CN108181736A - Electrooptic modulator based on graphene/metal composite structure - Google Patents
Electrooptic modulator based on graphene/metal composite structure Download PDFInfo
- Publication number
- CN108181736A CN108181736A CN201810014474.XA CN201810014474A CN108181736A CN 108181736 A CN108181736 A CN 108181736A CN 201810014474 A CN201810014474 A CN 201810014474A CN 108181736 A CN108181736 A CN 108181736A
- Authority
- CN
- China
- Prior art keywords
- graphene
- layer
- metal
- electrooptic modulator
- composite structure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/03—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on ceramics or electro-optical crystals, e.g. exhibiting Pockels effect or Kerr effect
- G02F1/0305—Constructional arrangements
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/03—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on ceramics or electro-optical crystals, e.g. exhibiting Pockels effect or Kerr effect
- G02F1/0305—Constructional arrangements
- G02F1/0316—Electrodes
Landscapes
- Physics & Mathematics (AREA)
- Nonlinear Science (AREA)
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Ceramic Engineering (AREA)
- Crystallography & Structural Chemistry (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
Abstract
The invention discloses a kind of electrooptic modulators based on graphene/metal composite structure, include including structured metal layer, graphene layer, dielectric layer, substrate reflection layer, metal electrode and voltage source, graphene layer：At least one layer of graphene, graphene are laid in dielectric layer, and voltage source is connect with graphene, apply different voltage to graphene by voltage source to regulate and control the reflectivity size of incident light.Electrooptic modulator according to embodiments of the present invention by the way that metal and graphene are combined, forms the composite construction of graphene/metal, to realize the adjusting function to incident light.
Description
Technical field
The present invention relates to electrooptic modulator technical fields, and graphene/metal composite structure is based on more particularly, to one kind
Electrooptic modulator.
Background technology
Sub-wavelength structure is the plane low dimensional micro-nano structure of engineer a kind of, by the unit module of sub-wavelength magnitude
It is built-up, the physical phenomenon of many ultra-traditionals can be generated.With the development of scientific and technological progress and modernization, information transmission and processing
Demand it is growing, requirement of the photoelectric component to size is more and more accurate, and traditional photoelectric device can not meet modernization
Demand, the photoelectric component of high integration made using sub-wavelength structure come into being.The photoelectric device of sub-wavelength is with light
Near field is information carrier, by the electromagnetic interaction between the optical element of micro-or nano size and near field, to realize that light is believed
Identification, detection, transmission, sensing, exchange of breath etc..Its Physical Mechanism with light interaction mainly swashs including surface plasma
Member, P-B phases (Pancharatnam-Berry Phase), Mie scattering (MIE).Wherein the sub-wavelength structure of metal can effectively swash
Surface plasmons is sent out, very strong RESONANCE ABSORPTION is generated at the structure of plane, by the geometric parameters for adjusting sub-wavelength structure
Number can effectively carry out the transmission of electromagnetic field or reflection the regulation and control of depth.This novel sub-wavelength metal surpasses surface device
Part ability of regulation and control is strong, there is that lightness, micromation, integrated, manipulation is flexible.
Single-layer graphene be by single layer of carbon atom it is tightly packed into bi-dimensional cellular shape structural material, moved with the electronics that its is high
Many peculiar Wuli-Shili-Renli system approach such as shifting rate, quantum hall effect, extremely low resistivity and high translucency become and work as
One of hot spot in the present research.Often there is a large amount of free electron in the conductive materials such as traditional metal, and graphene is that have
The material of semiconductor property, electron concentration only 1012cm-2To 1013cm-2, while the carrier concentration of graphene can pass through
Electrode and chemistry mix regulation and control.Therefore, the photoelectric characteristic of graphene is adjustable, and can be changed in great range.It is logical
It crosses and pole is powered up on graphene, in a manner that electricity mixes, the conductivity of graphene can be changed, optically change its folding
Rate is penetrated, so as to regulate and control in real time to incident light.Therefore, the voltage that graphene can be excellent as one is regulatable
Material is used for photoelectric device.
Chinese invention patent (CN201710516770.5) is a kind of to be based on graphene coplanar flat traveling wave absorption-type light modulation
Device employs coplanar waveguide travelling wave electric pole structure, and at work, bias voltage is loaded by microwave probe on electrode,
By changing the compound dielectric of voltage dynamic regulation graphene, so as to influence absorption of the strip optical waveguide to light.Invention is adopted
With a plurality of graphene ribbon, structure is relative complex, is not directed to adjusted and controlled only with graphene planes.
The novel light modulator of Chinese invention patent (CN107065072A) based on multimode waveguide, structure is with multimode
The electroluminescent Absorption modulation device of modulated structure, the phase-modulator with multimode modulated structure or the Mach pool with multi-mode structure
Moral interferometer modulator utilizes multimode waveguide optical modulation region and mode multiplexing-de-multiplexing technique so that light can be with different
Mode is repeatedly by optical modulation region, so as to enhance the modulation result to light field.Invention is passed through using the structure of many waveguides
The technology of multiplexing and demultiplexing is realized, is not directed to the regulating and controlling voltage of graphene.
Chinese invention patent (CN107045214A) optical modulator, structure are a kind of optical modulator of Mach Zehnder dry type,
For the continuous light from semiconductor laser incidence, the refraction of the Quantum Well by making two-way optical waveguide branch according to electric signal
Rate changes and carries out phase-modulation, and incident continuous light partial wave is made using optical branching filter, and optical phase shifter is configured on a Tiao Zhi roads,
Light and wave device make the light and wave of two branches, and power-up pole is connected to two branches, applies DC voltage to realize the function of light modulation.With
Unlike the present invention, which is utilized the modulator model of Mach Zehnder, is realized with the structure of waveguide.Invention is utilized
Strip waveguiding structure is not directed to simple planar structure.
Invention content
The present invention is directed to solve one of above-mentioned technical problem at least to a certain extent.
For this purpose, it is an object of the invention to propose a kind of application voltage by outside changing to regulate and control transmitance, when outer
Portion's voltage be different serial numbers when, to the reflectivity of incident light can also change correspondingly based on graphene/metal composite knot
The electrooptic modulator of structure.
Electrooptic modulator based on graphene/metal composite structure according to embodiments of the present invention, including：Metal structure
Layer, graphene layer, dielectric layer, substrate reflection layer, metal electrode and voltage source, which is characterized in that the graphene layer is included extremely
A few layer graphene, the graphene are laid in the dielectric layer, and the voltage source is connect with the graphene, passes through the electricity
Potential source applies different voltage to regulate and control the reflectivity size of incident light to the graphene.
The electrooptic modulator based on graphene/metal composite structure according to embodiments of the present invention, by by metal structure
Layer and graphene combine, and the composite construction of graphene/metal are formed, to realize the adjusting function to incident light.Wherein, metal knot
Structure layer can realize super-absorbent by surface plasmon resonance effect to the incident light of resonance wave strong point, realize a certain wave
The transmitance of long incident light is regulated and controled, and passes through regulating and controlling voltage graphene so that and graphene has different refractive index, so as to
Change the resonant wavelength of metal structure plasmon so that " drift " occurs for the wave band of super-absorbent, total it is same enter
It penetrates under conditions of light with different transmitances, alive size is applied according to outside to regulate and control the saturating of the electrooptic modulator
Rate is crossed, for a certain specific wavelength, the different transmitance of this wavelength can be obtained by way of changing voltage.
In addition, the electrooptic modulator based on graphene/metal composite structure according to embodiments of the present invention, can also have
Following additional technical characteristic：
According to one embodiment of present invention, the electrooptic modulator is followed successively by from bottom to top：The substrate reflection layer, institute
State dielectric layer, the graphene layer and the structured metal layer, the metal electrode respectively with the graphene layer and the lining
Bottom reflecting layer connects.
According to one embodiment of present invention, the substrate reflection layer is metallic reflector, the substrate reflection layer, described
Dielectric layer and the graphene layer form capacitance structure.
According to one embodiment of present invention, the substrate reflection layer is gold, silver or copper for reflection incident light.
According to one embodiment of present invention, the structured metal layer is metal grating, and the period of the metal grating exists
It 150nm-10 μm, accounts for width and compares in 0.2-0.9, be highly 10nm-200nm.
According to one embodiment of present invention, the graphene layer includes the 1-15 layers of graphene.
According to one embodiment of present invention, the thickness of the dielectric layer is 0-2um.
According to one embodiment of present invention, the dielectric layer is aluminium oxide, boron nitride, magnesium fluoride or silica.
According to one embodiment of present invention, the voltage that the voltage source applies is 0-200v.
According to one embodiment of present invention, the material of the structured metal layer is in gold, silver, aluminium, nickel, chromium, titanium and copper
At least one or its alloy.
The additional aspect and advantage of the present invention will be set forth in part in the description, and will partly become from the following description
It obtains significantly or is recognized by the practice of the present invention.
Description of the drawings
The above-mentioned and/or additional aspect and advantage of the present invention will become in the description from combination accompanying drawings below to embodiment
Significantly and it is readily appreciated that, wherein：
Fig. 1 is the structural representation of the electrooptic modulator according to embodiments of the present invention based on graphene/metal composite structure
Figure；
Fig. 2 is the fermi level diagram of graphene；
Fig. 3 is that the electrooptic modulator according to embodiments of the present invention based on graphene/metal composite structure does not have graphite
The relational graph of light transmission rate and wavelength during alkene layer；
Fig. 4 (a) is the graphene of the electrooptic modulator according to embodiments of the present invention based on graphene/metal composite structure
The relational graph of light transmission rate and wavelength when layer is 5 layers under difference fermi level；
Fig. 4 (b) is the graphene of the electrooptic modulator according to embodiments of the present invention based on graphene/metal composite structure
The relational graph of light transmission rate and wavelength when layer is 7 layers under difference fermi level；
Fig. 4 (c) is the graphene of the electrooptic modulator according to embodiments of the present invention based on graphene/metal composite structure
The relational graph of light transmission rate and wavelength when layer is 10 layers under difference fermi level.
Reference numeral：
Electrooptic modulator 100 based on graphene/metal composite structure；
Substrate reflection layer 10；Dielectric layer 20；Graphene layer 30；Structured metal layer 40；Metal electrode 50.
Specific embodiment
The embodiment of the present invention is described below in detail, the example of the embodiment is shown in the drawings, wherein from beginning to end
Same or similar label represents same or similar element or the element with same or like function.Below with reference to attached
The embodiment of figure description is exemplary, it is intended to for explaining the present invention, and is not considered as limiting the invention.
In the description of the present invention, it is to be understood that term " " center ", " on ", " under ", " vertical ", " level ",
The orientation or position relationship of the instructions such as " top ", " bottom ", " interior ", " outer ", " clockwise ", " counterclockwise " are based on side shown in the drawings
Position or position relationship are for only for ease of the description present invention and simplify description rather than instruction or imply signified device or member
Part must have specific orientation, with specific azimuth configuration and operation, therefore be not considered as limiting the invention.This
Outside, term " first ", " second " are only used for description purpose, and it is not intended that instruction or hint relative importance or implicit finger
The quantity of bright indicated technical characteristic." first " is defined as a result, the feature of " second " can be expressed or implicitly include
One or more this feature.In the description of the present invention, " multiple " are meant that two or more, unless otherwise bright
It is really specific to limit.
In the present invention unless specifically defined or limited otherwise, term " installation ", " connected ", " connection ", " fixation " etc.
Term should be interpreted broadly, for example, it may be being fixedly connected or being detachably connected or be integrally connected；It can be machine
Tool is connected or is electrically connected；It can be directly connected, can also be indirectly connected by intermediary, can be two members
Connection inside part.For the ordinary skill in the art, above-mentioned term can be understood in this hair as the case may be
Concrete meaning in bright.
The electric light tune based on graphene/metal composite structure according to embodiments of the present invention is specifically described below in conjunction with the accompanying drawings
Device 100 processed.
As shown in Figure 1, the electrooptic modulator 100 based on graphene/metal composite structure according to embodiments of the present invention wraps
Include substrate reflection layer 10, dielectric layer 20, graphene layer 30, structured metal layer 40, metal electrode 50 and voltage source.
Specifically, graphene layer 30 includes at least one layer of graphene, and graphene is laid in dielectric layer 20, voltage source and graphite
Alkene connects, and applies different voltage to graphene by voltage source to regulate and control the reflectivity size of incident light.
Electrooptic modulator 100 according to embodiments of the present invention based on graphene/metal composite structure as a result, pass through by
Metal and graphene combine, and the composite construction of graphene/metal are formed, to realize the adjusting function to incident light.Wherein, metal
Structure can realize that the transmitance of the incident light of a certain wavelength is regulated and controled by surface plasmon resonance effect, pass through
Regulating and controlling voltage graphene so that graphene has different refractive index, so as to change the resonance wave of metal structure plasmon
It is long so that total has different transmitances under conditions of same incident light, according to outside apply alive size come
Regulate and control the transmitance of device.
According to one embodiment of present invention, electrooptic modulator 100 is followed successively by from bottom to top：Substrate reflection layer 10, medium
Layer 20, graphene layer 30 and structured metal layer 40, metal electrode 50 are connect respectively with graphene layer 30 and substrate reflection layer 10.
According to one embodiment of present invention, substrate reflection layer 10 be metallic reflector, substrate reflection layer 10, dielectric layer 20
Capacitance structure is formed with graphene layer 30.
In certain specific embodiments of the invention, substrate reflection layer 10 is gold, silver or copper for reflection incident light.
Optionally, structured metal layer 40 is metal grating, and the period of metal grating can be 150nm-10 μm, and accounting for wide ratio can be
0.2-0.9 highly can be 10nm-200nm.
Optionally, graphene layer 30 includes 1-15 layer graphenes.
According to one embodiment of present invention, the thickness of dielectric layer 20 is 0-2um.
Further, dielectric layer 20 is aluminium oxide, boron nitride, magnesium fluoride or silica.
Preferably, the voltage that voltage source applies is 0-200v.
According to one embodiment of present invention, the material of structured metal layer 40 is in gold, silver, aluminium, nickel, chromium, titanium and copper
At least one or its alloy.
It should be noted that the shape of metal grating can be rectangle, at least one of trapezoidal and equilateral triangle or its
Combination, graphene layer 30 can be laid on dielectric layer 20.
It should be noted that the electrooptic modulator 100 based on graphene/metal composite structure according to embodiments of the present invention
Principle be：There are free electron, specific metal structure under specific incident light frequency can generate plasma and swash metal
First resonance effects, so as to realize a super-absorbent in corresponding resonance wave strong point, this super-absorbent so that the light of process is complete
Portion is absorbed, and by selecting suitable metal, is manufactured suitable metal micro-nano structure, can be realized the superabsorbent of specific band
It receives so that transmitance is minimum, without super-absorbent is not present in resonance wave strong point.Graphene is a kind of two dimension being made of carbon atom
Flat film, due to its special band structure, when applying different voltage to graphene, graphene can show different
Light refractive index.By applying different voltage, graphene may be considered a tunable material.We put graphene
In the lower section of metal structure, tunable graphene can have an impact the Plasmon Resonance of metal.Apply different
Voltage can make metal plasma plasmon resonance frequency shift, then when we change the applied voltage of graphene, Wo Menneng
The super-absorbent of different wave length is accessed, for Same Wavelength, we regulate and control extraneous voltage, and device can be obtained in this wavelength
Different transmitances.
The shape of metal structure, period account for the wide thickness than, dielectric layer and carry out theoretical meter according to required operation wavelength
It calculates, is calculated according to the methods of Finite-Difference Time-Domain Method or rigorous coupled wave approach.In required operating wave strong point, obtain
Fermi level during through (or reflection) different value needed for graphene.
It describes with reference to the accompanying drawings and in conjunction with specific embodiments according to the present invention based on graphene/metal composite structure
Electrooptic modulator 100.
As shown in Figure 1, using metallic silver as substrate reflection layer 10, the thickness of substrate reflection layer 10 be set as two it is micro-
Rice ensures that reflectivity is high.Aluminium oxide (Al is equipped on substrate reflection layer 102O3) as dielectric layer 20, the thickness of dielectric layer 20 is
21nm, on alumina tiling have 10 layer graphenes as graphene layer 30, period 180nm, light are equipped on graphene layer 30
Grid width 170nm is highly the silver-colored grating of 40nm as structured metal layer 40.
It is according to embodiments of the present invention based on the electrooptic modulator 100 of graphene/metal composite structure by using based on
FDTD (Finite-Difference Time-Domain Solutions) software of Finite-Difference Time-Domain Method is emulated, with
1550nm is operation wavelength, using TM polarised lights as incident light, realizes the effect of electrooptic modulator.
As shown in Fig. 2, the energy band diagram of graphene is a dirac cone, when applying voltage to graphene, can change
The fermi level of graphene.
As shown in figure 3, when incident light enters structured metal layer 40, Plasmon Resonance can be generated, forms formant,
It but after making due to structured metal layer 40, can not go to change structural parameters again, change reflectivity in real time so cannot reach
Function.
As shown in Fig. 4 (a) to 4 (c), after graphene is introduced, by the light transmission rate under different fermi levels, in difference
Fermi level under, obtained different formants, at 1550nm wavelength, can have been obtained when fermi level difference different
Reflectivity.When Fig. 4 (a), Fig. 4 (b) and Fig. 4 (c) are respectively 5 layers, 7 layers and 10 layer graphene, different modulation conditions.
To sum up, the electrooptic modulator 100 based on graphene/metal composite structure according to embodiments of the present invention is with showing
There is technology to compare, have the following advantages that：
(1) it using the graphene for being capable of electricity regulation and control, can be realized based on stone by the voltage for simply adjusting external application
100 device of electrooptic modulator of black alkene/metal composite structure is to the regulating and controlling effect of incident light, without changing the ginseng of structure again
Number realizes the function of real-time monitoring；
(2) modification scope of graphene is wide, can be in a kind of electricity based on graphene/metal composite structure by voltage adjusting
The effect of opening the light of multi-wavelength can be realized on 100 device of optical modulator；
(3) by changing the structure of metal, with reference to the optical property tunability of graphene, it is red in near-infrared can be reached
Outer function of opening the light (1000nm-10um).
It should be noted that compared with CN201710516770.5, CN201710516770.5 be using between waveguide not
The absorption of light is realized with coupling, the electrooptic modulator 100 based on graphene/metal composite structure of the embodiment of the present invention is profit
It is absorbed with planar structure by surface plasmon resonance to realize, absorbing wavelength is changed by graphene, so as to fulfill
Modulation function.Compared with CN107065072A, CN107065072A is the structure using many waveguides by being multiplexed and demultiplexing
Technology realizes, the electrooptic modulator 100 based on graphene/metal composite structure of the embodiment of the present invention is by will be golden
Belong to micro-nano structure and graphene combines, the modulation function of light is realized using the function of electricity regulation and control.Compared with CN107045214A,
The modulator model of Mach Zehnder is utilized in CN107045214A, is realized with the structure of waveguide, the embodiment of the present invention based on
What the electrooptic modulator 100 of graphene/metal composite structure utilized is that micro nano structure and graphene combine, and utilizes graphene
Dielectric constant adjustable function realizes optical modulator.
Other of electrooptic modulator according to embodiments of the present invention are formed and are operated for those of ordinary skill in the art
For be all known, be not detailed herein.
In the description of this specification, reference term " one embodiment ", " example ", " is specifically shown " some embodiments "
The description of example " or " some examples " etc. means specific features, structure, material or the spy for combining the embodiment or example description
Point is contained at least one embodiment of the present invention or example.In the present specification, schematic expression of the above terms are not
Centainly refer to identical embodiment or example.Moreover, particular features, structures, materials, or characteristics described can be any
One or more embodiments or example in combine in an appropriate manner.
Although the embodiments of the present invention has been shown and described above, it is to be understood that above-described embodiment is example
Property, it is impossible to limitation of the present invention is interpreted as, those of ordinary skill in the art are not departing from the principle of the present invention and objective
In the case of can make changes, modifications, substitutions and variations to the above described embodiments within the scope of the invention.
Claims (10)
1. a kind of electrooptic modulator based on graphene/metal composite structure, including structured metal layer, graphene layer, dielectric layer,
Substrate reflection layer, metal electrode and voltage source, which is characterized in that the graphene layer includes：
At least one layer of graphene, the graphene are laid in the dielectric layer, and the voltage source connect with the graphene, passes through
The voltage source applies different voltage to regulate and control the reflectivity size of incident light to the graphene.
2. the electrooptic modulator according to claim 1 based on graphene/metal composite structure, which is characterized in that described
Electrooptic modulator is followed successively by from bottom to top：The substrate reflection layer, the dielectric layer, the graphene layer and the metal structure
Layer, the metal electrode are connect respectively with the graphene layer and the substrate reflection layer.
3. the electrooptic modulator according to claim 2 based on graphene/metal composite structure, which is characterized in that described
Substrate reflection layer is metallic reflector, and the substrate reflection layer, the dielectric layer and the graphene layer form capacitance structure.
4. the electrooptic modulator according to claim 3 based on graphene/metal composite structure, which is characterized in that described
Substrate reflection layer is gold, silver or copper for reflection incident light.
5. the electrooptic modulator according to claim 1 based on graphene/metal composite structure, which is characterized in that described
Structured metal layer is metal grating, and the period of the metal grating at 150nm-10 μm, accounts for width and compares in 0.2-0.9, be highly
10nm-200nm。
6. the electrooptic modulator according to claim 1 based on graphene/metal composite structure, which is characterized in that described
Graphene layer includes the 1-15 layers of graphene.
7. the electrooptic modulator according to claim 1 based on graphene/metal composite structure, which is characterized in that described
The thickness of dielectric layer is 0-2um.
8. the electrooptic modulator according to claim 7 based on graphene/metal composite structure, which is characterized in that described
Dielectric layer is aluminium oxide, boron nitride, magnesium fluoride or silica.
9. the electrooptic modulator according to claim 1 based on graphene/metal composite structure, which is characterized in that described
The voltage that voltage source applies is 0-200v.
10. the electrooptic modulator according to claim 1 based on graphene/metal composite structure, which is characterized in that described
The material of structured metal layer is at least one of gold, silver, aluminium, nickel, chromium, titanium and copper or its alloy.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810014474.XA CN108181736A (en) | 2018-01-08 | 2018-01-08 | Electrooptic modulator based on graphene/metal composite structure |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810014474.XA CN108181736A (en) | 2018-01-08 | 2018-01-08 | Electrooptic modulator based on graphene/metal composite structure |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN108181736A true CN108181736A (en) | 2018-06-19 |
Family
ID=62549999
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201810014474.XA Pending CN108181736A (en) | 2018-01-08 | 2018-01-08 | Electrooptic modulator based on graphene/metal composite structure |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN108181736A (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109273805A (en) * | 2018-12-07 | 2019-01-25 | 金华伏安光电科技有限公司 | A kind of tunable filter based on graphene |
| CN111190163A (en) * | 2020-02-21 | 2020-05-22 | 深圳奥比中光科技有限公司 | Scanning device and scanning method based on reconfigurable optical super-surface layer |
| WO2021004183A1 (en) * | 2019-07-08 | 2021-01-14 | 深圳大学 | Resonant cavity-based terahertz device, and manufacturing method for same |
| CN113258295A (en) * | 2021-05-13 | 2021-08-13 | 浙江工业大学 | Method for realizing tunable electromagnetic induction transparency based on graphene-dielectric composite super surface |
| CN114114723A (en) * | 2021-12-13 | 2022-03-01 | 浙江树人学院（浙江树人大学） | Electric control light intensity absorption device |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104570402A (en) * | 2013-10-12 | 2015-04-29 | 中国科学院苏州纳米技术与纳米仿生研究所 | Spatial light modulator based on metamaterial structures and preparation method for spatial light modulator |
| CN105022178A (en) * | 2015-08-18 | 2015-11-04 | 电子科技大学 | Graphene phase type light modulator based on planar waveguide |
| CN105068278A (en) * | 2015-09-17 | 2015-11-18 | 厦门大学 | Space electrooptical modulator based on graphene |
| CN205844667U (en) * | 2016-06-08 | 2016-12-28 | 安徽枫慧金属股份有限公司 | Nano-device based on Graphene metal clad layer structure |
| CN107209436A (en) * | 2015-02-03 | 2017-09-26 | 三星电子株式会社 | Optical modulation device with grid structure |
| CN207895207U (en) * | 2018-01-08 | 2018-09-21 | 苏州大学 | Electrooptic modulator based on graphene/metal composite structure |
-
2018
- 2018-01-08 CN CN201810014474.XA patent/CN108181736A/en active Pending
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104570402A (en) * | 2013-10-12 | 2015-04-29 | 中国科学院苏州纳米技术与纳米仿生研究所 | Spatial light modulator based on metamaterial structures and preparation method for spatial light modulator |
| CN107209436A (en) * | 2015-02-03 | 2017-09-26 | 三星电子株式会社 | Optical modulation device with grid structure |
| CN105022178A (en) * | 2015-08-18 | 2015-11-04 | 电子科技大学 | Graphene phase type light modulator based on planar waveguide |
| CN105068278A (en) * | 2015-09-17 | 2015-11-18 | 厦门大学 | Space electrooptical modulator based on graphene |
| CN205844667U (en) * | 2016-06-08 | 2016-12-28 | 安徽枫慧金属股份有限公司 | Nano-device based on Graphene metal clad layer structure |
| CN207895207U (en) * | 2018-01-08 | 2018-09-21 | 苏州大学 | Electrooptic modulator based on graphene/metal composite structure |
Non-Patent Citations (1)
| Title |
|---|
| MING LIU ETC.: "A graphene-based broadband optical modulator", 《NATURE》 * |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109273805A (en) * | 2018-12-07 | 2019-01-25 | 金华伏安光电科技有限公司 | A kind of tunable filter based on graphene |
| WO2021004183A1 (en) * | 2019-07-08 | 2021-01-14 | 深圳大学 | Resonant cavity-based terahertz device, and manufacturing method for same |
| CN111190163A (en) * | 2020-02-21 | 2020-05-22 | 深圳奥比中光科技有限公司 | Scanning device and scanning method based on reconfigurable optical super-surface layer |
| CN113258295A (en) * | 2021-05-13 | 2021-08-13 | 浙江工业大学 | Method for realizing tunable electromagnetic induction transparency based on graphene-dielectric composite super surface |
| CN114114723A (en) * | 2021-12-13 | 2022-03-01 | 浙江树人学院（浙江树人大学） | Electric control light intensity absorption device |
| CN114114723B (en) * | 2021-12-13 | 2023-10-13 | 浙江树人学院（浙江树人大学） | Electric control light intensity absorbing device |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN108181736A (en) | Electrooptic modulator based on graphene/metal composite structure | |
| Wei et al. | Plasmon waveguiding in nanowires | |
| Chao et al. | Highly sensitive metal-insulator-metal plasmonic refractive index sensor with a centrally coupled nanoring containing defects | |
| Chao et al. | Plasmonic refractive index sensor based on the combination of rectangular and circular resonators including baffles | |
| CN207895207U (en) | Electrooptic modulator based on graphene/metal composite structure | |
| Ji et al. | Surface plasmon resonance refractive index sensor based on ultraviolet bleached polymer waveguide | |
| Gan et al. | Plasmonic surface-wave splitter | |
| Wei et al. | Routing of surface plasmons in silver nanowire networks controlled by polarization and coating | |
| CN207895171U (en) | Photoswitch based on graphene/metal hybrid construction | |
| Balci et al. | Slowing surface plasmon polaritons on plasmonic coupled cavities by tuning grating grooves | |
| JP2010145399A (en) | Mixed coupling structure of short-range surface plasmon polariton and general dielectric waveguide, coupling structure of long-range surface plasmon polariton and dielectric waveguide, and its application | |
| Chou Chau | Multiple-mode bowtie cavities for refractive index and glucose sensors working in visible and near-infrared wavelength ranges | |
| Abohassan et al. | Tunable wide bandstop and narrow bandpass filters based on one-dimensional ternary photonic crystals comprising defects of silver nanoparticles in water | |
| Monfared et al. | Electro-optical switch based on one-dimensional graphene-plasmonic crystals | |
| Wu et al. | Quasi-bound state in the continuum supported by a compound grating waveguide structure for high-figure-of-merit refractive-index sensing | |
| CN102590939B (en) | Surface plasmon polariton slit light waveguide | |
| Motokura et al. | Light-controllable Fano resonance in azo-dye-doped all-dielectric multilayer structure | |
| CN108563040A (en) | Photoswitch based on graphene/metal hybrid construction | |
| DiMaria et al. | Plasmonic dispersion engineering of coupled metal nanoparticle-film systems | |
| CN102565938A (en) | Low-loss surface plasmon polariton optical waveguide based on double-layer metal | |
| Adato et al. | Modification of dispersion, localization, and attenuation of thin metal stripe symmetric surface plasmon-polariton modes by thin dielectric layers | |
| Palinski et al. | Mode switching with waveguide-coupled plasmonic nanogratings | |
| Zhou et al. | Extending the frequency range of surface plasmon polariton mode with meta-material | |
| Babych et al. | Applications of metal-dielectric nanocomposite structures in information systems | |
| Satuby et al. | Surface plasmon polariton waveguiding: From multimode stripe to a slot geometry |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| RJ01 | Rejection of invention patent application after publication | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20180619 |