CN111240048B - Optical modulator - Google Patents

Optical modulator Download PDF

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CN111240048B
CN111240048B CN202010115216.8A CN202010115216A CN111240048B CN 111240048 B CN111240048 B CN 111240048B CN 202010115216 A CN202010115216 A CN 202010115216A CN 111240048 B CN111240048 B CN 111240048B
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dimensional material
layer
conductive bottom
lubricating layer
modulation
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CN111240048A (en
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刘江涛
蔡勋明
周朝彪
范梦慧
徐艳丽
吴媛媛
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Guizhou Minzu University
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    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/0102Constructional details, not otherwise provided for in this subclass

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  • Optics & Photonics (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)

Abstract

The invention discloses an optical modulator which comprises a conductive bottom layer, wherein insulating layers are fixedly arranged at two ends of the upper surface of the conductive bottom layer, a lubricating layer is fixedly arranged on the upper surface of each insulating layer, the lower surfaces of two ends of a two-dimensional material are arranged on the upper surface of each lubricating layer, a first electrode is arranged on the conductive bottom layer, a second electrode is arranged on each lubricating layer, and the two-dimensional material slides on the lubricating layers. The invention has the beneficial effects that: thereby adjust the electrostatic force between two-dimensional material and the base through changing the voltage between two-dimensional material and the electrically conductive bottom for two-dimensional material slides on the lubricant film, thereby adjust the distance between two-dimensional material and the electrically conductive base and realize light regulation and control, and this kind of electro-optical modulator can realize the modulation when ultraviolet reaches infrared spectrum within range, and modulation speed is fast, and modulation voltage is little, the low power dissipation.

Description

一种光调制器a light modulator

技术领域technical field

本发明涉及电光技术领域,具体是一种光调制器。The invention relates to the field of electro-optic technology, in particular to an optical modulator.

背景技术Background technique

光调制器在光通信中具有广泛的应用,也可以用于雷达和激光调制中。光调制有机械调制、声光调制、磁光调制器、电光调制、电吸收调制。其中电光调制利用电光效应如线性电光效应(泡克耳斯效应)等来调制,其速度极高,但通常只能工作在特定波长附近,调制波长范围窄。二维材料如石墨烯等也被用来制作电光调制器。其主要通过调制二维材料的费米能级来调节能带间光吸收。调节频率也很高。但这种调制器也只能工作在光子跃迁能在费米能级附近的波段。机械光调制如斩波器调制波长范围极宽,可以同时调控紫外至远红外波段的光束,但传统机械光调制的调制速度较低,其最大调制频率仅为几十千赫兹,并不适用于现代高速光通信,也无法应用于超高速显示和成像等领域。Optical modulators have a wide range of applications in optical communications and can also be used in radar and laser modulation. Optical modulation includes mechanical modulation, acousto-optic modulation, magneto-optic modulator, electro-optic modulation, and electro-absorption modulation. Among them, electro-optic modulation uses electro-optic effects such as linear electro-optic effect (Pockels effect) to modulate, and its speed is extremely high, but usually it can only work near a specific wavelength, and the modulation wavelength range is narrow. Two-dimensional materials such as graphene have also been used to make electro-optic modulators. It mainly modulates the interband light absorption by modulating the Fermi level of two-dimensional materials. The adjustment frequency is also high. But this modulator can only work in the band where the photon transition energy is near the Fermi level. Mechanical light modulation, such as a chopper, has a very wide modulation wavelength range, and can simultaneously regulate the beams in the ultraviolet to far-infrared bands. However, the modulation speed of traditional mechanical light modulation is low, and its maximum modulation frequency is only tens of kilohertz, which is not suitable for Modern high-speed optical communication cannot be applied to fields such as ultra-high-speed display and imaging.

发明内容Contents of the invention

本发明所要解决的技术问题是提供一种光调制器,通过改变二维材料和导电底层之间的电压,从而利用静电力使得二维材料在润滑层上滑移,调节二维材料和导电底座之间的距离从而实现光调控,这种微纳机械电光调制器可以实现紫外至红外光谱范围内的同时调制,且调制速度快,调制电压小,功耗低。The technical problem to be solved by the present invention is to provide an optical modulator, by changing the voltage between the two-dimensional material and the conductive bottom layer, thereby using the electrostatic force to make the two-dimensional material slip on the lubricating layer, and adjust the two-dimensional material and the conductive base The distance between them can realize light control. This kind of micro-nano mechanical electro-optic modulator can realize simultaneous modulation in the ultraviolet to infrared spectral range, and the modulation speed is fast, the modulation voltage is small, and the power consumption is low.

本发明解决上述技术问题的技术方案如下:包括导电底层,所述导电底层的上表面的两端上固定设有绝缘层,所述绝缘层的上表面固定设有润滑层,所述二维材料的两端的下表面设在所述润滑层的上表面上,所述导电底层上设有第一电极,所述润滑层上设有第二电极,所述二维材料在所述润滑层上滑动。The technical solution of the present invention to solve the above-mentioned technical problems is as follows: comprising a conductive bottom layer, an insulating layer is fixedly arranged on both ends of the upper surface of the conductive bottom layer, a lubricating layer is fixedly arranged on the upper surface of the insulating layer, and the two-dimensional material The lower surfaces of both ends of the two ends are arranged on the upper surface of the lubricating layer, the first electrode is arranged on the conductive bottom layer, the second electrode is arranged on the lubricating layer, and the two-dimensional material slides on the lubricating layer .

本发明的有益效果是:由于二维材料可以在润滑层上滑移,当导电底层和二维材料间施加一定的电压时,由于静电力的作用,导电底层和二维材料间相互吸引或排斥,从而使得二维材料在润滑层上滑移并改变导电底层和二维材料之间的间距,由于光在导电底层和二维材料之间的干涉,可以有效的调控导电底层和二维材料的光吸收和光反射,从而实现光的高效调制。且当机电系统尺寸减小到微米或纳米尺寸时,其运动速度迅速提高,调制速度可以达到GHz以上。相比于传统微纳结构,二维材料是最薄,其单位面积质量更小,加速更快,调制速度更高。The beneficial effect of the present invention is: because the two-dimensional material can slide on the lubricating layer, when a certain voltage is applied between the conductive bottom layer and the two-dimensional material, due to the electrostatic force, the conductive bottom layer and the two-dimensional material are attracted or repelled each other , so that the two-dimensional material slips on the lubricating layer and changes the distance between the conductive bottom layer and the two-dimensional material. Due to the interference of light between the conductive bottom layer and the two-dimensional material, the distance between the conductive bottom layer and the two-dimensional material can be effectively adjusted. Light absorption and light reflection, resulting in efficient modulation of light. And when the size of the electromechanical system is reduced to a micron or nanometer size, its motion speed increases rapidly, and the modulation speed can reach above GHz. Compared with traditional micro-nano structures, two-dimensional materials are the thinnest, with smaller mass per unit area, faster acceleration and higher modulation speed.

在上述技术方案的基础上,本发明还可以做如下改进。On the basis of the above technical solutions, the present invention can also be improved as follows.

进一步,所述二维材料为单层或多层石墨烯。Further, the two-dimensional material is single-layer or multi-layer graphene.

采用上述进一步方案的有益效果是石墨烯单位面积质量密度低,调制速度高,此外,石墨烯在紫外至红外波段吸收率基本一致,工作波段宽。The beneficial effect of adopting the above further solution is that the mass density per unit area of graphene is low, and the modulation speed is high. In addition, the absorption rate of graphene in the ultraviolet to infrared band is basically the same, and the working band is wide.

在上述技术方案的基础上,本发明还可以做如下改进。On the basis of the above technical solutions, the present invention can also be improved as follows.

进一步,所述润滑层的材质为石墨材质。Further, the lubricating layer is made of graphite.

采用上述进一步方案的有益效果是石墨解理面和石墨烯之间存在超润滑效应,摩擦系数极小,有利于提高调制的调制速度,减小功耗。The beneficial effect of adopting the above further solution is that there is a super-lubricating effect between the graphite cleavage surface and the graphene, and the friction coefficient is extremely small, which is conducive to improving the modulation speed of modulation and reducing power consumption.

在上述技术方案的基础上,本发明还可以做如下改进。On the basis of the above technical solutions, the present invention can also be improved as follows.

进一步,所述导电底层中部的凸起的表面为光滑铝材质。Further, the raised surface in the middle of the conductive bottom layer is made of smooth aluminum.

采用上述进一步方案的有益效果是铝材料在紫外至红外波段都具有较高的反射率,有利于提高底座和二维材料之间光干涉,提高调制效率和工作带宽。The beneficial effect of adopting the above further scheme is that the aluminum material has high reflectivity in the ultraviolet to infrared band, which is beneficial to improve the optical interference between the base and the two-dimensional material, and improve the modulation efficiency and working bandwidth.

在上述方案的基础上,本发明还可以做如下改进。On the basis of the above solution, the present invention can also be improved as follows.

进一步,所述润滑层为L形润滑层。Further, the lubricating layer is an L-shaped lubricating layer.

采用上述进一步方案的有益效果是当施加电压后,二维材料在润滑层上滑移,接触面积减小,二维材料和润滑层之间的表面束缚能减小,这将提供一个回复力,减弱或阻止二维材料在润滑层上的滑移。回复力正比于接触面积的变化。L形润滑层这种上窄下宽的润滑层有利于在初始阶段也就是二维材料和底座距离较大时提供一个较小的回复力,这有利于提高调制速度。而当二维材料和底座距离很小时提供一个较大的回复力,这有利于避免二维材料与底座的黏连,以至于调制失效。此外,在这种结构中摩擦力正比于总的接触面积,L形润滑层这种上窄下宽的润滑层可以在回复力不变的情况下调节摩擦力,避免摩擦力过大以至于功耗过大、调制速率低,也可以避免摩擦力过小导致二维材料出现震荡现象。The beneficial effect of adopting the above-mentioned further scheme is that when a voltage is applied, the two-dimensional material slips on the lubricating layer, the contact area decreases, and the surface binding energy between the two-dimensional material and the lubricating layer decreases, which will provide a restoring force, Weaken or prevent the sliding of two-dimensional materials on the lubricating layer. The restoring force is proportional to the change in contact area. The L-shaped lubricating layer, which is narrow at the top and wide at the bottom, is conducive to providing a small restoring force in the initial stage, that is, when the distance between the two-dimensional material and the base is large, which is conducive to improving the modulation speed. And when the distance between the two-dimensional material and the base is small, a large restoring force is provided, which is beneficial to avoid the adhesion between the two-dimensional material and the base, so that the modulation fails. In addition, in this structure, the friction force is proportional to the total contact area, and the L-shaped lubricating layer, which is narrow at the top and wide at the bottom, can adjust the friction force without changing the restoring force, so as to avoid excessive friction force so that the work Excessive consumption and low modulation rate can also avoid the vibration phenomenon of two-dimensional materials caused by too small friction force.

附图说明Description of drawings

图1为本发明的结构示意图;Fig. 1 is a structural representation of the present invention;

图2为润滑层的结构示意图;Fig. 2 is the structural representation of lubricating layer;

图3为波长550纳米的光在周期为15纳米的方波电压调制下光调制率和时间关系图;Fig. 3 is a graph showing the relationship between the light modulation rate and time of light with a wavelength of 550 nanometers modulated by a square wave voltage with a period of 15 nanometers;

图4为被调制光波长和调制率关系图;Fig. 4 is a graph of the relationship between the wavelength of modulated light and the modulation rate;

图5为入射光角度和调整率关系图;Figure 5 is a diagram of the relationship between the incident light angle and the adjustment rate;

附图中,各标号所代表的部件列表如下:In the accompanying drawings, the list of parts represented by each label is as follows:

1、导电底层,2、绝缘层,3、润滑层,4、二维材料,5、被调制光,6,第二电极,7,第一电极。1. Conductive bottom layer, 2. Insulation layer, 3. Lubricating layer, 4. Two-dimensional material, 5. Modulated light, 6. Second electrode, 7. First electrode.

具体实施方式Detailed ways

在本发明的描述中,需要说明的是,术语“上”、“下”、“前”、“后”、“左”、“右”、“内”、“外”等指示的方位或位置关系为基于附图所示的方位或位置关系,仅是为了便于描述本发明和简化描述,而不是指示或暗示所指的箱体或元件必须具有特定的方位、以特定的方位构造和操作,因此不能理解为对本发明的限制。此外,术语“第一”、“第二”仅用于描述目的,而不能理解为指示或暗示相对重要性。In the description of the present invention, it should be noted that the orientation or position indicated by the terms "up", "down", "front", "rear", "left", "right", "inside", "outside" etc. The relationship is based on the orientation or positional relationship shown in the drawings, and is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the referred box or element must have a specific orientation, be constructed and operated in a specific orientation, Therefore, it should not be construed as limiting the invention. In addition, the terms "first" and "second" are used for descriptive purposes only, and should not be understood as indicating or implying relative importance.

在本发明的描述中,需要说明的是,除非另有明确的规定和限定,术语“安装”、“相连”、“连接”应做广义理解,例如,可以是固定连接,也可以是可拆卸连接,或一体地连接;可以是机械连接,也可以是电路连接;可以是直接相连,也可以通过中间媒介间接相连,可以是两个元件内部的连通。对于本领域的普通技术人员而言,可以具体情况理解上述术语在本发明中的具体含义。此外,在本发明的描述中,除非另有说明,“多个”的含义是两个或两个以上。In the description of the present invention, it should be noted that unless otherwise specified and limited, the terms "installation", "connection" and "connection" should be understood in a broad sense, for example, it can be a fixed connection or a detachable connection. Connection, or integral connection; it can be mechanical connection or circuit connection; it can be direct connection or indirect connection through an intermediary, and it can be the internal communication of two components. Those of ordinary skill in the art can understand the specific meanings of the above terms in the present invention in specific situations. In addition, in the description of the present invention, unless otherwise specified, "plurality" means two or more.

为使本发明实施例的目的、技术方案和优点更加清楚,下面将结合本发明实施例中的附图,对本发明实施例中的技术方案进行清楚、完整地描述,显然,所描述的实施例是本发明的一部分实施例,而不是全部的实施例。基于本发明中的实施例,本领域普通技术人员在没有做出创造性劳动的前提下所获得的所有其他实施例,都属于本发明保护的范围。In order to make the purpose, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments It is a part of embodiments of the present invention, but not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.

实施例1:Example 1:

如图1所示,本实施例中,一种光调制器,包括导电底层1,所述导电底层1的上表面的两端上均固定设有绝缘层2,两个所述绝缘层2的上表面均固定设有润滑层3,两个所述润滑层3的上表面之间设有二维材料4,所述二维材料4的两端的下表面分别设在两个所述润滑层3的上表面上,所述导电底层1上设有第一电极7,一所述润滑层3上设有第二电极6,第一电极7和第二电极6的正负可以相反,也可以是同极,异种电极相吸引,距离变小,同种相排斥,距离增大,二维材料4中部和导电底层1之间由空气或真空隔开。As shown in Figure 1, in this embodiment, an optical modulator includes a conductive bottom layer 1, an insulating layer 2 is fixed on both ends of the upper surface of the conductive bottom layer 1, and two insulating layers 2 The upper surface is fixedly provided with a lubricating layer 3, two-dimensional material 4 is arranged between the upper surfaces of the two described lubricating layers 3, and the lower surfaces of two ends of the two-dimensional material 4 are respectively arranged on two described lubricating layers 3 On the upper surface of the upper surface, the conductive bottom layer 1 is provided with a first electrode 7, and the lubricating layer 3 is provided with a second electrode 6. The positive and negative of the first electrode 7 and the second electrode 6 can be opposite, or can be Electrodes of the same electrode and different electrodes attract each other, and the distance becomes smaller, while the same electrode repels, and the distance increases. The middle part of the two-dimensional material 4 and the conductive bottom layer 1 are separated by air or vacuum.

润滑层3为L形润滑层,二维材料4的两端的下表面分别设有两个L形润滑层,两个L形润滑层水平相对设置,如图2所示。L形润滑层当施加电压后,二维材料4在润滑层3上滑移,接触面积减小,二维材料4和润滑层3之间的表面束缚能减小,这将提供一个回复力,减弱或阻止二维材料4在润滑层3上的滑移。回复力正比于接触面积的变化,采用L形润滑层,由于L上部较细,滑移时接触面积变化小,有利于减小回复力,从而降低调制电压。同时,当滑移长度过大时,二维材料4达到L形的底边,若继续滑移,接触面积变化极大,这将导致一个极大的回复力,从而阻止二维材料4的继续滑移,从而避免二维材料4与润滑层3的脱离,以及与导电底层1的直接接触,更好的支撑二维材料4。The lubricating layer 3 is an L-shaped lubricating layer, two L-shaped lubricating layers are respectively provided on the lower surfaces of the two ends of the two-dimensional material 4, and the two L-shaped lubricating layers are arranged horizontally opposite each other, as shown in FIG. 2 . L-shaped lubricating layer When the voltage is applied, the two-dimensional material 4 slides on the lubricating layer 3, the contact area decreases, and the surface binding energy between the two-dimensional material 4 and the lubricating layer 3 decreases, which will provide a restoring force, Weaken or prevent the sliding of the two-dimensional material 4 on the lubricating layer 3 . The restoring force is proportional to the change of the contact area. The L-shaped lubricating layer is adopted. Since the upper part of the L is thinner, the change of the contact area is small during sliding, which is beneficial to reduce the restoring force and thus reduce the modulation voltage. At the same time, when the sliding length is too large, the two-dimensional material 4 reaches the bottom edge of the L shape. If the sliding continues, the contact area will change greatly, which will lead to a huge restoring force, thereby preventing the two-dimensional material 4 from continuing. Slip, thereby avoiding the detachment of the two-dimensional material 4 from the lubricating layer 3 and direct contact with the conductive bottom layer 1, so as to better support the two-dimensional material 4.

两边石墨解离面润滑层2之间的距离也就是豁口宽度为40微米,润滑层3的材质为石墨材质,表面为解离面,宽度为1微米;不加电压时,石墨烯和导电底层1之间的距离为110纳米,导电底层长和宽都为35微米,工作电压0.18伏,导电底层1为光滑铝材料。The distance between the lubricating layer 2 of the graphite dissociation surface on both sides is 40 microns, the material of the lubricating layer 3 is graphite, the surface is a dissociation surface, and the width is 1 micron; when no voltage is applied, the graphene and the conductive bottom layer The distance between 1 is 110 nanometers, the length and width of the conductive bottom layer are both 35 microns, the working voltage is 0.18 volts, and the conductive bottom layer 1 is made of smooth aluminum material.

由于二维材料4可以在润滑层3上滑移,当导电底层1和二维材料4间施加一定的电压时,导电底层1和二维材料4间相互吸引,从而可以改变导电底层1和二维材料4之间的间距,由于光在导电底层1和二维材料4之间的干涉,可以有效的调控导电底层1和二维材料4的光吸收和光反射,从而实现光的高效调制。Since the two-dimensional material 4 can slide on the lubricating layer 3, when a certain voltage is applied between the conductive bottom layer 1 and the two-dimensional material 4, the conductive bottom layer 1 and the two-dimensional material 4 attract each other, so that the conductive bottom layer 1 and the two-dimensional material can be changed. Due to the interference of light between the conductive bottom layer 1 and the two-dimensional material 4, the light absorption and light reflection of the conductive bottom layer 1 and the two-dimensional material 4 can be effectively regulated, thereby realizing efficient modulation of light.

具体的调制效果如图3、图4和图5所示,可以同时调控波段为整个可见光、近红外和通讯波段的光束,波长范围在1.2微米以上,比传统光电调制的工作波长范围大2-3个量级;工作电压仅为0.18V,比传统光调制小约1-2个量级;调制响应速度约为2纳秒,调制频率在100MHz以上,比传统机械调制速度快2-4个量级。The specific modulation effect is shown in Figure 3, Figure 4 and Figure 5. It can simultaneously control the beams of the entire visible light, near-infrared and communication bands. The wavelength range is above 1.2 microns, which is 2-2- 3 orders of magnitude; the working voltage is only 0.18V, which is about 1-2 orders of magnitude smaller than traditional optical modulation; the modulation response speed is about 2 nanoseconds, and the modulation frequency is above 100MHz, which is 2-4 times faster than traditional mechanical modulation order of magnitude.

优选被调整光4的入射角度,当被调制光5倾斜15-80度入射。斜入射时,石墨烯的光吸收可调范围更大,反射变化较大。The incident angle of the adjusted light 4 is preferably adjusted, when the modulated light 5 is incident at an angle of 15-80 degrees. When the incidence is oblique, the adjustable range of graphene's light absorption is larger, and the reflection changes greatly.

以上仅为本发明的较佳实施例,并不用以限制本发明,凡在本发明的精神和原则之内,所作的任何修改、等同替换、改进等,均应包含在本发明的保护范围之内。The above are only preferred embodiments of the present invention, and are not intended to limit the present invention. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principles of the present invention shall be included in the protection scope of the present invention Inside.

Claims (5)

1. An optical modulator, characterized by: including electrically conductive bottom (1), the fixed insulating layer (2) that is equipped with on the both ends of the upper surface of electrically conductive bottom (1), the last fixed surface of insulating layer (2) is equipped with lubricating layer (3), establish the lower surface at the both ends of two-dimensional material (4) on the upper surface of lubricating layer (3), be equipped with first electrode (7) on electrically conductive bottom (1), be equipped with second electrode (6) on lubricating layer (3), two-dimensional material (4) are in slide on lubricating layer (3), work as electrically conductive bottom (1) with when applying certain voltage between two-dimensional material (4), electrically conductive bottom (1) with inter attraction or repulsion between two-dimensional material (4), thereby make two-dimensional material (4) are in slide and change on lubricating layer (3) electrically conductive bottom (1) with interval between two-dimensional material (4), regulation and control electrically conductive bottom (1) with the light absorption and the light reflection of two-dimensional material (4).
2. A light modulator according to claim 1 wherein: the two-dimensional material (4) is single-layer or multi-layer graphene.
3. A light modulator according to claim 2 wherein: the lubricating layer (3) is made of graphite.
4. A light modulator according to any one of claims 1-3 wherein: the surface of the bulge in the middle of the conductive bottom layer (1) is made of smooth aluminum.
5. A light modulator according to any one of claims 1-3 wherein: the lubricating layer (3) is an L-shaped lubricating layer.
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