CN111254384A - 一种Hf-AlHfSiN-AlHfNdN复合涂层刀具 - Google Patents

一种Hf-AlHfSiN-AlHfNdN复合涂层刀具 Download PDF

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CN111254384A
CN111254384A CN201910965717.2A CN201910965717A CN111254384A CN 111254384 A CN111254384 A CN 111254384A CN 201910965717 A CN201910965717 A CN 201910965717A CN 111254384 A CN111254384 A CN 111254384A
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coating
cutter
alhfsin
alhfndn
transition layer
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吴泽
邢佑强
刘磊
鲍航
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Southeast University
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Southeast University
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    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/02—Pretreatment of the material to be coated
    • C23C14/024—Deposition of sublayers, e.g. to promote adhesion of the coating
    • C23C14/025—Metallic sublayers
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0641—Nitrides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/14—Metallic material, boron or silicon
    • C23C14/18—Metallic material, boron or silicon on other inorganic substrates
    • C23C14/185—Metallic material, boron or silicon on other inorganic substrates by cathodic sputtering
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
    • C23C14/325—Electric arc evaporation

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  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

本发明属于刀具涂层材料技术领域，涉及一种Hf‑AlHfSiN‑AlHfNdN复合涂层刀具。该刀具基体材料可以是高速钢、硬质合金、陶瓷等材料，刀具表面涂层由内至外依次为Hf过渡层、AlHfSiN硬涂层、AlHfNdN耐热层。该涂层过渡层与刀具基体结合牢固，涂层硬度高，最外层涂层热稳定性优异，具有良好的耐磨、耐热特点。该刀具可广泛应用于难加工金属材料的切削加工，可有效改善刀具使用寿命和加工精度，提高切削加工效率。

Description

一种Hf-AlHfSiN-AlHfNdN复合涂层刀具
技术领域
本发明涉及一种Hf-AlHfSiN-AlHfNdN复合涂层刀具，属于刀具涂层材料技术领域。
背景技术
机械制造业为整个国民经济提供技术装备，是国民经济和社会发展以及国防建设的物质基础，其发展水平是国家综合实力的重要标志。切削加工技术是机械制造业中应用最广泛的基础技术，而切削刀具技术的进步则是切削加工技术快速发展的关键。近年来，为满足干切削、高速切削等对切削刀具提出的新的要求，金属切削工具行业在不断尝试开发新型耐磨刀具材料、刀具涂层以及开展刀具几何结构的优化设计，这些方法均在一定程度上解决了限制切削技术发展的瓶颈问题。在这些方法中，其中以涂层的适用性最为广泛，但涂层与基体材料之间的结合问题成为了制约其性能发挥的一大因素，尤其是涂层与刀具基体结合部分的过渡层的结合性能至关重要；另外，切削热引起的切削高温容易导致涂层的失效，尤其是涂层不同成分的热膨胀系数的差异会导致硬质涂层破损。为此，开发新型的高结合强度、耐热的硬质涂层刀具对促进涂层刀具应用范围的扩大以及切削加工技术的进步将具有重要意义。
中国专利“申请号：201710532821.3”报道了AlNbCN多元梯度复合涂层刀具及其制备方法，该发明通过采用中频磁控溅射和多弧镀的复合方法在刀具基体表面依次沉积Ti过渡层、AlNbC过渡层、含氮量梯度渐变的AlNbCN涂层，该刀具具备较高的硬度和强度。中国专利“申请号：201710532803.5”报道了SiNbC/SiNbCN叠层复合涂层刀具及其制备工艺，该发明通过非平衡磁控溅射和电弧离子镀的方法在刀具基体表面交替沉积所述两种复合涂层，该刀具具备良好的物理机械性能，可应用于多种金属材料的精加工和半精加工。
发明内容
本发明的目的在于克服现有技术的不足，提供一种Hf-AlHfSiN-AlHfNdN复合涂层刀具，进一步提高涂层膜基结合强度和涂层耐热性能。
本发明的一种Hf-AlHfSiN-AlHfNdN复合涂层刀具，刀具基体材料可以是高速钢、硬质合金、陶瓷等材料，刀具表面涂层由内至外依次为Hf过渡层、AlHfSiN硬涂层、AlHfNdN耐热层，Hf过渡层、AlHfSiN硬涂层、AlHfNdN耐热层的厚度依次为0.5～0.8μm、0.8～1.5μm、0.6～1.0μm。
本发明提出了一种新型的Hf-AlHfSiN-AlHfNdN复合涂层刀具。相比现有的常规氮化钛基涂层，本发明的新型复合涂层具有更高的硬度，且金属铪作为过渡层相比传统的钛过渡层更为致密，膜基界面结合强度提高；该发明的涂层的最外层中的金属钕元素具有高温稳定性，能显著提升涂层的耐高温冲击性能。本发明的一种Hf-AlHfSiN-AlHfNdN复合涂层刀具可广泛应用于难加工金属材料的切削加工，可有效改善刀具使用寿命和加工精度，提高切削加工效率。
具体实施方式
下面通过具体实施例对本发明作进一步详述，以下实施例只是描述性的，不是限定性的，不能以此限定本发明的保护范围。
一种Hf-AlHfSiN-AlHfNdN复合涂层刀具，刀具基体材料是氧化铝陶瓷材料，刀具表面涂层由内至外依次为Hf过渡层、AlHfSiN硬涂层、AlHfNdN耐热层，Hf过渡层、AlHfSiN硬涂层、AlHfNdN耐热层的厚度依次为0.6μm、1.2μm、1.0μm。该涂层的制备采用磁控溅射结合多弧离子镀的PVD方法逐层制备。

Claims (2)

1.一种Hf-AlHfSiN-AlHfNdN复合涂层刀具，其特征在于：刀具基体材料可以是高速钢、硬质合金、陶瓷等材料，刀具表面涂层由内至外依次为Hf过渡层、AlHfSiN硬涂层、AlHfNdN耐热层。
2.根据权利要求1所述的一种Hf-AlHfSiN-AlHfNdN复合涂层刀具，特别地，Hf过渡层、AlHfSiN硬涂层、AlHfNdN耐热层的厚度依次为0.5～0.8μm、0.8～1.5μm、0.6～1.0μm。
CN201910965717.2A 2019-10-10 2019-10-10 一种Hf-AlHfSiN-AlHfNdN复合涂层刀具 Pending CN111254384A (zh)

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Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109518184A (zh) * 2018-11-23 2019-03-26 东南大学 一种Hf-BHfN-BHfNC复合涂层刀具及其制备方法

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109518184A (zh) * 2018-11-23 2019-03-26 东南大学 一种Hf-BHfN-BHfNC复合涂层刀具及其制备方法

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