CN111148371A - Electrostatic clamping of electronic boards - Google Patents

Electrostatic clamping of electronic boards Download PDF

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Publication number
CN111148371A
CN111148371A CN201911048932.2A CN201911048932A CN111148371A CN 111148371 A CN111148371 A CN 111148371A CN 201911048932 A CN201911048932 A CN 201911048932A CN 111148371 A CN111148371 A CN 111148371A
Authority
CN
China
Prior art keywords
carrier
electronic board
clamping
electrostatic field
electronic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201911048932.2A
Other languages
Chinese (zh)
Inventor
西尔维斯特·德梅尔
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
ASMPT GmbH and Co KG
Original Assignee
ASM Assembly Systems GmbH and Co KG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ASM Assembly Systems GmbH and Co KG filed Critical ASM Assembly Systems GmbH and Co KG
Publication of CN111148371A publication Critical patent/CN111148371A/en
Pending legal-status Critical Current

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Classifications

    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/10Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern
    • H05K3/12Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using thick film techniques, e.g. printing techniques to apply the conductive material or similar techniques for applying conductive paste or ink patterns
    • H05K3/1216Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using thick film techniques, e.g. printing techniques to apply the conductive material or similar techniques for applying conductive paste or ink patterns by screen printing or stencil printing
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/30Assembling printed circuits with electric components, e.g. with resistor
    • H05K3/32Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits
    • H05K3/34Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits by soldering
    • H05K3/3494Heating methods for reflowing of solder
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K3/00Tools, devices, or special appurtenances for soldering, e.g. brazing, or unsoldering, not specially adapted for particular methods
    • B23K3/08Auxiliary devices therefor
    • B23K3/087Soldering or brazing jigs, fixtures or clamping means
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K37/00Auxiliary devices or processes, not specially adapted to a procedure covered by only one of the preceding main groups
    • B23K37/04Auxiliary devices or processes, not specially adapted to a procedure covered by only one of the preceding main groups for holding or positioning work
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/0008Apparatus or processes for manufacturing printed circuits for aligning or positioning of tools relative to the circuit board
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2101/00Articles made by soldering, welding or cutting
    • B23K2101/36Electric or electronic devices
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/01Tools for processing; Objects used during processing
    • H05K2203/0147Carriers and holders
    • H05K2203/0165Holder for holding a Printed Circuit Board [PCB] during processing, e.g. during screen printing
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/10Using electric, magnetic and electromagnetic fields; Using laser light
    • H05K2203/105Using an electrical field; Special methods of applying an electric potential

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Electric Connection Of Electric Components To Printed Circuits (AREA)
  • Supply And Installment Of Electrical Components (AREA)

Abstract

A method of manufacturing a printed circuit board assembly, comprising clamping an electronic board to a carrier by applying an electrostatic field to the electronic board, and applying a print medium (e.g. a conductive print medium) to the electronic board using a printing process during which the electronic board is kept clamped to the carrier by the electrostatic field. Additional plates may be clamped to the carrier in turn, enabling precise placement of each plate.

Description

Electrostatic clamping of electronic boards
Technical Field
The present invention relates to a method of manufacturing a printed circuit board assembly, a method of clamping an electronic board for processing and a carrier.
Background
Industrial screen printers typically apply conductive printing media onto a flat workpiece, such as a circuit board or electronic board, by applying the conductive printing media, such as solder paste or conductive ink, through a pattern of holes in a screen (sometimes referred to as a foil or stencil) using an angled blade or squeegee. The Printed Circuit Board (PCB) thus formed may then be filled with components using a Surface Mount Technology (SMT) process on solder pads for placing the electronic components on the board to form a printed circuit board assembly. The assembly may then be passed through a reflow oven to complete the soldering process, thereby ensuring electrical and mechanical connection of the components to the substrate.
However, this known method has a problem of the tendency of miniaturization of the components. As the size of the components decreases, the solder paste pads required to attach the components must be correspondingly reduced in size. In addition, circuit boards are becoming thinner and thinner, and the use of flexible boards (so-called "Flex-PCBs" or "flexible printed PCBs") is becoming more common. All these trends require very precise printing, which puts pressure on productivity and manufacturing quality. PCBs have associated tolerances and distortions, and it is therefore difficult to precisely align all the necessary components.
As one particular example, flexible PCBs typically include very small components in "clusters" and also in mosaic (paneled), such that each panel contains at least one of these clusters. Each component has its own associated tolerance and, in addition, each cluster also has its own tolerance relative to the clusters in the other panels. Thus, the tolerances may be higher than the precision required for successful printing within one cluster.
Currently, a vacuum carrier is used to support the plates during the printing process, thereby vacuum clamping each plate to the carrier. With such carriers it is not possible to provide multiple alignments of the plates, so it is only possible to print with an average position, i.e. to align the plates on the carrier in a position optimized for all clusters simultaneously, rather than realigning between the optimal positions for the respective clusters. Therefore, printing accuracy is impaired.
Disclosure of Invention
The present invention seeks to overcome these problems and provides, by way of example, a means for clamping such a flexible PCB. Other objects of the invention include providing a simplified and more accurate board assembly process.
According to the invention, this object is achieved by using a novel carrier which utilizes electrostatic clamping instead of vacuum clamping.
This solution is in stark contrast to the conventionally recognized concept in the printing industry, which is generally thought necessary to avoid electrostatic charges within the printer. However, it has been determined that electrostatic fixturing is in fact a viable clamping option, since the generated field is only present with significant strength in the surface of the material or component being clamped.
The non-conductive material may be clamped in this manner if it has electrically polarized properties. An external electric field applied to the dielectric material may cause a displacement of the bound charged elements. These are elements that bind to molecules and cannot move freely around the material. The positively charged elements are shifted in the direction of the field and the negatively charged elements are shifted opposite to the direction of the field. The molecules can retain a neutral charge but still form an electric dipole moment.
The electrostatic field can be maintained for several days without the need for a power source, which allows the same carrier to be used for various different processes, such as printing, placement and reflow soldering. In addition, the high temperature of the reflow oven does not affect the clamping force.
According to a first aspect of the present invention, there is provided a method of manufacturing a printed circuit board assembly, comprising the steps of:
i) clamping the electronic board to the carrier by applying an electrostatic field to the electronic board;
ii) applying a print medium to the electronic board using a printing process,
wherein the electronic board is kept clamped to the carrier by an electrostatic field during the printing process.
According to a second aspect of the present invention, there is provided a method of clamping an electronic board for processing, comprising the steps of:
i) providing a carrier comprising an electrostatic field generator adapted to generate clamping electrostatic fields at least two spatially separated regions of the carrier,
ii) placing a first electronic board onto the carrier at a first determined position within a first area of the carrier,
iii) clamping the first electronic board to the carrier by generating an electrostatic field at the first area,
iv) placing a second electronic board onto the carrier at a second determined position within a second area of the carrier, and
v) clamping the second electronic board to the carrier by generating an electrostatic field at the second area.
According to a third aspect of the invention, there is provided a carrier for use in a method according to any one of the first and second aspects.
As used herein, the term "electronic board" is used to denote a flexible or rigid, printed or unprinted board, substrate or workpiece for carrying electronic circuits, electronic components or electronic devices.
According to a preferred embodiment of the invention, the electrostatic carrier is capable of individually holding individual, single circuits or clusters (e.g. flexible PCBs). The respective plate can be placed accurately on the carrier, for example using a pick-and-place machine, and then clamped in place by switching on the electrostatic field. The board can be held accurately in this position throughout the manufacturing process (i.e., printing, assembly, and reflow soldering). The further circuits or clusters can be placed individually on the carrier and clamped individually so that each circuit or cluster board can be clamped in an optimal position. At the end of the manufacturing process, the clamping may be released by discharging the electrostatic field.
Other particular aspects and features of the present invention are set out in the appended claims.
Drawings
The invention will now be described with reference to the accompanying drawings (not to scale), in which.
Fig. 1 schematically illustrates a side view of an electrostatic carrier according to an embodiment of the invention.
Fig. 2 schematically illustrates a cross-sectional view of the electrostatic carrier of fig. 1 along line a-a.
Description of the figure numbers:
1-Electrostatic Carrier
2-carrier base
3-lower dielectric insulating layer
4-electrode layer
5-upper dielectric insulating layer
6a, 6 b-electronic board
7-electric contact
8a-8 c-anode structure
9a-9 c-cathode structure
10-Carrier reference
11-plate reference.
Detailed Description
Fig. 1 schematically shows a side view of an electrostatic carrier 1 according to an embodiment of the invention. The carrier 1 is formed as a layered structure having a flat top surface adapted to support at least one electronic board on top in use, two separate boards 6a, 6b being supported being shown in fig. 1. The lowermost layer of the carrier 1 in use is a carrier base 2 which provides structural rigidity to the carrier 1. The carrier base 2 may comprise various materials, such as glass, silicon, metal or organic materials. In the embodiment shown, a lower dielectric insulation layer 3, for example formed by thin-film technology, is located on top of the carrier base 2. The lower dielectric insulating layer 3 is only required when the carrier base 2 is formed of a conductive material such as aluminum Al or other metals. An electrode layer 4 is placed on top of the lower dielectric insulating layer 3, the electrode layer 4 being described in more detail below. If the lower dielectric insulating layer 3 is not present, the electrode layer 4 can be positioned directly on the carrier substrate 2. An upper dielectric insulating layer 5 is placed on top of the electrode layer 4, which upper dielectric insulating layer 5 may be formed similarly to the lower dielectric insulating layer 3. The upper and lower dielectric layers may be formed of various materials including, for example, a polymer such as polyvinyl chloride (PVC) or polycarbonate, or a non-polymeric material such as SiO2. The various layers may be formed separately and then attached together, for example, by using a small amount of adhesive or film techniques.
The upper dielectric insulation layer 5 serves as a support surface for one or more electronic boards 6a, 6 b. It should be noted that the thickness of the upper dielectric insulation layer 5 affects the clamping force available for the electronic board and, therefore, in order to ensure an effective clamping, the upper dielectric insulation layer 5 should be kept as thin as possible. If PVC or polycarbonate is used as the upper dielectric insulation layer 5, a thickness of about 10 μm can now be achieved, while thin-film techniques are used, for example for SiO2For example, a layer thickness of about 50nm is possible.
Although not shown in fig. 1, the carrier may also be provided with identification indicia, such as a 2D or 3D barcode or RFID tag, so that the carrier can be tracked during subsequent manufacturing processes.
Fig. 2 schematically illustrates a cross-sectional view of the electrostatic carrier of fig. 1 along line a-a. In this view, the internal structure of the electrode layer 4 is visible. The relative stacking position of the electronic boards 6a, 6b is shown in outline, and as explained in more detail below, various carrier fiducials 10 are also shown on top of the upper dielectric insulating layer 5. The electrode layer 4 comprises an electrostatic field generator having at least one (in this embodiment three) electrostatic field generator in the form of an electrostatic clamping area defined by a capacitive interdigitated comb electrode pattern. Each pattern is formed by an interdigitated arrangement of a comb-like structure 8a-8c for the anode electrode and a comb-like structure 9a-9c for the cathode electrode. Each comb structure is independently electrically connectable to an external dc voltage source (not shown) via a respective electrical contact 7. When so connected, each of the generators generates an electrostatic field that applies a downward force or clamping force to the electronic board on the top surface of the carrier 1. To facilitate connection, each electrical contact 7 is conductively connected to a point on the outer surface (not shown) of the carrier 1 that is connected to an external voltage.
The electrode layer 4 may be formed in various ways that will be apparent to a person skilled in the art, for example by printing the desired electrode pattern onto a dielectric substrate, by forcing a conductive paste through a suitable mask or using PCB manufacturing techniques or thin film techniques.
The three patterns shown are spatially separated along the carrier 1, so that in use, i.e. when each pattern is connected to an external voltage source, three local areas or zones of the carrier 1 of relatively high electrostatic fields are generated. As described above, each pattern may be individually connected to an external voltage source, so that each pattern, and thus each field region, may be individually and selectively actuated. In this way, the different electronic boards 6 can be clamped individually or sequentially to respective areas of the carrier 1, generally corresponding to the respective patterns. Figure 2 shows an embodiment where one electronic board can be clamped to each area, but in other embodiments more than one electronic board can be clamped to the same area, however such an embodiment would be disadvantageous because both boards would be clamped at the same time and therefore would not be able to clamp a first board and subsequently position and clamp a second board.
Fig. 2 shows a plurality of carrier reference marks ("fiducials") 10, which are optically identifiable marks located on the upper surface of the carrier 1. Furthermore, and as is well known in the art, each electronic board 6a, 6b is provided with a respective board reference 11. The carrier fiducial 10 and the board fiducial 11 may help to accurately place the electronic board 6 on the carrier 1, as explained in more detail below.
An exemplary method of manufacturing a printed circuit board assembly according to the present invention will now be described.
In an initial step, a carrier (such as the carrier shown in fig. 1 and 2) is provided and discharged so that the carrier does not generate an electrostatic field.
The first electronic board may then be placed on the carrier at a first determined position within the first area of the carrier. Such placement may be performed, for example, using a pick-and-place machine capable of highly precise placement. The correct positioning of the electronic board may be achieved by positioning the board fiducials 11 on the electronic board relative to the carrier fiducials 10. Typically, the pick-and-place machine includes optical position sensors adapted to identify these fiducials.
Then, by connecting the cathode and anode electrodes of the respective electrostatic field generators to a voltage source, an electrostatic field is generated at the first area, thereby clamping the first electronic board to the carrier.
If desired, and while the first electronic board is clamped to the carrier, further electronic boards may be placed sequentially on the carrier at respective determined positions within respective areas of the carrier in a similar manner as the first electronic board, and clamped after positioning by generating electrostatic fields at the respective areas.
It should be noted that this method enables each plate to be placed optimally, which is not possible with the known vacuum clamping methods. In particular, this method enables a high degree of precision in the placement and clamping of a single flexible PCB.
Once the electronic board is clamped to the carrier, the respective electrostatic field generators can be disconnected from the voltage source, since the electrostatic field can be kept high enough to perform clamping over several days. This enables the electronic board to remain clamped on the same carrier in more than one manufacturing process and the carrier can be transported between processes.
Thus, after clamping as described above, the carrier can be accurately positioned within the printer, for example by aligning carrier fiducials or plate fiducials as is known in the art. A printing process may then be used to apply a print medium (e.g., a conductive print medium such as solder paste) to the top surface of the electronic board, typically including forcing the print medium through apertures in a stencil by sweeping a squeegee blade across the appropriately patterned stencil.
After this printing process, the printed electronic board may be equipped with one or more electronic components while the electronic board remains clamped to the carrier. Advantageously, the carrier may be transported to a pick-and-place machine, for example along a conveyor belt, and accurately positioned within the placement area of the machine. As is known in the art, the carrier and/or plate reference may again be used to ensure proper alignment.
After this assembly process, the assembled electronic board may be subjected to a reflow soldering process while the electronic board remains clamped to the carrier. Advantageously, the carrier may be transported, for example along a conveyor belt, to a reflow oven for heat treatment, as is well known in the art. The electrostatic clamping function of the carrier is not affected by the high temperature in the furnace.
After reflow soldering, the or each electronic board may be released from the carrier by discharging the respective electrostatic fields (e.g. by short-circuiting the positive and negative electrodes of each pattern).
In all of these steps, the carrier can be tracked by correctly reading the carrier identification indicia of each machine so that the correct processing is performed on the or each plate on the carrier.
The above embodiments are exemplary only, and other possibilities and alternatives within the scope of the invention will be apparent to those skilled in the art. For example, the interdigitated comb electrode pattern shown in fig. 2 may be replaced with any capacitive electrode pattern. Each carrier may be provided with one or more patterns, the upper limit being determined by the physical dimensions of the carrier in question. The carrier is capable of holding various materials, clusters, and components, including thin glass (e.g., about 150 μm thickness) for microstructuring.

Claims (13)

1. A method of manufacturing a printed circuit board assembly, comprising the steps of:
i) clamping the electronic board to the carrier by applying an electrostatic field to the electronic board;
ii) applying a printing medium to the electronic board using a printing process,
wherein the electronic board remains clamped to the carrier by the electrostatic field during the printing process.
2. The method of claim 1, wherein the carrier comprises an electrostatic field generator for generating the electrostatic field.
3. The method of claim 2, wherein the electrostatic field generator comprises at least two spatially separated and individually actuatable electrostatic field generators adapted to generate clamping electrostatic fields in respective regions of the carrier.
4. A method according to claim 3, wherein step i) comprises clamping the electronic board to the carrier at a first determined position within a first area of the carrier, and clamping a second electronic board to the carrier at a second determined position within a second area of the carrier while the electronic board is clamped to the carrier.
5. The method according to claim 1, wherein step i) comprises placing the electronic board on the carrier using a pick and place machine.
6. A method according to any preceding claim, comprising the step of assembling the electronic board printed during the printing process with one or more electronic components, wherein the electronic board remains clamped to the carrier throughout the printing and assembling process.
7. The method of claim 6, wherein the electronic board is assembled using a pick and place machine.
8. A method according to claim 6, comprising the step of performing a reflow soldering process on the assembled electronic board, wherein the electronic board remains clamped to the carrier throughout the printing, assembly and reflow soldering processes.
9. A method of clamping an electronic board for processing, comprising the steps of:
i) providing a carrier comprising an electrostatic field generator adapted to generate clamping electrostatic fields at least two spatially separated regions of the carrier,
ii) placing a first electronic board onto the carrier at a first determined position within a first area of the carrier,
iii) clamping the first electronic board to the carrier by generating an electrostatic field at the first area,
iv) placing a second electronic board onto the carrier at a second determined position within a second area of the carrier, and
v) clamping the second electronic board to the carrier by generating an electrostatic field at the second area.
10. The method of claim 9, wherein the carrier comprises at least one fiducial to enable positioning of the first and second electronic boards relative to the carrier.
11. A method according to claim 9 or 10, wherein the first and second electronic boards are placed on the carrier by a pick and place machine.
12. A vector for use in the method of claim 9 or 10.
13. The carrier of claim 12, comprising an electrostatic field generator adapted to generate individually controllable clamping electrostatic fields at least two spatially separated regions of the carrier.
CN201911048932.2A 2018-11-06 2019-10-31 Electrostatic clamping of electronic boards Pending CN111148371A (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102018127658.3A DE102018127658A1 (en) 2018-11-06 2018-11-06 Electrostatic clamping of electronic plates
DE102018127658.3 2018-11-06

Publications (1)

Publication Number Publication Date
CN111148371A true CN111148371A (en) 2020-05-12

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CN201911048932.2A Pending CN111148371A (en) 2018-11-06 2019-10-31 Electrostatic clamping of electronic boards

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CN (1) CN111148371A (en)
DE (1) DE102018127658A1 (en)
TW (1) TWI712350B (en)

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CN1121033A (en) * 1994-02-14 1996-04-24 曼弗雷德·R·屈恩勒 Transport system with electrostatic substrate retention for printing presses and other apparatus requiring accurate positioning registration
JP2000294902A (en) * 1999-04-01 2000-10-20 Sumitomo Electric Ind Ltd Manufacture of flexible printed wiring board
JP2002202335A (en) * 2000-12-28 2002-07-19 Hioki Ee Corp Circuit board inspecting device
US20030052954A1 (en) * 2001-09-19 2003-03-20 Canon Kabushiki Kaisha Conveying device and image recording apparatus having the same
JP2004088060A (en) * 2002-06-28 2004-03-18 Sumitomo Bakelite Co Ltd Manufacturing method for circuit board
TWI235026B (en) * 2004-04-30 2005-06-21 D Tek Semicon Technology Co Lt System and method having the adhering and positioning technique for use in chip substrate package
CN1994839A (en) * 2006-01-05 2007-07-11 财团法人工业技术研究院 Static adsorption device
CN101755492A (en) * 2007-06-27 2010-06-23 3M创新有限公司 In the thermoformed polymeric substrate, form the Apparatus and method for of thin film electronic device
TW201324679A (en) * 2008-04-02 2013-06-16 Ap Systems Inc Substrate assembling apparatus
JP2011003913A (en) * 2010-07-26 2011-01-06 Ulvac Japan Ltd Electrostatic chuck
CN102683255A (en) * 2011-03-10 2012-09-19 台湾积体电路制造股份有限公司 Substrate assembly carrier using electrostatic force
JP2016009715A (en) * 2014-06-23 2016-01-18 新光電気工業株式会社 Tray for electrostatic attraction and substrate fixing device
CN108022866A (en) * 2016-10-28 2018-05-11 应用材料公司 Stress equilibrium electrostatic substrate carrier with contact

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Publication number Publication date
TW202019252A (en) 2020-05-16
DE102018127658A1 (en) 2020-05-07
TWI712350B (en) 2020-12-01

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