CN102636132A - Reference plane generating device for calibrating roughness of optical surface - Google Patents
Reference plane generating device for calibrating roughness of optical surface Download PDFInfo
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- CN102636132A CN102636132A CN2012100615986A CN201210061598A CN102636132A CN 102636132 A CN102636132 A CN 102636132A CN 2012100615986 A CN2012100615986 A CN 2012100615986A CN 201210061598 A CN201210061598 A CN 201210061598A CN 102636132 A CN102636132 A CN 102636132A
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- roughness
- reference plane
- generating device
- optical surface
- calibrating
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Abstract
The invention relates to a reference plane generating device for calibrating the roughness of an optical surface, belonging to the technical field of optical detection. The reference plane generating device for calibrating the roughness of the optical surface has the advantages of lower surface roughness and very good surface uniformity. The reference plane generating device comprises hydraulic mercury, a container outer wall, a container opening, a damping structure and a sealing cover; the damping structure is located at the lower part in the container outer wall; the damping element refers to arranged stand columns or plate grids; the size of the container opening is the same as the caliber of an optical roughness detecting lens; and the sealing cover is in threaded connection with the container opening closely. With the adoption of the reference plane generating device, the roughness of the reference plane surface is lower, and the surface uniformity is very good and no flaw or defect is generated. The reference plane generating device can be used for calibrating the roughness of the optical surface well.
Description
Technical field
The present invention relates to the optical detective technology field, relate in particular to a kind of reference planes generating apparatus that the optical surface roughness is demarcated that is used for.
Background technology
Any detecting instrument all need be demarcated before using, and the interferometer that is used for the optical material surface roughness concentration is no exception.Generally, what the roughness of interferometer was demarcated use is the calibrating block that is provided by producer, generally is to obtain after the surface finish with silicon or silit.But there is some problem in this calibrating block: between each calibrating block and the roughness of the diverse location of same calibrating block be difficult to evenly, and some places exist flaw and defective.So using different calibrating block or using the diverse location of same calibrating block to carry out timing signal, the unevenness of calibrating block can influence the precision of demarcation, increases the error of demarcating; The surfaceness of calibrating block is not very good, can reduce the stated accuracy of detecting instrument like this, especially when the high-quality surface of apparatus measures, demarcates the error of being brought and can fall into oblivion real data, causes testing result inaccurate; Calibrating block is safeguarded inconvenience, in air, places relatively difficulty of ash back wiping.
Summary of the invention
The present invention seeks in order to overcome the deficiency of existing calibrating block reference surface, it is extremely low to have proposed a kind of surfaceness, the reference planes generating apparatus that is used for the demarcation of optical surface roughness that surface uniformity is fabulous.
Technical scheme of the present invention is, a kind ofly is used for the reference planes generating apparatus that the optical surface roughness is demarcated, and this device comprises liquid mercury, container outer wall, vessel port, damping structure and gland bonnet; Said damping structure is positioned at below, container outer wall inside; Said damping element is column or the Turbogrid plates of arranging; Said vessel port size is identical with the bore of optically roughness degree detector lens; Said gland bonnet and vessel port are to be threaded and airtight.
Beneficial effect of the present invention: reference planes are formed by the liquid mercury that is placed in the container among the present invention; Single, the homogeneous of mercury and stable properties; Have good time, space invariance; And the consistance of making realized that the reference planes surfaceness is extremely low, and surface uniformity is fabulous, indefectible and defective; Apparatus of the present invention are made simply, are safeguarded easily, are convenient to operate and carry.
Description of drawings
Fig. 1 is a kind of reference planes generating apparatus synoptic diagram that is used for the demarcation of optical surface roughness of the present invention;
Fig. 2 is the synoptic diagram when damping element is column and lattice structure in apparatus of the present invention.
Among the figure: 1, optically roughness degree detector lens, 2, liquid mercury, 3, shell of tank, 4, vessel port, 5, damping element, 6, gland bonnet.
Embodiment
As shown in Figure 1, the present invention is a kind of to be used for the reference planes generating apparatus that the optical surface roughness is demarcated, and this device comprises liquid mercury 2, container outer wall 3, vessel port 4, damping structure 5 and gland bonnet 6; Said damping structure 5 is positioned at container outer wall 3 inner belows.Gland bonnet 6 and vessel port 4 are to be threaded and airtight.Wherein the material of shell of tank 3, damping element 5 and gland bonnet 6 is identical, and preferred material is a macromolecular material, also can be glass or metal material.As shown in Figure 2, figure b is that preferred damping element version is lattice-shaped, also can be figure a column shape.The existence of damping element 5 is in order to let liquid mercury 2 settle out rapidly, to reduce the needed time of balance.Vessel port 4 is set directly over the shell of tank 3, and in order to reduce the volatilization of mercury as far as possible, opening size should be as far as possible little, and the use of satisfying the roughness demarcation gets final product, can be identical with optically roughness degree detector lens 1 bore.Height 1mm～5mm that the height of liquid mercury 2 liquid levels should exceed damping element 5 in the container is for suitable, exceeds can increase too much the needed time of liquid level stabilizing.Before roughness is demarcated, earlier gland bonnet 6 is opened, whole device place optically roughness degree detector lens 1 under, leave standstill a period of time after, liquid mercury 2 formed surfaces promptly can be used for the demarcation of white light interferometer roughness; After the demarcation, gland bonnet 6 is screwed to keep sealing.It all is identical should guaranteeing to operate ambient temperature at every turn.
Reference planes are formed by the liquid mercury that is placed in the container among the present invention, and surfaceness is extremely low, and surface uniformity is fabulous, indefectible and defective.
These reference planes are because single, the homogeneous of mercury and stable properties have good time, space invariance, and the consistance of making, and can be used for the normative reference that the white light interferometer roughness is demarcated.With water, other liquid phase ratio of wet goods, the reference planes scattered light that uses liquid mercury to generate is few, and reflectivity is high, is more suitable for the reference planes of demarcating as roughness.
A kind of reference planes generating apparatus that is used for the demarcation of optical surface roughness of the present invention is made simply, is safeguarded easily, is convenient to operate and carry.
Claims (4)
1. one kind is used for the reference planes generating apparatus that the optical surface roughness is demarcated, and it is characterized in that this device comprises liquid mercury (2), container outer wall (3), vessel port (4), damping structure (5) and gland bonnet (6); Said damping structure (5) is positioned at the inner below of container outer wall (3).
2. a kind of reference planes generating apparatus that the optical surface roughness is demarcated that is used for according to claim 1 is characterized in that vessel port (4) size is identical with optically roughness degree detector lens (1) bore.
3. a kind of reference planes generating apparatus that the optical surface roughness is demarcated that is used for according to claim 1 is characterized in that damping element (5) is column or the Turbogrid plates of arranging.
4. a kind of reference planes generating apparatus that the optical surface roughness is demarcated that is used for according to claim 1 is characterized in that, gland bonnet (6) and vessel port (4) are to be threaded and airtight.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2012100615986A CN102636132A (en) | 2012-03-09 | 2012-03-09 | Reference plane generating device for calibrating roughness of optical surface |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2012100615986A CN102636132A (en) | 2012-03-09 | 2012-03-09 | Reference plane generating device for calibrating roughness of optical surface |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN102636132A true CN102636132A (en) | 2012-08-15 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2012100615986A Pending CN102636132A (en) | 2012-03-09 | 2012-03-09 | Reference plane generating device for calibrating roughness of optical surface |
Country Status (1)
| Country | Link |
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| CN (1) | CN102636132A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108844500A (en) * | 2018-04-10 | 2018-11-20 | 苏州久越金属科技有限公司 | A kind of radium-shine automatic high-efficiency measurement method |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1999008065A1 (en) * | 1997-08-07 | 1999-02-18 | Vlsi Standards, Inc. | Calibration standard for microroughness measuring instruments |
| DE10226801A1 (en) * | 2002-06-15 | 2004-01-08 | Bundesrepublik Deutschland, vertr. d. d. Bundesministerium für Wirtschaft und Arbeit, dieses vertr. d. d. Präsidenten der Physikalisch-Technischen Bundesanstalt | Surface measuring device and method for mechanical and non-contact optical examination of object surfaces |
| CN101762250A (en) * | 2010-01-28 | 2010-06-30 | 上海交通大学 | Grinding workpiece surface quality optical real-time detection device |
-
2012
- 2012-03-09 CN CN2012100615986A patent/CN102636132A/en active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1999008065A1 (en) * | 1997-08-07 | 1999-02-18 | Vlsi Standards, Inc. | Calibration standard for microroughness measuring instruments |
| DE10226801A1 (en) * | 2002-06-15 | 2004-01-08 | Bundesrepublik Deutschland, vertr. d. d. Bundesministerium für Wirtschaft und Arbeit, dieses vertr. d. d. Präsidenten der Physikalisch-Technischen Bundesanstalt | Surface measuring device and method for mechanical and non-contact optical examination of object surfaces |
| CN101762250A (en) * | 2010-01-28 | 2010-06-30 | 上海交通大学 | Grinding workpiece surface quality optical real-time detection device |
Non-Patent Citations (2)
| Title |
|---|
| 李德培: "关于用水银液面作标准平面的探讨", 《光学技术》 * |
| 武旭华等: "液面基准法标定干涉仪系统误差", 《光子学报》 * |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108844500A (en) * | 2018-04-10 | 2018-11-20 | 苏州久越金属科技有限公司 | A kind of radium-shine automatic high-efficiency measurement method |
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Application publication date: 20120815 |