CN111334842A - 一种pvd电镀悬挂工装结构 - Google Patents
一种pvd电镀悬挂工装结构 Download PDFInfo
- Publication number
- CN111334842A CN111334842A CN202010274302.3A CN202010274302A CN111334842A CN 111334842 A CN111334842 A CN 111334842A CN 202010274302 A CN202010274302 A CN 202010274302A CN 111334842 A CN111334842 A CN 111334842A
- Authority
- CN
- China
- Prior art keywords
- fixedly connected
- pvd
- metal substrate
- connecting block
- product
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000002184 metal Substances 0.000 claims abstract description 60
- 229910052751 metal Inorganic materials 0.000 claims abstract description 60
- 238000005240 physical vapour deposition Methods 0.000 claims abstract description 39
- 239000000758 substrate Substances 0.000 claims abstract description 31
- 238000009713 electroplating Methods 0.000 claims abstract description 25
- 239000000725 suspension Substances 0.000 claims abstract description 17
- 229910000679 solder Inorganic materials 0.000 claims abstract description 4
- 230000000670 limiting effect Effects 0.000 claims description 13
- 230000000694 effects Effects 0.000 abstract description 8
- 238000003466 welding Methods 0.000 description 5
- 239000011247 coating layer Substances 0.000 description 3
- 239000010410 layer Substances 0.000 description 3
- 150000002739 metals Chemical class 0.000 description 3
- 230000007797 corrosion Effects 0.000 description 2
- 238000005260 corrosion Methods 0.000 description 2
- 238000005868 electrolysis reaction Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 239000000956 alloy Substances 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 150000001768 cations Chemical class 0.000 description 1
- 229910000365 copper sulfate Inorganic materials 0.000 description 1
- ARUVKPQLZAKDPS-UHFFFAOYSA-L copper(II) sulfate Chemical compound [Cu+2].[O-][S+2]([O-])([O-])[O-] ARUVKPQLZAKDPS-UHFFFAOYSA-L 0.000 description 1
- -1 corrosion Chemical class 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000002198 insoluble material Substances 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000001579 optical reflectometry Methods 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D17/00—Constructional parts, or assemblies thereof, of cells for electrolytic coating
- C25D17/06—Suspending or supporting devices for articles to be coated
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/50—Substrate holders
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D17/00—Constructional parts, or assemblies thereof, of cells for electrolytic coating
- C25D17/06—Suspending or supporting devices for articles to be coated
- C25D17/08—Supporting racks, i.e. not for suspending
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Electrochemistry (AREA)
- Mechanical Engineering (AREA)
- Electroplating Methods And Accessories (AREA)
Abstract
Description
Claims (7)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN202010274302.3A CN111334842B (zh) | 2020-04-09 | 2020-04-09 | 一种pvd电镀悬挂工装结构 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN202010274302.3A CN111334842B (zh) | 2020-04-09 | 2020-04-09 | 一种pvd电镀悬挂工装结构 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN111334842A true CN111334842A (zh) | 2020-06-26 |
CN111334842B CN111334842B (zh) | 2021-06-18 |
Family
ID=71178835
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN202010274302.3A Active CN111334842B (zh) | 2020-04-09 | 2020-04-09 | 一种pvd电镀悬挂工装结构 |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN111334842B (zh) |
Citations (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5391275A (en) * | 1990-03-02 | 1995-02-21 | Applied Materials, Inc. | Method for preparing a shield to reduce particles in a physical vapor deposition chamber |
JP2002030493A (ja) * | 2000-07-10 | 2002-01-31 | Hiroshi Nagayama | メッキ用ハンガー |
JP2007056350A (ja) * | 2005-08-26 | 2007-03-08 | Akebono Brake Ind Co Ltd | メッキ装置 |
US20090026068A1 (en) * | 2000-04-27 | 2009-01-29 | Akihisa Hongo | Revolution member supporting apparatus and semiconductor substrate processing apparatus |
CN202626278U (zh) * | 2012-05-21 | 2012-12-26 | 珠海承鸥卫浴用品有限公司 | 组合挂具 |
JP2013036083A (ja) * | 2011-08-08 | 2013-02-21 | Kakihara Kogyo Kk | めっき補助具及びこれを用いためっき方法 |
US8562798B2 (en) * | 2005-02-03 | 2013-10-22 | Applied Materials, Inc. | Physical vapor deposition plasma reactor with RF source power applied to the target and having a magnetron |
CN206089796U (zh) * | 2016-08-30 | 2017-04-12 | 科森科技东台有限公司 | 用于pvd加工的挂具 |
CN206956195U (zh) * | 2017-06-29 | 2018-02-02 | 十堰市协兴工贸有限公司 | 一种便于拆卸安装的电镀挂具 |
CN208136328U (zh) * | 2018-05-09 | 2018-11-23 | 深圳市正和忠信股份有限公司 | 一种pvd镀膜工件旋转悬挂装置 |
US20190060939A1 (en) * | 2017-08-23 | 2019-02-28 | United Technologies Corporation | Fixture assembly for coating combustor panels |
CN109554681A (zh) * | 2018-12-26 | 2019-04-02 | 上海应用技术大学 | 一种物理气相沉积用镀膜夹具 |
CN208884014U (zh) * | 2018-08-24 | 2019-05-21 | 托伦斯半导体设备启东有限公司 | 阳极氧化的挂具 |
CN209890730U (zh) * | 2019-04-22 | 2020-01-03 | 杭州泛亚卫浴股份有限公司 | 一种用于pvd加工的螺旋式挂具 |
-
2020
- 2020-04-09 CN CN202010274302.3A patent/CN111334842B/zh active Active
Patent Citations (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5391275A (en) * | 1990-03-02 | 1995-02-21 | Applied Materials, Inc. | Method for preparing a shield to reduce particles in a physical vapor deposition chamber |
US20090026068A1 (en) * | 2000-04-27 | 2009-01-29 | Akihisa Hongo | Revolution member supporting apparatus and semiconductor substrate processing apparatus |
JP2002030493A (ja) * | 2000-07-10 | 2002-01-31 | Hiroshi Nagayama | メッキ用ハンガー |
US8562798B2 (en) * | 2005-02-03 | 2013-10-22 | Applied Materials, Inc. | Physical vapor deposition plasma reactor with RF source power applied to the target and having a magnetron |
JP2007056350A (ja) * | 2005-08-26 | 2007-03-08 | Akebono Brake Ind Co Ltd | メッキ装置 |
JP2013036083A (ja) * | 2011-08-08 | 2013-02-21 | Kakihara Kogyo Kk | めっき補助具及びこれを用いためっき方法 |
CN202626278U (zh) * | 2012-05-21 | 2012-12-26 | 珠海承鸥卫浴用品有限公司 | 组合挂具 |
CN206089796U (zh) * | 2016-08-30 | 2017-04-12 | 科森科技东台有限公司 | 用于pvd加工的挂具 |
CN206956195U (zh) * | 2017-06-29 | 2018-02-02 | 十堰市协兴工贸有限公司 | 一种便于拆卸安装的电镀挂具 |
US20190060939A1 (en) * | 2017-08-23 | 2019-02-28 | United Technologies Corporation | Fixture assembly for coating combustor panels |
CN208136328U (zh) * | 2018-05-09 | 2018-11-23 | 深圳市正和忠信股份有限公司 | 一种pvd镀膜工件旋转悬挂装置 |
CN208884014U (zh) * | 2018-08-24 | 2019-05-21 | 托伦斯半导体设备启东有限公司 | 阳极氧化的挂具 |
CN109554681A (zh) * | 2018-12-26 | 2019-04-02 | 上海应用技术大学 | 一种物理气相沉积用镀膜夹具 |
CN209890730U (zh) * | 2019-04-22 | 2020-01-03 | 杭州泛亚卫浴股份有限公司 | 一种用于pvd加工的螺旋式挂具 |
Also Published As
Publication number | Publication date |
---|---|
CN111334842B (zh) | 2021-06-18 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN105088323B (zh) | 板式电镀挂具 | |
CN1609282A (zh) | 局部电镀的方法以及装置 | |
KR102310438B1 (ko) | 전기 도금용 지그 어셈블리 | |
CN111334842B (zh) | 一种pvd电镀悬挂工装结构 | |
CN209873166U (zh) | 一种电镀用挂具 | |
CN2910972Y (zh) | 多档组合式电镀挂具 | |
CN102424994A (zh) | 一种镍铁合金电镀液 | |
CN105132997B (zh) | 一种辐条用电镀挂具 | |
CN216107306U (zh) | 一种形状可变电镀钛篮 | |
CN210945843U (zh) | 一种家电零件镀漆装置 | |
CN211814690U (zh) | 一种导电性好的阴阳极座导电结构 | |
CN213624454U (zh) | 一种用于不同长度螺杆镀锌的挂具 | |
CN211471602U (zh) | 一种嵌入式镀槽及具有嵌入式镀槽的装置 | |
CN213013158U (zh) | 一种电镀辅助阳极工装 | |
CN220685304U (zh) | 一种圆柱型电子产品挂架结构 | |
CN206494978U (zh) | 一种伸缩式的电镀挂架 | |
CN213739766U (zh) | 一种电镀挂具装置 | |
CN205443501U (zh) | 一种电镀自动生产线活塞杆镀铬专用组合挂具 | |
US6360461B1 (en) | Electric pressing iron and method of manufacturing an electric pressing iron | |
CN209854270U (zh) | 一种电镀挂架 | |
CN220413586U (zh) | 一种可悬挂多个工件的电镀挂具 | |
KR20080026735A (ko) | 균일 피막용 지그 | |
CN111663169B (zh) | 阳极铜球防掉落缸提效装置 | |
KR20190118275A (ko) | 전기 도금용 양극판 | |
CN215713468U (zh) | 一种配备移动装置和辅助阳极的镀锌镍合金设备 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
PB01 | Publication | ||
PB01 | Publication | ||
SE01 | Entry into force of request for substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
GR01 | Patent grant | ||
GR01 | Patent grant | ||
TA01 | Transfer of patent application right | ||
TA01 | Transfer of patent application right |
Effective date of registration: 20210611 Address after: Unit 421 and 423, 4th floor, Lianyi building, 266-268 Heshan Road, Huli District, Xiamen City, Fujian Province, 361000 Applicant after: XIAMEN KERUISHENG TECHNOLOGY Co.,Ltd. Address before: Yinjiang road in Jimei District of Xiamen City, Fujian Province, No. 185 361021 Applicant before: JIMEI University |
|
TR01 | Transfer of patent right | ||
TR01 | Transfer of patent right |
Effective date of registration: 20240430 Address after: Room 302, No. 253 Guankou Avenue, Guankou Town, Jimei District, Xiamen City, Fujian Province, 361000, China Patentee after: Xiamen Nenggu Coating Technology Co.,Ltd. Country or region after: China Address before: Unit 421 and 423, 4th floor, Lianyi building, 266-268 Heshan Road, Huli District, Xiamen City, Fujian Province, 361000 Patentee before: XIAMEN KERUISHENG TECHNOLOGY CO.,LTD. Country or region before: China |