CN1232175A - Photoelectric vacuum leakage detecting technique and apparatus - Google Patents
Photoelectric vacuum leakage detecting technique and apparatus Download PDFInfo
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- CN1232175A CN1232175A CN 98113898 CN98113898A CN1232175A CN 1232175 A CN1232175 A CN 1232175A CN 98113898 CN98113898 CN 98113898 CN 98113898 A CN98113898 A CN 98113898A CN 1232175 A CN1232175 A CN 1232175A
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Abstract
A photoelectric method for detecting vacuum leakage features that magnetic field is used to limit the movement of electrons in order to excite gas discharge in vacuum, high-sensitivity photoelectric device is used to detect the intensity and colour of gas discharge and electronic circuit is used for alarming. Its device is composed of casing, light exciting unit for amplifying the colour and intensity of gas discharge and light receiver for converting the colour and intensity to different electronic signals. Its advantages are high sensitivity and response speed, good working pressure and low cost.
Description
The present invention is a kind of new method---photoelectric method that vacuum equipment or device are hunted leak.Belong to the vacuum leak hunting technology.
To vacuum equipment or the device many kinds of methods of having hunted leak.The residing state of tested container roughly can divide two classes during from leak detection, promptly positive platen press and negative pressure method.The invention belongs to the negative pressure method.Commonly used and practical method has the high-frequency spark leak detecting in the negative pressure method; The discharge tube method; The vacuum meter method; The ionic pump method; Probe method in the halogen leak detector; Mass spectrograph method and helium mass spectrometer leak detector method.Above the whole bag of tricks all has its relative merits separately.
The objective of the invention is: a kind of vacuum leak hunting technology and device are provided, and it has highly sensitive, and the reaction time is short, and the operating pressure section is good, can be in higher pressure section work, and the inexpensive easy acquisition of search gas, advantage such as flexible and convenient to use.Be a kind of very practical photoelectric vacuum leakage detecting technique and device.
The present invention is that the method (being the magnetron pattern) of utilizing the motion of magnetic field bound electron excites the gas discharge in the vacuum, and detects the intensity and the color of its gas discharge with sensitive photoelectric device.Basic thought of the present invention is based on electric field is just giving magnetic field to change the electron motion direction, constraint and prolong trajectory of electron motion, thus improve the ionization probability of electron pair working gas and effectively utilized the energy of electronics.Thereby formed the glow discharge zone of the highdensity plasma that utilizes the sealing of the magnetic line of force and electrode.The color of all gases glow discharge is intrinsic, and different gas has different discharge colors.Thereby the different gas of residual gas is visited when leaking small opening in employing and the vacuum chamber, as has small opening, and this gas will enter and participate in ionisation of gas in the vacuum chamber, and color will change.Optical excitation part of the present invention will be amplified this color and intensity variations.The optical excitation part can be placed in the vacuum chamber any local easily flexibly, is preferably in the place that tracer gas arrives easily, between small opening and off-gas pump.Light of the present invention is accepted part will accept this color and intensity variations.Light is accepted part and can be placed on flexibly in the vacuum chamber, also can be placed on the outer view window of vacuum chamber, and its requirement is that window and the optical excitation luminous zone partly of photodetector is on same optical beam path.The window of photodetector and the distance of luminous zone are near more good more.Photodetector with having different electric signal output, utilizes general electronics circuit to produce alerting signal as detecting color and intensity variations again.Tracer gas can be helium, hydrogen, carbon dioxide, phenixin, butane, fluorine Lyons, ether, ethanol, acetone etc.
The invention has the advantages that sensitivity is higher, the reaction time is short, and the operating pressure section is good, can be in higher pressure section work, and the inexpensive easy acquisition of tracer gas, flexible and convenient to use, be a kind of very practical leak hunting method.
Concrete structure of the present invention and embodiment are as shown in drawings.Totally be divided into two parts: form the optical excitation part with battery lead plate in scheming (2), outer shroud magnet (3), barricade (4), magnetic pole piece (5) and middle magnet (7); With photodetector in scheming (9) and light-filter (8) is that light is accepted part.(5) are the magnetic pole pieces that middle magnet (7) is connected with the mutual magnetic of outer shroud magnet (3) among the figure.(2) are that a nonmagnetic metal battery lead plate places on magnet (7) and the outer shroud magnet (3) among the figure, execute a negative voltage or HF voltage on it.Outer shroud magnet (3) is a toroidal magnet, and middle magnet (7) places among the outer shroud magnet (3), and middle magnet (7) is inhaled with the contacted magnetic pole of battery lead plate (2) mutually with outer shroud magnet (3), and promptly magnetic pole is opposite.(4) be barricade, earthing potential.(6) be vacuum-chamber wall, earthing potential.(8) be light-filter, can use light monochromator or optical filter.As use optical filter, and when using different tracer gas, can be with different colors.Light-filter can omit need not.(9) be photodetector, but can use the device of photometries such as vacuum photo tube, photomultiplier, semiconductor photocell, photoelectric cell that its window is facing to luminous zone (1).(1) be that apparatus of the present invention gas when work is ionized the luminous zone that is produced.
Description of drawings: Fig. 1 photoelectricity vacuum leak detector synoptic diagram;
Wherein magnet, (8) light-filter, (9) photodetector in (1) luminous zone, (2) battery lead plate, (3) outer shroud magnet, (4) barricade, (5) magnetic pole piece, (6) vacuum-chamber wall, (7).
Novel point of the present invention is: (one) adopts electric field and magnetic field orthotropic to come with the method for the motion of bound electron Excite the gas discharge in the vacuum, and amplified the color of common gases glow discharge and the variation of light intensity. (2) Adopt sensitive photoelectric device to detect intensity and the color of its gas discharge. (3) the light receiving portion can be flexible Be placed in the vacuum chamber, also can be placed on the outer observation window of vacuum chamber, its requirement is the window of photodetector Mouthful with optical excitation luminous zone partly on same optical beam path.
Claims (4)
1, photoelectric vacuum leakage detecting technique, it is characterized in that this method is to utilize the method for magnetic field bound electron motion, excite the gas discharge in the vacuum, and detect the intensity and the color of its gas discharge with sensitive photoelectric device, the color and the intensity of gas discharge is partly amplified in optical excitation, light is accepted the variation output different electric signal of part with this color and intensity, utilizes electronics circuit to produce alerting signal.
2, photoelectric vacuum leakage detecting device is characterized in that totally being divided into two parts: form the optical excitation part with battery lead plate in scheming (2), outer shroud magnet (3), barricade (4), magnetic pole piece (5) and middle magnet (7); With photodetector in scheming (9) and light-filter (8) is that light is accepted part; (5) are the magnetic pole pieces that middle magnet (7) is connected with the mutual magnetic of outer shroud magnet (3) among the figure; (2) are that a nonmagnetic metal battery lead plate places on magnet (7) and the outer shroud magnet (3) among the figure, execute a negative voltage or HF voltage on it; Outer shroud magnet (3) is a toroidal magnet, and middle magnet (7) places among the outer shroud magnet (3), and middle magnet (7) is inhaled with the contacted magnetic pole of battery lead plate (2) mutually with outer shroud magnet (3), and promptly magnetic pole is opposite; (4) be barricade, earthing potential; (6) be vacuum-chamber wall, earthing potential; Optical excitation partly places arbitrary position in the vacuum chamber, and light is accepted part and can be placed in the vacuum chamber, also can place outside the vacuum chamber, but the luminous zone of the window of photodetector and optical excitation part is on same light path.
3,, it is characterized in that light-filter can be light monochromator or optical filter according to the described photoelectricity vacuum leak detector of claim 2.
4,, it is characterized in that photodetector can use vacuum photo tube, photomultiplier, semiconductor photocell, photoelectric cell according to the described photoelectricity vacuum leak detector of claim 2.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 98113898 CN1232175A (en) | 1998-04-10 | 1998-04-10 | Photoelectric vacuum leakage detecting technique and apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 98113898 CN1232175A (en) | 1998-04-10 | 1998-04-10 | Photoelectric vacuum leakage detecting technique and apparatus |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN1232175A true CN1232175A (en) | 1999-10-20 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 98113898 Pending CN1232175A (en) | 1998-04-10 | 1998-04-10 | Photoelectric vacuum leakage detecting technique and apparatus |
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| CN (1) | CN1232175A (en) |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101458150B (en) * | 2007-12-13 | 2010-09-29 | 中芯国际集成电路制造(上海)有限公司 | Physical gas-phase deposition chamber gastightness detecting method |
| CN103792051A (en) * | 2014-02-18 | 2014-05-14 | 珠海格力电器股份有限公司 | Halogen pipe gas tightness testing method and device |
| CN104541142A (en) * | 2012-07-23 | 2015-04-22 | 阿迪克森真空产品公司 | Detection method and facility for checking sealed products for leaks |
| CN102667467B (en) * | 2009-12-22 | 2016-01-20 | Ima生命北美股份有限公司 | Use and monitoring freeze drying is come to the gasmetry of vacuum pump discharges |
| CN109211491A (en) * | 2018-10-11 | 2019-01-15 | 湖南华天光电惯导技术有限公司 | A method of examining laser gyro air-tightness |
| CN111279173A (en) * | 2017-11-02 | 2020-06-12 | 三菱电机株式会社 | Method for testing semiconductor device and method for manufacturing semiconductor device |
| CN112827845A (en) * | 2020-12-28 | 2021-05-25 | 肇庆大华农生物药品有限公司 | Vacuum detection method for transparent packaging bottle |
-
1998
- 1998-04-10 CN CN 98113898 patent/CN1232175A/en active Pending
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101458150B (en) * | 2007-12-13 | 2010-09-29 | 中芯国际集成电路制造(上海)有限公司 | Physical gas-phase deposition chamber gastightness detecting method |
| CN102667467B (en) * | 2009-12-22 | 2016-01-20 | Ima生命北美股份有限公司 | Use and monitoring freeze drying is come to the gasmetry of vacuum pump discharges |
| CN104541142A (en) * | 2012-07-23 | 2015-04-22 | 阿迪克森真空产品公司 | Detection method and facility for checking sealed products for leaks |
| CN103792051A (en) * | 2014-02-18 | 2014-05-14 | 珠海格力电器股份有限公司 | Halogen pipe gas tightness testing method and device |
| CN111279173A (en) * | 2017-11-02 | 2020-06-12 | 三菱电机株式会社 | Method for testing semiconductor device and method for manufacturing semiconductor device |
| CN111279173B (en) * | 2017-11-02 | 2022-06-24 | 三菱电机株式会社 | Method for testing semiconductor device and method for manufacturing semiconductor device |
| CN109211491A (en) * | 2018-10-11 | 2019-01-15 | 湖南华天光电惯导技术有限公司 | A method of examining laser gyro air-tightness |
| CN112827845A (en) * | 2020-12-28 | 2021-05-25 | 肇庆大华农生物药品有限公司 | Vacuum detection method for transparent packaging bottle |
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