CN111251483A - Silicon rod cutting method - Google Patents

Silicon rod cutting method Download PDF

Info

Publication number
CN111251483A
CN111251483A CN202010170385.1A CN202010170385A CN111251483A CN 111251483 A CN111251483 A CN 111251483A CN 202010170385 A CN202010170385 A CN 202010170385A CN 111251483 A CN111251483 A CN 111251483A
Authority
CN
China
Prior art keywords
rod
silicon
slicing
silicon wafer
crystal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202010170385.1A
Other languages
Chinese (zh)
Inventor
符黎明
孟祥熙
曹育红
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Changzhou Shichuang Energy Co Ltd
Changzhou Shichuang Energy Technology Co Ltd
Original Assignee
Changzhou Shichuang Energy Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Changzhou Shichuang Energy Co Ltd filed Critical Changzhou Shichuang Energy Co Ltd
Priority to CN202010170385.1A priority Critical patent/CN111251483A/en
Publication of CN111251483A publication Critical patent/CN111251483A/en
Priority to PCT/CN2021/086423 priority patent/WO2021180247A1/en
Pending legal-status Critical Current

Links

Images

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B28WORKING CEMENT, CLAY, OR STONE
    • B28DWORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor

Abstract

The invention discloses a silicon rod cutting method, which is used for cutting a silicon rod into silicon wafers and comprises a slicing step; the silicon rod is a single crystal silicon rod with a 100 crystal orientation; an included angle of 90 degrees is formed between the slicing direction and the axis of the silicon rod, and the silicon wafer obtained by slicing is a monocrystalline silicon wafer with a non-100 crystal orientation. The method can cut the first monocrystalline silicon piece with the non-100 crystal orientation from the monocrystalline silicon rod, mainly adjusts the slicing direction of the quasi-square rod or the square rod, has small change on the existing monocrystalline silicon rod cutting method, and is easy to popularize. The method can also cut the second monocrystalline silicon piece with the non-100 crystal orientation from the edge skin material, can improve the utilization rate of the monocrystalline silicon rod, and can improve the output of the monocrystalline silicon piece with the non-100 crystal orientation.

Description

Silicon rod cutting method
Technical Field
The invention relates to the field of photovoltaics, in particular to a silicon rod cutting method.
Background
The monocrystalline silicon slice is formed by cutting a monocrystalline silicon rod, generally, a 100-crystal-orientation monocrystalline silicon rod is prepared firstly, the head end and the tail end of the silicon rod are cut off firstly during cutting, and then the rest sections of the silicon rod are cut to obtain a quasi-square rod or a square rod with the length direction parallel to the axis of the silicon rod; and then, the square rod or the square rod is aligned for slicing, the slicing direction is vertical to the length direction of the quasi square rod or the square rod, and the silicon wafer obtained by slicing is a 100-crystal-direction monocrystalline silicon wafer.
As can be seen from the above, the conventional method for slicing a single crystal silicon rod can only produce a single crystal silicon wafer having a crystal orientation of 100. With the development of solar cell technology, monocrystalline silicon wafers with a non-100 crystal orientation are also in demand, so that the existing cutting method of the monocrystalline silicon rod needs to be improved to prepare the monocrystalline silicon wafers with the non-100 crystal orientation.
Disclosure of Invention
The invention aims to provide a silicon rod cutting method, which can prepare a monocrystalline silicon piece with an off-100 crystal orientation.
In order to achieve the above object, the present invention provides a method for cutting a silicon rod, which cuts the silicon rod into silicon wafers, comprising a slicing step; the silicon rod is a single crystal silicon rod with a 100 crystal orientation; an included angle of 90 degrees is formed between the slicing direction and the axis of the silicon rod, and the silicon wafer obtained by slicing is a monocrystalline silicon wafer with a non-100 crystal orientation.
Preferably, the head end and the tail end of the silicon rod are cut off, and then the rest section of the silicon rod is cut to obtain a quasi-square rod or a square rod with the length direction parallel to the axis of the silicon rod; and then, the square rod or the square rod is aligned for slicing, an included angle of 90 degrees is formed between the slicing direction and the length direction of the square rod or the square rod, and the silicon wafer obtained by slicing is a first monocrystalline silicon wafer with a non-100 crystal orientation.
Preferably, the leftover segments of the silicon rods are cut to generate the edge skin materials; the edge leather material comprises: the cutting device comprises a rectangular cutting surface formed by cutting, an arc surface opposite to the cutting surface and a pair of end surfaces arranged at two ends of the cutting surface in the length direction; taking the cut surface as a datum plane; the joint part of the cutting surface and the cambered surface is taken as a sharp corner part; the part of the cambered surface, which is positioned between the sharp corners on the two sides of the edge leather material, is taken as an arc-shaped bulge;
cutting off sharp corners on two sides of the edge leather material, and cutting off arc-shaped convex parts of the edge leather material to obtain cuboid-shaped silicon blocks with the length direction consistent with the length direction of the reference surface;
and slicing the silicon block, wherein the slicing direction and the reference plane form an included angle of not 90 degrees, and the sliced silicon wafer is a second monocrystalline silicon wafer with a non-100 crystal orientation.
Preferably, when the first monocrystalline silicon wafer is sliced, an included angle of 5-85 degrees exists between the slicing direction and the length direction of the quasi-square rod or the square rod.
Preferably, when the second monocrystalline silicon wafer is sliced, an included angle of 5-85 degrees exists between the slicing direction and the reference plane.
Preferably, the first monocrystalline silicon wafer is a monocrystalline silicon wafer with 110 crystal orientation or 111 crystal orientation.
Preferably, the second monocrystalline silicon wafer is a monocrystalline silicon wafer with 110 crystal orientation or 111 crystal orientation.
The invention has the advantages and beneficial effects that: provided is a method for slicing a silicon rod, which can produce a silicon single crystal wafer having an orientation other than 100.
The method can cut the first monocrystalline silicon piece with the non-100 crystal orientation from the monocrystalline silicon rod, mainly adjusts the slicing direction of the quasi-square rod or the square rod, has small change on the existing monocrystalline silicon rod cutting method, and is easy to popularize.
The method can also cut the second monocrystalline silicon piece with the non-100 crystal orientation from the edge skin material, can improve the utilization rate of the monocrystalline silicon rod, and can improve the output of the monocrystalline silicon piece with the non-100 crystal orientation.
Drawings
FIG. 1 is a schematic view of a trim material.
Detailed Description
The following further describes embodiments of the present invention with reference to examples. The following examples are only for illustrating the technical solutions of the present invention more clearly, and the protection scope of the present invention is not limited thereby.
The invention provides a silicon rod cutting method, which is used for cutting a silicon rod into silicon wafers and comprises a slicing step; the silicon rod is a single crystal silicon rod with a 100 crystal orientation; an included angle of 90 degrees is formed between the slicing direction and the axis of the silicon rod, and the silicon wafer obtained by slicing is a monocrystalline silicon wafer with a non-100 crystal orientation.
The specific embodiment of the invention is as follows:
selecting a 100-crystal-orientation single crystal silicon rod, cutting off the head end and the tail end of the silicon rod during cutting, and then cutting the rest section of the silicon rod to obtain a quasi-square rod or a square rod with the length direction parallel to the axis of the silicon rod; and then, aligning the square rod or the square rod for slicing, wherein an included angle of not 90 degrees (preferably 5-85 degrees) exists between the slicing direction and the length direction of the square rod or the square rod, and the sliced silicon wafer is a first monocrystalline silicon wafer with a non-100 crystal orientation (the first monocrystalline silicon wafer can be a monocrystalline silicon wafer with a 110 crystal orientation, a monocrystalline silicon wafer with a 111 crystal orientation or other monocrystalline silicon wafers with the non-100 crystal orientations).
As shown in fig. 1, the trimming of the remaining segment of the silicon rod generates a boundary skin material 1; the edge cover material 1 comprises: a rectangular cutting surface 11 formed by cutting, an arc surface 12 opposite to the cutting surface 11, and a pair of end surfaces respectively arranged at two ends of the cutting surface 11 in the length direction; the pair of end faces is perpendicular to the cut surface 11; taking the cut surface 11 as a reference surface; the combination part of the cutting surface 11 and the cambered surface 12 is taken as a sharp corner part 2; the part of the cambered surface 12, which is positioned between the sharp corners 2 at the two sides of the edge leather 1, is taken as an arc-shaped convex part 3;
cutting off sharp corners 2 at two sides of the edge leather 1, and cutting off arc-shaped protrusions 3 of the edge leather 1 to obtain rectangular silicon blocks 4 with the length direction consistent with that of the reference surface; the silicon block 4 is sliced, the slicing direction and the reference plane 11 have an included angle of not 90 degrees but not 0 degree (preferably 5-85 degrees), and the sliced silicon wafer is a second monocrystalline silicon wafer with a non-100 crystal orientation (the second monocrystalline silicon wafer can be a monocrystalline silicon wafer with a 110 crystal orientation, can also be a monocrystalline silicon wafer with a 111 crystal orientation, and can also be a monocrystalline silicon wafer with other non-100 crystal orientations).
The foregoing is only a preferred embodiment of the present invention, and it should be noted that, for those skilled in the art, various modifications and decorations can be made without departing from the technical principle of the present invention, and these modifications and decorations should also be regarded as the protection scope of the present invention.

Claims (7)

1. A method for cutting a silicon rod into silicon wafers, comprising a slicing step; the silicon rod is a single crystal silicon rod with a 100 crystal orientation; the method is characterized in that the slicing direction and the axis of the silicon rod form an included angle of not 90 degrees, and the silicon wafer obtained by slicing is a monocrystalline silicon wafer with a non-100 crystal orientation.
2. The method as set forth in claim 1, wherein both ends of the silicon rod are cut off, and the remaining silicon rod is cut to obtain a quasi-square rod or a square rod having a length direction parallel to the axis of the silicon rod; and then, the square rod or the square rod is aligned for slicing, an included angle of 90 degrees is formed between the slicing direction and the length direction of the square rod or the square rod, and the silicon wafer obtained by slicing is a first monocrystalline silicon wafer with a non-100 crystal orientation.
3. The method of claim 2, wherein the trimming of the remaining segment of the silicon rod produces a coating; the edge leather material comprises: the cutting device comprises a rectangular cutting surface formed by cutting, an arc surface opposite to the cutting surface and a pair of end surfaces arranged at two ends of the cutting surface in the length direction; taking the cut surface as a datum plane; the joint part of the cutting surface and the cambered surface is taken as a sharp corner part; the part of the cambered surface, which is positioned between the sharp corners on the two sides of the edge leather material, is taken as an arc-shaped bulge;
cutting off sharp corners on two sides of the edge leather material, and cutting off arc-shaped convex parts of the edge leather material to obtain cuboid-shaped silicon blocks with the length direction consistent with the length direction of the reference surface;
and slicing the silicon block, wherein the slicing direction and the reference plane form an included angle of not 90 degrees, and the sliced silicon wafer is a second monocrystalline silicon wafer with a non-100 crystal orientation.
4. The method of claim 2, wherein an angle of 5 to 85 degrees is formed between a slicing direction and a length direction of the quasi-square rod or the square rod when the first single crystal silicon wafer is sliced.
5. The method according to claim 3, wherein an angle between a slicing direction and a reference plane is 5 to 85 degrees when the second single crystal silicon wafer is sliced.
6. The method according to claim 2, wherein the first single-crystal silicon wafer is a 110-crystal-oriented or 111-crystal-oriented single-crystal silicon wafer.
7. The method according to claim 3, wherein the second single-crystal silicon wafer is a 110-crystal-oriented or 111-crystal-oriented single-crystal silicon wafer.
CN202010170385.1A 2020-03-12 2020-03-12 Silicon rod cutting method Pending CN111251483A (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
CN202010170385.1A CN111251483A (en) 2020-03-12 2020-03-12 Silicon rod cutting method
PCT/CN2021/086423 WO2021180247A1 (en) 2020-03-12 2021-04-12 Method for cutting silicon rod

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202010170385.1A CN111251483A (en) 2020-03-12 2020-03-12 Silicon rod cutting method

Publications (1)

Publication Number Publication Date
CN111251483A true CN111251483A (en) 2020-06-09

Family

ID=70943238

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202010170385.1A Pending CN111251483A (en) 2020-03-12 2020-03-12 Silicon rod cutting method

Country Status (2)

Country Link
CN (1) CN111251483A (en)
WO (1) WO2021180247A1 (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2021082514A1 (en) * 2019-11-01 2021-05-06 常州时创能源股份有限公司 Method for cutting crystalline silicon edge scrap material
WO2021180247A1 (en) * 2020-03-12 2021-09-16 常州时创能源股份有限公司 Method for cutting silicon rod
CN113815137A (en) * 2021-07-30 2021-12-21 隆基绿能科技股份有限公司 Silicon rod processing method
CN116277561A (en) * 2023-05-18 2023-06-23 苏州晨晖智能设备有限公司 Method for squaring silicon rod

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN201824485U (en) * 2010-09-29 2011-05-11 常州天合光能有限公司 Slicing device for battery plates made from multi-crystal silicon ingots
CN202862430U (en) * 2012-07-30 2013-04-10 上海申和热磁电子有限公司 Silicon wafer crystal orientation chamfering jig
CN103552166A (en) * 2013-09-30 2014-02-05 洛阳鸿泰半导体有限公司 Device for adjusting crystal-orientation deviation degree of silicon rod
CN103952754A (en) * 2014-04-21 2014-07-30 江西赛维Ldk太阳能高科技有限公司 Monocrystal-like silicon ingot preparation method and methods for preparing monocrystal-like silicon wafers by cutting monocrystal-like silicon ingot
CN104985709A (en) * 2015-06-16 2015-10-21 杭州海纳半导体有限公司 Method for adjusting crystal orientation of single-crystal rod and measuring method
CN108068221A (en) * 2017-11-01 2018-05-25 宇泰(江西)新能源有限公司 A kind of processing method with column crystal silicon rod processing rectangular photovoltaic cells silicon chip
CN110712308A (en) * 2019-10-23 2020-01-21 常州时创能源科技有限公司 Cutting method of edge leather

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0787186B2 (en) * 1987-06-01 1995-09-20 住友電気工業株式会社 Method for manufacturing BSO wafer
US6159285A (en) * 1998-05-07 2000-12-12 Virginia Semiconductor, Inc. Converting <100> and <111> ingots to <110> ingots
US8623137B1 (en) * 2008-05-07 2014-01-07 Silicon Genesis Corporation Method and device for slicing a shaped silicon ingot using layer transfer
CN111251483A (en) * 2020-03-12 2020-06-09 常州时创能源股份有限公司 Silicon rod cutting method

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN201824485U (en) * 2010-09-29 2011-05-11 常州天合光能有限公司 Slicing device for battery plates made from multi-crystal silicon ingots
CN202862430U (en) * 2012-07-30 2013-04-10 上海申和热磁电子有限公司 Silicon wafer crystal orientation chamfering jig
CN103552166A (en) * 2013-09-30 2014-02-05 洛阳鸿泰半导体有限公司 Device for adjusting crystal-orientation deviation degree of silicon rod
CN103952754A (en) * 2014-04-21 2014-07-30 江西赛维Ldk太阳能高科技有限公司 Monocrystal-like silicon ingot preparation method and methods for preparing monocrystal-like silicon wafers by cutting monocrystal-like silicon ingot
CN104985709A (en) * 2015-06-16 2015-10-21 杭州海纳半导体有限公司 Method for adjusting crystal orientation of single-crystal rod and measuring method
CN108068221A (en) * 2017-11-01 2018-05-25 宇泰(江西)新能源有限公司 A kind of processing method with column crystal silicon rod processing rectangular photovoltaic cells silicon chip
CN110712308A (en) * 2019-10-23 2020-01-21 常州时创能源科技有限公司 Cutting method of edge leather

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2021082514A1 (en) * 2019-11-01 2021-05-06 常州时创能源股份有限公司 Method for cutting crystalline silicon edge scrap material
WO2021180247A1 (en) * 2020-03-12 2021-09-16 常州时创能源股份有限公司 Method for cutting silicon rod
CN113815137A (en) * 2021-07-30 2021-12-21 隆基绿能科技股份有限公司 Silicon rod processing method
CN116277561A (en) * 2023-05-18 2023-06-23 苏州晨晖智能设备有限公司 Method for squaring silicon rod
CN116277561B (en) * 2023-05-18 2023-07-21 苏州晨晖智能设备有限公司 Method for squaring silicon rod

Also Published As

Publication number Publication date
WO2021180247A1 (en) 2021-09-16

Similar Documents

Publication Publication Date Title
CN111251483A (en) Silicon rod cutting method
CN109747055B (en) Preparation method and application of monocrystalline silicon wafer
CN111361027B (en) Silicon rod cutting process
CN110712308A (en) Cutting method of edge leather
CN110789010A (en) Cutting process of crystal silicon edge leather
CN102873770B (en) Method for processing orientation-deflected seed crystals
CN110640917A (en) Multi-wire cutting device for silicon rod edge leather
CN103000711A (en) Improved crystal silicon, cell and solar power generating device
CN110625834A (en) Method for cutting crystalline silicon edge leather
CN105522658A (en) Machining method for A-direction sapphire diaphragm
CN111267248A (en) Preparation method of non-100 crystal orientation monocrystalline silicon wafer
CN111029440B (en) Single crystal battery and manufacturing method of single crystal silicon wafer
CN103956337B (en) The cutting method of a kind of semiconductor wafer
CN110828612A (en) Preparation method of four-chamfer small cell
CN110854236A (en) Preparation method of four-chamfer small battery
US9111745B2 (en) Methods for producing rectangular seeds for ingot growth
CN202423307U (en) Improved casting crystal silicon wafer
CN206519588U (en) A kind of high finishing tool of chamfer machining
CN114619578A (en) Silicon rod processing method, silicon wafer, battery and battery assembly
CN102962900B (en) Cutting method for free-space photoisolator chip body
CN205600998U (en) A is to sapphire window sheet&#39;s processingequipment
CN213617122U (en) Cutter for linear cut of silica gel
JPS6321339B2 (en)
CN112861278B (en) Method for calculating length of initial cleavage crack of semiconductor material
CN114179235A (en) Preparation process of &lt;110&gt; monotectic silicon wafer

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
RJ01 Rejection of invention patent application after publication
RJ01 Rejection of invention patent application after publication

Application publication date: 20200609