CN111174809A - Method for cleaning inner hole of cavity of laser gyroscope - Google Patents
Method for cleaning inner hole of cavity of laser gyroscope Download PDFInfo
- Publication number
- CN111174809A CN111174809A CN201911384484.3A CN201911384484A CN111174809A CN 111174809 A CN111174809 A CN 111174809A CN 201911384484 A CN201911384484 A CN 201911384484A CN 111174809 A CN111174809 A CN 111174809A
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- Prior art keywords
- cavity
- inner hole
- cleaning
- washing
- grinding head
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C25/00—Manufacturing, calibrating, cleaning, or repairing instruments or devices referred to in the other groups of this subclass
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B23/00—Portable grinding machines, e.g. hand-guided; Accessories therefor
- B24B23/02—Portable grinding machines, e.g. hand-guided; Accessories therefor with rotating grinding tools; Accessories therefor
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B5/00—Machines or devices designed for grinding surfaces of revolution on work, including those which also grind adjacent plane surfaces; Accessories therefor
- B24B5/36—Single-purpose machines or devices
- B24B5/48—Single-purpose machines or devices for grinding walls of very fine holes, e.g. in drawing-dies
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23G—CLEANING OR DE-GREASING OF METALLIC MATERIAL BY CHEMICAL METHODS OTHER THAN ELECTROLYSIS
- C23G1/00—Cleaning or pickling metallic material with solutions or molten salts
- C23G1/02—Cleaning or pickling metallic material with solutions or molten salts with acid solutions
- C23G1/08—Iron or steel
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23G—CLEANING OR DE-GREASING OF METALLIC MATERIAL BY CHEMICAL METHODS OTHER THAN ELECTROLYSIS
- C23G1/00—Cleaning or pickling metallic material with solutions or molten salts
- C23G1/02—Cleaning or pickling metallic material with solutions or molten salts with acid solutions
- C23G1/08—Iron or steel
- C23G1/081—Iron or steel solutions containing H2SO4
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23G—CLEANING OR DE-GREASING OF METALLIC MATERIAL BY CHEMICAL METHODS OTHER THAN ELECTROLYSIS
- C23G1/00—Cleaning or pickling metallic material with solutions or molten salts
- C23G1/02—Cleaning or pickling metallic material with solutions or molten salts with acid solutions
- C23G1/08—Iron or steel
- C23G1/085—Iron or steel solutions containing HNO3
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23G—CLEANING OR DE-GREASING OF METALLIC MATERIAL BY CHEMICAL METHODS OTHER THAN ELECTROLYSIS
- C23G3/00—Apparatus for cleaning or pickling metallic material
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Materials Engineering (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Radar, Positioning & Navigation (AREA)
- Remote Sensing (AREA)
- General Physics & Mathematics (AREA)
- Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Cleaning By Liquid Or Steam (AREA)
Abstract
The invention relates to a method for cleaning an inner hole of a cavity of a laser gyroscope, which comprises the following steps: 1) polishing an inner hole: dipping a soft grinding head equipped with a micro electric grinder into the ferric oxide polishing solution, and extending the grinding head into each inner hole of the cavity for grinding; 2) washing with water: washing each inner hole of the polished cavity by deionized water; 3) acid washing: transferring the cavity into acid liquor for acid washing; 4) washing with water: washing the cavity with deionized water, and then ultrasonically cleaning the cavity in the deionized water; 5) and (3) drying: and blowing the cavity by using nitrogen or compressed air. The invention adopts the method of combining mechanical polishing and chemical cleaning to clean the inner hole of the cavity, has high decontamination speed and good decontamination effect, and does not abrade the surface of the inner hole of the cavity.
Description
Technical Field
The invention relates to the technical field of cleaning of optical elements, in particular to a method for cleaning an inner hole of a cavity of a laser gyroscope.
Background
The laser gyro is used as a precise navigation device and widely applied to the aspects of guided missiles, aerospace and aviation and the like, and the core component of the laser gyro is a glass optical element-cavity with a plurality of inner holes and a complex structure. The cleaning degree of the surface and the inner hole of the cavity is closely related to the reliability and the stability of the laser gyro. Because the processing procedure of cavity is complicated, the cycle is long, and the hole inevitable remains pollutants such as polishing powder, watermark in the processing procedure, and these pollutants dry on the inner wall through physical adsorption or even chemisorption for a long time, make the cavity hole wash the degree of difficulty greatly. In the traditional cleaning process, the cavitation effect acted on the inner hole is greatly weakened due to the complex cavity structure in the ultrasonic cleaning process, and the cleaning effect is not good; in the chemical cleaning method, because pollutant components are complex, and the polishing powder mainly containing cerium oxide is difficult to dissolve in a common cleaning agent, a plurality of cleaning liquids are required to be adopted, including an organic solvent cleaning liquid for repeated cleaning, the process is complex, and the consumed time is long; although the common wiping method is effective, the efficiency is low, the labor cost is high, and partial pollutants are easy to remain.
Disclosure of Invention
Aiming at the technical problems in the prior art, the invention provides a method for cleaning an inner hole of a cavity of a laser gyroscope, which is efficient, simple and convenient and has a good cleaning effect.
The technical scheme for solving the technical problems is as follows: the method for cleaning the inner hole of the cavity of the laser gyroscope comprises the following steps:
1) polishing an inner hole: dipping a soft grinding head equipped with a micro electric grinder into the ferric oxide polishing solution, and extending the grinding head into each inner hole of the cavity for grinding;
2) washing with water: washing each inner hole of the polished cavity by deionized water;
3) acid washing: transferring the cavity into acid liquor for acid washing;
4) washing with water: washing an inner hole of the cavity by using deionized water, and then ultrasonically cleaning the cavity in the deionized water;
5) and (3) drying: and blowing the cavity by using nitrogen or compressed air.
Further, the soft grinding head in the step 1) can be one of a wool grinding head, a cloth grinding head or a nylon grinding head, preferably a wool grinding head, and the diameter of the wool grinding head is 0.2-1 mm smaller than that of an inner hole to be cleaned.
Further, the iron oxide polishing powder in the step 1) is 500-3000 meshes.
Further, the iron oxide polishing solution consists of iron oxide polishing powder and deionized water.
Further, the mass fraction of the ferric oxide in the ferric oxide polishing solution is 5-50%.
Further, the rotating speed of the micro electric grinder in the step 1) is 500-1000 rpm, and the polishing time of each inner hole is 1-5 min.
Further, the acid solution in step 3) needs to satisfy two conditions at the same time: firstly, the water-soluble iron salt can be generated by the reaction with ferric oxide, and secondly, the water-soluble iron salt cannot react with the cavity material microcrystalline glass. In view of these two conditions, strong acids other than HF may be employed.
Further, the acid is preferably one of hydrochloric acid or sulfuric acid or dilute nitric acid.
Further, the volume percentage of acid in the hydrochloric acid solution, the sulfuric acid solution or the dilute nitric acid solution is 10-50%.
Further, the pickling temperature is 80-90 ℃, and the pickling time is 5-15 min.
Further, the ultrasonic cleaning process in the step 4) is to ultrasonically clean the cavity in deionized water for 1-3 times, each time for 3-15 min, and the ultrasonic frequency is 40-60 kHz.
The beneficial effect of adopting above-mentioned technical scheme is: the inner hole of the cavity is cleaned by adopting a method combining mechanical polishing and chemical cleaning, the decontamination speed is high, and the decontamination effect is good.
The invention adopts the method of polishing by the ferric oxide polishing solution, can remove various pollutants on the surface of the inner hole at one time no matter whether the dissolution performance and the adsorption mechanism of the pollutants in the inner hole of the cavity are the same or not, and has high decontamination speed and good decontamination effect. And the hardness of the ferric oxide polishing powder is slightly smaller than that of the microcrystalline glass of the cavity, and the surface of the inner hole of the cavity cannot be damaged by controlling the particle size of the ferric oxide polishing powder, the concentration of the polishing solution and the rotating speed of the grinding head.
Drawings
FIGS. 1, 3 and 5 are photomicrographs of the inner bore of the chamber before cleaning in examples 1-3 of the present invention;
FIGS. 2, 4 and 6 are microscope photographs of the inner holes of the cavity cleaned by the method described in examples 1 to 3 of the present invention.
Detailed Description
The present invention will now be described with reference to the accompanying drawings, which are provided for illustration purposes only and are not intended to limit the scope of the present invention.
The iron oxide polishing powder used in the examples was a commercially available product and had an iron sesquioxide composition.
Example 1
1) Polishing an inner hole: adding 50g of iron oxide polishing powder with the particle size of 500 meshes into 950g of deionized water, and uniformly stirring to prepare the required polishing solution; dipping the polishing solution on a wool grinding head equipped with a micro electric grinder, wherein the diameter of the grinding head is 0.2mm smaller than that of an inner hole. Dipping the polishing solution on a wool grinding head, sequentially extending the wool grinding head into each inner hole of the cavity, setting the rotating speed of a micro electric grinder to be 1000rpm, and grinding each inner hole for 5 min;
2) washing with water: washing each inner hole of the polished cavity by deionized water;
3) acid washing: preparing 800ml of hydrochloric acid solution with the volume concentration of 10%, and heating to 80 ℃; transferring the cavity to be cleaned into dilute hydrochloric acid, and boiling and cleaning for 15 min;
4) washing with water: washing the pickled cavity with deionized water, and then placing the cavity in deionized water for ultrasonic cleaning for 3 times, wherein each time is 3min, and the ultrasonic frequency is 60 kHz;
5) and (3) drying: and (4) blowing the cavity by using nitrogen until the surface and the inner hole of the cavity are completely air-dried.
Example 2
1) Polishing an inner hole: adding 50g of iron oxide polishing powder with the particle size of 3000 meshes into 50g of deionized water, and uniformly stirring to prepare the required polishing solution; dipping the polishing solution on a wool grinding head equipped with a micro electric grinder, wherein the diameter of the grinding head is 1mm smaller than that of an inner hole. Dipping the polishing solution on a wool grinding head, sequentially extending into each inner hole of the cavity, setting the rotating speed of a micro electric grinder to be 500rpm, and grinding each inner hole for 1 min;
2) washing with water: washing each inner hole of the polished cavity by deionized water;
3) acid washing: preparing 800ml of nitric acid solution with the volume concentration of 50%, and heating to 90 ℃; transferring the cavity to be cleaned into dilute hydrochloric acid, and boiling and cleaning for 5 min;
4) washing with water: washing the pickled cavity with deionized water, and then placing the cavity in deionized water for ultrasonic cleaning for 1 time, wherein the ultrasonic frequency is 40kHz, and the ultrasonic time is 15 min;
5) and (3) drying: and (4) blowing the cavity by using nitrogen until the surface and the inner hole of the cavity are completely air-dried.
Example 3
1) Polishing an inner hole: adding 50g of iron oxide polishing powder with the particle size of 2000 meshes into 110g of deionized water, and uniformly stirring to prepare the required polishing solution; dipping the polishing solution on a wool grinding head equipped with a micro electric grinder, wherein the diameter of the grinding head is 0.5mm smaller than that of an inner hole. Dipping the polishing solution on a wool grinding head, sequentially extending into each inner hole of the cavity, setting the rotating speed of a micro electric grinder to be 700rpm, and grinding each inner hole for 3 min;
2) washing with water: washing each inner hole of the polished cavity by deionized water;
3) acid washing: preparing 800ml of sulfuric acid solution with the volume concentration of 30%, and heating to 85 ℃; transferring the cavity to be cleaned into dilute hydrochloric acid, and boiling and cleaning for 10 min;
4) washing with water: washing the pickled cavity with deionized water, and then placing the cavity in deionized water for ultrasonic cleaning for 2 times, each time for 10min, wherein the ultrasonic frequency is 50 kHz;
5) and (3) drying: and blowing the cavity by using compressed air until the surface and the inner hole of the cavity are completely air-dried.
Experimental example 1
The capillary pores of the cavity before and after cleaning by the cleaning method of examples 1 to 3 were observed by a model XPZ-830B microscope manufactured by Guilin optical instruments Inc., and the magnification was 60 times. As can be seen from fig. 1, 3 and 5, a large number of particles and also watermarks are attached to the pores before cleaning. The inner hole of the cleaned cavity has no residual pollutants such as polishing powder, watermarks and the like, and can meet the requirement on the cleanliness of the cavity of the laser gyroscope.
Experimental example 2
The internal bores of the chamber before and after cleaning according to the cleaning method of examples 1-3 were measured using a ZEISS CONTURA coordinate measuring apparatus, and the results are shown in Table 1. As can be seen from Table 1, the sizes of the pores and the gas storage holes of the cavity are almost unchanged before and after cleaning, which indicates that the cleaning method of the invention does not cause abrasion to the surfaces of the inner holes of the cavity. It should be noted that: the pore size data after individual cleaning is larger than that before cleaning, for example, the diameter of the gas storage hole M4 in example 1 is 12.029mm before cleaning, and is 12.028mm after cleaning, because the last significant digit is estimated, and when different objects are measured, the estimated value may have slight difference.
TABLE 1 comparison of the diameters of the inner bores of the chambers before and after cleaning by the cleaning methods of examples 1-3
The above description is only for the purpose of illustrating the preferred embodiments of the present invention and is not to be construed as limiting the invention, and any modifications, equivalents, improvements and the like that fall within the spirit and principle of the present invention are intended to be included therein.
Claims (10)
1. A method for cleaning an inner hole of a cavity of a laser gyroscope is characterized by comprising the following steps:
1) polishing an inner hole: dipping a soft grinding head equipped with a micro electric grinder into the ferric oxide polishing solution, and extending the grinding head into each inner hole of the cavity for grinding;
2) washing with water: washing each inner hole of the polished cavity by deionized water;
3) acid washing: transferring the cavity into acid liquor for acid washing;
4) washing with water: washing each inner hole of the cavity by deionized water, and then ultrasonically cleaning the cavity by the deionized water;
5) and (3) drying: and blowing the cavity by using nitrogen or compressed air.
2. The method for cleaning the inner hole of the cavity of the laser gyroscope as claimed in claim 1, wherein the flexible grinding head is one of a wool grinding head, a cloth grinding head and a nylon grinding head.
3. The method for cleaning the inner hole of the cavity of the laser gyroscope as claimed in claim 2, wherein the soft grinding head is a wool grinding head, and the diameter of the wool grinding head is 0.2-1 mm smaller than the diameter of the inner hole of the cavity.
4. The method for cleaning the inner hole of the cavity of the laser gyroscope, as claimed in claim 1, wherein the particle size of the iron oxide polishing powder is 500-3000 mesh.
5. The method of claim 4, wherein the iron oxide polishing solution comprises iron oxide polishing powder and deionized water.
6. The method for cleaning the inner hole of the cavity of the laser gyroscope, as claimed in claim 5, wherein the mass percentage of the iron oxide polishing powder in the iron oxide polishing solution is 5% -50%.
7. The method for cleaning the inner hole of the cavity of the laser gyroscope, as claimed in claim 1, wherein the rotation speed of the micro electric grinder is 500-1000 rpm, and the grinding time of each inner hole is 1-5 min.
8. The method as claimed in claim 1, wherein the acid solution is one of hydrochloric acid solution, sulfuric acid solution or dilute nitric acid solution, and the volume percentage of the acid is 10% to 50%.
9. The method for cleaning the inner hole of the cavity of the laser gyroscope, as claimed in claim 8, wherein the pickling temperature is 80-90 ℃ and the pickling time is 5-15 min.
10. The method for cleaning the inner hole of the cavity of the laser gyroscope, as claimed in claim 1, wherein the ultrasonic cleaning process is ultrasonic cleaning the cavity in deionized water for 1-3 times, each time for 3-15 min, and the ultrasonic frequency is 40-60 kHz.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201911384484.3A CN111174809A (en) | 2019-12-28 | 2019-12-28 | Method for cleaning inner hole of cavity of laser gyroscope |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201911384484.3A CN111174809A (en) | 2019-12-28 | 2019-12-28 | Method for cleaning inner hole of cavity of laser gyroscope |
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| CN201911384484.3A Pending CN111174809A (en) | 2019-12-28 | 2019-12-28 | Method for cleaning inner hole of cavity of laser gyroscope |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111534838A (en) * | 2020-06-16 | 2020-08-14 | 广东嘉元科技股份有限公司 | Electrolytic copper foil raw foil machine |
| CN112934832A (en) * | 2021-04-19 | 2021-06-11 | 北京北方华创微电子装备有限公司 | Method for cleaning ceramic parts |
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| EP1782916A1 (en) * | 2005-11-04 | 2007-05-09 | Honeywell International Inc. | Methods and apparatus for grinding discrete mirrors |
| CN104493653A (en) * | 2014-11-29 | 2015-04-08 | 域鑫科技（惠州）有限公司 | Inner-hole grinding and polishing device |
| CN109037028A (en) * | 2018-06-22 | 2018-12-18 | 江苏京尚圆电气集团有限公司 | A kind of silicon material washing method |
| CN109318063A (en) * | 2018-11-07 | 2019-02-12 | 天津津航技术物理研究所 | Laser gyro slotted vane annular groove polissoir and method |
| CN109622503A (en) * | 2018-12-04 | 2019-04-16 | 天津津航技术物理研究所 | A kind of lossless cleaning method after laser gyro cavity optical manufacturing |
| CN109648450A (en) * | 2018-12-28 | 2019-04-19 | 临安宇杰精密制品有限公司 | A kind of polishing of precision element, cleaning process |
-
2019
- 2019-12-28 CN CN201911384484.3A patent/CN111174809A/en active Pending
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1782916A1 (en) * | 2005-11-04 | 2007-05-09 | Honeywell International Inc. | Methods and apparatus for grinding discrete mirrors |
| CN104493653A (en) * | 2014-11-29 | 2015-04-08 | 域鑫科技（惠州）有限公司 | Inner-hole grinding and polishing device |
| CN109037028A (en) * | 2018-06-22 | 2018-12-18 | 江苏京尚圆电气集团有限公司 | A kind of silicon material washing method |
| CN109318063A (en) * | 2018-11-07 | 2019-02-12 | 天津津航技术物理研究所 | Laser gyro slotted vane annular groove polissoir and method |
| CN109622503A (en) * | 2018-12-04 | 2019-04-16 | 天津津航技术物理研究所 | A kind of lossless cleaning method after laser gyro cavity optical manufacturing |
| CN109648450A (en) * | 2018-12-28 | 2019-04-19 | 临安宇杰精密制品有限公司 | A kind of polishing of precision element, cleaning process |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111534838A (en) * | 2020-06-16 | 2020-08-14 | 广东嘉元科技股份有限公司 | Electrolytic copper foil raw foil machine |
| CN111534838B (en) * | 2020-06-16 | 2021-01-29 | 广东嘉元科技股份有限公司 | Electrolytic copper foil raw foil machine |
| CN112934832A (en) * | 2021-04-19 | 2021-06-11 | 北京北方华创微电子装备有限公司 | Method for cleaning ceramic parts |
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