CN111239585A - Kelvin detection circuit and test method - Google Patents
Kelvin detection circuit and test method Download PDFInfo
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- CN111239585A CN111239585A CN202010037253.1A CN202010037253A CN111239585A CN 111239585 A CN111239585 A CN 111239585A CN 202010037253 A CN202010037253 A CN 202010037253A CN 111239585 A CN111239585 A CN 111239585A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2801—Testing of printed circuits, backplanes, motherboards, hybrid circuits or carriers for multichip packages [MCP]
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2801—Testing of printed circuits, backplanes, motherboards, hybrid circuits or carriers for multichip packages [MCP]
- G01R31/2818—Testing of printed circuits, backplanes, motherboards, hybrid circuits or carriers for multichip packages [MCP] using test structures on, or modifications of, the card under test, made for the purpose of testing, e.g. additional components or connectors
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Abstract
The invention relates to a Kelvin detection circuit and a test method. In the invention, multiple circuit arms correspond to ports of a tested device one by one, each circuit arm is composed of two sub-circuits, the output end connecting ends of the two sub-circuits are connected with the same port of the tested device, and the other end is an open end; the open ends of the two sub-circuits correspond to the driving end and the sensing end of the Kelvin detection circuit respectively; the switch circuit is arranged on the test board adapter plate and used for selecting two circuit arms in the detection stage, short-circuiting the two selected subcircuits in each circuit arm and connecting the two selected circuit arms to the same port of the tested device to form a test loop.
Description
Technical Field
The invention relates to the technical field of semiconductor integrated circuit testing, in particular to a Kelvin detection circuit and a testing method.
Background
In the chip testing process, various switching exists between the voltage and current (VI) source output end and the device end to be tested, and these switching and routing can cause small resistance, and the influence of these resistances on the test is very important when the current is large. For the above reasons, the Kelvin (Kelvin) structure of the VI source is very important for chip testing, and detecting the four-wire Kelvin connection of the VI source in advance is very important for ensuring the accuracy and reliability of the test result. At present, for a VI source with a built-in Kelvin detection loop, although an additional detection loop is not needed, the requirement on the Kelvin contact resistance is higher, and due to the existence of each external switching link, the relatively accurate contact resistance cannot be measured. For VI sources without Kelvin detection circuit inside, the current mainstream scheme is to add an external Kelvin detection circuit on the test board to ensure correctness of Kelvin connection. However, this solution usually needs to occupy the VI source and the relay control bit on each test board, so that few test resources are more strained originally; in addition, especially for a probe Card (Prober Card) in wafer testing, the area of a test board itself is limited, and a Kelvin detection circuit is additionally added, which inevitably increases the difficulty of layout and wiring of the Prober Card.
Disclosure of Invention
In view of the above, it is necessary to provide a kelvin detection circuit and a test method for solving the problems that the kelvin detection circuit requires more control bits and the wiring is complicated.
The invention provides a Kelvin detection circuit, comprising:
the multi-path circuit arms correspond to ports of a tested device one by one, each circuit arm is composed of two sub-circuits, the output end connecting ends of the two sub-circuits are connected with the same port of the tested device, and the other end of each sub-circuit is an open end; the open ends of the two sub-circuits correspond to the driving end and the sensing end of the Kelvin detection circuit respectively; and
and the switch circuit is arranged on the test board adapter plate and used for selecting two circuit arms and short-circuiting the two sub-circuits in each selected circuit arm in the detection stage, and then connecting the two selected circuit arms to the same port of the tested device to form a test loop.
In one embodiment, the kelvin detection circuit includes two paths of circuit arms, one path is an H-side circuit arm, the other path is an L-side circuit arm, the H-side circuit arm includes an H-side driving sub-circuit and an H-side sensing sub-circuit, and the L-side circuit arm includes an L-side driving sub-circuit and an L-side sensing sub-circuit.
In one embodiment, the switching circuit includes:
a first switch branch, a first end of which is connected to a sensing end of the H-end sensing sub-circuit, a second end of which is connected to an output end of the H-end sensing sub-circuit, a third end of which is connected to the H-end driving sub-circuit, and a fourth end of which is connected to the L-end driving sub-circuit, for short-circuiting the H-end driving sub-circuit and the H-end sensing sub-circuit, disconnecting the sensing end and the output end of the H-end sensing sub-circuit, and connecting the L-end driving sub-circuit to the output end of the H-end sensing sub-circuit when detecting a contact resistance of the H-end of the device under test;
the second switch branch circuit is connected with the L-end driving sub-circuit at one end and the sensing end of the L-end sensing sub-circuit at the other end, and is used for short-circuiting the L-end driving sub-circuit and the L-end sensing sub-circuit when detecting the contact resistance of the H/L end of the tested device; and
and a first end of the third switch branch circuit is connected with a sensing end of the L-end sensing sub-circuit, a second end of the third switch branch circuit is connected with an output end of the L-end sensing sub-circuit, a third end of the third switch branch circuit is connected with the H-end driving sub-circuit, and a fourth end of the third switch branch circuit is connected with a sensing end of the H-end sensing sub-circuit, and is used for short-circuiting the H-end driving sub-circuit and the H-end sensing sub-circuit, disconnecting the sensing end of the L-end sensing sub-circuit from the output end of the L-end sensing sub-circuit and connecting the H-end driving sub-circuit with the output end of the L-end sensing sub-circuit when.
In one embodiment, the first switching leg comprises a first double pole double throw switch;
the first double-pole double-throw switch comprises four fixed contacts, two movable contacts and two switch blades, wherein the first fixed contact is connected with a sensing end of the H-end sensing sub-circuit, the second fixed contact is connected with the L-end driving sub-circuit, the third fixed contact is connected with the H-end driving sub-circuit, the fourth fixed contact is suspended, the first movable contact is connected with an output end of the H-end sensing sub-circuit, the second movable contact is connected with a sensing end of the H-end sensing sub-circuit, the first movable contact controls the first switch blade to be switched between the first fixed contact and the second fixed contact, and the second movable contact controls the second switch blade to be switched between the third fixed contact and the fourth fixed contact.
In one embodiment, the third switching leg comprises a second double pole double throw switch;
the second double-pole double-throw switch comprises four fixed contacts, two movable contacts and two switch blades, wherein the first fixed contact is connected with the sensing end of the L-end sensing sub-circuit, the second fixed contact and the third fixed contact are both connected with the H-end driving sub-circuit, the fourth fixed contact is suspended, the first movable contact is connected with the output end of the L-end sensing sub-circuit, the second movable contact is connected with the sensing end of the H-end sensing sub-circuit, the first movable contact controls the third switch blade to be switched between the first fixed contact and the second fixed contact, and the second movable contact controls the fourth switch blade to be switched between the third fixed contact and the fourth fixed contact.
In one embodiment, the kelvin detection circuit further comprises:
the ammeter is connected in the test loop in series and used for detecting the test circuit in the test loop; and
and the voltmeter is respectively connected with the two output ends in the test loop and used for testing the test voltage between the two output ends.
Based on the same inventive concept, the invention also provides a test method of the kelvin detection circuit based on any one of the above embodiments, which comprises the following steps:
utilizing a switch circuit to respectively short circuit two sub-circuits of the two circuit arms, and connecting the four short-circuited sub-circuits to the same port of the tested device to form a test loop;
and providing input voltage for the test loop, detecting test voltage between output ends of the two sub-circuits corresponding to the same port, and determining the open-circuit connection state between the output ends of the two sub-circuits according to the test voltage.
In one embodiment, the testing method further comprises:
and detecting the test current of the test loop, and calculating the contact resistance at the port according to the test voltage and the test current obtained by detection.
In one embodiment, the switching circuit includes:
a first fixed contact of the first double-pole double-throw switch is connected with a sensing end of the H-end sensing sub-circuit, a second fixed contact of the first double-pole double-throw switch is connected with the L-end driving sub-circuit, a third fixed contact of the first double-pole double-throw switch is connected with the H-end driving sub-circuit, a fourth fixed contact of the first double-pole double-throw switch is suspended, a first moving contact of the first double-pole double-throw switch is connected with an output end of the H-end sensing sub-circuit, a second fixed contact of the first double-pole double-throw switch is connected with a sensing end of the H-end sensing sub-circuit, the first moving contact controls a first switch to switch between the first fixed contact and the second fixed;
a first fixed contact of the second double-pole double-throw switch is connected with a sensing end of the L-end sensing sub-circuit, a second fixed contact and a third fixed contact of the second double-pole double-throw switch are both connected with the H-end driving sub-circuit, a fourth fixed contact is suspended, a first moving contact is connected with an output end of the L-end sensing sub-circuit, a second moving contact is connected with a sensing end of the H-end sensing sub-circuit, the first moving contact controls a third switch to switch between the first fixed contact and the second fixed contact, and the second moving contact controls a fourth switch to switch between the third fixed contact and the fourth fixed contact;
and a third switch disposed in series between the L-terminal driving sub-circuit and a sensing terminal of the L-terminal sensing sub-circuit.
In one embodiment, detecting the contact resistance at the H-port of the device under test comprises:
throwing the first switch blade to a second stationary contact of the first double-pole double-throw switch, throwing the second switch blade to a third stationary contact of the first double-pole double-throw switch, so that the H-terminal drive sub-circuit and the H-terminal sensing sub-circuit are short-circuited, a sensing terminal and an output terminal of the H-terminal sensing sub-circuit are disconnected, the L-terminal drive sub-circuit and an output terminal of the H-terminal sensing sub-circuit are connected, and the third switch is closed, so that the L-terminal drive sub-circuit and the L-terminal sensing sub-circuit are short-circuited to form the test loop;
and providing the input voltage for the test loop, detecting to obtain the detection voltage and the detection current, and determining the contact resistance at the port of the H end of the device to be tested according to the detection voltage and the detection current.
In one embodiment, the test voltage is obtained using a voltmeter and the test current is obtained using an ammeter.
In summary, the present invention provides a kelvin detection circuit and a test method. In the invention, multiple circuit arms correspond to ports of a tested device one by one, each circuit arm is composed of two sub-circuits, the output end connecting ends of the two sub-circuits are connected with the same port of the tested device, and the other end is an open end; the open ends of the two sub-circuits correspond to the driving end and the sensing end of the Kelvin detection circuit respectively; the switch circuit is arranged on the test board adapter plate and used for selecting two circuit arms in the detection stage, short-circuiting the two selected subcircuits in each circuit arm and connecting the two selected circuit arms to the same port of the tested device to form a test loop. In the invention, the switch circuit is arranged on the test board adapter plate, and the detection can be carried out by utilizing the space on the test board adapter plate and the spare relay control bit resource, so that the area of the test board is not occupied, and the test resource on the test board is not occupied.
Drawings
Fig. 1 is a schematic structural diagram of a kelvin detection circuit according to an embodiment of the present invention;
FIG. 2 is a diagram of an exemplary Kelvin detection scheme provided by an embodiment of the present invention;
fig. 3 is a schematic flow chart of a test method based on a kelvin detection circuit according to the present invention.
Detailed Description
In order to make the aforementioned objects, features and advantages of the present invention comprehensible, embodiments accompanied with figures are described in detail below. In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present invention. This invention may, however, be embodied in many different forms and should not be construed as limited to the embodiments set forth herein, but rather should be construed as broadly as the present invention is capable of modification in various respects, all without departing from the spirit and scope of the present invention.
Referring to fig. 1, an embodiment of the invention provides a kelvin detection circuit, which includes a multi-path circuit arm 100 and a switch circuit 200.
The multi-path circuit arms 100 correspond to ports of a device to be tested one by one, each circuit arm is composed of two sub-circuits, the output end connecting ends of the two sub-circuits are connected with the same port of the device to be tested, and the other end of each sub-circuit is an open end; the open ends of the two sub-circuits correspond to the driving end and the sensing end of the Kelvin detection circuit respectively.
The switch circuit 200 is disposed on the test board adapter plate, and is configured to select two circuit arms and short-circuit the two sub-circuits in each selected circuit arm in a detection stage, and then connect the two selected circuit arms to a same port of the device under test to form a test loop.
It can be understood that for the VI source without the built-in Kelvin detection loop, please refer to fig. 1, and the external Kelvin detection principle diagram of the VI source shows multiple sets of relays, which can implement external Kelvin detection. The detection loop is composed of four inputs FH, SH, FL, and SL, connected to the four-wire output inside the VI source, and four outputs FH ', SH', FL ', and SL', connected to the DUT (device under test). In the structure, a switching relay is arranged between FH and SH and used for short-circuiting FH and SH of a VI source in advance, and a switching relay is arranged between FL and SL and used for short-circuiting FL and SL of the VI source in advance; a switching relay is arranged between FH and SH ', and between SL and SL' to respectively cut off SH and SH ', and SL'; a switching relay is arranged between FH and SL ' and between SH ' and FL ', Kelvin detection of a High end and a Low end at a DUT can be realized, and the Kelvin contact resistance value can be relatively accurately measured. However, this solution usually requires the use of VI sources and relay control bits on each DUT test board, which places a strain on the otherwise scarce test resources.
In the invention, the switch circuit 200 is arranged on the test board adapter plate, two sub-circuits of two circuit arms are respectively short-circuited in the detection stage, and four short-circuited sub-circuits are connected to the same port of the tested device to form a test loop, so that the space on the test board adapter plate and the spare relay control bit resource can be used for detection, the area of the test board is not occupied, and the test resource on the test board is not occupied.
In one embodiment, the kelvin detection circuit includes two circuit arms, one of which is an H-side circuit arm and the other is an L-side circuit arm, where the H-side circuit arm includes an H-side driver sub-circuit 110 and an H-side sense sub-circuit 120, and the L-side circuit arm includes an L-side driver sub-circuit 130 and an L-side sense sub-circuit 140.
It can be understood that the H-side circuit arm and the L-side circuit arm form a four-wire connection method, which is beneficial to eliminating the influence of resistance in a test circuit, thereby ensuring the accuracy when measuring low resistance.
In one embodiment, the switching circuit 200 includes a first switching leg 210, a second switching leg 220, and a third switching leg 230.
The first switch branch 210 has a first end connected to the sensing end of the H-terminal sensing sub-circuit 120, a second end connected to the output end of the H-terminal sensing sub-circuit 120, a third end connected to the H-terminal driving sub-circuit 110, and a fourth end connected to the L-terminal driving sub-circuit 130, and is configured to short-circuit the H-terminal driving sub-circuit 110 and the H-terminal sensing sub-circuit 120, disconnect the sensing end and the output end of the H-terminal sensing sub-circuit 120, and connect the L-terminal driving sub-circuit 130 to the output end of the H-terminal sensing sub-circuit 120 when detecting the contact resistance of the H-terminal of the device under test.
The second switch branch 220 has one end connected to the L-terminal driving sub-circuit 130 and the other end connected to the sensing end of the L-terminal sensing sub-circuit 140, and is used for short-circuiting the L-terminal driving sub-circuit 130 and the L-terminal sensing sub-circuit 140 when detecting the contact resistance of the H/L terminal of the device under test.
The third switch branch 230 has a first end connected to the sensing end of the L-terminal sensing sub-circuit 140, a second end connected to the output end of the L-terminal sensing sub-circuit 140, a third end connected to the H-terminal driving sub-circuit 110, and a fourth end connected to the sensing end of the H-terminal sensing sub-circuit 120, and is configured to, when detecting the contact resistance of the L-terminal of the device under test, short-circuit the H-terminal driving sub-circuit 110 and the H-terminal sensing sub-circuit 120, disconnect the sensing end and the output end of the L-terminal sensing sub-circuit 140, and connect the H-terminal driving sub-circuit 110 to the output end of the L-terminal sensing sub-circuit 140.
In one embodiment, the first switching leg 210 includes a first double pole double throw switch K1.
The first double-pole double-throw switch K1 includes four fixed contacts, two movable contacts and two switches, a first fixed contact P11 is connected to a sensing end FH of the H-end sensing sub-circuit 120, a second fixed contact P12 is connected to the L-end driving sub-circuit 130, a third fixed contact P13 is connected to the H-end driving sub-circuit 110, a fourth fixed contact P14 is suspended, a first movable contact P15 is connected to an output end SH' of the H-end sensing sub-circuit 120, a second movable contact P16 is connected to a sensing end SH of the H-end sensing sub-circuit 120, the first movable contact P15 controls the first switch to switch between the first fixed contact P11 and the second fixed contact P12, and the second movable contact P16 controls the second switch between the third fixed contact P13 and the fourth fixed contact P14.
When the device is used for a formed DUT test circuit, the first moving contact P15 of the first double-pole double-throw switch K1 controls the first switch to be connected with the first fixed contact P11 of the first double-pole double-throw switch K1, and the second moving contact P16 of the first double-pole double-throw switch K1 controls the second switch to be connected with the fourth fixed contact P14 of the first double-pole double-throw switch K1. In the process of testing the connection state of the ports, the first moving contact P15 of the first double-pole double-throw switch K1 controls the first switch to be connected with the second fixed contact P12 of the first double-pole double-throw switch K1, the second moving contact P16 of the first double-pole double-throw switch K1 controls the second switch to be connected with the third fixed contact P13 of the first double-pole double-throw switch K1, and the H-terminal driving sub-circuit 110 is short-circuited with the H-terminal sensing sub-circuit 120 and connected to the output terminal FH' of the H-terminal driving sub-circuit 110. In addition, the L-terminal driving sub-circuit 130 and the L-terminal sensing sub-circuit 140 are short-circuited through the second switching branch 220 and connected to the output terminal SH' of the H-terminal sensing sub-circuit 120, and then a small voltage is applied and detected back. If the output end FH 'is short-circuited with the output end SH', a voltage value close to zero is detected; if the output terminal FH 'is open-circuited with the output terminal SH', the applied voltage value is detected.
Further, if quantitative measurement of the Kelvin contact resistance is required, a FVMI pressure flow measurement (or FIMV flow measurement) mode can be adopted. Applying a small voltage V1, measuring the current I1, and calculating the Kelvin contact resistance RHAnd V1/I1, namely the connection condition of the High end at the DUT and the resistance value of the Kelvin contact resistor.
In one embodiment, the third switching leg 230 includes a second double pole double throw switch K2.
The second double-pole double-throw switch K2 includes four fixed contacts, two movable contacts and two knife switches, a first fixed contact P21 of the second double-pole double-throw switch K2 is connected to a sensing terminal SL of the L-terminal sensing sub-circuit 140, a second fixed contact P21 of the second double-pole double-throw switch K2 and a third fixed contact P23 of the second double-pole double-throw switch K are connected to the H-terminal driving sub-circuit 110, a fourth fixed contact P24 of the second double-pole double-throw switch K is suspended, a first movable contact P25 of the second double-pole double-throw switch K is connected to an output terminal SL 'of the L-terminal sensing sub-circuit 140, a second movable contact P26 of the second double-pole double-throw switch K is connected to a sensing terminal SH of the H-terminal sensing sub-circuit 120, and a first movable contact P4934 of the second movable contact is connected to an output terminal SL' of the L-.
When the circuit is used for a formed DUT test circuit, the first moving contact P25 of the second double-pole double-throw switch K2 is connected with the first fixed contact P21 through the third switch, and the second moving contact P26 of the second double-pole double-throw switch K2 controls the fourth switch to be connected with the fourth fixed contact P24. In the process of testing the connection state of the ports, the first moving contact P25 of the second double-pole double-throw switch K2 is connected with the second fixed contact P22 through the third switch, and the second moving contact P26 of the second double-pole double-throw switch K2 controls the fourth switch to be connected with the third fixed contact P23. At this time, the H-side driving sub-circuit 110 and the H-side sensing sub-circuit 120 are short-circuited and connected to the output end SL' of the L-side sensing sub-circuit 140. In addition, the L-terminal driving sub-circuit 130 and the L-terminal sensing sub-circuit 140 are short-circuited through the second switching branch 220 and connected to the output terminal FL' of the L-terminal driving sub-circuit 130, and then a small voltage is applied and sensed back. If the output end FL 'is short-circuited with the output end SL', a voltage value close to zero is detected; if the output end FL 'is open-circuited with the output end SL', the applied voltage value is detected back.
Further, if quantitative measurement of Kelvin contact resistance is required, FVMI (or FIMV flow manometry) may be used. Applying a small voltage V2, measuring the current I2, and calculating the Kelvin contact resistance RLAnd V2/I2, namely the connection condition of the Low end at the DUT and the resistance value of the Kelvin contact resistor.
In one embodiment, the kelvin detection circuit further includes an ammeter (not shown) and a voltmeter (not shown).
The ammeter is connected in series in the test loop and used for detecting the test circuit in the test loop.
The voltmeter is respectively connected with the two output ends in the test loop and used for testing the test voltage between the two output ends.
Based on the kelvin detection circuit described in any of the above embodiments, an embodiment of the present invention further provides a test method, please refer to fig. 3, where the test method includes:
step S310, selecting two circuit arms by using the switch circuit 200, short-circuiting the two sub-circuits in each selected circuit arm, and connecting the two selected circuit arms to the same port of the tested device to form a test loop;
step S320, providing an input voltage for the test loop, detecting a test voltage between the output ends of the two sub-circuits corresponding to the same port, and determining an open connection state between the output ends of the two sub-circuits according to the test voltage.
The connection status of each port of the DUT device can be detected in the manner described above. In the invention, the switch circuit 200 is arranged on the test board adapter plate, two sub-circuits of two circuit arms are respectively short-circuited in the detection stage, and four short-circuited sub-circuits are connected to the same port of the tested device to form a test loop, so that the space on the test board adapter plate and the spare relay control bit resource can be used for detection, the area of the test board is not occupied, and the test resource on the test board is not occupied.
In one embodiment, the method further comprises:
and detecting the test current of the test loop, and calculating the contact resistance at the port according to the test voltage and the test current obtained by detection.
In one embodiment, the kelvin detection circuit includes two circuit arms, one of which is an H-side circuit arm including an H-side driver sub-circuit 110 and an H-side sense sub-circuit 120, and the other of which is an L-side circuit arm including an L-side driver sub-circuit 130 and an L-side sense sub-circuit 140. It can be understood that the H-side circuit arm and the L-side circuit arm form a four-wire connection method, which is beneficial to eliminating the influence of resistance in a test circuit, thereby ensuring the accuracy when measuring low resistance.
In one embodiment, the switch circuit 200 includes a first double pole double throw switch K1, a second double pole double throw switch K2, and a third switch K3.
The first double-pole double-throw switch K1 includes four fixed contacts, two movable contacts and two switches, a first fixed contact P11 is connected to a sensing end FH of the H-end sensing sub-circuit 120, a second fixed contact P12 is connected to the L-end driving sub-circuit 130, a third fixed contact P13 is connected to the H-end driving sub-circuit 110, a fourth fixed contact P14 is suspended, a first movable contact P15 is connected to an output end SH' of the H-end sensing sub-circuit 120, a second movable contact P16 is connected to a sensing end SH of the H-end sensing sub-circuit 120, the first movable contact P15 controls the first switch to switch between the first fixed contact P11 and the second fixed contact P12, and the second movable contact P16 controls the second switch between the third fixed contact P13 and the fourth fixed contact P14.
When the device is used for a formed DUT test circuit, the first moving contact P15 of the first double-pole double-throw switch K1 controls the first switch to be connected with the first fixed contact P11 of the first double-pole double-throw switch K1, and the second moving contact P16 of the first double-pole double-throw switch K1 controls the second switch to be connected with the fourth fixed contact P14 of the first double-pole double-throw switch K1. In the process of testing the connection state of the ports, the first moving contact P15 of the first double-pole double-throw switch K1 controls the first switch to be connected with the second fixed contact P12 of the first double-pole double-throw switch K1, the second moving contact P16 of the first double-pole double-throw switch K1 controls the second switch to be connected with the third fixed contact P13 of the first double-pole double-throw switch K1, and the H-terminal driving sub-circuit 110 is short-circuited with the H-terminal sensing sub-circuit 120 and connected to the output terminal FH' of the H-terminal driving sub-circuit 110. In addition, the L-terminal driving sub-circuit 130 and the L-terminal sensing sub-circuit 140 are short-circuited through the second switching branch 220 and connected to the output terminal SH' of the H-terminal sensing sub-circuit 120, and then a small voltage is applied and detected back. If the output end FH 'is short-circuited with the output end SH', a voltage value close to zero is detected; if the output terminal FH 'is open-circuited with the output terminal SH', the applied voltage value is detected.
The second double-pole double-throw switch K2 includes four fixed contacts, two movable contacts and two knife switches, a first fixed contact P21 of the second double-pole double-throw switch K2 is connected to a sensing terminal SL of the L-terminal sensing sub-circuit 140, a second fixed contact P21 of the second double-pole double-throw switch K2 and a third fixed contact P23 of the second double-pole double-throw switch K are connected to the H-terminal driving sub-circuit 110, a fourth fixed contact P24 of the second double-pole double-throw switch K is suspended, a first movable contact P25 of the second double-pole double-throw switch K is connected to an output terminal SL 'of the L-terminal sensing sub-circuit 140, a second movable contact P26 of the second double-pole double-throw switch K is connected to a sensing terminal SH of the H-terminal sensing sub-circuit 120, and a first movable contact P4934 of the second movable contact is connected to an output terminal SL' of the L-.
When the circuit is used for a formed DUT test circuit, the first moving contact P25 of the second double-pole double-throw switch K2 is connected with the first fixed contact P21 through the third switch, and the second moving contact P26 of the second double-pole double-throw switch K2 controls the fourth switch to be connected with the fourth fixed contact P24. In the process of testing the connection state of the ports, the first moving contact P25 of the second double-pole double-throw switch K2 is connected with the second fixed contact P22 through the third switch, and the second moving contact P26 of the second double-pole double-throw switch K2 controls the fourth switch to be connected with the third fixed contact P23. At this time, the H-side driving sub-circuit 110 and the H-side sensing sub-circuit 120 are short-circuited and connected to the output end SL' of the L-side sensing sub-circuit 140. In addition, the L-terminal driving sub-circuit 130 and the L-terminal sensing sub-circuit 140 are short-circuited through the second switching branch 220 and connected to the output terminal FL' of the L-terminal driving sub-circuit 130, and then a small voltage is applied and sensed back. If the output end FL 'is short-circuited with the output end SL', a voltage value close to zero is detected; if the output end FL 'is open-circuited with the output end SL', the applied voltage value is detected back.
The third switch K3 is serially disposed between the sensing terminals of the L-terminal driving sub-circuit 130 and the L-terminal sensing sub-circuit 140.
In one embodiment, detecting the contact resistance at the H-port of the device under test comprises:
throwing the first knife-switch towards a second stationary contact P12 of the first double pole double throw switch, throwing the second knife-switch towards a third stationary contact P13 of the first double pole double throw switch, so that the H-terminal drive sub-circuit 110 and the H-terminal sense sub-circuit 120 are short-circuited, the sense terminal and the output terminal of the H-terminal sense sub-circuit 120 are disconnected, the L-terminal drive sub-circuit 130 and the output terminal of the H-terminal sense sub-circuit 120 are connected, and closing the third switch, so that the L-terminal drive sub-circuit 130 and the L-terminal sense sub-circuit 140 are short-circuited, constituting the test loop;
and providing the input voltage for the test loop, detecting to obtain the detection voltage and the detection current, and determining the contact resistance at the port of the H end of the device to be tested according to the detection voltage and the detection current.
In this embodiment, when the Kelvin contact resistance is quantitatively tested, an FVMI pressure-applying flow-measuring (or FIMV flow-applying pressure-measuring) mode is adopted. Applying a small voltage V1, measuring the current I1, and calculating the Kelvin contact resistance RHAnd V1/I1, namely the connection condition of the High end at the DUT and the resistance value of the Kelvin contact resistor. Similarly, the connection condition of the Low end at the DUT and the resistance value of the kelvin contact resistor can be obtained, which is not described in detail.
In one embodiment, the test voltage is obtained using a voltmeter and the test current is obtained using an ammeter.
In summary, the present invention provides a kelvin detection circuit and a test method. In the invention, multiple circuit arms correspond to ports of a tested device one by one, each circuit arm is composed of two sub-circuits, the output end connecting ends of the two sub-circuits are connected with the same port of the tested device, and the other end is an open end; the open ends of the two sub-circuits correspond to the driving end and the sensing end of the Kelvin detection circuit respectively; the switch circuit 200 is disposed on the test board adapter plate, and is configured to select two circuit arms and short-circuit the two sub-circuits in each selected circuit arm in a detection stage, and then connect the two selected circuit arms to a same port of the device under test to form a test loop. In the invention, the switch circuit 200 is arranged on the test board adapter plate, and can utilize the space on the test board adapter plate and the spare relay control bit resource for detection, thereby occupying neither the area of the test board nor the test resource on the test board.
The technical features of the embodiments described above may be arbitrarily combined, and for the sake of brevity, all possible combinations of the technical features in the embodiments described above are not described, but should be considered as being within the scope of the present specification as long as there is no contradiction between the combinations of the technical features.
The above-mentioned embodiments only express several embodiments of the present invention, and the description thereof is more specific and detailed, but not construed as limiting the scope of the invention. It should be noted that, for a person skilled in the art, several variations and modifications can be made without departing from the inventive concept, which falls within the scope of the present invention. Therefore, the protection scope of the present patent shall be subject to the appended claims.
Claims (12)
1. A kelvin detection circuit, comprising:
the multi-path circuit arms correspond to ports of a tested device one by one, each circuit arm is composed of two sub-circuits, the output end connecting ends of the two sub-circuits are connected with the same port of the tested device, and the other end of each sub-circuit is an open end; the open ends of the two sub-circuits correspond to the driving end and the sensing end of the Kelvin detection circuit respectively; and
and the switch circuit is arranged on the test board adapter plate and used for selecting two circuit arms and short-circuiting the two sub-circuits in each selected circuit arm in the detection stage, and then connecting the two selected circuit arms to the same port of the tested device to form a test loop.
2. The kelvin detection circuit according to claim 1, wherein said kelvin detection circuit comprises two said circuit arms, one being an H-side circuit arm and the other being an L-side circuit arm, said H-side circuit arm comprising an H-side driver sub-circuit and an H-side sense sub-circuit, said L-side circuit arm comprising an L-side driver sub-circuit and an L-side sense sub-circuit.
3. The kelvin detection circuit of claim 2, wherein the switching circuit comprises:
a first switch branch, a first end of which is connected to a sensing end of the H-end sensing sub-circuit, a second end of which is connected to an output end of the H-end sensing sub-circuit, a third end of which is connected to the H-end driving sub-circuit, and a fourth end of which is connected to the L-end driving sub-circuit, for short-circuiting the H-end driving sub-circuit and the H-end sensing sub-circuit, disconnecting the sensing end and the output end of the H-end sensing sub-circuit, and connecting the L-end driving sub-circuit to the output end of the H-end sensing sub-circuit when detecting a contact resistance of the H-end of the device under test;
the second switch branch circuit is connected with the L-end driving sub-circuit at one end and the sensing end of the L-end sensing sub-circuit at the other end, and is used for short-circuiting the L-end driving sub-circuit and the L-end sensing sub-circuit when detecting the contact resistance of the H/L end of the tested device; and
and a first end of the third switch branch circuit is connected with a sensing end of the L-end sensing sub-circuit, a second end of the third switch branch circuit is connected with an output end of the L-end sensing sub-circuit, a third end of the third switch branch circuit is connected with the H-end driving sub-circuit, and a fourth end of the third switch branch circuit is connected with a sensing end of the H-end sensing sub-circuit, and is used for short-circuiting the H-end driving sub-circuit and the H-end sensing sub-circuit, disconnecting the sensing end of the L-end sensing sub-circuit from the output end of the L-end sensing sub-circuit and connecting the H-end driving sub-circuit with the output end of the L-end sensing sub-circuit when.
4. The Kelvin detection circuit of claim 3, wherein the first switching leg comprises a first double-pole double-throw switch;
the first double-pole double-throw switch comprises four fixed contacts, two movable contacts and two switch blades, wherein the first fixed contact is connected with a sensing end of the H-end sensing sub-circuit, the second fixed contact is connected with the L-end driving sub-circuit, the third fixed contact is connected with the H-end driving sub-circuit, the fourth fixed contact is suspended, the first movable contact is connected with an output end of the H-end sensing sub-circuit, the second movable contact is connected with a sensing end of the H-end sensing sub-circuit, the first movable contact controls the first switch blade to be switched between the first fixed contact and the second fixed contact, and the second movable contact controls the second switch blade to be switched between the third fixed contact and the fourth fixed contact.
5. The Kelvin detection circuit of claim 3, wherein the third switch leg comprises a second double-pole double-throw switch;
the second double-pole double-throw switch comprises four fixed contacts, two movable contacts and two switch blades, wherein the first fixed contact is connected with the sensing end of the L-end sensing sub-circuit, the second fixed contact and the third fixed contact are both connected with the H-end driving sub-circuit, the fourth fixed contact is suspended, the first movable contact is connected with the output end of the L-end sensing sub-circuit, the second movable contact is connected with the sensing end of the H-end sensing sub-circuit, the first movable contact controls the third switch blade to be switched between the first fixed contact and the second fixed contact, and the second movable contact controls the fourth switch blade to be switched between the third fixed contact and the fourth fixed contact.
6. The kelvin detection circuit of claim 1, further comprising:
the ammeter is connected in the test loop in series and used for detecting the test circuit in the test loop; and
and the voltmeter is respectively connected with the two output ends in the test loop and used for testing the test voltage between the two output ends.
7. A test method based on the Kelvin detection circuit of any one of claims 1-6, characterized by comprising:
utilizing a switch circuit to respectively short circuit two sub-circuits of the two circuit arms, and connecting the four short-circuited sub-circuits to the same port of the tested device to form a test loop;
and providing input voltage for the test loop, detecting test voltage between output ends of the two sub-circuits corresponding to the same port, and determining the open-circuit connection state between the output ends of the two sub-circuits according to the test voltage.
8. The test method of claim 7, further comprising:
and detecting the test current of the test loop, and calculating the contact resistance at the port according to the test voltage and the test current obtained by detection.
9. The method according to claim 7, wherein the kelvin detection circuit comprises two circuit arms, one of which is an H-side circuit arm and the other of which is an L-side circuit arm, the H-side circuit arm comprises an H-side driver sub-circuit and an H-side sense sub-circuit, and the L-side circuit arm comprises an L-side driver sub-circuit and an L-side sense sub-circuit.
10. The test method of claim 9, wherein the switching circuit comprises:
a first fixed contact of the first double-pole double-throw switch is connected with a sensing end of the H-end sensing sub-circuit, a second fixed contact of the first double-pole double-throw switch is connected with the L-end driving sub-circuit, a third fixed contact of the first double-pole double-throw switch is connected with the H-end driving sub-circuit, a fourth fixed contact of the first double-pole double-throw switch is suspended, a first moving contact of the first double-pole double-throw switch is connected with an output end of the H-end sensing sub-circuit, a second fixed contact of the first double-pole double-throw switch is connected with a sensing end of the H-end sensing sub-circuit, the first moving contact controls a first switch to switch between the first fixed contact and the second fixed;
a first fixed contact of the second double-pole double-throw switch is connected with a sensing end of the L-end sensing sub-circuit, a second fixed contact and a third fixed contact of the second double-pole double-throw switch are both connected with the H-end driving sub-circuit, a fourth fixed contact is suspended, a first moving contact is connected with an output end of the L-end sensing sub-circuit, a second moving contact is connected with a sensing end of the H-end sensing sub-circuit, the first moving contact controls a third switch to switch between the first fixed contact and the second fixed contact, and the second moving contact controls a fourth switch to switch between the third fixed contact and the fourth fixed contact;
and a third switch disposed in series between the L-terminal driving sub-circuit and a sensing terminal of the L-terminal sensing sub-circuit.
11. The method of testing as claimed in claim 10, wherein detecting contact resistance at an H-port of the device under test comprises:
throwing the first switch blade to a second stationary contact of the first double-pole double-throw switch, throwing the second switch blade to a third stationary contact of the first double-pole double-throw switch, so that the H-terminal drive sub-circuit and the H-terminal sensing sub-circuit are short-circuited, a sensing terminal and an output terminal of the H-terminal sensing sub-circuit are disconnected, the L-terminal drive sub-circuit and an output terminal of the H-terminal sensing sub-circuit are connected, and the third switch is closed, so that the L-terminal drive sub-circuit and the L-terminal sensing sub-circuit are short-circuited to form the test loop;
and providing the input voltage for the test loop, detecting to obtain the detection voltage and the detection current, and determining the contact resistance at the port of the H end of the device to be tested according to the detection voltage and the detection current.
12. The test method of claim 8, wherein the test voltage is obtained using a voltmeter and the test current is obtained using an ammeter.
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US11315453B1 (en) | 2020-11-08 | 2022-04-26 | Innolux Corporation | Tiled display device with a test circuit |
| WO2023137848A1 (en) * | 2022-01-18 | 2023-07-27 | 长鑫存储技术有限公司 | Detection method and apparatus for semiconductor structure, and device and storage medium |
| CN117233436A (en) * | 2023-11-15 | 2023-12-15 | 青岛泰睿思微电子有限公司 | Kelvin test switching device and test switching method for discrete device |
-
2020
- 2020-01-14 CN CN202010037253.1A patent/CN111239585A/en active Pending
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US11315453B1 (en) | 2020-11-08 | 2022-04-26 | Innolux Corporation | Tiled display device with a test circuit |
| CN114464080A (en) * | 2020-11-08 | 2022-05-10 | 群创光电股份有限公司 | Electronic device |
| TWI786876B (en) * | 2020-11-08 | 2022-12-11 | 群創光電股份有限公司 | Electronic device |
| WO2023137848A1 (en) * | 2022-01-18 | 2023-07-27 | 长鑫存储技术有限公司 | Detection method and apparatus for semiconductor structure, and device and storage medium |
| CN117233436A (en) * | 2023-11-15 | 2023-12-15 | 青岛泰睿思微电子有限公司 | Kelvin test switching device and test switching method for discrete device |
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