CN111272798A - Flexible film testing device and flexible film production line - Google Patents
Flexible film testing device and flexible film production line Download PDFInfo
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- CN111272798A CN111272798A CN202010120846.4A CN202010120846A CN111272798A CN 111272798 A CN111272798 A CN 111272798A CN 202010120846 A CN202010120846 A CN 202010120846A CN 111272798 A CN111272798 A CN 111272798A
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- 238000012360 testing method Methods 0.000 title claims abstract description 40
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 33
- 238000001816 cooling Methods 0.000 claims abstract description 63
- 238000001514 detection method Methods 0.000 claims abstract description 57
- KTSFMFGEAAANTF-UHFFFAOYSA-N [Cu].[Se].[Se].[In] Chemical compound [Cu].[Se].[Se].[In] KTSFMFGEAAANTF-UHFFFAOYSA-N 0.000 claims abstract description 26
- 238000001704 evaporation Methods 0.000 claims abstract description 20
- 230000008020 evaporation Effects 0.000 claims abstract description 19
- 239000010408 film Substances 0.000 claims description 92
- 238000009413 insulation Methods 0.000 claims description 29
- 239000000463 material Substances 0.000 claims description 24
- 238000007789 sealing Methods 0.000 claims description 24
- 239000012528 membrane Substances 0.000 claims description 9
- 238000007599 discharging Methods 0.000 claims description 8
- 239000010409 thin film Substances 0.000 claims description 7
- 230000008676 import Effects 0.000 claims 1
- 238000000034 method Methods 0.000 abstract description 12
- 238000012545 processing Methods 0.000 description 7
- 230000000694 effects Effects 0.000 description 4
- 238000010438 heat treatment Methods 0.000 description 4
- 238000005192 partition Methods 0.000 description 4
- 230000005540 biological transmission Effects 0.000 description 2
- 238000007664 blowing Methods 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 239000000110 cooling liquid Substances 0.000 description 2
- 230000000994 depressogenic effect Effects 0.000 description 2
- 238000009434 installation Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012544 monitoring process Methods 0.000 description 2
- 238000010549 co-Evaporation Methods 0.000 description 1
- HVMJUDPAXRRVQO-UHFFFAOYSA-N copper indium Chemical compound [Cu].[In] HVMJUDPAXRRVQO-UHFFFAOYSA-N 0.000 description 1
- 239000008367 deionised water Substances 0.000 description 1
- 229910021641 deionized water Inorganic materials 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- QNWMNMIVDYETIG-UHFFFAOYSA-N gallium(ii) selenide Chemical compound [Se]=[Ga] QNWMNMIVDYETIG-UHFFFAOYSA-N 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 230000000750 progressive effect Effects 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 230000000087 stabilizing effect Effects 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
- G01N23/227—Measuring photoelectric effect, e.g. photoelectron emission microscopy [PEEM]
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
- G01N23/223—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material by irradiating the sample with X-rays or gamma-rays and by measuring X-ray fluorescence
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2223/00—Investigating materials by wave or particle radiation
- G01N2223/07—Investigating materials by wave or particle radiation secondary emission
- G01N2223/076—X-ray fluorescence
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2223/00—Investigating materials by wave or particle radiation
- G01N2223/07—Investigating materials by wave or particle radiation secondary emission
- G01N2223/084—Investigating materials by wave or particle radiation secondary emission photo-electric effect
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2223/00—Investigating materials by wave or particle radiation
- G01N2223/10—Different kinds of radiation or particles
- G01N2223/101—Different kinds of radiation or particles electromagnetic radiation
- G01N2223/1016—X-ray
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2223/00—Investigating materials by wave or particle radiation
- G01N2223/60—Specific applications or type of materials
- G01N2223/61—Specific applications or type of materials thin films, coatings
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- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
Abstract
The invention discloses a flexible film testing device and a flexible film production line, wherein the flexible film testing device comprises: the device comprises a cavity for transmitting the CIGS flexible film, wherein an inlet and an outlet for transmitting the CIGS flexible film are respectively arranged on two sides of the cavity, a guide roller for supporting and guiding the CIGS flexible film is arranged in the cavity, an EDX detection device for detecting the CIGS flexible film is arranged on the inner wall of the cavity, and a cooling device for cooling the surrounding environment of the EDX detection device is arranged in the cavity. According to the invention, the EDX detection device is additionally arranged in the cavity, so that the detection is carried out during the production of the CIGS flexible film, the problems in the evaporation process can be found in time, and the process adjustment is carried out in time. The yield of the copper indium gallium selenide is improved. The flexible film production line provided by the invention realizes the on-line detection of the CIGS flexible film, improves the yield of the CIGS flexible film and improves the production efficiency of the CIGS flexible film.
Description
Technical Field
The invention relates to the technical field of new energy manufacturing, in particular to a flexible film testing device. In addition, the invention also relates to a flexible film production line comprising the flexible film testing device.
Background
At present, two schemes such as an EDX (electronic discharge X) offline test and a handheld EDX (electronic discharge X) device are generally adopted in a CIGS (copper indium gallium selenium) test means, the offline test refers to a test in a non-vacuum state, and the handheld EDX can only detect a local CIGS sample, so that the existing scheme has great limitations, for example, the CIGS evaporation environment has non-repeatability, and the co-evaporation needs longer process time such as heating, stabilizing an evaporation source, cooling and the like.
Test under EDX line: after the copper indium gallium selenide is manufactured, the test is carried out in modes of cutting and the like, so that the time is long, and the time is also needed for data processing. Aiming at the problems of more unstable factors and non-repeatability of evaporation environment in the production and research of the copper indium gallium selenide. Therefore, a series of work such as production resources, materials, manpower, time, and subsequent processes are wasted.
In summary, how to detect the cigs flexible material in a vacuum state is a problem to be solved by those skilled in the art.
Disclosure of Invention
In view of this, the present invention provides a flexible thin film testing device capable of detecting a cigs flexible thin film on line.
Another object of the present invention is to provide a flexible film manufacturing line including the above flexible film testing apparatus.
In order to achieve the above purpose, the invention provides the following technical scheme:
a flexible membrane test apparatus comprising: the flexible copper indium gallium selenide film conveying device comprises a cavity for conveying the flexible copper indium gallium selenide film, wherein an inlet and an outlet for conveying the flexible copper indium gallium selenide film are respectively arranged on two sides of the cavity, a guide roller for supporting and guiding the flexible copper indium gallium selenide film is arranged in the cavity, an EDX detection device for detecting the flexible copper indium gallium selenide film is arranged on the inner wall of the cavity, and a cooling device for cooling the surrounding environment of the EDX detection device is arranged in the cavity.
Preferably, the cavity is opposite to an opening formed in the side wall of the CIGS flexible film guided by the guide roller, an openable door plate is arranged on the opening, a lengthening cavity facing the guide roller is formed in the inner wall of the door plate, a sunken part sunken into the lengthening cavity is formed in the outer wall of the CIGS flexible film guided by the guide roller, two through holes are formed in the sunken part, and an X-ray head and a detector head of the EDX detection device are respectively installed in the two through holes.
Preferably, the outer side of the depressed part is provided with a dustproof transparent plate, and a dustproof cover is arranged between the dustproof transparent plate and the depressed part.
Preferably, the detector head is disposed within the through-hole by a sealing flange.
Preferably, the extension cavity comprises an extension cylinder arranged on the end surface of the inner side of the opening, a sealing plate is arranged at the end of the inner side of the extension cylinder, and the recess is arranged on the sealing plate.
Preferably, a cooling chamber is arranged in the door panel, and the cooling chamber is communicated with the lengthening chamber.
Preferably, a cooling pipe is arranged in the cooling chamber, and the middle part of the cooling pipe is installed on the outer end face of the opening.
Preferably, the guide roll is arranged on the inner wall of the cavity opposite to the sealing plate, the cooling device is a heat insulation layer arranged on the outer side of the guide roll, two ends of the heat insulation layer are connected to the inner wall of the cavity where the door plate is located, heat insulation cylinders which are used for isolating the copper indium gallium selenide flexible film and communicated with the inside of the heat insulation layer are respectively arranged on two sides of the heat insulation layer, and the two heat insulation cylinders are respectively connected to the inlet and the outlet.
The utility model provides a flexible film production line, includes a plurality of evaporation chamber and a plurality of corner chamber cross connection's annular line, the both ends of annular line are the corner chamber, the one end of annular line the corner chamber communicate in the cooling chamber, the cooling chamber with receive the material chamber intercommunication, the other end of annular line the corner chamber communicate in preheating the chamber, preheat the other end in chamber and communicate in the blowing chamber, receive the material chamber the cooling chamber the corner chamber evaporation chamber preheat the chamber with all be equipped with the negative pressure system on the blowing chamber, all the negative pressure system all is connected with vacuum device, receive the material chamber the cooling chamber with the corner chamber is arbitrary one of above-mentioned flexible film testing arrangement.
The invention provides a flexible film testing device, which comprises: the device comprises a cavity for transmitting the CIGS flexible film, wherein an inlet and an outlet for transmitting the CIGS flexible film are respectively arranged on two sides of the cavity, a guide roller for supporting and guiding the CIGS flexible film is arranged in the cavity, an EDX detection device for detecting the CIGS flexible film is arranged on the inner wall of the cavity, and a cooling device for cooling the surrounding environment of the EDX detection device is arranged in the cavity.
Because heating device's setting can lead to the ambient temperature around the EDX detection device too high, sets up cooling device in the cavity this moment and cools off the ambient temperature around the EDX detection device, and cooling device can be device types such as cooling tube, thermal-insulated wall, makes cooling device can guarantee the normal work of EDX detection device, and EDX requires for operational environment temperature higher, and the ambient temperature of EDX when normal work is about 15-30 ℃ usually.
The invention can be applied to a production line for processing the CIGS flexible film, when the CIGS flexible film is processed, the CIGS flexible film enters the cavity along the inlet and passes through the outer side surface of the guide roller, so that the guide roller can support and guide the CIGS flexible film, and as the processing environment of the CIGS flexible film is a vacuum environment and the temperature is high, when an EDX detection device is used for detection, the ambient temperature around the EDX detection device needs to be reduced, a cooling device for cooling the ambient environment around the EDX detection device is arranged in the cavity, so that the EDX detection device can normally detect.
Compared with the prior art, the invention has the advantages that the EDX detection device is additionally arranged in the cavity, the detection is carried out during the production of the CIGS flexible film, the problems in the evaporation process can be found in time, and the process adjustment is carried out in time. The problems of process monitoring, adjustment, detection and the like in the coating process of the copper indium gallium selenide flexible film production line are solved. The yield of the copper indium gallium selenide is improved.
The invention also provides a flexible film production line which comprises a plurality of evaporation cavities and a plurality of annular lines with corner cavities connected in a staggered manner, wherein the two ends of each annular line are corner cavities, the corner cavity at one end of each annular line is communicated with the cooling cavity, the cooling cavity is communicated with the material receiving cavity, the corner cavity at the other end of each annular line is communicated with the preheating cavity, the other end of each preheating cavity is communicated with the material discharging cavity, negative pressure systems are arranged on the material receiving cavity, the cooling cavity, the corner cavities, the evaporation cavities, the preheating cavities and the material discharging cavities, all the negative pressure systems are connected with the negative pressure devices, and the material receiving cavity, the cooling cavity and the corner cavities are any one of the flexible film testing devices.
The flexible film production line provided by the invention realizes the on-line detection of the CIGS flexible film, improves the yield of the CIGS flexible film and improves the production efficiency of the CIGS flexible film.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to the provided drawings without creative efforts.
FIG. 1 is a schematic view of a flexible film production line provided by the present invention;
FIG. 2 is a front view of a flexible membrane test apparatus provided in the present invention;
FIG. 3 is a three-dimensional view of a flexible film testing apparatus provided in the present invention;
FIG. 4 is a side view of a flexible membrane test apparatus provided in the present invention;
FIG. 5 is a perspective view of a flexible membrane test apparatus provided in the present invention;
FIG. 6 is a cross-sectional view of a chamber provided by the present invention.
In FIGS. 1-6:
1-material receiving cavity, 2-cooling cavity, 3-corner cavity, 4-evaporation cavity, 5-preheating cavity, 6-material discharging cavity, 7-negative pressure device, 8-door plate, 9-flexible film, 10-sealing plate, 11-X ray head, 12-detector head, 13-recessed part, 14-lengthening cylinder, 15-dustproof transparent plate, 16-dustproof cover, 17-cooling pipe, 18-sealing flange, 19-heat insulation cylinder, 20-partition, 21-support, 22-guide roller, 23-heat insulation layer and 24-sealing element.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
The core of the invention is to provide a flexible film testing device capable of detecting the CIGS flexible film on line.
Another core of the present invention is to provide a flexible film production line including the above flexible film testing apparatus.
Referring to fig. 1 to 6, fig. 1 is a schematic view of a flexible film production line according to the present invention; FIG. 2 is a front view of a flexible membrane test apparatus provided in the present invention; FIG. 3 is a three-dimensional view of a flexible film testing apparatus provided in the present invention; FIG. 4 is a side view of a flexible membrane test apparatus provided in the present invention; FIG. 5 is a perspective view of a flexible membrane test apparatus provided in the present invention; FIG. 6 is a cross-sectional view of a chamber provided by the present invention.
A flexible membrane test apparatus comprising: the device comprises a cavity for transmitting the CIGS flexible film 9, wherein an inlet and an outlet for transmitting the CIGS flexible film 9 are respectively arranged on two sides of the cavity, a guide roller 22 for supporting and guiding the CIGS flexible film 9 is arranged in the cavity, an EDX detection device for detecting the CIGS flexible film 9 is arranged on the inner wall of the cavity, a cooling device for cooling the surrounding environment of the EDX detection device is arranged in the cavity when the temperature in the cavity is higher than the normal working temperature of the EDX detection device, and a negative pressure system for vacuumizing the cavity is arranged on the cavity.
It should be noted that the specific shape and size of the cavity can be set according to actual conditions, and the cavity is generally arranged on the ground, so that a support frame can be arranged outside the cavity for supporting, when the invention is applied to a production line for processing the copper indium gallium selenide flexible thin film 9, the negative pressure system vacuumizes the cavity to generate a vacuum environment in the cavity, so that the EDX detection device performs detection in the vacuum environment, and some cavities on the production line need to be provided with heating devices, such as corner cavities 3, so that the normal processing temperature of the copper indium gallium selenide flexible thin film 9 is maintained in the cavity.
Because heating device's setting can lead to the ambient temperature around the EDX detection device too high, sets up cooling device in the cavity this moment and cools off the ambient temperature around the EDX detection device, and cooling device can be device types such as cooling tube, thermal-insulated wall, makes cooling device can guarantee the normal work of EDX detection device, and EDX requires for operational environment temperature higher, and the ambient temperature of EDX when normal work is about 15-30 ℃ usually.
The invention can be applied to a production line for processing the CIGS flexible film 9, when the CIGS flexible film 9 is processed, the CIGS flexible film 9 enters the cavity along the inlet and passes through the outer side surface of the guide roller 22, so that the guide roller 22 can support and guide the CIGS flexible film 9, and as the processing environment of the CIGS flexible film 9 is a vacuum environment and has higher temperature, when an EDX detection device is used for detection, the ambient temperature around the EDX detection device needs to be reduced, a cooling device for cooling the ambient environment around the EDX detection device is arranged in the cavity, so that the EDX detection device can normally detect.
Compared with the prior art, the EDX detection device is additionally arranged in the cavity, detection is carried out during production of the CIGS flexible film 9, problems in the evaporation process can be found in time, and process adjustment is carried out in time. The problems of process monitoring, adjustment, detection and the like in the coating process of the copper indium gallium selenide flexible film 9 production line are solved. The yield of the copper indium gallium selenide is improved.
On the basis of the above embodiment, as a further preferred option, an opening is provided on the side wall of the cigs flexible film 9, which is guided by the guide roller 22 and is directly faced by the cavity, the openable door plate 8 is provided on the opening, a lengthened cavity protruding toward the guide roller 22 is provided on the inner wall of the door plate 8, a recessed portion 13 recessed toward the lengthened cavity is provided on the outer wall of the cigs flexible film 9, which is guided by the guide roller 22 and is directly faced by the lengthened cavity, two through holes are provided on the recessed portion 13, and the X-ray head 11 and the detector head 12 of the EDX detection apparatus are respectively installed in the two through holes.
It should be noted that the door panel 8 is provided for normal maintenance and replacement of the devices and components in the cavity, and the EDX detection device is mounted on the door panel 8, so that the EDX detection device can be conveniently processed, and the cost is low. The door plate 8 is arranged right opposite to the copper indium gallium selenide flexible thin film 9 guided by the guide roller 22, so that the X-ray head 11 and the detector head 12 on the EDX detection device can be right opposite to the copper indium gallium selenide flexible thin film 9, and the detection precision of the EDX detection device is improved.
Because the length of the lengthened cavity can be set according to the actual detection condition, the distances between the X-ray head 11 and the detector head 12 which are arranged in the lengthened cavity and the CIGS flexible film 9 can be set according to the actual detection condition. Form inside cavity structures between extension chamber and the door plant 8, install EDX detection device in extension intracavity portion and can make the device succinct, make and do not have other interconnecting link in the cavity is inside, the through-hole sets up for the structure according to X ray head 11 and detector head 12, makes sealing connection between X ray head 11 and detector head 12 and two through-holes, can make EDX detection device not receive evaporation element's influence.
The side surface of the concave part 13 is an inclined surface, because the X-ray head 11 needs to emit X-rays, and the detector head 12 needs to collect X-fluorescence emitted by the cigs flexible film 9, the X-ray head 11 is arranged on the inclined surface of the concave part 13, and the detector head 12 is arranged on the inclined surface of the other side of the concave part 13, so that the detector head 12 can collect the X-fluorescence emitted by the cigs flexible film 9 more easily.
In addition to the above embodiment, it is further preferable that a dust-proof transparent plate 15 is provided outside the recessed portion 13, and a dust-proof cover 16 is provided between the dust-proof transparent plate 15 and the recessed portion 13. It should be noted that the dustproof transparent plate 15 can prevent the evaporation element from contacting the X-ray head 11 and the detector head 12, and further improves the detection effect of the EDX detection apparatus. An installation groove may be provided on the outer side wall of the cigs flexible film 9 with the elongated cavities around the recess 13 directed against the guide roller 22, and the dustproof transparent plate 15 may be inserted into the installation groove.
In addition to the above embodiments, it is further preferable that the X-ray head 12 is provided in the through hole via a sealing flange 18. It should be noted that the sealing flange 18 can ensure the sealing degree between the detector head 12 and the through hole, and the sealing flange 18 has a simple structure, is convenient to install, and has a low cost. Preferably, the detector head 12 is disposed within the through-hole by a seal 24.
In addition to the above embodiment, it is further preferable that the extension chamber includes an extension tube 14 attached to an inner end surface of the opening, a sealing plate 10 is provided at an inner end of the extension tube 14, and the recess 13 is provided in the sealing plate 10.
It should be noted that the length of the extension cylinder 14 can be flexibly set according to the distance from the detector head 12 and the X-ray head 12 to the cigs flexible film 9, two end portions of the extension cylinder 14 are respectively provided with a flange plate, which is respectively connected with the door plate 8 and the sealing plate 10 in a sealing manner, the extension cylinder 14 is cylindrical, the sealing plate 10 is disc-shaped and has the same shape as the extension cylinder 14, and the sealing plate 10 is connected with the extension cylinder 14 through a bolt. The lengthened cavity provided by the embodiment is simple in structure and convenient to process and install.
In addition to the above embodiment, it is further preferable that the door panel 8 is provided with the cooling pipe 17, and the middle portion of the cooling pipe 17 is attached to the outer end surface of the opening. The cooling pipe 17 is a hard pipe. The cooling tube 17 is internally communicated with cooling liquid, the preferable cooling liquid is deionized water, the arrangement of the cooling tube 17 can be set according to the environmental conditions, and for achieving a better cooling effect, the middle part of the cooling tube 17 is wound on the end face of the outer side of the opening, so that the cooling tube 17 is closer to the EDX detection device, and the better cooling effect can be achieved.
On the basis of the above embodiment, as a further preferred, the guide roller 22 is disposed on the inner wall of the cavity directly opposite to the sealing plate 10, the cooling device is a heat insulation layer 23 disposed on the outer side of the guide roller 22, one end of the heat insulation layer 23 is connected to the inner wall of the cavity where the door panel 8 is located, the other end of the heat insulation layer is connected to the inner wall of the cavity outside the support 21 for mounting the guide roller 22, heat insulation cylinders 19 for isolating the flexible copper indium gallium selenide film 9 and communicating with the inside of the heat insulation layer 23 are respectively disposed on two sides of the heat insulation layer 23, and the two heat insulation cylinders 19 are respectively connected to the inlet and the.
The guide roller 22 is attached to the inner wall of the chamber by the support 21, and the support 21 is aligned with the sealing plate 10, and even if the support 21 is aligned with the EDX detection apparatus, the cooling apparatus is provided as the heat insulating layer 23, and the heat insulating layer 23 may be a heat insulating water-cooling layer or another type of heat insulating layer 23, and as long as the material capable of insulating heat is used, the scope of the present invention is included. The heat insulation layer 23 is plate-shaped, one end of the heat insulation layer is connected to the inner wall of the cavity where the door panel 8 is located, the other end of the heat insulation layer is connected to the inner wall of the cavity outside the support 21 for installing the guide roller 22, the heat insulation layer 23 is installed on the inner wall outside the support 21, the CIGS flexible film 9 needs to be transmitted, therefore, transmission ports can be formed in two side walls of the heat insulation layer 23, heat insulation cylinders 19 respectively connected to the inner end faces of the inlet and the outlet of the cavity are arranged outside the transmission ports, in order to achieve a better isolation effect, annular partitions 20 can be arranged at the inlet and the outlet, the calibers of the inlet and the outlet are reduced, the two heat insulation cylinders 19 are respectively connected to the partitions 20, and the partitions 20 mainly serve to isolate evaporation elements and prevent the evaporation elements from contacting.
In addition to the flexible film testing device, the invention also provides a flexible film production line which comprises a plurality of evaporation cavities 4 and a plurality of annular lines with corner cavities 3 connected in a staggered manner, wherein the two ends of each annular line are the corner cavities 3, the corner cavity 3 at one end of each annular line is communicated with the cooling cavity 2, the cooling cavity 2 is communicated with the material receiving cavity 1, the corner cavity 3 at the other end of each annular line is communicated with the preheating cavity 5, the other end of the preheating cavity 5 is communicated with the material discharging cavity 6, the material receiving cavity 1, the cooling cavity 2, the corner cavities 3, the evaporation cavities 4, the preheating cavities 5 and the material discharging cavities 6 are all provided with negative pressure systems, all the negative pressure systems are connected with the negative pressure device 7, and the material receiving cavity 1, the cooling cavity 2 and the corner cavities 3 are all the flexible film testing device disclosed by any one of the embodiments.
The flexible film is discharged from the discharging cavity 6 and enters the preheating cavity 5 to be preheated, after reaching a certain temperature, the flexible film enters the evaporation cavity 4 through the corner cavity 3 to be evaporated and grown, and then enters the cooling cavity 2 to be cooled and collected through the material collecting cavity 1, so that the production of the copper indium gallium selenide film is completed.
The flexible film production line provided by the invention realizes the on-line detection of the CIGS flexible film 9, improves the yield of the CIGS flexible film 9 and improves the production efficiency of the CIGS flexible film 9. The structure of other parts of the flexible film production line refers to the prior art, and is not described herein again.
The embodiments in the present description are described in a progressive manner, each embodiment focuses on differences from other embodiments, and the same and similar parts among the embodiments are referred to each other.
The flexible film testing device and the flexible film production line provided by the invention are described in detail above. The principles and embodiments of the present invention are explained herein using specific examples, which are presented only to assist in understanding the method and its core concepts. It should be noted that, for those skilled in the art, it is possible to make various improvements and modifications to the present invention without departing from the principle of the present invention, and those improvements and modifications also fall within the scope of the claims of the present invention.
Claims (8)
1. A flexible membrane test apparatus, comprising: a cavity for transmitting flexible film of copper indium gallium selenide (9), the both sides of cavity are equipped with import and the export that is used for transmitting flexible film of copper indium gallium selenide (9) respectively, be equipped with in the cavity and be used for supporting and direction guide roll (22) of flexible film of copper indium gallium selenide (9), be equipped with the EDX detection device who is used for detecting flexible film of copper indium gallium selenide (9) on the inner wall of cavity, temperature in the cavity is higher than during EDX detection device's normal operating temperature, be equipped with the cooling device who is used for cooling EDX detection device surrounding environment in the cavity, be equipped with on the cavity be used for with the vacuum system of evacuation in the cavity.
2. The flexible film testing device according to claim 1, wherein an opening is formed in a side wall of the CIGS flexible film (9) which is just opposite to the guide roller (22) and is guided by the cavity, an openable door plate (8) is arranged on the opening, an elongated cavity which protrudes towards the guide roller (22) is formed in the inner wall of the door plate (8), a concave part (13) which is concave towards the inside of the elongated cavity is formed in the outer wall of the CIGS flexible film (9) which is just opposite to the guide roller (22) and is guided by the elongated cavity, two through holes are formed in the concave part (13), and an X-ray head (11) and a detector head (12) of the EDX detection device are respectively installed in the two through holes.
3. The flexible thin film testing device according to claim 2, characterized in that a dustproof transparent plate (15) is provided outside the recess (13), and a dustproof cover (16) is provided between the dustproof transparent plate (15) and the recess (13).
4. The flexible film testing device of claim 2, wherein the detector head (12) is disposed within the through-hole via a sealing flange (18).
5. The flexible film testing device according to claim 2, wherein the elongated chamber comprises an elongated cylinder (14) mounted on an inner end surface of the opening, a sealing plate (10) is provided on an inner end of the elongated cylinder (14), and the recess (13) is provided on the sealing plate (10).
6. The flexible film testing device according to claim 2, wherein said door panel (8) is provided with a cooling pipe (17), and a central portion of said cooling pipe (17) is installed on an outer end surface of said opening.
7. The flexible film testing device according to claim 6, wherein the guide roll (22) is arranged on the inner wall of the cavity opposite to the sealing plate (10), the cooling device is a heat insulation layer (23) arranged on the outer side of the guide roll (22), one end of the heat insulation layer (23) is connected to the inner wall of the cavity where the door plate (8) is located, the other end of the heat insulation layer is connected to the inner wall of the cavity on the outer side of the support (21) for mounting the guide roll (22), heat insulation cylinders (19) which are used for isolating the copper indium gallium selenide flexible film (9) and communicated with the inside of the heat insulation layer (23) are respectively arranged on two sides of the heat insulation layer (23), and the two heat insulation cylinders (19) are respectively connected to the inlet and the outlet.
8. A flexible film production line comprises a plurality of evaporation cavities (4) and a plurality of annular lines which are connected in a staggered manner with corner cavities (3), wherein the two ends of each annular line are the corner cavities (3), the corner cavities (3) at one end of each annular line are communicated with a cooling cavity (2), the cooling cavity (2) is communicated with a material receiving cavity (1), the corner cavities (3) at the other end of each annular line are communicated with a preheating cavity (5), the other end of each preheating cavity (5) is communicated with a material discharging cavity (6), the material receiving cavity (1), the cooling cavity (2), the corner cavities (3), the evaporation cavities (4), the preheating cavity (5) and the material discharging cavity (6) are respectively provided with a negative pressure system, and all the negative pressure systems are connected with a negative pressure device (7), and the flexible film measuring line is characterized in that the material receiving cavity (1), the cooling cavity (2) and the corner cavities (3) are the flexible film measuring line as claimed in any one of claims 1 to 7 And (5) testing the device.
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