CN211741497U - Voltage current source test circuit - Google Patents

Abstract

The utility model provides a voltage current source test circuit, this test circuit includes voltage current source, this voltage current source includes the control unit, exports power amplifier circuit, current measurement circuit and voltage measurement circuit, and the four-wire kelvin circuit that connects thereof, this four-wire kelvin circuit includes high-end current drive circuit, high-end voltage sensing circuit, low-end current drive circuit, low-end voltage sensing circuit; the voltage current source further includes a four-way voltage measurement circuit corresponding to the four-wire kelvin circuit. The utility model discloses an increase four ways voltage measurement circuit and realize extra difference voltage measurement to the pressure drop on the measuring current line, still increase the switching circuit at this voltage current source device's output simultaneously, realize kelvin measuring circuit's overlap joint switching, thereby realize at every turn before the test equivalent contact resistance test on the current line.

Description

Voltage current source test circuit

Technical Field

The utility model relates to an integrated circuit tests technical field, in particular to voltage current source test circuit.

Background

In integrated circuit testing, a voltage current source (hereinafter referred to as a VI source) is required for signal excitation and voltage current measurement of a Device Under Test (hereinafter referred to as a DUT).

In order to improve the accuracy of the output voltage and the test voltage, the conventional VI source adopts a four-wire Kelvin (Kelvin) connection mode, which is a High-end current driving circuit (FH, Force High), a High-end voltage sensing circuit (SH, Sense High), a Low-end current driving circuit (FL, Force Low), and a Low-end voltage sensing circuit (SL, Sense Low). Wherein current is output (or input) from the High-side current drive circuit (FH, Force High) and is returned (or output) from the Low-side current drive circuit (FL, Force Low). The rf and the Rfl are equivalent resistances generated in the FH and FL transmission links, respectively, and a current flows through the rf and the Rfl, so that a certain voltage drop is generated in the current transmission link.

The voltage measurement is taken as the difference between the High-side voltage sensing circuit (SH, Sense High) and the Low-side voltage sensing circuit (SL, Sense Low) as the voltage difference on the DUT. The SH end and the SL end are internally provided with high-impedance input ends, and the voltage of the near end and the far end of the signal is the same. Wherein Rsh and Rsl are equivalent resistances of the transmission link at the SH end and the SL end, respectively. Because the SH end and the SL end are internally provided with high-impedance input ends, the good contact between the Rsh and the Rsl is in the magnitude below ohm, and the good contact is in the magnitude above megaohm when the contact is poor. When the contact is good, compared with the high impedance with the magnitude of more than kilomega inside the SH end and the SL end, the high impedance can be ignored, so that the pressure difference between the Rsh and the Rsl is very small and can be ignored.

Fig. 1 shows a conventional VI source architecture, which includes a SH terminal and an SL terminal connected to a differential operational amplifier OP2 in common and then connected to a CONTROL terminal, a voltage follower OP1 connected in series to the SH terminal, a voltage follower OP5 connected in series to the SL terminal, a span resistor Ri connected in series to the FL terminal, a current differential measurement OP4 connected in parallel to both terminals of the span resistor Ri, and an output power amplifier OP3 connected in series between the CONTROL terminal and the FH terminal. When the VI source framework works, the CONTROL sets the VI source mode state corresponding to the VI source mode according to the needed VI source mode, drives the output power amplifier OP3 to work, outputs the VI source mode from the FH end, carries out voltage following measurement on the voltage follower OP1 and the voltage follower OP5 to respectively obtain Vsh and Vsl, obtains a Vmeter signal through the differential operational amplifier OP2, and sends the Vmeter signal into the CONTROL for feedback and measurement; meanwhile, after a signal output from the FH end flows to the FL end through the DUT, the signal flows to the GND end through the Ri finally; and the differential amplifier OP4 measures the voltage at two ends of Ri to obtain an Imeter signal, and the Imeter signal is sent to the CONTROL for feedback and measurement.

As shown in fig. 2, when a conventional VI source architecture is used to stimulate a signal or measure voltage and current at a DUT, a four-wire kelvin connection is also typically used to subtract out the voltage difference produced by the current at the equivalent resistance of the current wire, thereby accurately measuring the voltage difference across the DUT.

However, in practical applications, the output from the VI source can reach the DUT through cables, various adapter sockets, gold fingers, or probes, and each link has a transmission resistance or a contact resistance, which causes different voltage drops. The power transmission resistor on the fixed connection circuit such as a cable is relatively stable, and the voltage drop on the power transmission resistor under a certain current is relatively fixed. In the case of a socket, particularly a gold finger or a probe, which has electrical connection due to pressure, the contact resistance is related to the contact pressure, and also related to the cleanliness and flatness of the contact surface.

Particularly, when the golden finger or the probe is used, the golden finger or the probe is respectively contacted with a plurality of devices for a plurality of times, so that the problems of reduction of the cleanliness of a contact surface, unevenness of the contact surface or reduction of contact pressure due to use abrasion exist; this problem causes the test contact resistance to become abnormally large, resulting in test abnormality. Therefore, the possible poor contact needs to be detected, once the poor contact is found, the surface of the golden finger or the probe needs to be cleaned in time, and if the surface is still abnormal, the contact pressure needs to be adjusted; if the abnormality still occurs, the gold finger or probe needs to be replaced to ensure good contact.

The conventional VI source architecture cannot accurately measure equivalent contact resistances on a current line, namely, rfc and Rflc, and the equivalent contact resistances have a great influence on the voltage drop of the current line in a high-current test, and the equivalent contact resistances may change in each test process. In each test of the VI source, if the equivalent contact resistance values can be accurately measured, whether the contact link has reliability risks (such as contact resistance change caused by oxidation, abrasion, impurities and the like of a golden finger) can be quickly judged, so that an early alarm is given according to test data, and equipment maintenance is carried out to reduce later-stage greater quality risks, such as: the problems of needle burning, device burning, VI source burning and the like are more serious especially in the tests of high power and large current.

Based on this, the conventional VI source architecture is improved, as shown in fig. 3, by adding one differential voltage measurement circuit to each of the high and low ends of the VI source based on the four-wire kelvin connection of the conventional VI source to implement additional differential voltage measurement to measure the voltage drop on the current line, thereby implementing dynamic equivalent contact resistance on the read back current line at each test.

On the basis of fig. 3, which is an improvement of the conventional VI source architecture, when the measurement connection circuit shown in fig. 4 is used to measure the contact resistance at two ends (a High end and a low end) of the DUT, the measurement current passes through the FL end of the VI source, flows through Rfl, Rflc, DUT, Rfhc, and Rfh, and finally flows into the FH end of the VI source, and through two differential operational amplifiers added at the High end and the low end, the differential voltages at the SH end, the SHx end, the SL end, and the SLx end are simultaneously tested to obtain Vdiff _ High and Vdiff _ low voltages, which are calculated with the set current to obtain the values of Rfhc and Rflc.

Although the improved VI source architecture and the measurement connection circuit thereof shown in fig. 3 and 4 can be well tested to obtain the values of rfc and Rflc, there are several problems:

first, the contact test of the improved VI source architecture has a precondition that the device is required to be matched, that is, the device has a certain current flowing capability or a certain current flowing capability in one direction, such as a protection diode or a parasitic diode of the device itself, because the current for the contact resistance test needs to flow through the device to be tested. If the device itself is abnormal, such as the protective diode or the parasitic diode is abnormal or an empty tube appears, the abnormality can be mistaken as contact abnormality, and the test parameter statistics of production and the maintenance of the golden finger are further influenced;

secondly, for some devices, the pin does not have or needs other resources to cooperate to have a certain current flowing capability or a certain unidirectional current flowing capability, for example, a Gate end of an MOSFET or an IGBT does not have a parasitic diode or other devices with other two ends, and during switching of a high-speed switch, a contact resistance of the Gate end has a great influence on a switching speed of the switch, so that the contact resistance of the Gate end needs to be accurately tested, and for example, a Collector end of a triode cannot be conducted with an Emitter end when the Gate end is not driven;

thirdly, for the contact test of some pins of such devices, the improved VI source architecture with contact resistance test is not fully applicable, and for the test of contact resistance of multiple pins of the device, when the VI source is connected, one power supply pin is usually used in parallel, such as the ground of a chip.

SUMMERY OF THE UTILITY MODEL

In view of this, the main object of the present invention is to provide a voltage current source test circuit, on the basis of the traditional four-wire kelvin line, the voltage drop on the current line is measured by adding four voltage measuring circuits, and a switching circuit is added at the output of the voltage current source device to realize the lap-joint switching of the kelvin measuring circuit, so as to realize the equivalent contact resistance test on the current line before each test. The utility model discloses under the prerequisite that does not influence the original characteristics of VI source, still can realize extra differential voltage measurement in the four-wire Kelvin circuit, accurate measurement equivalent contact resistance to whether the quick judgement contact link exists the reliability risk, prevent to cause the problem of damage to the device easily when leading to the heavy current test because of the reliability reduction of contact link.

The utility model adopts the technical scheme that the voltage current source test circuit comprises a voltage current source, wherein the voltage current source comprises a control unit, an output power amplifier circuit, a current measurement circuit, a voltage measurement circuit and a four-wire Kelvin circuit connected with the voltage measurement circuit, and the four-wire Kelvin circuit comprises a high-end current drive circuit (FH), a high-end voltage sensing circuit (SH), a low-end current drive circuit (FL) and a low-end voltage sensing circuit (SL);

the voltage current source further comprises a four-way voltage measurement circuit corresponding to the four-wire kelvin circuit;

two voltage measuring circuits (FHS, SHS) corresponding to the high-end current driving circuit (FH) and the high-end voltage sensing circuit (SH) are respectively used for measuring the voltage generated by the contact resistance of the high-end port of the tested device and outputting the voltage to a first differential operational amplifier (OP103) for differential voltage operation, the first differential operational amplifier (OP103) is in double-control connection with the high-end current driving circuit (FH) and the voltage measuring circuit (FHS) corresponding to the high-end current driving circuit (FH) through a first single-pole double-throw switch (K103), the first differential operational amplifier (OP103) is also in double-control connection with the high-end voltage sensing circuit (SH) and the voltage measuring circuit (SHS) corresponding to the high-end current driving circuit (FH) through a second single-pole double-throw switch (K104), and the motionless ends of the first single-pole double-throw switch (K103) and the second single-pole double-throw switch (K104) are respectively connected with the input end of;

the two voltage measurement circuits (FLS, SLS) corresponding to the low-side current drive circuit (FL) and the low-side voltage sensing circuit (SL) are respectively used for measuring the voltage generated by the contact resistance of the low-side port of the tested device and outputting the voltage to a second differential operational amplifier (OP107) for differential voltage operation, the second differential operational amplifier (OP107) is in double-control connection with the low-side current drive circuit (FL) and the voltage measurement circuit (FLS) corresponding to the low-side current drive circuit (FL) through a third single-pole double-throw switch (K110), is also in double-control connection with the low-side current drive circuit (SL) and the voltage measurement circuit (SLS) corresponding to the low-side current drive circuit (FL) through a fourth single-pole double-throw switch (K109), and the immobile ends of the third single-pole double-throw switch (K110) and the fourth single-pole double-throw switch (K109) are respectively connected with the input end of the second differential operational amplifier (OP.

By above, this technical scheme has increased the four-way voltage measurement circuit that corresponds this four-wire kelvin circuit through on the original four-wire kelvin circuit's of voltage current source foundation structure, and through single-pole double-throw switch, can choose to lead to and measure the differential voltage on two of them circuits, in the actual test application, can test whether this voltage current source passes through the contact of kelvin external connection circuit and device under test unusual, still can test the accurate value of the contact resistance of this voltage current source and device under test port, thereby whether quick judgement contact link exists the reliability risk, prevent to cause the problem of damage to the device easily when leading to the heavy current test because of the reliability of contact link reduces.

Preferably, the voltage current source further includes:

the high-end current driving circuit (FH) is connected in series with a first switch (K101), the high-end current driving circuit (FH) is also connected with a voltage measuring circuit (FHS) corresponding to the high-end current driving circuit through a second switch (K102), and the current output by the output power amplification circuit is transmitted to a high-end port of the tested device through the high-end current driving circuit (FH) or the voltage measuring circuit (FHS) corresponding to the high-end current driving circuit by switching the first switch (K101) or the second switch (K102);

the low-side current driving circuit (FL) is respectively connected with the high-side voltage sensing circuit (SH) and the corresponding voltage measuring circuit (SHS) through a third switch (K106) and a fourth switch (K105), and the current flowing back from the high-side port of the tested device is transmitted to the low-side current driving circuit (FL) through the high-side voltage sensing circuit (SH) or the corresponding voltage measuring circuit (SHS) by switching the third switch (K106) or the fourth switch (K105).

By the above, by adding the relay switch on the four-wire kelvin circuit of the voltage current source and the voltage measuring circuit corresponding to the four-wire kelvin circuit, under the condition that an external circuit is not changed, the current output by the voltage current source is output to the high-end port of the tested device through different circuits only by controlling and switching on or off the relay switch, and the differential voltage between any two circuits can be measured, so that the contact resistance test function of different circuits and the high-end port of the tested device is realized.

Preferably, the voltage current source further includes:

the high-side current driving circuit (FH) is respectively connected with the low-side voltage sensing circuit (SL) and the corresponding voltage measuring circuit (SLS) through a fifth switch (K107) and a sixth switch (K108), and the current on the high-side current driving circuit (FH) is transmitted to the low-side port of the tested device through the low-side voltage sensing circuit (SL) or the corresponding voltage measuring circuit (SLS) by switching the fifth switch (K107) or the sixth switch (K108);

and the low-side current driving circuit (FL) is connected with a seventh switch (K112) in series, the low-side current driving circuit (FL) is also connected with a corresponding voltage measuring circuit (FLS) through an eighth switch (K111), and the current flowing back from the low-side port of the tested device is enabled to flow back to the ground terminal through the low-side current driving circuit (FL) or the corresponding voltage measuring circuit (FLS) by switching the seventh switch (K112) or the eighth switch (K111).

By the above, by adding the relay switch on the four-wire kelvin circuit of the voltage current source and the voltage measuring circuit corresponding to the four-wire kelvin circuit, under the condition that an external circuit is not changed, the current output by the voltage current source is output to the low-end port of the tested device through different circuits only by controlling and switching on or off the relay switch, a complete loop is formed, and the differential voltage between any two circuits can be measured, so that the contact resistance testing function of the different circuits and the low-end port of the tested device is realized.

Preferably, the voltage current source is connected to both ends of the device under test by a six-wire kelvin external connection method, which includes:

the high-end current driving circuit (FH) and the voltage measuring circuit (FHS) corresponding to the FH are connected to the high-end port of the DUT after being short-circuited, and the high-end voltage sensing circuit (SH) and the voltage measuring circuit (SHS) corresponding to the SH are respectively connected to the high-end port of the DUT;

the low-side current driving circuit (FL) and the corresponding voltage measuring circuit (FLS) are connected to the low-side port of the device to be tested after being short-circuited near the low-side port of the device to be tested, and the low-side voltage sensing circuit (SL) and the corresponding voltage measuring circuit (SLS) are respectively connected to the low-side port of the device to be tested.

Preferably, the voltage current source is connected to both ends of the device under test by a four-wire kelvin external connection method, which includes:

the high-end current driving circuit (FH) and the voltage measuring circuit (FHS) corresponding to the FH are connected to the high-end port of the device under test after being short-circuited near the high-end port of the device under test, and the high-end voltage sensing circuit (SH) and the voltage measuring circuit (SHS) corresponding to the SH are connected to the high-end port of the device under test after being short-circuited near the high-end port of the device under test;

the low-side current driving circuit (FL) and the corresponding voltage measuring circuit (FLS) are connected to the low-side port of the device under test after being short-circuited near the low-side port of the device under test, and the low-side voltage sensing circuit (SL) and the corresponding voltage measuring circuit (SLS) are connected to the low-side port of the device under test after being short-circuited near the low-side port of the device under test.

From the above, because the device under test fixture is installed differently, it usually has six ports or four ports, and at this time, the connection of the voltage current source and the device under test can be realized by selecting the six-wire kelvin external connection mode or the four-wire kelvin external connection mode according to the actually selected fixture.

Optionally, the second switch (K102) and the fourth switch (K105) are closed, the first single-pole double-throw switch (K103) is connected to the voltage measurement circuit (FHS) corresponding to the high-end current driving circuit, the second single-pole double-throw switch (K104) is connected to the voltage measurement circuit (SHS) corresponding to the high-end voltage sensing circuit, and whether the connection between the two voltage measurement circuits (FHS, SHS) and the high-end port of the device under test is normal is determined according to the differential voltage measured by the first differential operational amplifier (OP103) and the current measured by the current test circuit;

the first switch (K101) and the third switch (K106) are closed, the first single-pole double-throw switch (K103) is connected to the high-end current driving circuit (FH), the second single-pole double-throw switch (K104) is connected to the high-end voltage sensing circuit (SH), and whether the connection between the high-end current driving circuit (FH) and the high-end voltage sensing circuit (SH) and the high-end port of the tested device is normal or not is judged according to the differential voltage measured by the first differential operational amplifier (OP103) and the current measured by the current testing circuit.

Therefore, by the control mode, the contact condition of the high-end current drive circuit and the high-end voltage sensing circuit with the high-end port of the tested device can be tested, and the contact condition of the voltage measurement circuit corresponding to the high-end current drive circuit and the high-end voltage sensing circuit with the high-end port of the tested device can be tested.

Optionally, the first switch (K101) and the third switch (K106) are closed, the first single-pole double-throw switch (K103) is connected to the voltage measurement circuit (FHS) corresponding to the high-end current driving circuit, the second single-pole double-throw switch (K104) is connected to the voltage measurement circuit (SHS) corresponding to the high-end voltage sensing circuit, and the contact resistance between the voltage current source and the high-end port of the device under test is calculated according to the differential voltage measured by the first differential operational amplifier (OP103) and the current measured by the current testing circuit.

Therefore, by the control method, the contact resistance value of the voltage current source and the high-end port of the device to be tested can be accurately tested, and it is worth noting that when the voltage current source and the device to be tested are connected in a six-wire Kelvin external connection mode, the tested contact resistance value is the contact resistance value of the contact terminals of the high-end current driving circuit and the high-end port of the device to be tested, and when the voltage current source and the device to be tested are connected in a four-wire Kelvin external connection mode, the tested contact resistance value is the sum of the contact resistance values of the contact terminals of the high-end current driving circuit, the high-end voltage sensing circuit and the high-end port of the device to be.

Optionally, the sixth switch (K108) and the eighth switch (K111) are closed, the third single-pole double-throw switch (K110) is connected to the voltage measurement circuit (FLS) corresponding to the low-side current driving circuit, the fourth single-pole double-throw switch (K109) is connected to the voltage measurement circuit (SLS) corresponding to the low-side voltage sensing circuit, and whether the two voltage measurement circuits (FLS, SLS) are normally connected to the low-side port of the device under test is determined according to the differential voltage measured by the second differential operational amplifier (OP107) and the current measured by the current measurement circuit;

and closing the fifth switch (K107) and the seventh switch (K112), connecting the third single-pole double-throw switch (K110) to the low-side current driving circuit (FL), connecting the fourth single-pole double-throw switch (K109) to the low-side voltage sensing circuit (SL), and judging whether the low-side current driving circuit (FL) and the low-side voltage sensing circuit (SL) are normally connected with the low-side port of the tested device according to the differential voltage measured by the second differential operational amplifier (OP107) and the current measured by the current testing circuit.

Therefore, by the control mode, the contact condition of the low-side current driving circuit and the low-side voltage sensing circuit with the low-side port of the tested device can be tested, and the contact condition of the voltage measuring circuit corresponding to the low-side current driving circuit and the low-side voltage sensing circuit with the low-side port of the tested device can also be tested.

Optionally, the fifth switch (K107) and the seventh switch (K112) are closed, the third single-pole double-throw switch (K110) is connected to the voltage measurement circuit (FLS) corresponding to the low-side current driving circuit, the fourth single-pole double-throw switch (K109) is connected to the voltage measurement circuit (SLS) corresponding to the low-side voltage sensing circuit, and the contact resistance between the voltage current source and the low-side port of the device under test is calculated according to the differential voltage measured by the second differential operational amplifier (OP107) and the current measured by the current measurement circuit.

Therefore, by the control method, the contact resistance value of the voltage current source and the low-end port of the device to be tested can be accurately tested, and it is worth noting that when the voltage current source and the device to be tested are connected in a six-wire kelvin external connection mode, the tested contact resistance value is the contact resistance value of the low-end current driving circuit and the contact terminal of the low-end port of the device to be tested, and when the voltage current source and the device to be tested are connected in a four-wire kelvin external connection mode, the tested contact resistance value is the sum of the contact resistance values of the low-end current driving circuit, the low-end voltage sensing circuit and the contact terminal of the low-end port of the device to be.

According to the above voltage current source test circuit, the utility model also provides a test method adopts test circuit carries out the test of the contact resistance of the device port under test.

By last, through the utility model discloses well voltage current source test circuit can test voltage current source's auxiliary circuit and the contact condition of being surveyed the device, and contact resistance value when still accurate measurement voltage current source passes through the terminal and is connected with the device under test.

Drawings

FIG. 1 is a circuit schematic of a conventional voltage current source;

FIG. 2 is a schematic diagram of a conventional voltage current source with a four wire Kelvin connection with a DUT;

FIG. 3 is a circuit schematic of an improved prior art voltage current source;

FIG. 4 is a schematic diagram of a prior art circuit for making contact resistance measurements using an improved voltage current source;

fig. 5 is a schematic circuit diagram of the voltage-current source device of the present invention;

FIG. 6 is a schematic diagram of a six wire Kelvin connection of a voltage current source device of the present invention with a DUT;

FIGS. 7-9 are schematic circuit diagrams of the present invention using six-wire Kelvin for DUT high-end port contact resistance measurement;

FIGS. 10-12 are schematic circuit diagrams of a six wire Kelvin method of the present invention for DUT low side port contact resistance measurement;

fig. 13 is a schematic diagram of a four-wire kelvin connection of the voltage current source device of the present invention to a DUT;

FIGS. 14-16 are schematic circuit diagrams illustrating the four-wire Kelvin method of the present invention for DUT high-end port contact resistance measurement;

fig. 17-19 are schematic circuit diagrams illustrating the four-wire kelvin method of the present invention for measuring the contact resistance of the low-side port of the DUT.

Detailed Description

A specific embodiment of the voltage current source device according to the present invention will be described in detail below with reference to fig. 5 to 19.

As shown in fig. 5, in the voltage current source (hereinafter referred to as VI source), based on the original four-wire kelvin line of the internal circuit of the VI source, four voltage signal measuring circuits (FHS, SHS, FLS, SLS) are added to implement additional differential voltage measurement to measure the voltage drop on the current line;

specifically, the original architecture of the VI source includes CONTROL, an output power amplifier circuit, a current measurement circuit, a voltage measurement circuit, and four-wire kelvin lines inside the four-wire kelvin circuits, where the four-wire kelvin circuits are FH (High-end current driving circuit), SH (High-end voltage sensing circuit, Sense High), FL (Low-end current driving circuit, ForceLow), and SL (Low-end voltage sensing circuit, Sense Low), and corresponding output ports are FHout, SHout, fliout, and SLout, and when connected to a DUT, the four output ports are correspondingly connected to two ends (High end and Low end) of the DUT through an external signal line, respectively;

when the VI source framework works, the CONTROL sets the state of the corresponding VI source mode according to the needed VI source mode, the output power amplifier OP101 is driven to work, the current is output from an FH signal wire, the current flows back to an FL signal wire through an externally connected DUT, flows through a range resistor Ri and finally flows to a GND end, a differential amplifier OP109 connected with two ends of the range resistor Ri measures the voltage at two ends of the range resistor Ri to obtain an Imeter signal, the Imeter signal is sent to the CONTROL for feedback and measurement, a voltage follower OP104 connected with an SH signal wire and a voltage follower OP106 connected with an SL signal wire respectively carry out voltage following measurement to respectively obtain measured voltages Vshx and Vslx, and the Vmeter signal is sent to the ROL CONTROL for feedback and measurement through differential operation of the differential operational amplifier OP 105;

the utility model discloses on the basis of the original framework in above-mentioned VI source, the extra four ways voltage signal measuring circuit that increases (FHS, SHS, FLS, SLS) is used for measuring the pressure drop on corresponding circuit (FH, SH, FL, SL) respectively, and its output port that corresponds is FHSout, SHSout, FLSout, SLSOout respectively, when being connected with the DUT, these four output ports correspond the both ends (high-end and low side) that are connected to the DUT through an external signal line respectively. The connection mode of the four-way voltage signal measurement circuit added inside the VI source is described in detail with reference to fig. 5:

the voltage signal measuring circuit (FHS) comprises a differential operational amplifier OP103, a voltage follower OP102, a single-pole double-throw switch K103 and a FHS signal wire, wherein the negative input end of the differential operational amplifier OP103 receives a voltage Vshx fed back by the output end of the voltage follower OP104 connected with the SH signal wire, the positive input end of the differential operational amplifier OP103 receives a voltage Vfhx fed back by the output end of the voltage follower OP102, the input end of the voltage follower OP102 is connected with the stationary end of the single-pole double-throw switch K103 through a wire FHX, and two moving ends of the single-pole double-throw switch K103 are respectively connected with an FH signal wire and an FHS signal wire;

the voltage signal measuring circuit (SHS) comprises a single-pole double-throw switch K104 and an SHS signal wire, wherein the fixed end of the single-pole double-throw switch K104 is connected with the input end of the voltage follower OP104 through a conducting wire SHX, and the two movable ends of the single-pole double-throw switch K104 are respectively connected with an SH signal wire and an SHS signal wire;

the voltage signal measuring circuit (FLS) comprises a differential operational amplifier OP107, a voltage follower OP108, a single-pole double-throw switch K110 and an FLS signal line, wherein a positive input end of the differential operational amplifier OP107 receives a voltage Vslx fed back by an output end of the voltage follower OP106 connected with the SL signal line, a negative input end of the differential operational amplifier OP107 receives a voltage Vflx fed back by an output end of the voltage follower OP108, an input end of the voltage follower OP108 is connected with a fixed end of the single-pole double-throw switch K110 through a conducting wire FLX, and two movable ends of the single-pole double-throw switch K110 are respectively connected with the FL signal line and the FLS signal line;

the voltage signal measuring circuit (SLS) comprises a single-pole double-throw switch K109 and an SLS signal wire, wherein the fixed end of the single-pole double-throw switch K109 is connected with the input end of the voltage follower OP106 through a conducting wire SLX, and the two movable ends of the single-pole double-throw switch K109 are respectively connected with the SL signal wire and the SLS signal wire.

In addition to the four-path voltage signal measuring circuit, the VI source is additionally provided with a switch switching circuit composed of a plurality of relay switches, and because the VI source is usually a complete structure, when the VI source is used for measuring a DUT, the VI source is often required to be switched on or off with a certain port or a certain line of the DUT by changing a wiring mode, so that the VI source is very complicated to use, and the defects such as wiring errors or poor contact are easily caused. Specifically, the switching circuit includes:

a relay switch K101 (close to the output port FHOut) connected in series with the FH signal line, a relay switch K102 connected in series between the FH signal line and the FHS signal line, a relay switch K107 connected in series between the FH signal line and the SL signal line, and a relay switch K108 connected in series between the FH signal line and the SLS signal line;

a relay switch K112 (close to the output port fluot) connected in series to the FL signal line, a relay switch K111 connected in series between the FL signal line and the FLs signal line, a relay switch K106 connected in series between the FL signal line and the SH signal line, and a relay switch K105 connected in series between the FL signal line and the SHs signal line.

In practical measurement applications, because some clamps have six external ports and some clamps may have only four external ports due to different types of clamps for mounting DUT devices, when the VI source is used to measure contact resistance across the DUT, the VI source can be selectively connected to the DUT using a six-wire kelvin external connection or a four-wire kelvin external connection according to the number of clamp ports, where "external connection" refers to signal wires connected between the VI source and the DUT, and "six-wire kelvin" or "four-wire kelvin" refers to the number of signal wires connected to the DUT.

When the voltage current source is connected with a DUT in a six-wire Kelvin external connection mode for contact resistance measurement, the wiring mode and the test principle are as follows:

as shown in fig. 6, when the VI source is connected to the DUT by the six-wire kelvin external connection method, the six-wire kelvin external connection method and the signal wire are defined separately for convenience of description below: FHS 'signal line connected with FHSout port and FH' signal line connected with FHOut port are connected with one end (high end) of DUT after being connected with port close to DUT, SHSout port and SHout port are respectively connected with one end of DUT through a SHS 'signal line and SH' signal line; the FLS 'signal line connected with the FLSout port and the FL' signal line connected with the FLout port are connected with the other end (low end) of the DUT after being connected with a port close to the DUT, and the SLSout port and the SLout port are also connected with the other end of the DUT through an SLS 'signal line and an SL' signal line respectively;

it should be noted that the above definitions of the VI source internal signal line and the external signal line are only for convenience of the following description, and in practical use, the internal signal line and the external signal line correspond to each other, for example, FH and FH' may be one line.

According to the six-wire Kelvin external connection mode of the VI source and the DUT, the contact resistance of the high-end port of the DUT can be measured, and the measurement process is as follows:

contact testing of DUT high-side auxiliary circuits one: as shown in fig. 7, the relay switches K102 and K105 are closed, the single pole double throw switch K103 turns on the FHS signal line, and the single pole double throw switch K104 turns on the SHS signal line; the VI source outputs a constant current I (usually 10mA) through the output power amplifier OP101, the current I flows out from the output end of the output power amplifier OP101, passes through the relay switch K102, the line resistance Rfhs of the external FHS ' signal line of the output port FHSout, the contact resistance Rfhc of the high-end port of the DUT, the contact resistance Rshsc of the external SHS ' signal line of the output port SHSout and the high-end port of the DUT, the line resistance Rshs of the external SHS ' signal line of the output port SHSout, and the relay switch K105 flows in from the FL signal line. At this time, by measuring Vdiff _ High at the output end of the differential operational amplifier OP103, a differential voltage Vdiff _ High1 can be obtained, and by measuring Imeter at the output end of the differential amplifier OP109, a current I1 can be obtained, when the current I1 is within the VI source constant current error range, the current I1 can be considered as a normal output current, and at this time, the auxiliary circuit contact resistance, that is, Rh1 — Vdiff _ High1/I1 — Rfhs + rhhc + Rshsc + Rshs, can be calculated;

when the result of the first contact test of the high-side auxiliary circuit of the DUT, that is, the value of Rh1 is smaller than a certain value (usually 100 ohms), it is verified that the contact between the FHS 'signal line externally connected to the output port FHSout and the SHS' signal line externally connected to the output port SHSout at the high-side port of the DUT is normal, and no contact disconnection or damage of the contact port occurs, so that the result of the subsequent contact resistance test using the auxiliary circuit of the FHS terminal and the auxiliary circuit of the SHSout terminal can be proved to be valid;

contact testing of DUT high-side auxiliary circuit two: as shown in fig. 8, the relay switches K101 and K106 are closed, the single-pole double-throw switch K103 connects the FH signal line, the single-pole double-throw switch K104 connects the SH signal line, the VI source outputs a constant current I (usually 10mA) through the output power amplifier OP101, the current I flows out from the output terminal of the output power amplifier OP101, passes through the relay switch K101, the line resistance Rfh of the FH ' signal line externally connected to the output port FHout, the contact resistance Rfhc of the high-side port of the DUT, the contact resistance Rshc of the SH ' signal line and the high-side port of the DUT externally connected to the output port SHout, the line resistance Rsh of the SH ' signal line externally connected to the output port SHout, and the relay switch K106 flows in from the FL signal line. At this time, by measuring Vdiff _ High at the output end of the differential operational amplifier OP103, a differential voltage Vdiff _ High2 can be obtained, and by measuring Imeter at the output end of the differential operational amplifier OP109, a current I2 can be obtained, when the current I2 is within the VI source constant current error range, the current I2 can be considered as a normal output current, and at this time, the auxiliary circuit contact resistance can be calculated, that is, Rh2 is Vdiff _ High2/I2 is Rfh2+ Rfhc + Rshc + Rsh, where Rfh2 includes the line resistance Rfh of the output port FHout external to the FHS' signal line and the line resistance of the conducting wire FHX and part of the FH signal line to the output port FHout;

when the result of the second contact test of the high-side auxiliary circuit of the DUT, that is, the value of Rh2 is smaller than a certain value (usually 100 ohms), it is verified that the signal line FH 'externally connected to the output port FHout and the SH' signal line externally connected to the output port SHout are in normal contact with the high-side port of the DUT, and no contact disconnection or damage of the contact port occurs, so that the result of the subsequent contact resistance test using the auxiliary circuit at the FHout terminal and the auxiliary circuit at the SHout terminal is valid;

contact resistance Rfhc test: as shown in fig. 9, the relay switches K101 and K106 are closed, the single-pole double-throw switch K103 is connected to the FHS signal line, the single-pole double-throw switch K104 is connected to the SHS signal line, the VI source outputs a constant current I (usually 10mA) through the output power amplifier OP101, the current I flows out from the output end of the output power amplifier OP101, passes through the relay switch K101, the line resistance Rfh of the FH ' signal line externally connected to the output port FHout, the contact resistance Rfhc of the high-end port of the DUT, the contact resistance Rshc of the SH ' signal line externally connected to the output port SHout and the high-end port of the DUT, the line resistance Rsh of the SH ' signal line externally connected to the output port SHout, and the relay switch K106 flows in from the FL signal line. The input end of the differential operational amplifier OP103 collects the voltage at the contact position of the High end of the DUT through an FHS signal line and an SHS signal line, at this time, the differential voltage Vdiff _ High3 can be obtained by measuring the Vdiff _ High at the output end of the differential operational amplifier OP103, the current I3 can be obtained by measuring the Imeter at the output end of the differential amplifier OP109, when the current I3 is within the VI source constant current error range, the current I3 can be considered as a normal output current, and since the differential operational amplifier OP103 is a High-impedance input end, the resistances Rfhs, Rshs and rssc sh on the FHS signal line and the SHS signal line have substantially no influence on the voltage measurement result when the on resistance is less than 100 ohms, and can be ignored, so that the auxiliary circuit contact resistance Rfhc can be calculated, that is Rh3 ═ Vdiff _ High3/I3 ═ Rfhc;

through the three steps of measurement, the value of the key contact resistance Rfhc of the high-end port of the DUT can be accurately measured, and the combined value of the rest contact resistances can be estimated according to the value of the Rfhc (Rh3) and the measured Rh1 and Rh2, so that other test requirements of the subsequent VI source can be met within a certain allowable range (usually 100 ohms). For example, in fig. 9, by switching the single-pole double-throw switch K103 from the FHS signal line to the FH signal line, Rh3 ═ Rfhc + Rfh2 can be tested, where Rfh2 includes the line resistance Rfh of the output port FHout external to the FH' signal line and the line resistance of the conductive line FHX and the portion FH signal line to the output port FHout.

Similarly, contact resistance measurements of the low-side port of the DUT may also be made according to the principles of contact resistance measurement of the high-side port of the DUT described above, which are now described with reference to fig. 10-12 as follows:

contact testing of DUT Low-side auxiliary Circuit one: as shown in fig. 10, the relay switches K111 and K108 are closed, the single-pole double-throw switch K109 turns on the SLS signal line, and the single-pole double-throw switch K110 turns on the FLS signal line; the VI source outputs a constant current I (usually 10mA) through the output power amplifier OP101, the current I flows out from the output end of the output power amplifier OP101, passes through the relay switch K108, and the output port slcout is externally connected with the line resistance Rsls of the SLS ' signal line, the output port slcout is externally connected with the contact resistance Rslsc of the SLS ' signal line and the DUT low-end port, the contact resistance Rflc of the DUT low-end port, the output port FLSout is externally connected with the line resistance Rfls of the FLS ' signal line, and the relay switch K111 flows in from the FL signal line. At this time, the differential voltage Vdiff _ Low4 can be obtained by measuring Vdiff _ Low at the output end of the differential operational amplifier OP107, the current I4 can be obtained by measuring Imeter at the output end of the differential amplifier OP109, when the current I4 is within the VI source constant current error range, the current I4 can be considered as a normal output current, and at this time, the auxiliary circuit contact resistance can be calculated, that is, Rh4 — Vdiff _ Low4/I4 — Rsls + rslssc + Rflc + Rfls;

when the result of the first contact test of the DUT low-side auxiliary circuit, that is, the value of Rh4 is smaller than a certain value (usually 100 ohms), it is verified that the contact between the FLS 'signal line externally connected to the output port FLSout and the SLS' signal line externally connected to the output port slcout at the low-side port of the DUT is normal, and no contact disconnection or damage occurs to the contact port, and the result of the subsequent contact resistance test using the auxiliary circuit at the FLSout end and the auxiliary circuit at the slcout end is valid;

contact testing of the DUT low-side auxiliary circuit two: as shown in fig. 11, the relay switches K112 and K107 are closed, the single-pole double-throw switch K109 connects the SL signal line, the single-pole double-throw switch K110 connects the FL signal line, the VI source outputs a constant current I (usually 10mA) through the output power amplifier OP101, the current I flows from the output terminal of the output power amplifier OP101, passes through the relay switch K107, the line resistance Rsl of the output port SLout externally connected to the SL ' signal line, the contact resistance Rslc of the output port SLout externally connected to the SL ' signal line and the DUT low-side port, the contact resistance Rflc of the DUT low-side port, the line resistance Rfl of the output port fliut externally connected to the FL ' signal line, and the relay switch K112 flows from the FL signal line. At this time, by measuring Vdiff _ Low at the output terminal of the differential operational amplifier OP107, a differential voltage Vdiff _ Low5 can be obtained, and by measuring Imeter at the output terminal of the differential operational amplifier OP109, a current I5 can be obtained, when the current I5 is within the VI source constant current error range, the current I5 can be considered as a normal output current, and at this time, an auxiliary circuit contact resistance can be calculated, that is, Rh5 is Vdiff _ Low5/I5 is Rfl5+ Rslc + Rflc + Rfl, where the Rfl5 includes a line resistance Rfl of the output port fliut external to the FL' signal line and a line resistance of the conductive line FLX and a part of the FL signal line to the output port fliut;

when the result of the second contact test of the DUT low-side auxiliary circuit, that is, the value of Rh5, is smaller than a certain value (usually 100 ohms), it is verified that the contact of the signal line FL 'externally connected to the output port flip and the signal line SL' externally connected to the output port SLout at the DUT high-side port is normal, and no contact break or damage occurs to the contact port, and the result of the subsequent contact resistance test using the auxiliary circuit at the flip end and the auxiliary circuit at the SLout end is valid;

contact resistance Rflc test: as shown in fig. 12, the relay switches K112 and K107 are closed, the single-pole double-throw switch K109 connects the SLS signal line, the single-pole double-throw switch K110 connects the FLS signal line, the VI source outputs a constant current I (usually 10mA) through the output power amplifier OP101, the current I flows from the output end of the output power amplifier OP101, passes through the relay switch K107, the line resistance Rsl of the SL 'signal line externally connected to the output port SLout, the contact resistance Rslc of the DUT low-end port, the line resistance Rfl of the output port fll externally connected to the FL' signal line, and the relay switch K112 flows from the FL signal line. The input end of the differential operational amplifier OP107 collects the voltage at the Low-end contact of the DUT through an SLS signal line and an FLS signal line, at this time, the differential voltage Vdiff _ Low6 can be obtained by measuring the Vdiff _ Low at the output end of the differential operational amplifier OP107, the current I6 can be obtained by measuring the Imeter at the output end of the differential amplifier OP109, when the current I6 is within the VI source constant current error range, the current I6 can be considered as a normal output current, and since the differential operational amplifier OP109 is a high-impedance input end, the resistances Rsls, Rslsc and Rfls on the SLS signal line and the FLS signal line have substantially no influence on the voltage measurement result when the on resistance is less than 100 ohms, and can be ignored, so that the auxiliary circuit contact resistance Rflc can be calculated, that is Rh6 — Vdiff _ Low6/I6 — Rflc;

through the three-step measurement, the value of the key contact resistance Rflc of the low-end port of the DUT can be accurately measured, and the combined value of the rest contact resistances can be estimated according to the value of the Rflc (Rh6) and the measured Rh4 and Rh5, so that other testing requirements of the subsequent VI source can be met within a certain allowable range (usually 100 ohms). For example, in fig. 12, by changing the single-pole double-throw switch K110 from the FLS signal line to the FL signal line, Rh6 — Rflc + Rfl5 can be tested, where the Rfl5 includes the line resistance Rfl and the conductive line FLX of the output port fliut external to the FL' signal line, and a part of the line resistance from the FL signal line to the output port fliut.

When the voltage current source is connected with a DUT in a four-wire Kelvin external connection mode for contact resistance measurement, the wiring mode and the test principle are as follows:

as shown in fig. 13, when the VI source is connected to the DUT by the four-wire kelvin external connection method, the four-wire kelvin external connection method and the signal line are defined separately for convenience of description below: FHS 'signal lines connected with FHSout ports and FH' signal lines connected with FHOut ports are connected at ports close to the DUT and then are connected to one end (high end) of the DUT in common, and SHS 'signal lines connected with SHSout ports and SH' signal lines connected with SHout ports are connected to one end (high end) of the DUT in common after being connected at ports close to the DUT; the FLS 'signal line connected with the FLSout port and the FL' signal line connected with the FLout port are connected at a port close to the DUT and then are connected to the other end (low end) of the DUT in common, and the SLS 'signal line connected with the SLout port and the SL' signal line connected with the SLout port are also connected to the other end (low end) of the DUT in common after being connected at a port close to the DUT;

it should be noted that the above definitions of the VI source internal signal line and the external signal line are only for convenience of the following description, and in practical use, the internal signal line and the external signal line correspond to each other, for example, FH and FH' may be one line.

According to the four-wire kelvin external connection mode of the VI source and the DUT, the contact resistance of the high-end port of the DUT can be measured, and the measurement process is the same as the measurement process using the six-wire kelvin external connection mode, and the difference is only that:

the high-end contact resistance measured by adopting a six-wire Kelvin external connection mode is Rfhc, and the high-end contact resistance measured by adopting a four-wire Kelvin external connection mode is Rfhc + Rshc; similarly, the low-end contact resistance measured by adopting the six-wire kelvin external connection mode is Rflc, and the low-end contact resistance measured by adopting the four-wire kelvin external connection mode is Rflc + Rslc;

the process of performing the contact resistance test using the four-wire kelvin will be briefly described with reference to fig. 14 to 19:

contact testing of DUT high-side auxiliary circuits one: as shown in fig. 14, the relay switches K102 and K105 are closed, the single pole double throw switch K103 turns on the FHS signal line, and the single pole double throw switch K104 turns on the SHS signal line; by measuring Vdiff _ High at the output end of the differential operational amplifier OP103, a differential voltage Vdiff _ High7 can be obtained, and by measuring Imeter at the output end of the differential amplifier OP109, a current I7 can be obtained, at this time, the contact resistance of the auxiliary circuit can be calculated, that is, Rh7 is Vdiff _ High7/I7 is Rfhs + rhhc + Rshc + Rshs;

when the result of the first contact test of the high-side auxiliary circuit of the DUT, that is, the value of Rh7 is smaller than a certain value (usually 100 ohms), it is verified that the contact between the FHS 'signal line externally connected to the output port FHSout and the SHS' signal line externally connected to the output port SHSout near the high-side port of the DUT is normal, and no contact disconnection or damage of the contact port occurs, so that the result of the subsequent contact resistance test using the auxiliary circuit of the FHSout and the auxiliary circuit of the SHSout is valid;

contact testing of DUT high-side auxiliary circuit two: as shown in fig. 15, the relay switches K101 and K106 are closed, the single-pole double-throw switch K103 is connected to the FH signal line, the single-pole double-throw switch K104 is connected to the SH signal line, a differential voltage Vdiff _ High8 can be obtained by measuring Vdiff _ High at the output end of the differential operational amplifier OP103, and a current I8 can be obtained by measuring Imeter at the output end of the differential amplifier OP109, and at this time, the auxiliary circuit contact resistance can be calculated, that is, Rh8 is Vdiff _ High8/I8 is Rfh8+ Rfhc + Rshc + Rsh, where Rfh8 includes the line resistance Rfh of the signal line external to the output port FHout and the line resistances of the conductor FHX and part of the FH signal line to the output port out;

when the result of the second contact test of the high-side auxiliary circuit of the DUT, that is, the value of Rh8 is smaller than a certain value (usually 100 ohms), it is verified that the signal line FH 'externally connected to the output port FHout and the SH' signal line externally connected to the output port SHout are in normal contact with the high-side port of the DUT, and no contact disconnection or damage of the contact port occurs, so that the result of the subsequent contact resistance test using the auxiliary circuit at the FHout terminal and the auxiliary circuit at the SHout terminal is valid;

contact resistance Rfhc + Rshc test: as shown in fig. 16, the relay switches K101 and K106 are closed, the single pole double throw switch K103 turns on the FHS signal line, and the single pole double throw switch K104 turns on the SHS signal line. The input end of the differential operational amplifier OP103 collects the voltage at the High-end contact of the DUT through an FHS signal line and an SHS signal line, at this time, the differential voltage Vdiff _ High9 can be obtained by measuring the Vdiff _ High at the output end Vdiff _ High of the differential operational amplifier OP103, the current I9 can be obtained by measuring the Imeter at the output end of the differential amplifier OP109, and since the differential operational amplifier OP103 is a High-impedance input end, the line resistances Rfhs and Rshs on the FHS signal line and the SHS signal line have substantially no influence on the voltage measurement result and can be ignored when the on resistance is less than 100 ohms, and therefore, the circuit contact resistance Rfhc + Rshc can be calculated, that is, 9 ═ Vdiff _ High9/I9 ═ rhhc + Rshc;

through the three steps of measurement, the value of the key contact resistance Rfhc + Rshc of the high-end port of the DUT can be accurately measured, and the combined value of the rest contact resistances can be estimated according to the value of the Rfhc + Rshc (Rh9) and the measured Rh1 and Rh2, so that other test requirements of the subsequent VI source can be met within a certain allowable range (usually 100 ohms). For example, in fig. 16, by switching the spdt switch K103 from the FHS signal line to the FH signal line, Rh 9-Rfhc + Rshc + Rfh2 can be tested, where Rfh2 includes the resistance Rfh of the output port FHout external to the FH' signal line and the resistance of the conductive line FHX and the portion FH signal line to the output port FHout.

Similarly, as shown in fig. 17 to fig. 19, in combination with the contact resistance measurement principle of the high-side port of the DUT, the contact resistance measurement of the low-side port of the DUT may also be performed, and the value of the contact resistance (Rflc + Rslc) of the low-side port of the DUT and the value of the combination of the remaining line resistances may be measured, and the measurement principle and the control process of the switch switching circuit are consistent with the control process of performing the contact resistance measurement of the low-side port of the DUT in the six-line kelvin external connection manner, and therefore, the description thereof is omitted.

To sum up, voltage current source device and contact resistance measuring circuit who provides compare with current voltage current source and measuring circuit, have following advantage:

the contact resistance on the Force lines (current lines) of high and low ends can be accurately and respectively tested in a six-line Kelvin mode;

the sum of the contact resistance and the key transmission resistance on the high-low end Force line can be accurately and respectively tested in a six-line Kelvin mode, and the sum of the contact resistance and the key transmission resistance on the previously tested Force line is subtracted, so that the sum of the key transmission resistance on the Force line can be accurately tested;

if the connection position of the device is limited, the traditional four-wire Kelvin mode can be adopted for connection, but compared with the traditional four-wire Kelvin mode, the sum of the contact resistances of the Force wire and the Sense wire at the high end and the low end can be accurately and respectively tested;

through a switch switching circuit in the VI source, the six-wire Kelvin or four-wire Kelvin circuit lap joint of the high end and the low end is realized, and the use of an external relay is saved;

and measuring the loop resistance of any two points at intervals by an external relay.

The above description is only a preferred embodiment of the present invention, and should not be taken as limiting the invention, and any modifications, equivalent replacements, improvements, etc. made within the spirit and principle of the present invention should be included in the protection scope of the present invention.

Claims (9)

1. A kind of voltage current source test circuit, including the voltage current source, this voltage current source includes the control unit, exports the power amplifier circuit, current measurement circuit and voltage measurement circuit, and its four-wire Kelvin circuit of connection, this four-wire Kelvin circuit includes high-end current drive circuit (FH), high-end voltage sensing circuit (SH), low-end current drive circuit (FL), low-end voltage sensing circuit (SL);

wherein said voltage current source further comprises a four-way voltage measurement circuit corresponding to said four-wire Kelvin circuit;

two voltage measuring circuits (FHS, SHS) corresponding to the high-end current driving circuit (FH) and the high-end voltage sensing circuit (SH) are respectively used for measuring the voltage generated by the contact resistance of the high-end port of the tested device and outputting the voltage to a first differential operational amplifier (OP103) for differential voltage operation, the first differential operational amplifier (OP103) is in double-control connection with the high-end current driving circuit (FH) and the voltage measuring circuit (FHS) corresponding to the high-end current driving circuit (FH) through a first single-pole double-throw switch (K103), the first differential operational amplifier (OP103) is also in double-control connection with the high-end voltage sensing circuit (SH) and the voltage measuring circuit (SHS) corresponding to the high-end current driving circuit (FH) through a second single-pole double-throw switch (K104), and the motionless ends of the first single-pole double-throw switch (K103) and the second single-pole double-throw switch (K104) are respectively connected with the input end of;

the two voltage measurement circuits (FLS, SLS) corresponding to the low-side current drive circuit (FL) and the low-side voltage sensing circuit (SL) are respectively used for measuring the voltage generated by the contact resistance of the low-side port of the tested device and outputting the voltage to a second differential operational amplifier (OP107) for differential voltage operation, the second differential operational amplifier (OP107) is in double-control connection with the low-side current drive circuit (FL) and the voltage measurement circuit (FLS) corresponding to the low-side current drive circuit (FL) through a third single-pole double-throw switch (K110), is also in double-control connection with the low-side current drive circuit (SL) and the voltage measurement circuit (SLS) corresponding to the low-side current drive circuit (FL) through a fourth single-pole double-throw switch (K109), and the immobile ends of the third single-pole double-throw switch (K110) and the fourth single-pole double-throw switch (K109) are respectively connected with the input end of the second differential operational amplifier (OP.

2. The circuit of claim 1, wherein the voltage current source further comprises:

the high-end current driving circuit (FH) is connected in series with a first switch (K101), the high-end current driving circuit (FH) is also connected with a voltage measuring circuit (FHS) corresponding to the high-end current driving circuit through a second switch (K102), and the current output by the output power amplification circuit is transmitted to a high-end port of the tested device through the high-end current driving circuit (FH) or the voltage measuring circuit (FHS) corresponding to the high-end current driving circuit by switching the first switch (K101) or the second switch (K102);

the low-side current driving circuit (FL) is respectively connected with the high-side voltage sensing circuit (SH) and the corresponding voltage measuring circuit (SHS) through a third switch (K106) and a fourth switch (K105), and the current flowing back from the high-side port of the tested device is transmitted to the low-side current driving circuit (FL) through the high-side voltage sensing circuit (SH) or the corresponding voltage measuring circuit (SHS) by switching the third switch (K106) or the fourth switch (K105).

3. The circuit of claim 2, wherein the voltage current source further comprises:

the high-side current driving circuit (FH) is respectively connected with the low-side voltage sensing circuit (SL) and the corresponding voltage measuring circuit (SLS) through a fifth switch (K107) and a sixth switch (K108), and the current on the high-side current driving circuit (FH) is transmitted to the low-side port of the tested device through the low-side voltage sensing circuit (SL) or the corresponding voltage measuring circuit (SLS) by switching the fifth switch (K107) or the sixth switch (K108);

and the low-side current driving circuit (FL) is connected with a seventh switch (K112) in series, the low-side current driving circuit (FL) is also connected with a corresponding voltage measuring circuit (FLS) through an eighth switch (K111), and the current flowing back from the low-side port of the tested device is enabled to flow back to the ground terminal through the low-side current driving circuit (FL) or the corresponding voltage measuring circuit (FLS) by switching the seventh switch (K112) or the eighth switch (K111).

4. The circuit of claim 3, wherein the voltage current source is connected to both ends of the device under test by a six-wire Kelvin external connection comprising:

the high-end current driving circuit (FH) and the voltage measuring circuit (FHS) corresponding to the FH are connected to the high-end port of the DUT after being short-circuited, and the high-end voltage sensing circuit (SH) and the voltage measuring circuit (SHS) corresponding to the SH are respectively connected to the high-end port of the DUT;

the low-side current driving circuit (FL) and the corresponding voltage measuring circuit (FLS) are connected to the low-side port of the device to be tested after being short-circuited near the low-side port of the device to be tested, and the low-side voltage sensing circuit (SL) and the corresponding voltage measuring circuit (SLS) are respectively connected to the low-side port of the device to be tested.

5. The circuit of claim 3, wherein the voltage current source is connected across the device under test by a four-wire Kelvin external connection comprising:

the high-end current driving circuit (FH) and the voltage measuring circuit (FHS) corresponding to the FH are connected to the high-end port of the device under test after being short-circuited near the high-end port of the device under test, and the high-end voltage sensing circuit (SH) and the voltage measuring circuit (SHS) corresponding to the SH are connected to the high-end port of the device under test after being short-circuited near the high-end port of the device under test;

the low-side current driving circuit (FL) and the corresponding voltage measuring circuit (FLS) are connected to the low-side port of the device under test after being short-circuited near the low-side port of the device under test, and the low-side voltage sensing circuit (SL) and the corresponding voltage measuring circuit (SLS) are connected to the low-side port of the device under test after being short-circuited near the low-side port of the device under test.

6. The circuit of claim 4 or 5,

closing a second switch (K102) and a fourth switch (K105), connecting a first single-pole double-throw switch (K103) to a voltage measuring circuit (FHS) corresponding to a high-end current driving circuit, connecting a second single-pole double-throw switch (K104) to a voltage measuring circuit (SHS) corresponding to a high-end voltage sensing circuit, and judging whether the two voltage measuring circuits (FHS and SHS) are normally connected with a high-end port of a tested device or not according to the differential voltage measured by a first differential operational amplifier (OP103) and the current measured by a current testing circuit;

the first switch (K101) and the third switch (K106) are closed, the first single-pole double-throw switch (K103) is connected to the high-end current driving circuit (FH), the second single-pole double-throw switch (K104) is connected to the high-end voltage sensing circuit (SH), and whether the connection between the high-end current driving circuit (FH) and the high-end voltage sensing circuit (SH) and the high-end port of the tested device is normal or not is judged according to the differential voltage measured by the first differential operational amplifier (OP103) and the current measured by the current testing circuit.

7. The circuit of claim 6,

and closing the first switch (K101) and the third switch (K106), connecting the first single-pole double-throw switch (K103) to a voltage measuring circuit (FHS) corresponding to the high-end current driving circuit, connecting the second single-pole double-throw switch (K104) to a voltage measuring circuit (SHS) corresponding to the high-end voltage sensing circuit, and calculating the contact resistance between the voltage current source and the high-end port of the tested device according to the differential voltage measured by the first differential operational amplifier (OP103) and the current measured by the current testing circuit.

8. The circuit of claim 4 or 5,

closing a sixth switch (K108) and an eighth switch (K111), connecting a third single-pole double-throw switch (K110) to a voltage measuring circuit (FLS) corresponding to the low-end current driving circuit, connecting a fourth single-pole double-throw switch (K109) to a voltage measuring circuit (SLS) corresponding to the low-end voltage sensing circuit, and judging whether the two voltage measuring circuits (FLS and SLS) are normally connected with the low-end port of the tested device or not according to the differential voltage measured by a second differential operational amplifier (OP107) and the current measured by the current testing circuit;

and closing the fifth switch (K107) and the seventh switch (K112), connecting the third single-pole double-throw switch (K110) to the low-side current driving circuit (FL), connecting the fourth single-pole double-throw switch (K109) to the low-side voltage sensing circuit (SL), and judging whether the low-side current driving circuit (FL) and the low-side voltage sensing circuit (SL) are normally connected with the low-side port of the tested device according to the differential voltage measured by the second differential operational amplifier (OP107) and the current measured by the current testing circuit.

9. The circuit of claim 8,

and closing the fifth switch (K107) and the seventh switch (K112), connecting the third single-pole double-throw switch (K110) to a voltage measuring circuit (FLS) corresponding to the low-side current driving circuit, connecting the fourth single-pole double-throw switch (K109) to a voltage measuring circuit (SLS) corresponding to the low-side voltage sensing circuit, and calculating the contact resistance between the voltage current source and the low-side port of the tested device according to the differential voltage measured by the second differential operational amplifier (OP107) and the current measured by the current testing circuit.

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