CN110398075A - Groove type solar heat-collecting pipe vacuum device for measuring properties - Google Patents

Groove type solar heat-collecting pipe vacuum device for measuring properties Download PDF

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Publication number
CN110398075A
CN110398075A CN201910753706.8A CN201910753706A CN110398075A CN 110398075 A CN110398075 A CN 110398075A CN 201910753706 A CN201910753706 A CN 201910753706A CN 110398075 A CN110398075 A CN 110398075A
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China
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type solar
groove type
high frequency
measured
frequency electric
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雷东强
姚方源
王志峰
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Institute of Electrical Engineering of CAS
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Institute of Electrical Engineering of CAS
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Priority to CN201910753706.8A priority Critical patent/CN110398075A/en
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    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24HEATING; RANGES; VENTILATING
    • F24SSOLAR HEAT COLLECTORS; SOLAR HEAT SYSTEMS
    • F24S40/00Safety or protection arrangements of solar heat collectors; Preventing malfunction of solar heat collectors
    • F24S40/90Arrangements for testing solar heat collectors
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01DMEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D21/00Measuring or testing not otherwise provided for
    • G01D21/02Measuring two or more variables by means not covered by a single other subclass
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00Energy generation through renewable energy sources
    • Y02E10/40Solar thermal energy, e.g. solar towers

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Sustainable Development (AREA)
  • Sustainable Energy (AREA)
  • Thermal Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)

Abstract

A kind of groove type solar heat-collecting pipe vacuum device for measuring properties, including high frequency electric source, gas ionization bringing device and spectral detection system.The gas ionization bringing device is constituted by electrical isolation case and positioned at the copper plate electrode of electrical isolation case inner wall, gas ionization bringing device is placed on the outer glass tube of groove type solar thermal-collecting tube to be measured, described high frequency electric source one end is connect with the copper plate electrode, the metal parts connect and ground of the other end and groove type solar thermal-collecting tube to be measured.The spectral detection system includes spectrometer, optical fiber and computer;Described spectrometer one end is connect with computer, the other end is connect with optical fiber, the probe of optical fiber is mounted in the peep hole of the electrical isolation case of the gas ionization bringing device, the spectral signal in annular space for receiving groove type solar thermal-collecting tube to be measured, the vacuum performance of groove type solar thermal-collecting tube to be measured can be obtained by the output signal of spectral signal and high frequency electric source.

Description

Groove type solar heat-collecting pipe vacuum device for measuring properties
Technical field
The present invention relates to the device for measuring properties and its measurement method of a kind of groove type solar thermal-collecting tube.
Background technique
Trough type solar power generation is the solar energy thermal-power-generating technology that business application is most wide, cost is minimum in the world at present. Groove type solar thermal-collecting tube is the most key component in this kind of solar heat power generation system from light to thermal transition, vacuum performance Superiority and inferiority directly affects the photo-thermal power generation efficiency and performance driving economy in groove type solar power station.
Groove type solar thermal-collecting tube is made of outer glass tube with the metal inner pipe for being coated with coating for selective absorption, outer glass tube It is connected with metal inner pipe using glass-to-metal seal mode, the two of thermal-collecting tube are terminated with metal bellows, to alleviate outer glass tube With metal inner pipe as temperature it is different caused by differential expansion.For the thermal efficiency for improving thermal-collecting tube, outer glass tube and metal inner pipe it Between annular space need to vacuumize, for separating thermal convection or the heat transfer of annular space to reduce the heat waste of thermal-collecting tube, simultaneously For avoiding coating for selective absorption from aoxidizing at high temperature.But since the metal inner pipe of groove type solar thermal-collecting tube often operates in Close at a high temperature of 400 DEG C, its own metal material and glass material are all ceaselessly being deflated, meanwhile, groove type solar thermal-arrest Easily decomposes generation hydrogen, hydrogen are penetrated into annular space by metal inner pipe when heat-conducting oil working medium high temperature in pipe, These material outgassings and hydrogen infiltration will cause the decline of groove type solar heat-collecting pipe vacuum performance.
Trough type solar power generation station generally requires operation 25 years, therefore the heat-collecting pipe vacuum service life need at least maintain 25 years, However the groove type solar thermal-collecting tube in power station damages frequent occurrence at runtime, according to the operation of slot type power station is united in the world at present It counts, groove type solar thermal-collecting tube annual crash rate about 3.5%-5%, wherein having 29% to be related to vacuum failure, slot type is too Positive energy heat-collecting pipe vacuum performance decline will cause heat waste and dramatically increase, and gas with various ingredient, gas with various pressure are to the slot type sun Influence degree caused by the heat waste of energy thermal-collecting tube is different, and molecular weight gas is smaller, and after having certain hydrogen, heat waste will be true 4 times or more when empty intact, larger loss in efficiency and economic loss are caused to power station.
The vacuum performance of groove type solar thermal-collecting tube mostly uses and places nonevaporable getter on its outer glass tube inner wall at present Agent, the nonevaporable getter dosage form be used to judge vacuum degree at the color change of silver color mirror surface, but since gas is more in annular space Complexity, and getter is also difficult to absorb inert gas, only when entering its silver color mirror surface of air in groove type solar thermal-collecting tube Bleach and just show Loss of vacuum, therefore silver color mirror surface is difficult to effectively indicate the specific vacuum degree and gas componant of annular space, Larger impact is caused to the operation of trough type solar power generation station and maintenance.
It is proposed in 202533221 U of utility model patent CN using vacuum system and vacuum film capacitor rule and is measured The layer vacuum of all-glass vacuum thermal-collecting tube, but the patent needs to open the sealing of all-glass vacuum thermal-collecting tube, is destructive Vacuum performance measurement, it is difficult to be applied on the groove type solar thermal-collecting tube in groove type solar collecting system.
Therefore, how the groove type solar heat-collecting pipe vacuum performance of lossless evaluation in systems is current groove type solar Common technology problem present in thermal power station there is no effective measuring device and method.
Summary of the invention
The main object of the present invention is to propose a kind of convenience, lossless novel evacuated device for measuring properties and its measurement side Method can carry out the measurement of vacuum performance quick nondestructive to groove type solar thermal-collecting tube in outdoor power station system indoors.
In order to achieve the above object, proposed adoption following technical scheme of the present invention:
Groove type solar heat-collecting pipe vacuum device for measuring properties of the invention includes high frequency electric source, gas ionization bringing device And spectral detection system.High frequency electric source is the power supply of gas ionization bringing device, and gas ionization bringing device is located at slot type to be measured too On the outer glass tube of positive energy thermal-collecting tube, the fibre-optical probe of spectral detection system is mounted on gas ionization bringing device and acquires spectrum Signal.
The gas ionization bringing device is constituted by electrical isolation case and positioned at the copper plate electrode of electrical isolation case inner wall. Electrical isolation case clamping is on the outer glass tube of groove type solar thermal-collecting tube to be measured;The copper plate electrode length and width range Between 10mm-200mm, thickness is within the scope of 0.2mm-2mm, and with the spacing of the outer glass tube in 0-20mm range It is interior.
The current frequency range of the high frequency electric source is 10KHZ-100MHZ.One end of the high frequency electric source by cable with The copper plate electrode connection, the other end of high frequency electric source are connect by cable with the metal parts of groove type solar thermal-collecting tube to be measured And it is grounded.When the high frequency electric source works, in the metal inner pipe of the copper plate electrode and groove type solar thermal-collecting tube to be measured Between generate high-frequency electric field, if groove type solar thermal-collecting tube to be measured annular space in have certain gas when can be by high-frequency electric field Ionization, Discharge Phenomena will not if the annular space vacuum pressure of groove type solar thermal-collecting tube to be measured is lower than 1Pa or less Ionic discharge phenomenon occurs.
The electrical isolation case is semi-cylindrical shaped or not a half cylindrical shape, and thickness is at least in 10mm or more, for preventing The copper plate electrode stated externally discharges, and clamping is on the outer glass tube of the groove type solar thermal-collecting tube to be measured.
Peep hole is provided on electrical isolation case, peep hole is through-hole, diameter at least 5mm.Peep hole can be located at described The outside of copper plate electrode, apart from the copper plate electrode edge at least 5mm.Copper sheet electricity in the electrical isolation case can also be located at The top of pole.The copper plate electrode is also provided with the identical hole of size at peep hole, for observing putting in outer glass tube Electric light composes situation.
The spectral detection system includes fiber spectrometer, optical fiber and computer, is acquired and is analyzed by optical principle The spectral signal of the annular space of groove type solar thermal-collecting tube to be measured.The measurable spectral wavelength ranges of the spectrometer are 150nm-1200nm.One end of the spectrometer is connect by connection with the computer, the other end of spectrometer and The optical fiber connection;The probe of the optical fiber is mounted on the peep hole of the electrical isolation case of the gas ionization bringing device It is interior, and always perpendicular to the outer glass tube of the groove type solar thermal-collecting tube to be measured, for receiving groove type solar thermal-arrest to be measured Spectral signal in the annular space of pipe, the probe and the copper plate electrode spacing at least 5mm.
It is at least included the following steps using the measurement method of the groove type solar heat-collecting pipe vacuum device for measuring properties:
1) the gas ionization bringing device is placed on the outer glass tube of groove type solar thermal-collecting tube to be measured;
2) power, the shape in the annular space of groove type solar thermal-collecting tube to be measured are applied to copper plate electrode by high frequency electric source At high-frequency electric field;
3) power for adjusting high frequency electric source output, when electricity occurs for gas in the annular space of groove type solar thermal-collecting tube to be measured From when, record the output voltage and current values of high frequency electric source, and by spectral detection system spectra re-recorded data, analyze spectrum Characteristic wavelength and spectral light shine strength values, for identifying the gas componant and pressure in annular space;
4) it when the annular space gas of groove type solar thermal-collecting tube to be measured, which fails electric discharge, generates light-emitting plasma, adjusts The electric current of high frequency electric source records the output voltage numerical value of high frequency electric source, analyzes the gas pressure in annular space to a certain fixed value By force.
Beneficial effects of the present invention:
1, groove type solar heat-collecting pipe vacuum device for measuring properties of the present invention uses the annular in groove type solar thermal-collecting tube Space forms high-frequency electric field and causes its interior gas discharge, then gas discharge spectrum is measured using spectral measurement system, according to not With gas discharge spectral signature wavelength and spectrum intensity of illumination judge gas componant and vacuum pressure existing for annular space; When gas fails to light-emitting plasma in annular space, the electric current of fixed high frequency electric source, by high frequency electric source in annular The voltage value for the high-frequency electric field that space is formed analyzes annular space gas vacuum pressure.Therefore, the present invention passes through high-frequency gas Ionization and spectrum analysis combination, realize the non-destructive testing of groove type solar heat-collecting pipe vacuum performance, are a kind of new surveys Amount method.
2, the gas ionization bringing device of groove type solar heat-collecting pipe vacuum device for measuring properties of the present invention, high frequency electric source and Spectral measurement system is all smaller, securely and reliably, easy to carry, is very suitable to field work.
3, the vacuum performance measurement method of groove type solar thermal-collecting tube of the present invention, can be in a short time to groove type solar The vacuum performance of thermal-collecting tube judges, not only can analyze gas componant when gas ionization discharge occurring in annular space and Pressure, moreover it is possible to analyze vacuum it is preferable when specific vacuum pressure value when not occurring gas ionization discharge in annular space, have Measure stable, easy-operating advantage.
Detailed description of the invention
Fig. 1 is the schematic diagram of groove type solar heat-collecting pipe vacuum device for measuring properties of the present invention;
Fig. 2 is the structural schematic diagram of gas ionization bringing device of the present invention;
Fig. 3 is the groove type solar heat-collecting pipe vacuum device for measuring properties schematic diagram of another way of the present invention;
In figure: 1 high frequency electric source, 2 gas ionization bringing devices, 3 spectral detection systems, 4 electrical isolation cases, 5 copper plate electrodes, 6 groove type solar thermal-collecting tubes to be measured, 7 outer glass tubes, 8 metal parts, 9 spectrometers, 10 optical fiber, 11 computers, 12 probes, 13 see Examine hole, 14 annular spaces.
Specific embodiment
The present invention is further illustrated below in conjunction with the drawings and specific embodiments.
1. embodiment 1
As depicted in figs. 1 and 2, groove type solar heat-collecting pipe vacuum device for measuring properties of the invention includes power frequency model It encloses for 50KHZ high frequency electric source 1, gas ionization bringing device 2 and spectral detection system 3.High frequency electric source 1 is that gas ionization applies dress 2 power supplies are set, gas ionization bringing device 2 is located on the outer glass tube of groove type solar thermal-collecting tube to be measured, and spectral detection system 3 is pacified On acquisition gas ionization bringing device.
Gas ionization bringing device 2 is by the semicircle electrical isolation case 4 with a thickness of 50mm and is located at 4 inner wall of electrical isolation case Copper plate electrode 5 form.4 clamping of electrical isolation case is used to prevent on the outer glass tube of groove type solar thermal-collecting tube to be measured Copper plate electrode 5 externally discharges.5 length of copper plate electrode is 160mm, width 150mm, with a thickness of 0.4mm, gas current applies dress It sets 2 to be placed on the outer glass tube 7 of groove type solar thermal-collecting tube 6 to be measured, copper plate electrode 5 and 7 spacing of outer glass tube are 2mm.It is high One end of frequency power 1 is connect by cable with copper plate electrode 5, and the other end of high frequency electric source 1 passes through cable and the slot type sun to be measured 8 connect and ground of metal parts of energy thermal-collecting tube 6.Spectral detection system 3 includes spectrometer 9, optical fiber 10 and computer 11, spectrum It is 150nm-1100nm that instrument 9, which can measure spectral wavelength ranges, and one end of spectrometer 9 is connect by connection with computer 11, light The other end of spectrometer 9 is connect with optical fiber 10, and the center of electrical isolation case 4 is provided with the peep hole 13 of diameter 10mm, peep hole 13 are located at 5 top of copper plate electrode, and copper plate electrode 5 is also provided with the hole equal with 13 diameter of peep hole, optical fiber at peep hole 13 10 probe 12 is mounted in the peep hole 13 of electrical isolation case 4, and probe 12 is located at 5 top 10mm of copper plate electrode, prevents from visiting First 12 electrification, probe 12 is always perpendicular to outer glass tube 7, for receiving the annular space 14 of groove type solar thermal-collecting tube 6 to be measured Interior spectral signal.
Using apparatus of the present invention measurement slot type solar energy heat-collecting pipe vacuum performance, steps are as follows:
1) gas ionization bringing device 2 is placed on the outer glass tube 7 of groove type solar thermal-collecting tube 6 to be measured;
2) power is applied to copper plate electrode 5 by high frequency electric source 1, in the annular space of groove type solar thermal-collecting tube 6 to be measured High-frequency electric field is formed in 14;
3) power for adjusting high frequency electric source 1, when electricity occurs for gas in the annular space 14 of groove type solar thermal-collecting tube 6 to be measured From when, record the output voltage and current values of high frequency electric source 1, and by 3 spectra re-recorded data of spectral detection system, analyze light Spectrum signature wavelength and spectral light shine strength values, for identifying the gas componant and pressure in annular space 14;
4) when 14 gas of annular space of groove type solar thermal-collecting tube 6 to be measured, which fails electric discharge, generates light-emitting plasma, The electric current of high frequency electric source 1 is adjusted to a certain fixed value, the output voltage numerical value of high frequency electric source 1 is recorded, according to output voltage numerical value Analyze the gas pressure intensity in annular space 14.
2. embodiment 2
Fig. 3 is the schematic diagram of the groove type solar heat-collecting pipe vacuum device for measuring properties of another way of the present invention, including Current frequency range is high frequency electric source 1, gas ionization bringing device 2 and the spectral detection system 3 of 27.12MHZ.High frequency electric source 1 For the power supply of gas ionization bringing device 2, gas ionization bringing device 2 is located at the outer glass tube of groove type solar thermal-collecting tube to be measured On, spectral detection system 3 is mounted on acquisition gas ionization bringing device.
Gas ionization bringing device 2 is by the semicircle electrical isolation case 4 with a thickness of 30mm and is located at 4 inner wall of electrical isolation case Copper plate electrode 5 constitute, 4 clamping of electrical isolation case on the outer glass tube of groove type solar thermal-collecting tube to be measured, and be used to prevent Copper plate electrode 5 externally discharges.5 length of copper plate electrode is 150mm, width 60mm, with a thickness of 0.7mm, gas ionization applies dress It sets 2 to be placed on the outer glass tube 7 of groove type solar thermal-collecting tube 6 to be measured, copper plate electrode 5 and 7 spacing of outer glass tube are 8mm.It is high One end of frequency power 1 is connect by cable with copper plate electrode 5, and the other end of high frequency electric source 1 passes through cable and the slot type sun to be measured 8 connect and ground of metal parts of energy thermal-collecting tube 6.Spectral detection system 3 includes spectrometer 9, optical fiber 10 and computer 11, spectrum It is 200nm-1100nm that instrument 9, which can measure spectral wavelength ranges, and one end of spectrometer 9 is connect by connection with computer 11, light The other end of spectrometer 9 is connect with optical fiber 10, and the marginal position of electrical isolation case 4 has the peep hole 13 of diameter 8mm, copper plate electrode 5 with the spacing of peep hole 13 be 10mm, and the probe 12 of optical fiber 10 is mounted in the peep hole 13 of electrical isolation case 4, and probe 12 begins The spectral signal in annular space 14 eventually perpendicular to outer glass tube 7, for receiving groove type solar thermal-collecting tube 6 to be measured.
Using apparatus of the present invention measurement slot type solar energy heat-collecting pipe vacuum performance, steps are as follows:
1) gas ionization bringing device 2 is placed on the outer glass tube 7 of groove type solar thermal-collecting tube 6 to be measured;
2) certain power is applied to copper plate electrode 5 by high frequency electric source 1, in the annular of groove type solar thermal-collecting tube 6 to be measured High-frequency electric field is formed in space 14;
3) power for adjusting high frequency electric source 1, when electricity occurs for gas in the annular space 14 of groove type solar thermal-collecting tube 6 to be measured From when, record the output voltage and current values of high frequency electric source 1, and by 3 spectra re-recorded data of spectral detection system, analyze light Spectrum signature wavelength and spectral light shine strength values, for identifying the gas componant and pressure in annular space 14;
4) light-emitting plasma is generated when the gas in the annular space 14 of groove type solar thermal-collecting tube 6 to be measured fails electric discharge When, the electric current of high frequency electric source 1 is adjusted to a certain fixed value, is recorded the output voltage numerical value of high frequency electric source, is analyzed annular space 14 Interior gas pressure intensity.

Claims (10)

1. a kind of groove type solar heat-collecting pipe vacuum device for measuring properties, it is characterised in that: the measuring device includes high frequency Power supply (1), gas ionization bringing device (2) and spectral detection system (3);High frequency electric source (1) is the confession of gas ionization bringing device Electricity, gas ionization bringing device (2) are located on the outer glass tube (7) of groove type solar thermal-collecting tube (6) to be measured, spectral detection system (3) fibre-optical probe (12) is mounted on gas ionization bringing device (2), acquires the ring of groove type solar thermal-collecting tube (6) to be measured Spectral signal in shape space (14).
2. groove type solar heat-collecting pipe vacuum device for measuring properties according to claim 1, it is characterised in that: gas ionization Bringing device (2) is constituted by electrical isolation case (4) and positioned at the copper plate electrode (5) of electrical isolation case inner wall;Electrical isolation case (4) Clamping is on the outer glass tube (7) of groove type solar thermal-collecting tube (6) to be measured;The length and width model of the copper plate electrode (5) It encloses between 10mm-200mm, thickness is within the scope of 0.2mm-2mm, and with the spacing of the outer glass tube in 0-20mm range It is interior.
3. groove type solar heat-collecting pipe vacuum device for measuring properties according to claim 1, it is characterised in that: the high frequency The current frequency range of power supply (1) is 10KHZ-100MHZ;Described high frequency electric source (1) one end passes through cable and the copper plate electrode (5) it connects, the other end of the high frequency electric source (1) passes through the metal parts (8) of cable and groove type solar thermal-collecting tube (6) to be measured Connect and ground.
4. groove type solar heat-collecting pipe vacuum device for measuring properties according to claim 1, it is characterised in that: the light Composing detection system (3) includes spectrometer (9), optical fiber (10) and computer (11);Described spectrometer (9) one end passes through connection It is connect with computer (11), the other end of the spectrometer (9) is connect with optical fiber (10).
5. groove type solar heat-collecting pipe vacuum device for measuring properties according to claim 2, it is characterised in that: the electricity Insulation crust (4) is semi-cylindrical shaped or not a half cylindrical shape, and thickness is at least in 10mm or more.
6. groove type solar heat-collecting pipe vacuum device for measuring properties according to claim 1 or 2, it is characterised in that: described Electrical isolation case (4) on be provided with peep hole (13), peep hole (13) is located at the outside of the copper plate electrode (5), described in distance Copper plate electrode (5) edge at least 5mm.
7. groove type solar heat-collecting pipe vacuum device for measuring properties according to claims 1 and 2, it is characterised in that: described Electrical isolation case (4) on be provided with peep hole (13), peep hole (13) is located at the top of copper plate electrode (5), the copper sheet electricity Pole (5) is also provided with the identical hole of size at peep hole (13), for observing the discharge spectrum situation in outer glass tube.
8. groove type solar heat-collecting pipe vacuum device for measuring properties according to claim 1, it is characterised in that: the light Peep hole (13) of the probe (12) of fine (10) in the electrical isolation case (4) is interior, and always perpendicular to the outer glass tube (7)。
9. groove type solar heat-collecting pipe vacuum device for measuring properties according to claim 1, it is characterised in that: the light It is 150nm-1200nm that spectrometer (9), which can measure spectral wavelength ranges,.
10. groove type solar heat-collecting pipe vacuum device for measuring properties according to claim 1, it is characterised in that: described Steps are as follows for measuring device measurement method:
1) the gas ionization bringing device (2) is placed on to the outer glass tube (7) of groove type solar thermal-collecting tube (6) to be measured On;
2) power is applied to copper plate electrode (5) by high frequency electric source (1), it is empty in the annular of groove type solar thermal-collecting tube (6) to be measured Between high-frequency electric field is formed in (14);
3) high frequency electric source (1) power is adjusted, when electricity occurs for the interior gas of the annular space (14) of groove type solar thermal-collecting tube (6) to be measured From when, record the output voltage and current values of high frequency electric source (1), and by spectral detection system (3) spectra re-recorded data, point It analyses spectral signature wavelength and spectral light shines strength values, for identifying the gas componant and pressure in annular space;
4) when annular space (14) gas of groove type solar thermal-collecting tube (6) to be measured, which fails electric discharge, generates light-emitting plasma, The electric current of high frequency electric source (1) is then adjusted to a certain fixed value, the output voltage numerical value of high frequency electric source (1) is recorded, it is empty to analyze annular Between gas pressure intensity in (14).
CN201910753706.8A 2019-08-15 2019-08-15 Groove type solar heat-collecting pipe vacuum device for measuring properties Pending CN110398075A (en)

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CN115728002A (en) * 2022-09-07 2023-03-03 南京航空航天大学 Vacuum glass vacuum degree detection system based on inductive coupling plasma

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