CN101762250A - Grinding workpiece surface quality optical real-time detection device - Google Patents
Grinding workpiece surface quality optical real-time detection device Download PDFInfo
- Publication number
- CN101762250A CN101762250A CN201010300868A CN201010300868A CN101762250A CN 101762250 A CN101762250 A CN 101762250A CN 201010300868 A CN201010300868 A CN 201010300868A CN 201010300868 A CN201010300868 A CN 201010300868A CN 101762250 A CN101762250 A CN 101762250A
- Authority
- CN
- China
- Prior art keywords
- time detection
- semi
- surface quality
- detection device
- workpiece surface
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Length Measuring Devices By Optical Means (AREA)
- Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
Abstract
The invention relates to a grinding workpiece surface quality optical real-time detection device and belongs to the technical field of metal processing. The device comprises a laser, a semi-permeable mirror, a glass layer, a fluid lens mechanism, an acquisition screen, a shot and a data acquisition system, wherein the semi-permeable mirror, the glass layer and the fluid lens mechanism are arranged directly under the laser from top to bottom successively, a workpiece to be detected is arranged at the bottom in the fluid lens mechanism, the acquisition screen, the shot and the data acquisition system are arranged at one horizontal side of the semi-permeable mirror successively, and the data acquisition system is arranged behind the shot and acquires scattered images on the acquisition screen. By creating a transparent measuring region on the surface of the workpiece, a laser beam to be measured and reflected and scattered beams on the surface can permeate cooling liquid and a grindstone dust covering layer. An incident beam is reflected and scattered on the surface of the workpiece, and the scattered images which are in zonal distribution are formed in the space, thus realizing real-time detection of the surface quality.
Description
Technical field
What the present invention relates to is the device in a kind of metalworking technology field, specifically is a kind of grinding workpiece surface quality optical real-time detection device.
Background technology
The real-time detection of workpiece machining surface is meant and detects the quality of workpiece simultaneously in the process of processing work.It can detect the quality situation of workpiece processing more on one's own initiative, and feeds back to control system, forms closed-loop system, thereby controls whole process fully, greatly boosts productivity and guarantees the quality of product.
In the accurate grinding process,, all under the liquid coolant environment, just can reach the quality requirements of regulation usually for guaranteeing crudy.Such as: the stock-wafer of integrated circuit (IC) chip, its surperficial accurate grinding processing is carried out under the condition that with the deionized water is liquid coolant.The wafer grinding quality of present nearly all producer all can not onlinely detect, but the batch detection that rolls off the production line.
But along with the single-piece value of workpiece to be machined is more and more higher, output is increasing, by the regular reflection lathe of detection mode afterwards and the inefficacy of technological process, can produce bigger hysteresis quality, and economic loss is very big.Therefore,, just can monitor in real time, can improve product percent of pass greatly, obtain great economic benefit machining state if can be implemented in the real-time detection of the accurate grinding processing under the liquid coolant condition.
Find by prior art documents, the online detection under the liquid coolant condition at present, majority is the contact type measurement mode, and is contactless few.People such as Coker S A are at International Journal of Machine Tools﹠amp; The In-process control of surface roughness due to tool wearusing a new ultrasonic system that delivers on the Manufacture, on the metal removal lathe, designed a kind of ultrasonic probe, be installed on the coolant nozzle, it can see through flowing coating of cooling liquid measuring workpieces surface.Because ultrasound wave is a kind of mechanical wave, its Measurement Resolution is not enough, and its measurement parameter is the average effect parameter, can not be used for the detection of high-precision surface.People such as Hiromasa K deliver Development of the in-process monitoring system for toll of lathemachine in the SPIE meeting, on lathe, use the method for air-blowing, remove the liquid coolant on the workpiece processing back side, realize detecting in real time, but this method can only be used for the mode that workpiece is horizontal rotary processing." on-line measurement system of surfaceness in the grinding process " that people such as Tong Min deliver on " domestic science and technology " with the roughness concentration of optical fiber as sensor, uses the ratio of direct reflection light intensity and 30 ° of direction scattered light intensities to obtain roughness.But the measurement range of this system is R
a: 0.1-6.0 μ m can not be used for the detection of smooth surface.
To sum up, in the accurate grinding processing,, stopped the propagation of measuring beam, also do not had the optical means of the real-time detection workpiece surface roughness under the liquid coolant processing conditions at present because liquid coolant covers surface of the work.
Summary of the invention
The present invention is directed to the prior art above shortcomings, a kind of grinding workpiece surface quality optical real-time detection device is provided, create a transparent measured zone at surface of the work, make Laser Measurement bundle, surface reflection and scattered beam can see through liquid coolant and grindstone dust overlayer.Reflection and scattering take place at surface of the work in incident beam, form the dispersion image of zonal arrangement in the space, the collection surface dispersion image, extract perpendicular to the grey value profile on the scattering light belt principal direction, carry out Gauss curve fitting, the ratio calculated characteristic parameter, substitution system calibrating curve calculation surface roughness value realizes the real-time detection of surface quality with this.
The present invention is achieved by the following technical solutions, the present invention includes: laser instrument, semi-permeable mirror, glassy layer, fluid lens mechanism, collection screen, camera lens and data acquisition system (DAS), wherein: semi-permeable mirror, glassy layer and fluid lens mechanism from top to bottom be set in turn in laser instrument under, workpiece for measurement is positioned at the in-house bottom of fluid lens, collection screen, camera lens and data acquisition system (DAS) are set in turn in level one side of semi-permeable mirror, the dispersion image that data acquisition system (DAS) is positioned at behind the camera lens and collection is shielded.
Described fluid lens mechanism comprises: water tank, water pump, flowmeter, nozzle and fluid state simulated slot, wherein: water tank, water pump, flowmeter and nozzle are connected successively, nozzle is arranged at the lower end of fluid state simulated slot, workpiece for measurement places bottom and the surface to be measured in the fluid state simulated slot to make progress over against semi-permeable mirror, and water pump is connected with electric power system.
Described data acquisition system (DAS) comprises: take image-generating unit and data processing unit, wherein: take and export data processing unit to after image-generating unit is taken the dispersion image on the collection screen, data processing unit draws calibration curve and roughness value according to digitized dispersion image.
When the present invention is used to detect:
The first step, laser beam impinge perpendicularly on the measured workpiece surface by the extra play of transparent measured zone;
Second step, use and take image-generating unit collection surface light scattering diagram picture, handle, extract characteristic parameter;
In the 3rd step,, calculate roughness value with characteristic parameter substitution calibration curve.
Characteristic parameter of the present invention, but the roughness scope of on-line measurement is R
a: 0.025-0.8 μ m, contained the range of surface roughness of grinding workpiece.More existing characteristic parameters, weigh the surface roughness value in the particular range only, the In situ surface roughnessmeasurement using a laser scattering method that delivers on Optics Communication of people such as Tay C J for example can only measure R
a: the grinding workpiece surface roughness in the 0.1-0.8 mu m range.The Development of a surface roughness measurement system using reflected laserbeam that people such as Kim H Y deliver on Journal of materials processing technology can only measure R
a: the grinding workpiece surface roughness in the 0.2-0.8 mu m range.
Data processing unit of the present invention extracts characteristic parameter from the two-dimensional scattering image, reduced the complicacy of measurement mechanism.Existing surface finish measurement device, mechanism's more complicated, the Development of a Laser-Scattering-Based Probe for On-Line Measurement ofSurface Roughness that on Applied optics, delivers of people such as Wang S H for example, in the designed measurement mechanism, need accurately to dispose the photodiode array collection of scattered light to extract the scattering signatures value.
Fluid lens of the present invention mechanism has created transparent measured zone, makes that the contactless real-time measurement in the process becomes possibility.This mechanism makes the measured workpiece surface extra play occur, and existing roughness concentration technology mostly is the measurement at Free Surface, measures for the character of surface that has extra play, does not also have the correlative study report at present.
Description of drawings
Fig. 1 is a structural representation of the present invention.
Fig. 2 is the fluid lens structural scheme of mechanism.
Fig. 3 is an embodiment effect synoptic diagram.
Embodiment
Below embodiments of the invention are elaborated, present embodiment is being to implement under the prerequisite with the technical solution of the present invention, provided detailed embodiment and concrete operating process, but protection scope of the present invention is not limited to following embodiment.
As shown in Figure 1, present embodiment comprises: laser instrument 1, semi-permeable mirror 2, glassy layer 3, fluid lens mechanism 4, collection screen 5, camera lens 6 and data acquisition system (DAS) 7, wherein: semi-permeable mirror 2, glassy layer 3 and fluid lens mechanism 4 from top to bottom be set in turn in laser instrument 1 under, workpiece for measurement is positioned at the bottom of fluid lens mechanism 4, collection screen 5, camera lens 6 and data acquisition system (DAS) 7 are set in turn in level one side of semi-permeable mirror 2, and data acquisition system (DAS) 7 is positioned at the dispersion image on camera lens 6 backs and the collection screen 5.
The angle of inclination of described semi-permeable mirror 2 is 45 °, and its Transflective ratio is 50/50;
Spacing is 150mm between described collection screen 5 and the semi-permeable mirror 2;
Spacing is 68mm between described semi-permeable mirror 2 and the workpiece for measurement surface;
Spacing is 100mm between described collection screen 5 and the camera lens 6.
Described laser instrument 1 is output as: wavelength X=650nm, and power 5mW, the diameter of output laser is 3mm;
Described semi-permeable mirror 2 is a plane, and specification is 100mm * 70mm * 1mm, coated glass;
Described glassy layer 3 is an organic glass, and thickness is 8mm;
Described collection screen 5 is a transmission-type hard frosted glass, and specification is 210mm * 148mm * 5mm.
As shown in Figure 2, described fluid lens mechanism 4 comprises: water tank 8, water pump 9, flowmeter 10, nozzle 11 and fluid state simulated slot 12, wherein: water tank 8, water pump 9, flowmeter 10 and nozzle 11 are connected successively, nozzle 11 is arranged at the lower end of fluid state simulated slot 12, workpiece for measurement places bottom and the surface to be measured in the fluid state simulated slot 12 to make progress over against semi-permeable mirror 2, and water pump 9 is connected with electric power system.
Described flowmeter 10 is the glass rotameter of band variable valve, and its measurement range is 1-7LPM.
Be filled with water in the described fluid lens mechanism 4.
Described data acquisition system (DAS) 7 comprises: take image-generating unit and data processing unit, wherein: take and export data processing unit to after image-generating unit is taken the dispersion image on the collection screen, data processing unit draws calibration curve and roughness value according to digitized dispersion image.
The present embodiment measuring process is as follows:
The first step, laser beam impinge perpendicularly on the measured workpiece surface by the extra play of transparent measured zone;
Second step, use and take image-generating unit collection surface light scattering diagram picture, handle, extract characteristic parameter;
Described transparent measured zone is meant: by the transparency liquid in the fluid lens mechanism 4, go out a transparent region in the workpiece for measurement surface, make the Laser Measurement bundle can see through liquid coolant and arrive the measured workpiece surface.
Described surface light dispersion image is that the laser beam incident in the first step to surface of the work reflection and scattering takes place, and formed dispersion image is zonal arrangement in the space.This image has reflected the distribution situation of surface scattering light intensity.
Described characteristic parameter is the ratio parameter that extracts from perpendicular to scattering light belt principal direction.At first, the dispersion image of gathering is carried out the denoising pre-service, seek scattering light belt principal direction then, here, quote in the mathematics the definition of ellipse long and short shaft, defining long and narrow light belt principal direction is major axis, and perpendicular direction is a minor axis.Along scattering light belt short-axis direction, extract the gray scale numerical value y at diverse location x place, carry out Gauss curve fitting:
According to fitting result ratio calculated σ
α/ t
1(σ), be characteristic parameter.
In the 3rd step,, calculate roughness value with characteristic parameter substitution calibration curve.
Described calibration curve uses standard roughness sample piece to measure in analogue means.Select the grinding standard sample of known roughness value to measure, each sample piece is gathered multiple image, at each width of cloth image, according to described method of second step, extracts characteristic parameter respectively, asks for the mean value of a plurality of characteristic parameters then.Change the distribution situation that is presented according to characteristic parameter mean value with roughness value, use canonical function explinear to carry out curve fitting, obtain calibration curve.During actual measurement, analyze the dispersion image of gathering, extract characteristic parameter, the substitution calibration curve can calculate surfaceness, realizes monitoring in real time.
As shown in Figure 3, for the matched curve of present embodiment, according to the roughness scope (R of flat surface grinding finished surface with the above-mentioned steps acquisition
a: 0.01-0.8 μ m), what select for use is the grinding roughness standards sample piece that meets the GB6060.2-85 standard, and corresponding roughness value is respectively: R
a=0.025 μ m, 0.05 μ m, 0.1 μ m, 0.2 μ m, 0.4 μ m, 0.8 μ m.Each width of cloth dispersion image at gathering at first carries out filter preprocessing, eliminates noise; Scan entire image then, seek scattering light belt principal direction; Along scattering light belt short-axis direction, extract the gray scale numerical value y at diverse location x place, carry out Gauss curve fitting according to following formula:
By fitting result ratio calculated σ
α/ t
1(σ).
During calibration, each sample piece is gathered multiple image, tries to achieve the mean value of a plurality of ratio parameters.With the roughness value is horizontal ordinate, and the mean value of each characteristic parameter is ordinate, lists characteristic parameter and changes the distribution situation that is presented with roughness value.Use canonical function explinear to carry out curve fitting, obtain the calibration curve expression formula:
Wherein: R
2=0.99974, R is a related coefficient.During actual measurement, as long as calculate the ratio feature parameter of measured workpiece surface scattering image, this expression formula of substitution just can be tried to achieve surface roughness value.
Claims (6)
1. grinding workpiece surface quality optical real-time detection device, it is characterized in that, comprise: laser instrument, semi-permeable mirror, glassy layer, fluid lens mechanism, collection screen, camera lens and data acquisition system (DAS), wherein: semi-permeable mirror, glassy layer and fluid lens mechanism from top to bottom be set in turn in laser instrument under, workpiece for measurement is positioned at the in-house bottom of fluid lens, collection screen, camera lens and data acquisition system (DAS) are set in turn in level one side of semi-permeable mirror, the dispersion image that data acquisition system (DAS) is positioned at behind the camera lens and collection is shielded.
2. grinding workpiece surface quality optical real-time detection device according to claim 1, it is characterized in that, described fluid lens mechanism comprises: water tank, water pump, flowmeter, nozzle and fluid state simulated slot, wherein: water tank, water pump, flowmeter and nozzle are connected successively, nozzle is arranged at the lower end of fluid state simulated slot, workpiece for measurement places bottom and the surface to be measured in the fluid state simulated slot to make progress over against semi-permeable mirror, and water pump is connected with electric power system.
3. grinding workpiece surface quality optical real-time detection device according to claim 1, it is characterized in that, described data acquisition system (DAS) comprises: take image-generating unit and data processing unit, wherein: take and export data processing unit to after image-generating unit is taken the dispersion image on the collection screen, data processing unit draws calibration curve and roughness value according to digitized dispersion image.
4. grinding workpiece surface quality optical real-time detection device according to claim 1 is characterized in that, described laser instrument is output as: wavelength X=650nm, and power 5mW, the diameter of output laser is 3mm.
5. grinding workpiece surface quality optical real-time detection device according to claim 1 is characterized in that, the angle of inclination of described semi-permeable mirror is 45 °, and its Transflective ratio is 50/50.
6. grinding workpiece surface quality optical real-time detection device according to claim 1 is characterized in that, is filled with water in the described fluid lens mechanism.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201010300868A CN101762250A (en) | 2010-01-28 | 2010-01-28 | Grinding workpiece surface quality optical real-time detection device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201010300868A CN101762250A (en) | 2010-01-28 | 2010-01-28 | Grinding workpiece surface quality optical real-time detection device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN101762250A true CN101762250A (en) | 2010-06-30 |
Family
ID=42493553
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201010300868A Pending CN101762250A (en) | 2010-01-28 | 2010-01-28 | Grinding workpiece surface quality optical real-time detection device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN101762250A (en) |
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102636132A (en) * | 2012-03-09 | 2012-08-15 | 中国科学院长春光学精密机械与物理研究所 | Reference plane generating device for calibrating roughness of optical surface |
| CN103105282A (en) * | 2013-01-18 | 2013-05-15 | 上海亨通宏普通信技术有限公司 | Device and method for angular measurement of fiber array or chip |
| CN108500842A (en) * | 2017-02-28 | 2018-09-07 | 株式会社迪思科 | The inspection Check methods of machined object, the inspection Check devices and processing unit (plant) of machined object |
| CN109282759A (en) * | 2018-10-05 | 2019-01-29 | 福建钜铖汽车配件有限公司 | A kind of piston of automobile Surface Roughness Detecting Method |
| CN110617786A (en) * | 2018-06-18 | 2019-12-27 | 凯斯科技股份有限公司 | Pad monitoring device, pad monitoring system comprising same and pad monitoring method |
| CN111336956A (en) * | 2020-02-17 | 2020-06-26 | 南京航空航天大学 | Optical measurement system and method for online measuring workpiece surface roughness |
| CN113546435A (en) * | 2021-08-03 | 2021-10-26 | 合肥茂腾环保科技有限公司 | Organic solvent water mixing type pressurization cooling separation system and method for flat panel display |
| CN115338709A (en) * | 2022-10-18 | 2022-11-15 | 徐州艾奇川自动化设备有限公司 | Numerical control machining intelligent monitoring control system based on industrial intelligence |
-
2010
- 2010-01-28 CN CN201010300868A patent/CN101762250A/en active Pending
Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102636132A (en) * | 2012-03-09 | 2012-08-15 | 中国科学院长春光学精密机械与物理研究所 | Reference plane generating device for calibrating roughness of optical surface |
| CN103105282A (en) * | 2013-01-18 | 2013-05-15 | 上海亨通宏普通信技术有限公司 | Device and method for angular measurement of fiber array or chip |
| CN103105282B (en) * | 2013-01-18 | 2015-08-12 | 江苏亨通光网科技有限公司 | A kind of device and method fiber array or chip being carried out to measurement of angle |
| CN108500842A (en) * | 2017-02-28 | 2018-09-07 | 株式会社迪思科 | The inspection Check methods of machined object, the inspection Check devices and processing unit (plant) of machined object |
| CN110617786A (en) * | 2018-06-18 | 2019-12-27 | 凯斯科技股份有限公司 | Pad monitoring device, pad monitoring system comprising same and pad monitoring method |
| CN109282759A (en) * | 2018-10-05 | 2019-01-29 | 福建钜铖汽车配件有限公司 | A kind of piston of automobile Surface Roughness Detecting Method |
| CN111336956A (en) * | 2020-02-17 | 2020-06-26 | 南京航空航天大学 | Optical measurement system and method for online measuring workpiece surface roughness |
| CN113546435A (en) * | 2021-08-03 | 2021-10-26 | 合肥茂腾环保科技有限公司 | Organic solvent water mixing type pressurization cooling separation system and method for flat panel display |
| CN113546435B (en) * | 2021-08-03 | 2022-07-22 | 合肥茂腾环保科技有限公司 | Organic solvent water mixing type pressurizing, cooling and separating system and method for flat panel display |
| CN115338709A (en) * | 2022-10-18 | 2022-11-15 | 徐州艾奇川自动化设备有限公司 | Numerical control machining intelligent monitoring control system based on industrial intelligence |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN101762250A (en) | Grinding workpiece surface quality optical real-time detection device | |
| WO2021248638A1 (en) | System for online real-time monitoring of metal additive manufacturing by multiple monitoring devices | |
| CN108406092B (en) | A kind of vibration mirror scanning laser processing of coaxial real-time detection | |
| Quinsat et al. | In situ non-contact measurements of surface roughness | |
| CN108931961B (en) | Integral end mill wear damage detection method based on machine vision | |
| KR102494957B1 (en) | Method for measuring the thickness of flat workpieces | |
| EP2002035B1 (en) | A mobile apparatus capable of surface measurements of a coating thickness | |
| Yandayan et al. | In-process dimensional measurement and control of workpiece accuracy | |
| CN102171000A (en) | Method for measuring the thickness of a discoidal workpiece | |
| US20060177566A1 (en) | Anodizing system with a coating thickness monitor and an anodized product | |
| JP2016534332A (en) | Method and apparatus for optically measuring the thickness of an object being machined by interferometry | |
| CN108145606A (en) | Polishing fluid bulky grain real time on-line monitoring device in a kind of polishing process | |
| CN105157584B (en) | A kind of on-line measurement device and method of non-contact object thickness | |
| CN207703678U (en) | A kind of polishing fluid bulky grain on-Line Monitor Device | |
| CN101386152A (en) | Grinding machine with laser ranging automatic compensation device | |
| US20040263855A1 (en) | Reconfigurable surface finish inspection apparatus for cylinder bores and other surfaces | |
| CN107990850A (en) | A kind of surface roughness on-line measurement system and method based on laser scattering method | |
| WO2023010617A1 (en) | Apparatus and method for detecting subsurface defect of optical element | |
| Kapłonek et al. | Laser methods based on an analysis of scattered light for automated, in-process inspection of machined surfaces: A review | |
| CN1215151A (en) | Laser on-line testing and checking apparatus for rubber element outline | |
| CN108051344A (en) | The realtime on-line monitoring method of polishing fluid bulky grain in a kind of polishing process | |
| Guo et al. | Experimental investigation of a modified Beckmann–Kirchhoff scattering theory for the in-process optical measurement of surface quality | |
| CN116532825A (en) | Laser hole making process monitoring and regulating combined protection method and system | |
| CN109187495A (en) | Femtosecond laser machined parameters are divided pupil differential confocal Raman spectrum monitoring method and apparatus | |
| Sridhar et al. | An in-process approach for monitoring and evaluating the surface roughness of turned components |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C02 | Deemed withdrawal of patent application after publication (patent law 2001) | ||
| WD01 | Invention patent application deemed withdrawn after publication |
Open date: 20100630 |