CN111308868A - Calibration method for alignment camera - Google Patents
Calibration method for alignment camera Download PDFInfo
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- CN111308868A CN111308868A CN202010192255.8A CN202010192255A CN111308868A CN 111308868 A CN111308868 A CN 111308868A CN 202010192255 A CN202010192255 A CN 202010192255A CN 111308868 A CN111308868 A CN 111308868A
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- calibration
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
- G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
- G03F9/7003—Alignment type or strategy, e.g. leveling, global alignment
- G03F9/7019—Calibration
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- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Length Measuring Devices By Optical Means (AREA)
Abstract
The invention provides a calibration method of an alignment camera, which comprises the steps of fixing the position of a substrate platform, respectively carrying out data detection in the X direction on a calibration point on a calibration plate by the alignment camera to obtain data of an actual measurement value of the movement of the alignment camera in the X direction, and calculating calibration data of the alignment camera in the X direction; and capturing data of the same calibration point according to the alignment camera to obtain the relative position relationship of the alignment camera. The position camera and the substrate platform are calibrated and calibrated by taking the calibration plate as a reference, so that the error of the substrate platform is not introduced into the calibration of the position camera, and the result is more accurate.
Description
Technical Field
The invention relates to the technical field of direct-writing exposure machines, in particular to a calibration method of an alignment camera.
Background
The exposure technology is widely applied to the field of semiconductor and PCB production, is one of the process steps for manufacturing semiconductor devices, chips and PCB products, and is used for printing characteristic patterns on the surface of a substrate and finally obtaining a pattern structure required according to circuit design. The traditional photoetching technology needs to make a master mask or a film negative film of a mask for exposure operation, the making period is long, and each plate corresponds to a single pattern and cannot be widely applied. In order to solve the problems of the traditional exposure technology, a direct-writing exposure mechanism comes from the beginning, the digital light processing technology is utilized, different required graph structures are edited through a programmable digital mirror device, graphs can be rapidly switched, the cost can be reduced, the time of a manufacturing process can be shortened, and the direct-writing exposure mechanism is widely applied to the technical field of photoetching.
The direct-writing exposure machine generally comprises a substrate platform, an alignment mechanism and an exposure mechanism, wherein the alignment mechanism and the exposure mechanism are arranged above the motion platform, and the substrate on the substrate platform is exposed through the cooperation of the substrate platform, the alignment mechanism and the exposure mechanism. The direct-writing exposure machine is high-precision machine equipment, and before the direct-writing exposure machine is put into use, a motion platform, an alignment mechanism and the like need to be calibrated, so that the running accuracy of the machine is improved. In the existing alignment method, generally, a position of an alignment camera in an alignment mechanism is fixed, a calibration plate is placed on a substrate platform, the substrate platform is moved to a position of a calibration point 1, a first alignment camera captures the calibration point 1 to obtain a first movement vector, a second alignment camera moves to capture the calibration point 1 to obtain a second movement vector, a position relationship between the first alignment camera and the second alignment camera is an offset error value of the first alignment camera and the second alignment camera, then the alignment camera is calibrated by moving the substrate platform, and in a process of moving the motion platform, the alignment camera obtains the calibration point of the calibration plate to obtain corresponding data, and the obtained data is processed to obtain two-dimensional compensation values in an X direction and a Y direction. In the method, the substrate platform is calibrated by the calibration plate, the alignment camera is calibrated by the substrate platform, and errors of the substrate platform are introduced in the process of calibrating the alignment camera, so that the accuracy of final calibration is limited.
Disclosure of Invention
In view of the above problems, the present invention provides a calibration method with higher accuracy.
The technical scheme is as follows: a method of calibrating a registration camera, comprising the steps of:
(1) calibrating the alignment camera: fixing the position of the substrate platform, and respectively carrying out data detection in the X direction on the calibration points on the calibration plate by the alignment cameras to obtain data of actual measurement values of the movement of the alignment cameras in the X direction and calculate calibration data of the alignment cameras in the X direction;
(2) calibrating the position relation between the alignment cameras: and capturing data of the same calibration point according to the alignment camera to obtain the relative position relationship of the alignment camera.
Further, in step 1, when the alignment camera moves one position in the X direction, the substrate platform drives the calibration board to move along the Y direction, and the alignment camera obtains a plurality of actual measurement data and calculates the calibration data of the relative movement of the alignment camera in the Y direction.
Further, in step 2, a two-dimensional compensation value chart of the movement of the alignment camera is obtained through the calibration data of the alignment camera in the X direction and the calibration data of the alignment camera in the Y direction.
Further, the substrate stage is calibrated before step 1.
Further, when the substrate platform is calibrated: according to the position of the calibration plate fixing alignment camera, the substrate platform drives the calibration plate to move for multiple times along the X direction and the Y direction, the position of a calibration point on the calibration plate is recorded through the alignment camera, and the calibration data of the substrate platform movement is calculated.
Further, the substrate platform drives the calibration board to move the same distance in the same direction every time.
Further, calibration data is calculated according to the detection data and the coordinate ideal value data of the alignment camera.
Further, the calibration data is obtained by using a linear equation or a square root equation.
Further, the distance of each movement of the alignment camera in the X direction is the same.
Further, in step 2, a reference alignment camera is set, and the positional relationship between the alignment cameras other than the reference alignment camera and the reference alignment camera is acquired.
In the calibration method, the alignment camera and the substrate platform are calibrated and calibrated by taking the calibration plate as a reference, so that the error of the substrate platform is not introduced into the calibration of the alignment camera, and the result is more accurate.
Drawings
Fig. 1 is a schematic view of a direct write exposure machine.
Fig. 2 is a schematic diagram of a calibration board of the alignment camera.
Detailed Description
The technical solution in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention.
As shown in fig. 1-2, the present invention relates to a method for alignment compensation of a direct-write exposure machine, wherein the exposure machine comprises a substrate platform 1 for placing a substrate, a motion mechanism 2 for driving the substrate platform 1 to move in multiple directions, and an alignment mechanism 3 for obtaining position information of the substrate placed on the substrate platform 1. The movement mechanism 2 comprises an X-direction movement mechanism, a Y-direction movement mechanism and a Z-direction movement mechanism, and the X-direction movement mechanism, the Y-direction movement mechanism and the Z-direction movement mechanism respectively drive the substrate platform to move in the X direction, the Y direction and the Z direction, wherein the Y direction is the scanning direction of the exposure machine, the X direction is perpendicular to the Y direction, and the Z direction is perpendicular to the XY plane. The alignment mechanism 3 comprises an alignment camera 30 and a moving mechanism 31 for driving the alignment camera to slide along the X direction, and when calibrating the direct writing exposure machine, a calibration plate 4 is usually adopted, the calibration plate 4 is provided with calibration points 40 arranged in an array, the calibration points 40 are regularly arranged along the X direction and the Y direction, a first spacing distance between adjacent calibration points is L1 in the X direction, and a second spacing distance between adjacent calibration points is L2 in the Y direction. Preferably, a linear motor is used as a driving motor of the movement mechanism. The movement mechanism may only include a Y-direction movement mechanism and a Z-direction movement mechanism, and does not include an X-direction movement mechanism.
The calibration of the direct-write exposure machine by the calibration plate comprises the following steps:
step 1: the substrate stage 1 is calibrated. Placing calibration plate 4 on base plate platform 1, corresponding calibration point 40 on calibration plate 4, adjusting the position of counterpoint camera 30, first calibration point 41 that one of them counterpoint camera 30 corresponds, first calibration point 41 is located the apex angle of calibration plate, and another counterpoint camera 30 corresponds another calibration point 40 on calibration plate 4. Fixing the position of the alignment camera 30, the Y-direction movement mechanism drives the substrate platform 1 to move, so that the calibration plate 4 moves along the Y-direction, the movement interval is a second interval distance L2 every time, or is an integral multiple of the second interval distance L2, and the alignment camera 30 acquires measurement data once every time the calibration plate 4 moves at a position, and finally acquires measurement data of the movement mechanism in the Y-direction, that is, movement data of the substrate platform 1 in the Y-direction. Then, the X-direction moving mechanism drives the substrate platform 1 to move, the substrate platform 1 drives the calibration board to move a first spacing distance L1 along the X-direction, or the moving distance is an integral multiple of the first spacing distance L1, which is the same as the above, the Y-direction moving mechanism drives the substrate platform to move, the substrate platform 1 drives the calibration board 4 to move along the Y-direction, each moving interval is the same as the above, and is a second spacing distance, or is an integral multiple of the second spacing distance, the calibration board 4 moves a position, the alignment camera 30 obtains a measurement data, and finally obtains all the measurement data of the moving mechanism in the X-direction and the Y-direction. By analogy, the substrate platform 1 drives the calibration plate 4 to move the same distance in the same direction every time, and finally the obtained calibration plate detects coordinate data completely.
Preferably, the moving distance of the calibration plate 4 along the X direction and the Y direction is as small as possible to obtain more actual measurement data, and further obtain more accurate calibration data.
Calibration data, i.e., compensation values, are calculated based on the detection data of the alignment cameras 30 and the coordinate ideal value data. The compensation value can be calculated by a conventional calculation method, such as a linear equation or a square root equation.
Step 2: the alignment camera 30 is calibrated. The alignment cameras 30 are moved to respective zero points, and the substrate stage 1 is moved below the alignment cameras 30, so that the alignment cameras 30 can perform data detection on the calibration points 40 on the substrate stage 1 in the X direction of the calibration plate.
And fixing the position of a calibration plate 4 of the substrate platform 1, and respectively carrying out data detection in the X direction on the calibration points 40 on the calibration plate 4 by the alignment camera 30. Moving the alignment camera 30 along the X direction sequentially captures data of the calibration points 40 on the calibration plate 4, wherein the moving distance of the alignment camera 30 in the X direction may be the same as the moving distance in the X direction during calibration of the substrate stage 1, or all the calibration points 40 in the X axis direction may be selectively captured. Data of the actual measurement value of the movement of the alignment camera 30X direction is obtained. Calibration data for moving the alignment camera 30X is obtained from the actual measurement value data and the ideal data.
When the alignment camera 30 moves one position in the X direction, the Y-direction movement mechanism drives the substrate platform 1 to move, so that the calibration plate 4 moves in the Y direction, and when the movement interval is a second interval distance L2 or an integral multiple of the second interval distance L2, when the calibration plate 4 moves one position, the alignment camera 30 obtains measurement data once, and finally obtains measurement data of the movement mechanism in the Y direction, that is, relative movement data of the alignment camera 30 in the Y direction. Calibration data for the Y-direction movement of the alignment camera 30 is obtained based on the measurement data and the ideal data.
The calibration data may be obtained in the same manner as the substrate platform calibration data, such as by using a linear equation or a square root equation.
And obtaining a two-dimensional compensation value chart of the movement of the alignment camera 30 through the calibration data of the alignment camera 30 in the X direction and the calibration data of the alignment camera 30 in the Y direction.
The relative movement data of the alignment camera 30Y direction is obtained from the calibration data of the alignment camera 30Y direction based on the calibrated data of the substrate stage 1, and a two-dimensional compensation value chart of the movement of the alignment camera 30 is obtained.
And step 3: positions between the alignment cameras 30. And (3) searching the data of the same calibration point captured by the alignment camera 30 through the actual measurement data obtained in the step (2) to obtain the relative position relationship of the alignment cameras.
The alignment cameras 30 are moved to respective zero points, and the substrate stage 1 is moved below the alignment cameras 30, so that the alignment cameras 30 can perform data detection on the calibration points 40 on the substrate stage 1 in the X direction of the calibration plate 4. And in the common travel range of the alignment cameras 30, selecting at least one calibration point 40 on the calibration plate 4, respectively calculating the travel of the alignment cameras 30 according to the selected calibration point 40, respectively moving the alignment cameras 30 to capture the selected calibration point 40 according to the travel to obtain an actual measurement value, and obtaining the position relation between the alignment cameras 30 according to the actually measured data. When the calibration points 40 are selected, a plurality of calibration points 40 can be selected for detection, and an average value is obtained through detection of a plurality of groups of data, so that more accurate data is obtained.
When the number of the alignment cameras 30 is more than two, one of the alignment cameras 30 is set as a reference alignment camera, the reference alignment camera is used as a reference, the reference alignment camera and the other alignment cameras are moved to respective zero points, the other alignment cameras and the reference alignment camera are moved to capture at least one calibration point on the calibration plate, data of all the alignment cameras 30 are respectively obtained, and the position relationship between the other alignment cameras and the reference alignment camera is obtained according to the actual measurement number.
After the direct-write exposure machine is powered off every time, the moving strokes of the substrate platform 1 and the alignment camera 30 are corrected again, and the return-to-zero error is eliminated.
In the calibration method, the number of the alignment cameras 30 is not limited, and the alignment cameras may be immovably and fixedly arranged.
In the calibration method, the alignment camera 30 and the substrate platform 1 are calibrated and calibrated by using the calibration plate 4 as a reference, so that the error of the substrate platform 1 is not introduced into the calibration of the alignment camera, and the result is more accurate.
Claims (10)
1. A calibration method for an alignment camera is characterized in that: which comprises the following steps:
(1) calibrating the alignment camera: fixing the position of the substrate platform, and respectively carrying out data detection in the X direction on the calibration points on the calibration plate by the alignment cameras to obtain data of actual measurement values of the movement of the alignment cameras in the X direction and calculate calibration data of the alignment cameras in the X direction;
(2) calibrating the position relation between the alignment cameras: and capturing data of the same calibration point according to the alignment camera to obtain the relative position relationship of the alignment camera.
2. Calibration method according to claim 1, characterized in that: in step 1, when the alignment camera moves one position in the X direction, the substrate platform drives the calibration board to move along the Y direction, and the alignment camera obtains a plurality of actual measurement data and calculates the relative movement calibration data of the alignment camera in the Y direction.
3. Calibration method according to claim 2, characterized in that: in step 2, a two-dimensional compensation value chart of the movement of the alignment camera is obtained through the calibration data of the alignment camera in the X direction and the calibration data of the alignment camera in the Y direction.
4. A calibration method according to any one of claims 1 to 3, characterized in that: the substrate stage is calibrated before step 1.
5. Calibration method according to claim 4, characterized in that: when the substrate platform is calibrated: according to the position of the calibration plate fixing alignment camera, the substrate platform drives the calibration plate to move for multiple times along the X direction and the Y direction, the position of a calibration point on the calibration plate is recorded through the alignment camera, and the calibration data of the substrate platform movement is calculated.
6. Calibration method according to claim 1, 2, 3 or 5, characterized in that: the base plate platform drives the calibration plate to move the same distance in the same direction every time.
7. The calibration method according to any one of claims 1, 2, 3, or 5, wherein: and calculating calibration data according to the detection data and the coordinate ideal value data of the alignment camera.
8. The calibration method according to claim 7, wherein: the calibration data is obtained using a linear equation or a square root equation.
9. Calibration method according to claim 1, characterized in that: the distance of each movement of the alignment camera in the X direction is the same.
10. The calibration method according to claim 1, wherein in step 2, a reference alignment camera is set, and the positional relationship between the alignment cameras other than the reference alignment camera and the reference alignment camera is acquired.
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| CN202010192255.8A CN111308868B (en) | 2020-03-18 | 2020-03-18 | Alignment compensation method of direct-writing exposure machine |
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| CN202010192255.8A CN111308868B (en) | 2020-03-18 | 2020-03-18 | Alignment compensation method of direct-writing exposure machine |
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| CN111308868B CN111308868B (en) | 2022-12-20 |
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Cited By (1)
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| CN114211629A (en) * | 2022-02-21 | 2022-03-22 | 沈阳和研科技有限公司 | Y-axis precision alignment assembly and alignment method of double-shaft scribing machine |
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