CN207895207U - Electrooptic modulator based on graphene/metal composite structure - Google Patents
Electrooptic modulator based on graphene/metal composite structure Download PDFInfo
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- CN207895207U CN207895207U CN201820024606.2U CN201820024606U CN207895207U CN 207895207 U CN207895207 U CN 207895207U CN 201820024606 U CN201820024606 U CN 201820024606U CN 207895207 U CN207895207 U CN 207895207U
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Abstract
The utility model discloses a kind of electrooptic modulators based on graphene/metal composite structure, including structured metal layer, graphene layer, dielectric layer, substrate reflection layer, metal electrode and voltage source, graphene layer to include：At least one layer of graphene, graphene are laid in dielectric layer, and voltage source is connect with graphene, apply different voltage to graphene by voltage source to regulate and control the reflectivity size of incident light.According to the electrooptic modulator of the utility model embodiment, by by metal and graphene combination, the composite construction of graphene/metal being formed, to realize the adjusting function to incident light.
Description
Technical field
The utility model is related to electrooptic modulator technical fields, and graphene/metal composite is based on more particularly, to one kind
The electrooptic modulator of structure.
Background technology
Sub-wavelength structure is a kind of plane low dimensional micro-nano structure of engineer, by the unit module of sub-wavelength magnitude
It is built-up, the physical phenomenon of many ultra-traditionals can be generated.With the development of scientific and technological progress and modernization, information transmission and processing
Demand it is growing, requirement of the photoelectric component to size is more and more accurate, and traditional photoelectric device cannot be satisfied modernization
Demand, the photoelectric component of high integration made using sub-wavelength structure come into being.The photoelectric device of sub-wavelength is with light
Near field is information carrier, by the electromagnetic interaction between the optical element and near field of micro-or nano size, to realize that light is believed
Identification, detection, transmission, sensing, exchange of breath etc..The Physical Mechanism of itself and light interaction mainly swashs including surface plasma
Member, P-B phases (Pancharatnam-Berry Phase), Mie scattering (MIE).Wherein the sub-wavelength structure of metal can effectively swash
Surface plasmons is sent out, very strong RESONANCE ABSORPTION is generated at the structure of plane, by the geometric parameters for adjusting sub-wavelength structure
Number can effectively carry out the transmission of electromagnetic field or reflection the regulation and control of depth.This super surface device of novel sub-wavelength metal
Part ability of regulation and control is strong, there is that lightness, micromation, integrated, manipulation is flexible.
Single-layer graphene be by single layer of carbon atom it is tightly packed at bi-dimensional cellular shape structure material, moved with the electronics that its is high
Many peculiar Wuli-Shili-Renli system approach such as shifting rate, quantum hall effect, extremely low resistivity and high translucency, become and work as
One of hot spot in the present research.Often there is a large amount of free electron in the conductive materials such as traditional metal, and graphene is that have
The material of semiconductor property, electron concentration only 1012cm-2To 1013cm-2, while the carrier concentration of graphene can pass through
Electrode and chemistry mix regulation and control.Therefore, the photoelectric characteristic of graphene is adjustable, and can be changed in very big range.It is logical
It crosses and powers up pole on graphene, in such a way that electricity mixes, the conductivity of graphene can be changed, optically change its folding
Rate is penetrated, so as to regulate and control in real time to incident light.Therefore, the voltage that graphene can be excellent as one is regulatable
Material is used for photoelectric device.
Chinese utility model patent (CN201710516770.5) is a kind of to be based on graphene coplanar flat traveling wave absorption-type light
Modulator uses coplanar waveguide travelling wave electric pole structure, and at work, bias voltage is loaded into electrode by microwave probe
On, by changing the compound dielectric of voltage dynamic regulation graphene, to influence absorption of the strip optical waveguide to light.It is practical
Novel to use a plurality of graphene ribbon, structure is relative complex, is not directed to only adjusted and controlled with graphene planes.
The novel light modulator of Chinese utility model patent (CN107065072A) based on multimode waveguide, structure is that have
The electroluminescent Absorption modulation device of multimode modulated structure, the phase-modulator with multimode modulated structure or the horse with multi-mode structure
Conspicuous Zehnder interferometer modulator utilizes multimode waveguide optical modulation region and mode multiplexing-de-multiplexing technique so that light can be with not
Same mode is repeatedly by optical modulation region, to which enhancing is to the modulation result of light field.Utility model utilizes many waveguides
Structure is realized by the technology for being multiplexed and demultiplexing, and is not directed to the regulating and controlling voltage of graphene.
Chinese utility model patent (CN107045214A) optical modulator, structure are a kind of light modulation of Mach Zehnder dry type
Device, for the continuous light from semiconductor laser incidence, by the Quantum Well for making two-way optical waveguide branch according to electric signal
Variations in refractive index and carry out phase-modulation, so that incident continuous light partial wave, optical phase shifter is configured in a branch using optical branching filter
On the road, light and wave device make the light and wave of two branches, power-up pole be connected to two branches, apply DC voltage to realize the work(of light modulation
Energy.Unlike the utility model, which is utilized the modulator model of Mach Zehnder, with the structure of waveguide come real
It is existing.Strip waveguiding structure is utilized in utility model, is not directed to simple planar structure.
Utility model content
The utility model is intended to solve one of above-mentioned technical problem at least to a certain extent.
For this purpose, the purpose of this utility model is that propose that a kind of application voltage by outside changing regulates and controls transmitance,
When external voltage is different serial number, the reflectivity of incident light can also be changed correspondingly multiple based on graphene/metal
Close the electrooptic modulator of structure.
According to the electrooptic modulator based on graphene/metal composite structure of the utility model embodiment, including：Metal knot
Structure layer, graphene layer, dielectric layer, substrate reflection layer, metal electrode and voltage source, which is characterized in that the graphene layer includes
At least one layer of graphene, the graphene are laid in the dielectric layer, and the voltage source is connect with the graphene, by described
Voltage source applies different voltage to regulate and control the reflectivity size of incident light to the graphene.
According to the electrooptic modulator based on graphene/metal composite structure of the utility model embodiment, by by metal
Structure sheaf and graphene combine, and the composite construction of graphene/metal are formed, to realize the adjusting function to incident light.Wherein, golden
Super-absorbent can be realized by surface plasmon resonance effect to the incident light of resonance wave strong point by belonging to structure sheaf, realize certain
The transmitance of the incident light of one wavelength is regulated and controled, and regulating and controlling voltage graphene is passed through so that and graphene has different refractive index,
To change the resonant wavelength of metal structure plasmon so that " drift " occurs for the wave band of super-absorbent, and total is same
There is different transmitances under conditions of one incident light, alive size is applied according to outside to regulate and control the electrooptic modulator
Transmitance the different transmitance of this wavelength can be obtained by way of changing voltage for a certain specific wavelength.
It, can be in addition, according to the electrooptic modulator based on graphene/metal composite structure of the utility model embodiment
With following additional technical characteristic：
One embodiment according to the present utility model, the electrooptic modulator are followed successively by from bottom to top：The substrate reflection
Layer, the dielectric layer, the graphene layer and the structured metal layer, the metal electrode respectively with the graphene layer and institute
State the connection of substrate reflection layer.
One embodiment according to the present utility model, the substrate reflection layer be metallic reflector, the substrate reflection layer,
The dielectric layer and the graphene layer constitute capacitance structure.
One embodiment according to the present utility model, the substrate reflection layer are gold, silver or copper for reflection incident light.
One embodiment according to the present utility model, the structured metal layer are metal grating, the week of the metal grating
Phase at 150nm-10 μm, accounts for wide ratio in 0.2-0.9, is highly 10nm-200nm.
One embodiment according to the present utility model, the graphene layer include the 1-15 layers of graphene.
The thickness of one embodiment according to the present utility model, the dielectric layer is 0-2um.
One embodiment according to the present utility model, the dielectric layer are aluminium oxide, boron nitride, magnesium fluoride or titanium dioxide
Silicon.
One embodiment according to the present utility model, the voltage that the voltage source applies are 0-200v.
One embodiment according to the present utility model, the material of the structured metal layer be gold, silver, aluminium, nickel, chromium, titanium and
At least one of copper or its alloy.
The additional aspect and advantage of the utility model will be set forth in part in the description, partly will be from following description
In become apparent, or recognized by the practice of the utility model.
Description of the drawings
The above-mentioned and/or additional aspect and advantage of the utility model will in the description from combination following accompanying drawings to embodiment
Become apparent and is readily appreciated that, wherein：
Fig. 1 is the structure according to the electrooptic modulator based on graphene/metal composite structure of the utility model embodiment
Schematic diagram；
Fig. 2 is the fermi level diagram of graphene；
Fig. 3 is that do not had according to the electrooptic modulator based on graphene/metal composite structure of the utility model embodiment
The relational graph of light transmission rate and wavelength when graphene layer；
Fig. 4 (a) is the stone according to the electrooptic modulator based on graphene/metal composite structure of the utility model embodiment
The relational graph of light transmission rate and wavelength when black alkene layer is 5 layers under difference fermi level；
Fig. 4 (b) is the stone according to the electrooptic modulator based on graphene/metal composite structure of the utility model embodiment
The relational graph of light transmission rate and wavelength when black alkene layer is 7 layers under difference fermi level；
Fig. 4 (c) is the stone according to the electrooptic modulator based on graphene/metal composite structure of the utility model embodiment
The relational graph of light transmission rate and wavelength when black alkene layer is 10 layers under difference fermi level.
Reference numeral：
Electrooptic modulator 100 based on graphene/metal composite structure；
Substrate reflection layer 10；Dielectric layer 20；Graphene layer 30；Structured metal layer 40；Metal electrode 50.
Specific implementation mode
The embodiments of the present invention are described below in detail, examples of the embodiments are shown in the accompanying drawings, wherein from beginning
Same or similar element or element with the same or similar functions are indicated to same or similar label eventually.Below by ginseng
The embodiment for examining attached drawing description is exemplary, it is intended to for explaining the utility model, and should not be understood as to the utility model
Limitation.
In the description of the present invention, it should be understood that term "center", "upper", "lower", "vertical", "horizontal",
The orientation or positional relationship of the instructions such as "top", "bottom", "inner", "outside", " clockwise ", " counterclockwise " is side based on ... shown in the drawings
Position or position relationship, are merely for convenience of describing the present invention and simplifying the description, do not indicate or imply the indicated device
Or element must have a particular orientation, with specific azimuth configuration and operation, therefore should not be understood as to the utility model
Limitation.In addition, term " first ", " second " are used for description purposes only, be not understood to indicate or imply relative importance or
Person implicitly indicates the quantity of indicated technical characteristic." first " is defined as a result, the feature of " second " can be expressed or hidden
Include one or more this feature containing ground.In the description of the present invention, the meaning of " plurality " is two or two with
On, unless otherwise specifically defined.
In the present invention unless specifically defined or limited otherwise, term " installation ", " connected ", " connection ", " Gu
It is fixed " etc. terms shall be understood in a broad sense, for example, it may be being fixedly connected, may be a detachable connection, or be integrally connected；It can
Can also be electrical connection to be mechanical connection；It can be directly connected, can also indirectly connected through an intermediary, Ke Yishi
Connection inside two elements.For the ordinary skill in the art, above-mentioned term can be understood as the case may be
Concrete meaning in the present invention.
The electricity based on graphene/metal composite structure according to the utility model embodiment is specifically described below in conjunction with the accompanying drawings
Optical modulator 100.
As shown in Figure 1, according to the electrooptic modulator based on graphene/metal composite structure of the utility model embodiment
100 include substrate reflection layer 10, dielectric layer 20, graphene layer 30, structured metal layer 40, metal electrode 50 and voltage source.
Specifically, graphene layer 30 includes at least one layer of graphene, and graphene is laid in dielectric layer 20, voltage source and graphite
Alkene connects, and applies different voltage to graphene by voltage source to regulate and control the reflectivity size of incident light.
As a result, according to the electrooptic modulator 100 based on graphene/metal composite structure of the utility model embodiment, lead to
It crosses metal and graphene combination, the composite construction of graphene/metal is formed, to realize the adjusting function to incident light.Wherein,
Metal structure can realize that the transmitance of the incident light of a certain wavelength is regulated and controled by surface plasmon resonance effect,
Pass through regulating and controlling voltage graphene so that graphene has different refractive index, to change being total to for metal structure plasmon
Vibration wave is long so that total has different transmitances under conditions of same incident light, is applied according to outside alive big
It is small to regulate and control the transmitance of device.
One embodiment according to the present utility model, electrooptic modulator 100 are followed successively by from bottom to top：Substrate reflection layer 10,
Dielectric layer 20, graphene layer 30 and structured metal layer 40, metal electrode 50 connect with graphene layer 30 and substrate reflection layer 10 respectively
It connects.
One embodiment according to the present utility model, substrate reflection layer 10 are metallic reflector, substrate reflection layer 10, medium
Layer 20 and graphene layer 30 constitute capacitance structure.
In some specific implementation modes of the utility model, substrate reflection layer 10 be gold, silver or copper for reflect into
Penetrate light.
Optionally, structured metal layer 40 is metal grating, and the period of metal grating can be 150nm-10 μm, and accounting for wide ratio can be
0.2-0.9 highly can be 10nm-200nm.
Optionally, graphene layer 30 includes 1-15 layer graphenes.
The thickness of one embodiment according to the present utility model, dielectric layer 20 is 0-2um.
Further, dielectric layer 20 is aluminium oxide, boron nitride, magnesium fluoride or silica.
Preferably, the voltage that voltage source applies is 0-200v.
The material of one embodiment according to the present utility model, structured metal layer 40 is gold, silver, aluminium, nickel, chromium, titanium and copper
At least one of or its alloy.
It should be noted that the shape of metal grating can be rectangle, at least one of trapezoidal and equilateral triangle or its
Combination, graphene layer 30 can be laid on dielectric layer 20.
It should be noted that according to the Electro-optical Modulation based on graphene/metal composite structure of the utility model embodiment
The principle of device 100 is：Metal there are free electron, specific metal structure can generate under specific incident light frequency etc. from
Sub- plasmon resonance effect, to realize that a super-absorbent, this super-absorbent make process in corresponding resonance wave strong point
Light is all absorbed, and by selecting suitable metal, is manufactured suitable metal micro-nano structure, can be realized the super of specific band
It absorbs so that transmitance is minimum, without super-absorbent is not present in resonance wave strong point.Graphene is a kind of two be made of carbon atom
Dimensional plane film, due to its special band structure, when applying different voltage to graphene, graphene can show difference
Light refractive index.By applying different voltage, graphene may be considered a tunable material.We are by graphene
It is placed in the lower section of metal structure, tunable graphene can have an impact the Plasmon Resonance of metal.Apply different
Voltage can make metal plasma plasmon resonance frequency shift, then when we change the applied voltage of graphene, we
The super-absorbent that can obtain different wave length, for Same Wavelength, we regulate and control extraneous voltage, and device can be obtained in this wave
Long different transmitances.
The shape of metal structure, period account for the wide thickness than, dielectric layer and carry out theoretical meter according to required operation wavelength
It calculates, is calculated according to the methods of Finite-Difference Time-Domain Method or rigorous coupled wave approach.In required operating wave strong point, obtain
Fermi level when through (or reflection) different value needed for graphene.
It describes with reference to the accompanying drawings and in conjunction with specific embodiments according to the present utility model based on graphene/metal composite knot
The electrooptic modulator 100 of structure.
As shown in Figure 1, using metallic silver as substrate reflection layer 10, the thickness of substrate reflection layer 10 be set as two it is micro-
Rice ensures that reflectivity is high.Aluminium oxide (Al is equipped on substrate reflection layer 102O3) as dielectric layer 20, the thickness of dielectric layer 20 is
21nm, on alumina tiling have 10 layer graphenes as graphene layer 30, period 180nm, light are equipped on graphene layer 30
Grid width 170nm is highly the silver-colored grating of 40nm as structured metal layer 40.
According to the utility model embodiment based on the electrooptic modulator 100 of graphene/metal composite structure by using
FDTD (Finite-Difference Time-Domain Solutions) software based on Finite-Difference Time-Domain Method is imitated
Very, using 1550nm as operation wavelength, using TM polarised lights as incident light, the effect of electrooptic modulator is realized.
It can change when applying voltage to graphene as shown in Fig. 2, the energy band diagram of graphene is a dirac cone
The fermi level of graphene.
As shown in figure 3, when incident light enters structured metal layer 40, Plasmon Resonance can be generated, forms formant,
It but after making due to structured metal layer 40, can not go to change structural parameters again, change reflectivity in real time so cannot reach
Function.
As shown in Fig. 4 (a) to 4 (c), after introducing graphene, by the light transmission rate under different fermi levels, in difference
Fermi level under, obtained different formants, at 1550nm wavelength, can have been obtained when fermi level difference different
Reflectivity.When Fig. 4 (a), Fig. 4 (b) and Fig. 4 (c) are respectively 5 layers, 7 layers and 10 layer graphene, different modulation conditions.
To sum up, according to the electrooptic modulator 100 based on graphene/metal composite structure of the utility model embodiment
Compared with prior art, it has the following advantages that：
(1) using the graphene for capableing of electricity regulation and control, the voltage by simply adjusting external application can be realized based on stone
100 device of electrooptic modulator of black alkene/metal composite structure is to the regulating and controlling effect of incident light, without changing the ginseng of structure again
Number, realizes the function of real-time monitoring；
(2) modification scope of graphene is wide, can be in a kind of electricity based on graphene/metal composite structure by voltage adjusting
The effect of opening the light of multi-wavelength can be realized on 100 device of optical modulator；
(3) it is red in can to reach near-infrared in conjunction with the optical property tunability of graphene by changing the structure of metal
Outer function of opening the light (1000nm-10um).
It should be noted that compared with CN201710516770.5, CN201710516770.5 be using between waveguide not
The absorption of light, the electrooptic modulator 100 based on graphene/metal composite structure of the utility model embodiment are realized with coupling
It is to be absorbed by surface plasmon resonance to realize using planar structure, absorbing wavelength is changed by graphene, to
Realize modulation function.Compared with CN107065072A, CN107065072A be using many waveguides structure by multiplexing and
The technology of demultiplexing realizes that the electrooptic modulator 100 based on graphene/metal composite structure of the utility model embodiment is
By the way that by metal micro-nanostructure and graphene combination, the modulation function of light is realized using the function of electricity regulation and control.With
CN107045214A is compared, and the modulator model of Mach Zehnder is utilized in CN107045214A, is realized with the structure of waveguide, this
What the electrooptic modulator 100 based on graphene/metal composite structure of utility model embodiment utilized is micro nano structure and stone
Black alkene combines, and optical modulator is realized using the adjustable function of the dielectric constant of graphene.
According to other compositions of the electrooptic modulator of the utility model embodiment and operate for ordinary skill
All it is known for personnel, is not detailed herein.
In the description of this specification, reference term " one embodiment ", " some embodiments ", " example ", " specifically show
The description of example " or " some examples " etc. means specific features, structure, material or spy described in conjunction with this embodiment or example
Point is contained at least one embodiment or example of the utility model.In the present specification, to the schematic table of above-mentioned term
It states and may not refer to the same embodiment or example.Moreover, particular features, structures, materials, or characteristics described can be
It can be combined in any suitable manner in any one or more embodiments or example.
Although the embodiments of the present invention have been shown and described above, it is to be understood that above-described embodiment is
Illustratively, it should not be understood as limiting the present invention, those skilled in the art are not departing from the utility model
Principle and objective in the case of above-described embodiment can be changed in the scope of the utility model, change, replace and
Modification.
Claims (9)
1. a kind of electrooptic modulator based on graphene/metal composite structure, including structured metal layer, graphene layer, dielectric layer,
Substrate reflection layer, metal electrode and voltage source, which is characterized in that the graphene layer includes：
At least one layer of graphene, the graphene are laid in the dielectric layer, and the voltage source connect with the graphene, passes through
The voltage source applies different voltage to regulate and control the reflectivity size of incident light to the graphene；
The electrooptic modulator is followed successively by from bottom to top：The substrate reflection layer, the dielectric layer, the graphene layer and described
Structured metal layer, the metal electrode are connect with the graphene layer and the substrate reflection layer respectively.
2. the electrooptic modulator according to claim 1 based on graphene/metal composite structure, which is characterized in that described
Substrate reflection layer is metallic reflector, and the substrate reflection layer, the dielectric layer and the graphene layer constitute capacitance structure.
3. the electrooptic modulator according to claim 2 based on graphene/metal composite structure, which is characterized in that described
Substrate reflection layer is gold, silver or copper for reflection incident light.
4. the electrooptic modulator according to claim 1 based on graphene/metal composite structure, which is characterized in that described
Structured metal layer is metal grating, and the period of the metal grating at 150nm-10 μm, accounts for wide ratio in 0.2-0.9, is highly
10nm-200nm。
5. the electrooptic modulator according to claim 1 based on graphene/metal composite structure, which is characterized in that described
Graphene layer includes the 1-15 layers of graphene.
6. the electrooptic modulator according to claim 1 based on graphene/metal composite structure, which is characterized in that described
The thickness of dielectric layer is 0-2um.
7. the electrooptic modulator according to claim 6 based on graphene/metal composite structure, which is characterized in that described
Dielectric layer is aluminium oxide, boron nitride, magnesium fluoride or silica.
8. the electrooptic modulator according to claim 1 based on graphene/metal composite structure, which is characterized in that described
The voltage that voltage source applies is 0-200v.
9. the electrooptic modulator according to claim 1 based on graphene/metal composite structure, which is characterized in that described
The material of structured metal layer is at least one of gold, silver, aluminium, nickel, chromium, titanium and copper or its alloy.
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108181736A (en) * | 2018-01-08 | 2018-06-19 | 苏州大学 | Electrooptic modulator based on graphene/metal composite structure |
| CN110133799A (en) * | 2019-04-23 | 2019-08-16 | 天津大学 | The integrated polarization photo-coupler and preparation method thereof of waveguide based on graphene |
| CN111736367A (en) * | 2020-06-01 | 2020-10-02 | 西安电子科技大学 | Phase modulator based on graphene, modulation method and preparation method |
-
2018
- 2018-01-08 CN CN201820024606.2U patent/CN207895207U/en not_active Expired - Fee Related
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108181736A (en) * | 2018-01-08 | 2018-06-19 | 苏州大学 | Electrooptic modulator based on graphene/metal composite structure |
| CN110133799A (en) * | 2019-04-23 | 2019-08-16 | 天津大学 | The integrated polarization photo-coupler and preparation method thereof of waveguide based on graphene |
| CN111736367A (en) * | 2020-06-01 | 2020-10-02 | 西安电子科技大学 | Phase modulator based on graphene, modulation method and preparation method |
| CN111736367B (en) * | 2020-06-01 | 2024-02-09 | 西安电子科技大学 | Graphene-based phase modulator, modulation method and preparation method |
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