature parameters are extracted respectively, and then the average value of each feature parameter is obtained. According to the change of the average value of each characteristic parameter with the roughness value, curve fitting is performed respectively to obtain the calibration curve between each characteristic parameter and the surface roughness. In the actual measurement, the surface roughness value can be calculated by analyzing the collected surface scattering images, extracting the characteristic parameters, and substituting them into the calibration curves respectively.

如图3、图4和图5所示,为本实施例以上述步骤获得的标定曲线,选用的是符合GB6060.2-85标准的平面磨削加工粗糙度标准样块,对应的粗糙度数值分别为:Ra=0.025μm、0.05μm、0.1μm、0.2μm、0.4μm、0.8μm。针对每一幅散射图像,首先进行滤波预处理消除噪声,然后按照第二步所述的分别计算三个特征参数。As shown in Fig. 3, Fig. 4 and Fig. 5, for the calibration curve obtained by the above steps in this embodiment, the surface grinding roughness standard sample block conforming to the GB6060.2-85 standard is selected, and the corresponding roughness value is They are: Ra =0.025 μm, 0.05 μm, 0.1 μm, 0.2 μm, 0.4 μm, 0.8 μm. For each scatter image, first filter preprocessing to eliminate noise, and then calculate three characteristic parameters according to the second step.

定标时,每个样块采集多幅图像,求得每个特征参数的平均值。以粗糙度数值为横坐标,各个特征参数的平均值为纵坐标,列出各个特征参数随粗糙度数值的变化情况,并分别进行曲线拟合,得到散射特征参数S、亮点比BPR和亮点灰度比BGR和粗糙度Ra之间的表达式分别为:During calibration, multiple images are collected for each sample block, and the average value of each feature parameter is obtained. Taking the roughness value as the abscissa and the average value of each feature parameter as the ordinate, the changes of each feature parameter with the roughness value are listed, and curve fitting is performed respectively to obtain the scattering feature parameter S, the bright spot ratio BPR and the bright spot gray. The expressions between the degree ratio BGR and the roughness Ra are:

Figure BDA0002385236770000061
R2=0.99823
Figure BDA0002385236770000061
R 2 =0.99823

Figure BDA0002385236770000062
R2=0.99503
Figure BDA0002385236770000062
R 2 =0.99503

Figure BDA0002385236770000063
R2=0.99964
Figure BDA0002385236770000063
R 2 =0.99964

其中,R为相关系数。where R is the correlation coefficient.

实际测量时,只要根据待测工件表面散射图像分别计算出特征参数(也可采集多幅图计算特征参数的均值),代入相应表达式,就可求得表面粗糙度数值。在三个特征参数均能准确确定粗糙度数值且粗糙度数值相差不大的情况下,使用其中一个特征参数即可;此外,也可以同时使用两个或三个特征参数计算粗糙度数值,供互相对比和验证。In actual measurement, as long as the characteristic parameters are calculated according to the surface scattering image of the workpiece to be measured (multiple images can also be collected to calculate the average value of the characteristic parameters), and the corresponding expression is substituted, the surface roughness value can be obtained. In the case that the three feature parameters can accurately determine the roughness value and the roughness values are not much different, one of the feature parameters can be used; in addition, two or three feature parameters can be used to calculate the roughness value for Compare and verify each other.

Claims (6)

1. An optical measurement system for online measurement of surface roughness of a workpiece, comprising: the device comprises a laser, a transparent window simulation system, an acquisition screen and a data acquisition and processing system; the laser is used for emitting a collimated laser beam, and the transparent window simulation system is used for simulating a transparent window measurement method under a cooling liquid environment, and comprises the following steps: the cooling liquid storage tank, the cooling liquid pump, the cooling liquid flowmeter and the cooling liquid joint are sequentially connected in series through the cooling liquid connecting pipe, and the cooling liquid joint is arranged on an end plate of the transparent window simulation device; the transparent liquid storage tank, the transparent liquid pump, the transparent liquid flowmeter and the transparent liquid connector are sequentially connected in series through a transparent liquid connecting pipe, and the transparent liquid connector is arranged on a bottom plate of the transparent window simulation device; the workpiece to be measured is positioned at the bottom of the transparent window simulation device; the data acquisition and processing system is used for shooting the scattering image on the acquisition screen and calculating to obtain a roughness value.
2. The optical measurement system for on-line measurement of the surface roughness of the workpiece according to claim 1, wherein the transparent window simulator comprises an end plate, a side plate, a bottom plate and a transparent top plate, which form a relatively closed cavity, the cooling liquid is filled in the space between the transparent top plate and the bottom plate, and a transparent area is formed between the upper part of the surface of the workpiece to be measured and the top plate of the transparent window simulator by adjusting the flow rates of the cooling liquid and the transparent liquid; and the used cooling liquid and the transparent liquid are discharged from a water outlet of the transparent window simulator.
3. An optical measurement system for on-line measurement of workpiece surface roughness according to claim 1, wherein the data acquisition and processing system comprises: the device comprises a shooting imaging unit and a data processing unit, wherein the shooting imaging unit is used for shooting a scattering image on an acquisition screen and outputting the scattering image to the data processing unit; the data processing unit is used for processing the image and extracting characteristic parameters to obtain a calibration curve and a roughness value.
4. An optical measuring method for on-line measuring the surface roughness of a workpiece using an optical measuring system for on-line measuring the surface roughness of a workpiece according to any one of claims 1 to 3, comprising the steps of:
firstly, collimated light beams emitted by a laser pass through a transparent measurement area generated by a transparent window simulation system and are incident to the surface of a workpiece to be measured at a certain angle;
secondly, collecting a surface scattering image by using a shooting imaging unit of a data collecting and processing system, processing the surface scattering image and extracting characteristic parameters;
and thirdly, substituting the characteristic parameters into the calibration curve to calculate the surface roughness value of the workpiece to be measured.
5. The method as claimed in claim 4, wherein the transparent window simulation system generates a transparent measurement area by using a transparent liquid to blow away the cooling liquid, and a transparent area is punched above the surface of the workpiece to be measured, so that the measurement laser beam can reach the surface of the workpiece to be measured through the cooling liquid covering layer to realize measurement.
6. An optical measurement method for on-line measuring the surface roughness of a workpiece according to claim 4, characterized in that the collected surface scattering image is a scattering image which is formed in a band shape after collimated light beam emitted by a laser passes through a transparent measuring area and is incident to the surface to be measured to be reflected and scattered, and the reflected and scattered light passes through the transparent measuring area and is formed in space.
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