CN111321379A - 一种金属板表面处理设备 - Google Patents
一种金属板表面处理设备 Download PDFInfo
- Publication number
- CN111321379A CN111321379A CN202010354504.9A CN202010354504A CN111321379A CN 111321379 A CN111321379 A CN 111321379A CN 202010354504 A CN202010354504 A CN 202010354504A CN 111321379 A CN111321379 A CN 111321379A
- Authority
- CN
- China
- Prior art keywords
- driving
- shaft
- surface treatment
- metal sheet
- worm
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
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Classifications
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/28—Vacuum evaporation by wave energy or particle radiation
- C23C14/30—Vacuum evaporation by wave energy or particle radiation by electron bombardment
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/50—Substrate holders
- C23C14/505—Substrate holders for rotation of the substrates
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
- C23C14/564—Means for minimising impurities in the coating chamber such as dust, moisture, residual gases
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- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Health & Medical Sciences (AREA)
- Toxicology (AREA)
- Other Surface Treatments For Metallic Materials (AREA)
Abstract
Description
Claims (10)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN202010354504.9A CN111321379B (zh) | 2020-04-29 | 2020-04-29 | 一种金属板表面处理设备 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN202010354504.9A CN111321379B (zh) | 2020-04-29 | 2020-04-29 | 一种金属板表面处理设备 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN111321379A true CN111321379A (zh) | 2020-06-23 |
CN111321379B CN111321379B (zh) | 2022-03-01 |
Family
ID=71168255
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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CN202010354504.9A Active CN111321379B (zh) | 2020-04-29 | 2020-04-29 | 一种金属板表面处理设备 |
Country Status (1)
Country | Link |
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CN (1) | CN111321379B (zh) |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0790555A (ja) * | 1993-09-17 | 1995-04-04 | Matsushita Electric Ind Co Ltd | 電子ビーム・アブレーション装置 |
CN105129579A (zh) * | 2015-10-08 | 2015-12-09 | 陈国安 | 单旋链式多轿箱平衡电梯 |
CN109923238A (zh) * | 2016-11-04 | 2019-06-21 | 株式会社爱发科 | 成膜装置 |
CN209243159U (zh) * | 2018-12-26 | 2019-08-13 | 攀枝花学院 | 一种用于蒸发镀膜的装置 |
CN110776036A (zh) * | 2019-12-31 | 2020-02-11 | 山东交通职业学院 | 一种稀有气体分离装置及其控制方法 |
-
2020
- 2020-04-29 CN CN202010354504.9A patent/CN111321379B/zh active Active
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0790555A (ja) * | 1993-09-17 | 1995-04-04 | Matsushita Electric Ind Co Ltd | 電子ビーム・アブレーション装置 |
CN105129579A (zh) * | 2015-10-08 | 2015-12-09 | 陈国安 | 单旋链式多轿箱平衡电梯 |
CN109923238A (zh) * | 2016-11-04 | 2019-06-21 | 株式会社爱发科 | 成膜装置 |
CN209243159U (zh) * | 2018-12-26 | 2019-08-13 | 攀枝花学院 | 一种用于蒸发镀膜的装置 |
CN110776036A (zh) * | 2019-12-31 | 2020-02-11 | 山东交通职业学院 | 一种稀有气体分离装置及其控制方法 |
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Publication number | Publication date |
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CN111321379B (zh) | 2022-03-01 |
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Effective date of registration: 20230815 Address after: No. 38 Gongbin Road, Xiangfang District, Harbin City, Heilongjiang Province, 150000 Patentee after: Heilongjiang Botong Traffic Signage Co.,Ltd. Address before: 230000 floor 1, building 2, phase I, e-commerce Park, Jinggang Road, Shushan Economic Development Zone, Hefei City, Anhui Province Patentee before: Dragon totem Technology (Hefei) Co.,Ltd. Effective date of registration: 20230815 Address after: 230000 floor 1, building 2, phase I, e-commerce Park, Jinggang Road, Shushan Economic Development Zone, Hefei City, Anhui Province Patentee after: Dragon totem Technology (Hefei) Co.,Ltd. Address before: No.8, Weixian Middle Road, high tech Development Zone, Weifang City, Shandong Province Patentee before: SHANDONG TRANSPORT VOCATIONAL College |
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