CN111238983A - Ultrasonic elliptical vibration scratching test method - Google Patents

Ultrasonic elliptical vibration scratching test method Download PDF

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CN111238983A
CN111238983A CN202010076245.8A CN202010076245A CN111238983A CN 111238983 A CN111238983 A CN 111238983A CN 202010076245 A CN202010076245 A CN 202010076245A CN 111238983 A CN111238983 A CN 111238983A
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scratching
axis
elliptical vibration
ultrasonic elliptical
lathe
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CN111238983B (en
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康仁科
董志刚
潘延安
鲍岩
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Dalian University of Technology
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    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N3/00Investigating strength properties of solid materials by application of mechanical stress
    • G01N3/58Investigating machinability by cutting tools; Investigating the cutting ability of tools

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Abstract

The invention discloses an ultrasonic elliptical vibration scratching test method. The method comprises the following steps: in a constant-temperature and constant-humidity ultra-precision machining test room, an ultrasonic elliptical vibration cutting device is started, the amplitude and the phase difference of two-phase vibration are adjusted, based on the C-axis function of a lathe, the X-axis and Z-axis feeding of the lathe are matched, and a diamond cutter is utilized to perform an ultrasonic elliptical vibration scratching test on a cut flat sample, so that a cutting trace close to the actual cutting condition is obtained. The invention provides a feasible high-precision scratching test method which is close to the actual cutting condition based on the C-axis function of a lathe and matched with the Z-axis feeding of the lathe, carries out variable cutting depth and variable speed scratching tests under the condition close to the actual cutting condition, and realizes the steps of sequentially carrying out leveling, fixed reference, scratching tests and the like under one-time clamping and positioning of a test piece.

Description

Ultrasonic elliptical vibration scratching test method
Technical Field
The invention relates to the field of ultrasonic vibration cutting principle test research, in particular to an ultrasonic elliptical vibration scratching test method.
Background
Ultrasonic elliptical vibration cutting is a method for cutting and machining a tool by applying two-dimensional vibration to the tool through single/double excitation to vibrate the tool in two dimensions. Compared with the traditional one-dimensional ultrasonic vibration cutting, the ultrasonic elliptical vibration cutting has more thorough separation characteristic, and can realize the functions of cutting friction force reversal, variable angle cutting, variable speed cutting in two directions and the like, thereby obviously reducing the abrasion of a cutter and obtaining better cutting quality while obtaining the nano-scale surface roughness.
Ultrasonic elliptical vibration cutting is a complex process of interaction between a cutter and the surface of a workpiece which vibrate in a high frequency mode along a circular or elliptical track, and factors such as the contact state, the ultrasonic vibration state, the contact time and the like of the cutter and the workpiece influence each other in the machining process, so that the research on the ultrasonic elliptical vibration cutting process becomes difficult. In order to reduce the influence of different factors on the cutting process, a scratching test is generally adopted to research the ultrasonic elliptical vibration cutting process and reveal the material removal mechanism.
The existing scratching test method and device mostly scratch the surface of a workpiece through a single-particle diamond pressure head to obtain scratches with variable cutting depth or fixed cutting depth. The first scheme is that an indentation/scratch tester is adopted for testing, and the scratching speed is very low; secondly, fixing single abrasive particles on the outer cylindrical surface or the end surface of the grinding wheel, and driving the grinding wheel to rotate through a grinding wheel spindle to realize high-speed scratching; the third is to use the diamond pressure head as the tool to clamp the lathe handle, and the feeding speed of the lathe is used as the scratching speed to carry out the test. However, the biggest problems of the common scratching are that the single-particle diamond pressure head is difficult to represent the actual cutting state, the scratching precision is difficult to guarantee, and the scratching reference is easy to change, so that the research of the function in the ultrasonic elliptic vibration cutting process from the micro scale is restricted.
At present, the research and exploration on ultrasonic elliptical vibration scratching are less at home and abroad, and therefore, a proper scratching test method is urgently needed to be designed.
Disclosure of Invention
In order to research the material removal mechanism in the ultrasonic elliptical vibration cutting process, the invention provides an ultrasonic elliptical vibration scratching test method, and the scratching test of a diamond cutter is realized through the ultrasonic elliptical vibration scratching test method. Based on the C-axis function of the lathe spindle and matched with the Z-axis feed of the lathe, the ultrasonic elliptical vibration scratching test is carried out on the cut-flat sample by using the diamond cutter. The method can control scratching speed, scratching depth and scratching length, can accurately represent the actual cutting state by adopting the diamond cutter, realizes one-time clamping and positioning of the test piece, sequentially carries out test piece leveling, reference determination and scratching, and provides a feasible method for approaching the actual cutting condition and high-precision scratching test. The technical means adopted by the invention are as follows:
an ultrasonic elliptical vibration scratching test method comprises the following steps: the test sample is installed on a vacuum chuck of a spindle of the ultra-precision lathe, the diamond cutter is arranged on an ultrasonic elliptical vibration cutting device on a Z axis of the ultra-precision lathe, and the ultrasonic elliptical vibration scratching test of the diamond cutter on the test sample under corresponding conditions is completed through the change of parameters of a C axis/Z axis/X axis in the operation process of the lathe.
Further, the method specifically comprises the following steps:
step 1, ensuring that the working characteristics of all shafting of the ultra-precision lathe are normal, and waiting for preheating until the lathe reaches thermal stability, wherein the ultra-precision lathe is arranged in an ultra-precision machining test room with preset constant temperature, constant humidity and air cleanliness;
step 2, mounting the sample on a vacuum chuck of a spindle of the ultra-precision lathe to complete dynamic balance adjustment of the sample;
step 3, installing the ultrasonic elliptical vibration cutting device on a Z axis of the ultra-precision lathe through a height fine adjustment device, starting the ultrasonic elliptical vibration cutting device, and adjusting the amplitude and phase difference of two-phase vibration of the device through an ultrasonic power supply to complete tool setting under the condition that vibration output meets a preset condition;
step 4, turning the end face of the test piece by adopting an end face turning method until the surface of the test piece is completely cut, and realizing surface leveling;
step 5, marking the position of the Z point of the tool as a scratching reference position when the last tool is turned;
step 6, switching the function of the C axis of the lathe spindle to change the lathe spindle into the C axis;
step 7, driving the sample to rotate by the shaft C of the lathe, setting the rotation angle of the shaft C, controlling the X, Z shaft to feed, and performing an ultrasonic elliptical vibration scratching test;
and 8, controlling the Z-axis movement of the lathe, and withdrawing the diamond cutter.
And 9, closing the ultra-precision lathe and the ultrasonic elliptical vibration scratching device, and taking down the scratching sample to obtain the ultrasonic elliptical vibration scratches in different states.
Further, in the step 7, the rotating speed of the C axis is controlled to perform ultrasonic elliptical vibration scratching tests at different scratching speeds;
by controlling the rotation angle of the C axis, ultrasonic elliptical vibration scratching tests with different scratching lengths can be carried out, and meanwhile, multiple interference scratching tests of the diamond cutter can be realized;
the variable-cut-depth ultrasonic elliptical vibration scratching test under different feeding gradients is realized by controlling the feeding speed of the Z axis;
the ultrasonic elliptical vibration scratching tests under different scratching depths are realized by controlling the Z-axis feeding depth;
the fixed-cut-depth ultrasonic elliptical vibration scratching test under different scratching depths is realized by controlling the Z-axis feeding depth and keeping the depth;
the ultrasonic elliptical vibration scratching test under the spiral track is realized by controlling the feeding speed of the X axis.
Furthermore, the temperature of the ultra-precision machining laboratory is controlled to be 20 +/-0.1 ℃, the humidity is controlled to be 35 +/-5%, and the cleanliness is controlled to be above 800 grade.
Further, the ultra-precision machining lathe is a three-axis ultra-precision lathe with a Z axis, an X axis and a main shaft/C axis.
Furthermore, the scratching speed can be selected at will within the maximum rotating speed of the C axis of the ultra-precision lathe, the scratching depth can be set through the Z axis feed of the ultra-precision lathe, the scratching depth precision depends on the feed precision of the ultra-precision lathe, the scratching length can be set through the rotating angle of the C axis of the ultra-precision lathe, and meanwhile, the multi-interference scratching test of the diamond cutter can be realized.
Furthermore, the ultrasonic elliptical vibration cutting device is an elliptical vibration track synthesized by longitudinal vibration and bending vibration, the amplitude of each phase of vibration can be independently adjusted by adjusting the excitation voltage of an ultrasonic power supply, and the phase difference of two-phase vibration can also be adjusted by the ultrasonic power supply, so that the adjustment of the ultrasonic elliptical vibration track is realized.
Compared with other single-particle scratching test methods, the ultrasonic elliptical vibration scratching test method has the following advantages:
according to the invention, the diamond cutter is adopted to replace a single-particle diamond pressure head, and based on the function of the C axis of the main shaft of the lathe and matched with the Z axis feed of the lathe, the cutting trace close to the actual cutting condition can be obtained, so that the ultrasonic elliptic vibration cutting machining method is beneficial to exploring the effect in the ultrasonic elliptic vibration cutting machining process from the micro scale.
The variable-cutting-depth and variable-speed scratching test is realized by matching with Z-axis feeding of a lathe, compared with a common scratching test, the method can realize high-speed scratching, is accurate in scratching reference positioning and high in scratching precision, realizes one-time clamping and positioning of the test piece, sequentially performs leveling, reference determination and scratching of the test piece, and provides a feasible method for realizing the high-precision scratching test.
The invention can be used for researching the ultrasonic elliptical vibration cutting mechanism under different scratching speeds by controlling the rotating speed of the C shaft.
The invention can be used for exploring the ultrasonic elliptical vibration cutting mechanism under different scratching lengths by controlling the rotation angle of the C axis, and can realize the repeated interference scratching test of the diamond cutter.
The invention can be used for exploring the variable cutting depth ultrasonic elliptical vibration cutting mechanism under different feeding gradients by controlling the Z-axis feeding depth.
The invention can be used for researching the ultrasonic elliptical vibration cutting mechanism under the spiral track by controlling the X-axis feeding speed.
Based on the reasons, the ultrasonic vibration cutting principle test device can be widely popularized in the field of ultrasonic vibration cutting principle test research.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings needed to be used in the description of the embodiments or the prior art will be briefly introduced below, and it is obvious that the drawings in the following description are some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to these drawings without creative efforts.
Fig. 1 is a schematic diagram showing a simple structure of an ultra-precision machining lathe according to an embodiment of the present invention, in which 1 is an X-axis, 2 is the ultra-precision lathe, 3 is a spindle/C-axis, 4 is a vacuum chuck, 5 is a sample, 6 is a scratch, 7 is a diamond tool, 8 is an ultrasonic elliptical vibration cutting device, 9 is a Z-axis, 11 is a height fine adjustment device, and 12 is an ultrasonic power supply.
FIG. 2 is a schematic diagram of a variable cut depth and constant cut body wipe in an embodiment of the present invention.
FIG. 3 is a schematic view of a wipe angle in an embodiment of the present invention.
FIG. 4 is a schematic drawing of ultrasonic elliptical vibration scratching of a variable-cutting-depth tungsten alloy test piece in an embodiment of the invention.
Detailed Description
In order to make the objects, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are some, but not all, embodiments of the present invention. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
The embodiment provides an ultrasonic elliptical vibration scratching test method, a schematic diagram of a main device is shown in fig. 1, and the method specifically comprises the following steps: ensuring that the working characteristics of all shafting (an X shaft 1, a Z shaft 9 and a main shaft/C shaft 3) of the ultra-precision lathe 2 are normal, and waiting for preheating until the lathe reaches thermal stability, wherein the ultra-precision lathe 2 is arranged in an ultra-precision machining test room with preset constant temperature, constant humidity and air cleanliness; in the embodiment, the temperature of the ultra-precision machining laboratory is controlled to be 20 +/-0.1 ℃, the humidity is controlled to be 35 +/-5%, and the cleanliness is controlled to be above 800 grade;
mounting the sample 5 on a vacuum chuck 4 of a spindle 3 of the ultra-precision lathe to complete dynamic balance adjustment of the sample 5; in the embodiment, the sample material is tungsten alloy 95W-3Ni-2Fe, the shape is cylindrical, and the dynamic balance adjustment precision grade is G40;
installing an ultrasonic elliptical vibration cutting device 8 on a Z axis 9 of an ultra-precision lathe 2 through a height fine adjustment device 11, starting the ultrasonic elliptical vibration cutting device 8, adjusting the amplitude and phase difference of two-phase vibration of the device through an ultrasonic power supply 12, wherein the resonant frequency is 40kHz, the amplitude of the output scratching speed direction is 4 microns, the amplitude of the scratch direction is 2 microns, the phase difference is pi/2, standing for 5 minutes, and finishing tool setting when the vibration output is stable;
turning the end face of the test piece 5 by adopting an end face turning method until the surface of the test piece 5 is completely cut, and realizing surface leveling; when the last turning is marked, the position of the Z point of the cutter is used as a scratching reference position;
the C shaft 3 of the ultra-precision lathe 2 drives the sample 5 to rotate, the rotation angle of the C shaft 2 is set, the feeding of an X shaft 1 and a Z shaft 9 is controlled at the same time, and an ultrasonic elliptical vibration scratching test is carried out by matching with a diamond cutter 7 (the front angle is 0 degrees, the rear angle is 10 degrees, the cutting edge radius of the cutter is 1mm, and the cutting blunt radius is less than 50 nm);
the rotation angle of the C shaft 2 is controlled to carry out ultrasonic elliptical vibration scratching tests with different scratching lengths, as shown in figures 3 and 4, and meanwhile, the repeated interference scratching tests of the diamond cutter can be realized; controlling the feeding speed of the Z shaft 9 to realize the variable cutting depth ultrasonic elliptical vibration scratching test under different feeding gradients; controlling the feeding depth of the Z-axis 9 to realize ultrasonic elliptical vibration scratching tests under different scratching depths; controlling the feeding depth of the Z-axis 9, and keeping the depth to realize the constant-cut-depth ultrasonic elliptical vibration scratching test under different scratching depths, as shown in FIG. 2; controlling the feeding speed of an X-axis 1 to realize an ultrasonic elliptical vibration scratching test under a spiral track;
the scratching speed can be selected at will within the maximum rotating speed of the ultra-precision lathe 2, the scratching depth can be set through the axial feeding of the ultra-precision lathe 2, the precision of the scratching depth depends on the feeding precision of the ultra-precision lathe 2, the scratching length can be set through the rotating angle of a C shaft 3 of the ultra-precision lathe, and meanwhile, the multi-time interference scratching test of the diamond cutter 7 can be realized; in this embodiment, the wipe parameters are set as: theta is 15-720 degrees, f is 0-8 mu m, n is 5-25r/min, wherein theta is a rotation angle, f is a feeding amount, and n is a main shaft rotation speed;
controlling the axial feed of the ultra-precision lathe 2 to withdraw the diamond cutter 7;
and (3) closing the ultra-precision lathe 2 and the ultrasonic elliptical vibration scratching device 8, and taking down the scratching sample 5 to obtain the ultrasonic elliptical vibration scratch 6.
Finally, it should be noted that: the above embodiments are only used to illustrate the technical solution of the present invention, and not to limit the same; while the invention has been described in detail and with reference to the foregoing embodiments, it will be understood by those skilled in the art that: the technical solutions described in the foregoing embodiments may still be modified, or some or all of the technical features may be equivalently replaced; and the modifications or the substitutions do not make the essence of the corresponding technical solutions depart from the scope of the technical solutions of the embodiments of the present invention.

Claims (7)

1. An ultrasonic elliptical vibration scratching test method is characterized by comprising the following steps: the test sample is installed on a vacuum chuck of a spindle of the ultra-precision lathe, the diamond cutter is installed on an ultrasonic elliptical vibration cutting device on a Z axis of the ultra-precision lathe, and the ultrasonic elliptical vibration scratching test of the diamond cutter on the test sample under corresponding conditions is completed through the change of parameters of a C axis/Z axis/X axis in the operation process of the lathe.
2. The ultrasonic elliptical vibration scratching test method according to claim 1, characterized by comprising the steps of,
step 1, ensuring that the working characteristics of all shafting of the ultra-precision lathe are normal, and waiting for preheating until the lathe reaches thermal stability, wherein the ultra-precision lathe is arranged in an ultra-precision machining test room with preset constant temperature, constant humidity and air cleanliness;
step 2, mounting the sample on a vacuum chuck of a spindle of the ultra-precision lathe to complete dynamic balance adjustment of the sample;
step 3, installing the ultrasonic elliptical vibration cutting device on a Z axis of the ultra-precision lathe through a height fine adjustment device, starting the ultrasonic elliptical vibration cutting device, and adjusting the amplitude and phase difference of two-phase vibration of the device through an ultrasonic power supply to complete tool setting under the condition that vibration output meets a preset condition;
step 4, turning the end face of the test piece by adopting an end face turning method until the surface of the test piece is completely cut, and realizing surface leveling;
step 5, marking the position of the Z point of the tool as a scratching reference position when the last tool is turned;
step 6, switching the function of the C axis of the lathe spindle to change the lathe spindle into the C axis;
step 7, driving the sample to rotate by the shaft C of the lathe, setting the rotation angle of the shaft C, controlling the X, Z shaft to feed, and performing an ultrasonic elliptical vibration scratching test;
and 8, controlling the Z-axis movement of the lathe, and withdrawing the diamond cutter.
And 9, closing the ultra-precision lathe and the ultrasonic elliptical vibration scratching device, and taking down the scratching sample to obtain the ultrasonic elliptical vibration scratches in different states.
3. The ultrasonic elliptical vibration scratching test method according to claim 2, wherein in the step 7, the rotating speed of the C axis is controlled to perform ultrasonic elliptical vibration scratching tests at different scratching speeds;
by controlling the rotation angle of the C axis, ultrasonic elliptical vibration scratching tests with different scratching lengths can be carried out, and meanwhile, multiple interference scratching tests of the diamond cutter can be realized;
the variable-cut-depth ultrasonic elliptical vibration scratching test under different feeding gradients is realized by controlling the feeding speed of the Z axis;
the ultrasonic elliptical vibration scratching tests under different scratching depths are realized by controlling the Z-axis feeding depth;
the fixed-cut-depth ultrasonic elliptical vibration scratching test under different scratching depths is realized by controlling the Z-axis feeding depth and keeping the depth;
the ultrasonic elliptical vibration scratching test under the spiral track is realized by controlling the feeding speed of the X axis.
4. The ultrasonic elliptical vibration scratching test method according to claim 1, wherein the temperature of the ultra-precision machining laboratory is controlled to be 20 ± 0.1 ℃, the humidity is controlled to be 35 ± 5%, and the cleanliness is controlled to be above 800 grade.
5. The ultrasonic elliptical vibration scratch test method as claimed in claim 1, wherein the ultra-precision machining lathe is a three-axis ultra-precision lathe having a Z-axis, an X-axis, a main axis/C-axis.
6. The ultrasonic elliptical vibration scratching test method according to claim 3, wherein the scratching speed can be arbitrarily selected within the maximum rotating speed of the C axis of the ultra-precision lathe, the scratching depth can be set through the Z axis feeding of the ultra-precision lathe, the scratching depth accuracy depends on the feeding accuracy of the ultra-precision lathe, the scratching length can be set through the rotating angle of the C axis of the ultra-precision lathe, and meanwhile, the multiple interference scratching test of the diamond cutter can be realized.
7. The ultrasonic elliptical vibration scratching test method according to claim 1, wherein the ultrasonic elliptical vibration cutting device is an elliptical vibration trajectory composed of longitudinal vibration and bending vibration, the amplitude of each phase of vibration can be independently adjusted by adjusting the excitation voltage of the ultrasonic power supply, and the phase difference of two-phase vibration can also be adjusted by the ultrasonic power supply, thereby realizing the adjustment of the ultrasonic elliptical vibration trajectory.
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CN113109199A (en) * 2021-04-15 2021-07-13 中国民航大学 Experimental device and method for single diamond abrasive particle ultrasonic vibration scribing silicon wafer

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CN113109199B (en) * 2021-04-15 2022-07-08 中国民航大学 Experimental device and method for single diamond abrasive particle ultrasonic vibration scribing silicon wafer

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