CN111289545A - High-energy X-ray CT device based on phase contrast imaging and imaging method - Google Patents

High-energy X-ray CT device based on phase contrast imaging and imaging method Download PDF

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CN111289545A
CN111289545A CN202010191200.5A CN202010191200A CN111289545A CN 111289545 A CN111289545 A CN 111289545A CN 202010191200 A CN202010191200 A CN 202010191200A CN 111289545 A CN111289545 A CN 111289545A
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章林文
刘进
夏连胜
张篁
阳庆国
李晶
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    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/02—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material
    • G01N23/04—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material and forming images of the material
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/02—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material
    • G01N23/04—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material and forming images of the material
    • G01N23/041—Phase-contrast imaging, e.g. using grating interferometers
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    • G01N2223/00—Investigating materials by wave or particle radiation
    • G01N2223/03—Investigating materials by wave or particle radiation by transmission
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    • G01N2223/40—Imaging
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    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
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Abstract

The invention discloses a high-energy X-ray CT device and an imaging method based on phase contrast imaging, wherein the high-energy X-ray CT device comprises a high-energy X-ray source, a sample table and an imaging device; the high-energy X-ray source is a high-energy X-ray quasi-point light source and an irradiation light source of the sample, and directionally emits, irradiates and transmits the sample; the sample stage is used for placing a sample, and after the high-energy X-ray source penetrates through the sample, the transmitted X-rays are transmitted in a fluctuating way and are coherently superposed at an image plane behind the sample to form photon intensity information containing phase and amplitude information; the imaging device is arranged at an image plane behind the sample, and converts photon intensity information into an image signal. The invention solves the problems that the quality of the obtained CT image is not ideal enough and the spatial resolution is poor due to the existing high-energy X-ray absorption contrast CT technology, and particularly the resolution of the obtained image of a tiny gap in a product is very low, the tiny gap is visible and can not be measured, and the tiny defect is difficult to distinguish.

Description

High-energy X-ray CT device based on phase contrast imaging and imaging method
Technical Field
The invention relates to the technical field of CT detection, in particular to a high-energy X-ray CT device and an imaging method based on phase contrast imaging.
Background
The valuable products such as equipment, devices, components and parts which are combined by parts and components containing high-density materials have the characteristics of complex internal structure, high design and installation precision, unremovable property, long expected life cycle and the like due to design requirements, and the internal structure state monitoring is required to be carried out according to a plan before the products are delivered and in the service life cycle so as to master important parameters and parameter changes of the products and provide accurate evaluation basis for quality, performance and life evaluation of the products.
The X-ray can penetrate through the visible light opaque product, and the intensity of the X-ray penetrating through the product carries the internal state information of the product. By adopting a specific information processing means, the intensity information of the X-rays irradiated and transmitted through the product at different angles is collected and processed, so that the internal structure and state information of the product can be obtained, namely the X-ray transmission (absorption contrast) CT technology, which is generally called X-ray CT technology. For the target product containing high-density material for manufacturing parts, the X-ray with higher photon energy (such as hundreds of keV, even MeV) is required to penetrate effectively, so the high-energy X-ray CT imaging technology is the main technical approach for monitoring the state of the valuable product composed of the high-density material parts.
For a specific target product, the performance of the product is closely related to the material structure characteristics of the mesoscopic scale, and the diagnosis precision of the structure and the state of the product by the detection device is required to reach the mesoscopic level (resolution is below 100 um). Current CT imaging techniques based on high-energy X-ray absorption contrast (transmission) have difficulty meeting the above diagnostic requirements. The main points are as follows: 1) the transmission diagnostic limit capability corresponds to a 1% signal intensity variation corresponding to a defect thickness of greater than 100 microns. The absorption contrast technology is difficult to diagnose the tiny defects due to the strong penetration characteristics (large mean free path and small absorption factor) of the high-energy X-ray; 2) the micro focus of a large-dose CT machine is difficult to realize due to space charge effect and the like, and is usually 1 mm; 3) line hardening problems (artifacts may occur in CT reconstruction and seriously affect the diagnostic result).
The high-energy X-rays at present are basically bremsstrahlung generated by high-energy electron beam targeting, the radiation is a broadband radiation with a wide energy spectrum, the absorption coefficient of the material to the X-rays is related to the energy spectrum, and as the X-rays enter the product, the low-energy part is absorbed quickly to generate the energy spectrum hardening effect: the spectral average absorption coefficient across samples of different thicknesses varies by more than 5% as possible. The existence and inherent characteristics of the factors cause that the quality of CT images obtained by a CT device using bremsstrahlung X-rays as a light source is not ideal, the spatial resolution is poor, particularly, the image resolution of the micro gap in the obtained product is low, the micro gap is not detectable, and the micro defect (mesoscopic defect which can cause macroscopic failure) is difficult to distinguish, and the factors restrict the bottleneck of the application of the industrial CT technology in the nondestructive detection of valuable products combined by high-density material parts.
Disclosure of Invention
The invention aims to provide a high-energy X-ray CT device and an imaging method based on phase contrast imaging, which aim to solve the problems that the quality of an obtained CT image is not ideal enough and the spatial resolution is poor due to the existing high-energy X-ray absorption contrast (transmission) CT technology, especially the resolution of an obtained image of a tiny gap in a product is low, the tiny gap is visible and undetectable, and the microdefect is difficult to distinguish, and realize the accurate evaluation of the quality and the service life cycle internal state of a valuable product which contains high-density materials, has high design and manufacturing precision and is complex.
The invention is realized by the following technical scheme:
a high-energy X-ray CT device based on phase contrast imaging comprises a high-energy X-ray source, a sample stage and an imaging device;
the high-energy X-ray source is a high-energy X-ray quasi-point light source and an irradiation light source of the sample, and directionally emits, irradiates and transmits the sample;
the sample stage is used for placing a sample, and after the high-energy X-ray source penetrates through the sample, the transmitted X-rays are transmitted in a fluctuating way and are coherently superposed at an image plane behind the sample to form photon intensity information containing phase and amplitude information;
the imaging device is arranged at an image plane behind the sample and used for receiving the coherent superposition of the X-rays transmitted through the sample at the image plane to form photon intensity information containing phase and amplitude information and converting the photon intensity information into an image signal.
The high-energy X-rays at present are basically bremsstrahlung generated by high-energy electron beam targeting, the radiation is a broadband radiation with a wide energy spectrum, the absorption coefficient of the material to the X-rays is related to the energy spectrum, and as the X-rays enter the product, the low-energy part is absorbed quickly to generate the energy spectrum hardening effect: the spectral average absorption coefficient across samples of different thicknesses varies by more than 5% as possible. The existence and inherent characteristics of the factors cause that the quality of CT images obtained by a CT device using bremsstrahlung X-rays as a light source is not ideal, the spatial resolution is poor, particularly, the image resolution of the micro gap in the obtained product is low, the micro gap is not detectable, and the micro defect (mesoscopic defect which can cause macroscopic failure) is difficult to distinguish, and the factors restrict the bottleneck of the application of the industrial CT technology in the nondestructive detection of valuable products combined by high-density material parts.
The invention adopts a high-energy X-ray quasi-point light source as an irradiation light source of a sample, photon energy of the high-energy X-ray quasi-point light source is a quasi-single-energy quasi-point light source with several MeV, the quasi-single-energy quasi-point light source directionally emits, irradiates and transmits (with attenuation) the sample (product), transmitted X rays are transmitted in a fluctuation mode and are coherently superposed at an image plane behind the sample to form photon intensity information containing phase and amplitude information, and an imaging device receives and converts the photon intensity information into an image signal to realize X-ray phase contrast imaging of the photon energy reaching the MeV.
The invention can realize high-precision detection of the internal structure (defect) of a complex product containing a high-density material component by adopting the MeV-level high-energy X-ray, and can greatly reduce the influence of X-ray scattering on imaging.
Since high energy (MeV) X-rays have short wavelengths and no coherent light source in this energy band is available at present, it is very difficult to obtain phase contrast images for MeV X-rays as opposed to keV X-ray phase contrast images. The invention is based on incoherent high-energy X-ray, adopts a high-energy X-ray quasi-point light source generated by a specific technical scheme as an irradiation light source, provides and designs a specific measurement scheme, extracts phase information which is carried by X-ray photons penetrating through a sample and is more sensitive to material surface quality information, utilizes a coaxial diffraction method for processing to obtain an image with enhanced boundary signals, improves the resolution capability of internal parts, structures and defects of a product, and realizes the mesoscopic resolution level of the product with the diagnostic spatial resolution capability superior to 50 um.
Usually the difference in surface quality of the material on both sides of the defect boundary is much smaller than the maximum surface quality variation of the defect region, and the size of the defect is too small to create an effective contrast on the absorption contrast image, resulting in a defect signal that is difficult to resolve.
The invention adopts the high-energy X-ray quasi-point light source as the irradiation light source of the sample, and reasonably arranges the selection and the relative relation of the sizes of the source, the object and the image, so that the high-energy X-ray quasi-point light source reaches the sample to form an X-ray light source with coherence, then the X-ray light source irradiates and penetrates the sample to be measured, the transmitted X-ray is transmitted in a fluctuation mode and is coherently superposed at the image plane behind the sample to form photon intensity information containing phase and amplitude information, and the signal enhancement at the boundary of the internal structure and the defect of the sample is obtained through signal processing, thereby realizing the resolution capability of containing high-density materials, high manufacturing precision, complex product internal structure and defect superior to 50 microns.
Further, the high-energy X-ray quasi-point light source is generated by adopting a Thomson scattering mode based on the interaction of high-energy electrons and laser.
Because the laser beam is accurately controllable, the light spot of the irradiation light source can be smaller than 10 microns.
Furthermore, the high-energy X-ray quasi-point light source is a quasi-single-energy gamma ray source.
The energy of the quasi-single-energy gamma ray source (namely the quasi-single-energy high-energy X ray source) is determined by the energy of electron beams and the energy of laser, and the generated X rays can reach several mega electron volts or even dozens of mega electron volts and have the capability of penetrating high-density objects. By adopting a quasi-single-energy gamma ray source, on one hand, the problem of ray hardening is solved from the source angle, and the problem that the diagnosis precision is influenced by the cup-shaped hardening effect brought by X rays with continuous energy spectrums and used in the absorption contrast CT diagnosis is effectively solved (under the condition of single-energy rays, the beam current intensity of the rays is attenuated in an exponential function form along with the thickness of an absorbing substance, and the attenuation coefficient is a constant); on the other hand, the problem of boundary blurring caused by a focal spot under imaging of a bremsstrahlung radiation source is solved. The focal spot of the quasi-unienergy gamma-ray source can reach the level of 20um, even if the resolution of the detection system is the level of 200um, the resolution of 50um can be realized by adopting the imaging layout with super-large magnification.
Further, the distance L between the high-energy X-ray source and the sample has to satisfy the coherence length σlGreater than or equal to the pixel size d at the samplepixel: the following formula:
σl＝λL/σs≥dpixel
wherein λ is the X-ray wavelength, σsIs the spot size of the X-ray source;
further, the imaging device is a photoelectric conversion screen.
And a detection system is arranged in the photoelectric conversion screen, and photon intensity information is detected by the detection system to form an image signal.
An imaging method of a high-energy X-ray CT apparatus based on phase contrast imaging, comprising the steps of:
1) the high-energy X-ray source reaches a sample to form an X-ray light source with coherence, then the X-ray light source irradiates and penetrates through the sample, the transmitted X-rays are transmitted in a fluctuating way and are coherently superposed at an image plane behind the sample to form photon intensity information containing phase and amplitude information, and the imaging device receives and converts the photon intensity information into an image signal;
2) after the step 1) is finished, rotating the sample according to a design angle, emitting the high-energy X-ray source again, and repeating the step 1) to obtain information of the high-energy X-ray transmitted sample at different angles;
3) and obtaining high-precision and three-dimensional images of the internal structure and defects of the sample by adopting a phase restoration technology and a CT-like density reconstruction processing technology.
The phase restoration technology and the CT-like density reconstruction processing technology are the prior art.
The invention adopts MeV high-energy X-ray to realize high-precision detection of the internal structure (defect) of a complex product containing a high-density material component; and a density change rate testing technology is adopted to realize high-precision detection of the hard X-ray on the component interface formed by materials with different densities.
Compared with the prior art, the invention has the following advantages and beneficial effects:
1. the invention adopts the high-energy X-ray quasi-point light source as the irradiation light source of the sample, and reasonably arranges the selection and the relative relation of the sizes of the source, the object and the image, so that the high-energy X-ray quasi-point light source reaches the sample to form an X-ray light source with coherence, then the X-ray light source irradiates and penetrates the sample to be measured, the transmitted X-ray is transmitted in a fluctuation mode and is coherently superposed at the image plane behind the sample to form photon intensity information containing phase and amplitude information, and the signal enhancement at the boundary of the internal structure and the defect of the sample is obtained through signal processing, thereby realizing the resolution capability of containing high-density materials, high manufacturing precision, complex product internal structure and defect superior to 50 microns.
2. The invention adopts the design of quasi-monochromatic light source, solves the problem of ray hardening, and effectively solves the problem that the diagnosis precision is influenced by the 'cup-shaped' hardening effect caused by the X-ray with continuous energy spectrum used in the absorption contrast CT diagnosis.
3. The invention adopts the density change rate testing technology to realize the high-precision detection of the hard X-ray to the component interface formed by materials with different densities.
Drawings
The accompanying drawings, which are included to provide a further understanding of the embodiments of the invention and are incorporated in and constitute a part of this application, illustrate embodiment(s) of the invention and together with the description serve to explain the principles of the invention. In the drawings:
FIG. 1 is a schematic diagram of a high-energy X-ray CT apparatus;
FIG. 2 is a schematic layout of a high-energy X-ray CT apparatus;
FIG. 3 is an image of an dragonfly eye, wherein (a) is a high-energy X-ray contrast image and (b) is an X-ray transmission image.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention is further described in detail below with reference to examples and accompanying drawings, and the exemplary embodiments and descriptions thereof are only used for explaining the present invention and are not meant to limit the present invention.
Example 1:
as shown in fig. 1-2, a high-energy X-ray CT apparatus based on phase contrast imaging includes a high-energy X-ray source, a sample stage and an imaging device;
the high-energy X-ray source is a quasi-single-energy gamma-ray source, is an irradiation light source of the sample, and directionally emits, irradiates and transmits the sample;
the sample stage is used for placing a sample, and after the high-energy X-ray source penetrates through the sample, the transmitted X-rays are transmitted in a fluctuating way and are coherently superposed at an image plane behind the sample to form photon intensity information containing phase and amplitude information;
the imaging device is arranged at an image plane behind the sample and used for receiving the photon intensity information containing phase and amplitude information formed by coherent superposition of X rays penetrating through the sample at the image plane and converting the photon intensity information into an image signal, and the imaging device is a photoelectric conversion screen;
the distance L between the high-energy X-ray source and the sample must satisfy the coherence length sigmalGreater than or equal to the pixel size d at the samplepixel: the following formula:
σl＝λL/σs≥dpixel
wherein λ is the X-ray wavelength, σsIs the spot size of the X-ray source;
in this embodiment, the X-ray energy (X-ray wavelength λ) of the high-energy X-ray source is 1MeV, and the spot size σ of the X-ray sources10 microns, pixel size d of the camera system detectorpixelAt 100 microns, the source-object-image relationship is adopted as follows: 0 to 80m to 200m, canEffective resolution was achieved for 40 micron defects in a 50mm thick tungsten block.
The technique described in this example was used for dragonfly eye imaging as shown in fig. 3 (a), and low energy (keV) x-ray imaging as shown in fig. 3 (b).
Example 2:
this example is based on example 1, and differs from example 1 in that:
in this embodiment, the X-ray energy (X-ray wavelength λ) of the high-energy X-ray source is 4MeV, and the spot size σ of the X-ray sources5 micron, pixel size d of a camera system detectorpixelAt 100 microns, the source-object-image relationship is adopted as follows: 0-150 m-300 m, can realize effective resolution to the defect of 50 microns in the tungsten block with the thickness of 70 mm.
An imaging method of the high-energy X-ray CT device based on the phase contrast imaging comprises the following steps:
1) the high-energy X-ray source reaches a sample to form an X-ray light source with coherence, then the X-ray light source irradiates and penetrates through the sample, the transmitted X-rays are transmitted in a fluctuating way and are coherently superposed at an image plane behind the sample to form photon intensity information containing phase and amplitude information, and the imaging device receives and converts the photon intensity information into an image signal;
2) after the step 1) is finished, rotating the sample according to a design angle, emitting the high-energy X-ray source again, and repeating the step 1) to obtain information of the high-energy X-ray transmitted sample at different angles;
3) and obtaining high-precision and three-dimensional images of the internal structure and defects of the sample by adopting a phase restoration technology and a CT-like density reconstruction processing technology.
The invention is based on incoherent high-energy X-ray, adopts a high-energy X-ray quasi-point light source generated by a specific technical scheme as an irradiation light source, provides and designs a specific measurement scheme, extracts phase information which is carried by X-ray photons penetrating through a sample and is more sensitive to material surface quality information, utilizes a coaxial diffraction method for processing to obtain an image with enhanced boundary signals, improves the resolution capability of internal parts, structures and defects of a product, and realizes the mesoscopic resolution level of the product with the diagnostic spatial resolution capability superior to 50 um.
The above-mentioned embodiments are intended to illustrate the objects, technical solutions and advantages of the present invention in further detail, and it should be understood that the above-mentioned embodiments are merely exemplary embodiments of the present invention, and are not intended to limit the scope of the present invention, and any modifications, equivalent substitutions, improvements and the like made within the spirit and principle of the present invention should be included in the scope of the present invention.

Claims (6)

1. A high-energy X-ray CT device based on phase contrast imaging is characterized by comprising a high-energy X-ray source, a sample stage and an imaging device;
the high-energy X-ray source is a high-energy X-ray quasi-point light source and an irradiation light source of the sample, and directionally emits, irradiates and transmits the sample;
the sample stage is used for placing a sample, and after the high-energy X-ray source penetrates through the sample, the transmitted X-rays are transmitted in a fluctuating way and are coherently superposed at an image plane behind the sample to form photon intensity information containing phase and amplitude information;
the imaging device is arranged at an image plane behind the sample and used for receiving the coherent superposition of the X-rays transmitted through the sample at the image plane to form photon intensity information containing phase and amplitude information and converting the photon intensity information into an image signal.
2. The high-energy X-ray CT device based on phase contrast imaging is characterized in that the high-energy X-ray quasi-point light source is generated by a Thomson scattering mode based on the interaction of high-energy electrons and laser.
3. The phase contrast imaging-based high-energy X-ray CT device according to claim 1, wherein the high-energy X-ray quasi-point light source is a quasi-single-energy gamma-ray source.
4. High energy phase contrast imaging based device according to claim 1X-ray CT apparatus, wherein the distance L between the high-energy X-ray source and the sample is such that the coherence length σ is satisfiedlGreater than or equal to the pixel size d at the samplepixel: the following formula:
σl＝λL/σs≥dpixel
wherein λ is the X-ray wavelength, σsIs the spot size of the X-ray source.
5. The high-energy X-ray CT apparatus based on phase-contrast imaging according to any of claims 1 to 4, wherein the imaging device is a photoelectric conversion screen.
6. An imaging method based on the high-energy X-ray CT apparatus based on phase contrast imaging according to any one of claims 1 to 5, comprising the steps of:
1) the high-energy X-ray source reaches a sample to form an X-ray light source with coherence, then the X-ray light source irradiates and penetrates through the sample, the transmitted X-rays are transmitted in a fluctuating way and are coherently superposed at an image plane behind the sample to form photon intensity information containing phase and amplitude information, and the imaging device receives and converts the photon intensity information into an image signal;
2) after the step 1) is finished, rotating the sample according to a design angle, emitting the high-energy X-ray source again, and repeating the step 1) to obtain information of the high-energy X-ray transmitted sample at different angles;
3) and obtaining high-precision and three-dimensional images of the internal structure and defects of the sample by adopting a phase restoration technology and a CT-like density reconstruction processing technology.
CN202010191200.5A 2020-03-18 2020-03-18 High-energy X-ray CT device based on phase contrast imaging and imaging method Pending CN111289545A (en)

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