CN111121617B - Optical aiming and pointing device and method based on phase shift differential motion - Google Patents
Optical aiming and pointing device and method based on phase shift differential motion Download PDFInfo
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- CN111121617B CN111121617B CN201811285887.8A CN201811285887A CN111121617B CN 111121617 B CN111121617 B CN 111121617B CN 201811285887 A CN201811285887 A CN 201811285887A CN 111121617 B CN111121617 B CN 111121617B
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Abstract
According to the optical aiming and pointing device and method based on phase shift differential motion, light is converged on an object to be detected, when a slit or a light-reflecting bright line of a characteristic point is encountered, the long direction of the slit line is vertical to the motion direction of the object to be detected, and at a signal receiving end, phase shift differential motion displacement detection is carried out by adopting two photoelectric receivers, so that the position zero point detection precision can be improved, and compared with the existing scheme, the detection precision is improved by tens of times to hundreds of times; meanwhile, the device of the invention can avoid the phenomenon that the position information is widened or lost due to the change of the intensity of the light source; in addition, the double-slit (grating) structure is not needed, so that the problems of scratch and the like caused by short distance can be avoided.
Description
Technical Field
The invention relates to the field of photoelectric measurement, in particular to an optical aiming and pointing device and method based on phase shift differential motion.
Background
The requirement for extracting zero position information in a precision optical instrument is higher and higher, for example, aiming lines of a dial and zero position information of a photoelectric encoder (including a grating ruler) are extracted, as shown in fig. 1, the zero position information is a typical mechanism of a traditional encoder, light emitted by a light source 1 irradiates a zero position window (zero position adopts bar code coding) of a scanning grating 55 and zero position coding of a grating disc (grating ruler) 54 through a lens 4, the zero position coding is received by a photoelectric receiver 51, an optical signal is changed into an electric signal, when the zero position coding passes through the scanning grating zero position window 55, a trigger 53 outputs indicating pulse position information after processing, and fig. 2(b) is a standard output diagram (the width of amplitude detection output represents zero points when dead zones in a displacement direction).
The typical mechanism of the encoder in the prior art has the following disadvantages: 1. the narrower the extracted photoelectric signal is, the smaller the gap between the grating disc 54 and the scanning grating 55 is, the narrowest bottom width of the extracted photoelectric signal is 30 μm, the gap between the grating disc 54 and the scanning grating 55 is only 0.02mm (the use limit), and grating patterns are easily scratched when the grating disc 54 and the scanning grating 55 move mutually; 2. when the light source luminous efficiency is reduced or the scanning speed is increased, the signal amplitude is reduced under the influence of response frequency of the photoelectric device, and when the signal amplitude is lower than the trigger comparison level in fig. 2(a), the grating disc 54 passes through a zero point, and no signal is output from the trigger 53; this phenomenon also occurs when the luminous efficiency is reduced; 3. as the light source efficiency increases, the zero position information output in fig. 2(c) becomes wider (error increases); 4. there is a dead zone of zero.
Disclosure of Invention
Embodiments of the present invention provide an optical pointing and pointing device and method based on phase shift differential.
The invention provides an optical aiming and pointing device based on phase shift differential motion, which comprises a light source, a lens, an object to be measured with a reference position, a photoelectric receiver and a trigger, wherein the object to be measured moves along an X direction, the photoelectric receiver comprises a first photoelectric receiver and a second photoelectric receiver, when light emitted by the light source is converged through the lens and irradiates the reference position on the object to be measured, the first photoelectric receiver receives a first path of optical signal before the second photoelectric receiver receives the first path of optical signal, the second photoelectric receiver receives a second path of optical signal subsequently to complete phase shift, the first path of signal and the second path of signal have phase difference, the trigger starts to work when the amplitude of the first path of optical signal reaches a first amplitude or the second path of optical signal reaches a second amplitude, the first path of optical signal and the second path of optical signal are intersected at a first coincident point, and finishing differential motion, and determining the reference position of the object to be measured by utilizing the first coincident point.
Optionally, when the device adopts a transmissive structure, the reference position adopts a slit;
when the device adopts a reflective structure, the reference position adopts a reflective structure.
Optionally, the emitting structure employs reflective chrome wire.
Optionally, the first and second photoelectric receivers are disposed along a direction perpendicular to the length of the slit line or along a direction perpendicular to the length of the conjugate image line of the reflective chrome line.
Optionally, the slit is located on the surface of the object to be measured, a linear length direction of the slit is perpendicular to a movement direction of the object to be measured, and the light is focused on the surface of the object to be measured.
Optionally, the reflective chromium line is located on the surface of the object to be detected, the length direction of the line is perpendicular to the movement direction of the object to be detected, and the light is focused on the surface of the object to be detected.
Optionally, the device further comprises a spectroscope having a transmission surface and a reflection surface, light of the light source sequentially passes through the transmission surface of the spectroscope and the lens to irradiate on the reflective chromium line of the object to be measured, reflected light reflected back by the reflective chromium line sequentially passes through the lens to irradiate on the reflection surface of the spectroscope, and the reflected light is received by the first photoelectric receiver and the second photoelectric receiver after being reflected by the reflection surface.
Optionally, when the light source adopts a monochromatic laser, the spectroscope is a polarization spectroscope, the device further includes a quarter-wave plate, light of the light source sequentially passes through a transmission surface of the polarization spectroscope, the quarter-wave plate and the lens and irradiates on the object to be measured, reflected light reflected back by the reflective chrome line sequentially passes through the lens and the quarter-wave plate and irradiates on a reflection surface of the polarization spectroscope, and the reflected light is received by the first photoelectric receiver and the second photoelectric receiver after being reflected by the reflection surface.
Optionally, the photoreceiver employs a photodiode, a phototriode, or a photomultiplier tube.
The invention provides an optical aiming and pointing method based on phase shift differential, which is applied to the optical aiming and pointing device based on phase shift differential.
According to the technical scheme, the embodiment of the invention has the following advantages:
the optical aiming and pointing device and method based on phase shift differential provided by the invention can determine the translation position of an object to be detected, and detect the translation position by adopting two photoelectric receivers to carry out phase shift differential, compared with the prior scheme, the detection precision is hundreds of times, and meanwhile, the device can improve the position detection precision and can avoid the phenomenon that the translation position information is widened or reduced due to the change of the light source intensity.
Drawings
FIG. 1 is a schematic diagram of a conventional encoder mechanism provided in a prior art arrangement;
FIG. 2 is a schematic diagram of a typical mechanism for a conventional encoder provided in a prior art arrangement with a signal amplitude below a trigger comparison level;
FIG. 3 is a schematic diagram of an optical pointing and locating device in a transmissive configuration;
FIG. 4 is a schematic diagram of a transmissive optical pointing device according to an embodiment of the present invention;
FIG. 5 is a schematic diagram of the photosensitive areas of two photo-receivers of an optical aiming and pointing device based on phase shift differentiation in an embodiment of the present invention;
FIG. 6 is a phase-shifted electro-optic signal and Lissajous plot thereof in an optical targeting and pointing device based on phase-shifted differential in an embodiment of the present invention;
FIG. 7 is a schematic structural diagram of a reflective optical pointing device based on phase shift differential according to an embodiment of the present invention.
Reference numerals: the device comprises a light source 1, a polarization beam splitter 2, a quarter wave plate 3, a lens 4, a photoelectric receiver 5, a first photoelectric receiver 51, a second photoelectric receiver 52, a trigger 53 and an object to be measured 54.
Detailed Description
In order to make the technical solutions of the present invention better understood, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
The terms "first," "second," "third," "fourth," and the like in the description and in the claims, as well as in the drawings, if any, are used for distinguishing between similar elements and not necessarily for describing a particular sequential or chronological order. It will be appreciated that the data so used may be interchanged under appropriate circumstances such that the embodiments described herein may be practiced otherwise than as specifically illustrated or described herein. Furthermore, the terms "comprises," "comprising," and "having," and any variations thereof, are intended to cover a non-exclusive inclusion, such that a process, method, system, article, or apparatus that comprises a list of steps or elements is not necessarily limited to those steps or elements expressly listed, but may include other steps or elements not expressly listed or inherent to such process, method, article, or apparatus.
Referring to fig. 4, an optical aiming and pointing device based on phase shift differential provided in an embodiment of the present invention includes a light source 1, a lens 4, an object 54 to be measured with a reference position, an optical receiver 5, and a trigger, where the object 54 to be measured moves along an X direction, the optical receiver 5 includes a first optical receiver 51 and a second optical receiver 52, when the light passes through the reference position, the first optical receiver 51 receives a first optical signal before the second optical receiver 52 receives the first optical signal, the second optical receiver 52 receives a second optical signal, the first optical signal and the second optical signal have a phase difference, the trigger starts to operate when an amplitude of the first optical signal reaches a first amplitude or the second optical signal reaches a second amplitude, the first optical signal and the second optical signal intersect at a first coincidence point O, the first coincidence point is used for determining the translation position of the object to be measured, specifically, when light emitted by the light source 1 irradiates on the reference position of the object to be measured 54 through the lens 4, the photoelectric receiver 5 receives the light and generates an electric signal, the trigger processes the electric signal and outputs an indication pulse, the indication pulse is used for determining the translation position, the line width of the reference position of the object to be measured 54 is 2 μ, light emitted by the light source 11 irradiates on the zero position of the object to be measured 54 through the lens 4 and is received by the photoelectric receiver 5, the optical signal is changed into an electric signal, when the slit passes through the converged light intersection point, the width of the single-path electric signal is less than 5 μm, the amplitude of the electric signal can refer to (a) in fig. 6 and is reduced by nearly 10 times compared with the width of the photoelectric signal in fig. 2, the trigger 53 processes and outputs an indication pulse width which is greatly reduced compared with the pulse width in the prior art, meanwhile, the phenomena of scratching and the like do not exist at the same time because the scanning grating is not needed.
Optionally, the object 54 to be measured adopts a grating scale, when the device adopts a transmissive structure, the reference position pattern of the object 54 to be measured may be a slit, the slit is located on the surface of the object 54 to be measured, the linear length direction of the slit is perpendicular to the moving direction of the object 54 to be measured, and the light is focused on the surface of the object 54 to be measured, the line width of the slit is 2 μm, which is not limited specifically.
When the device adopts a reflection type structure, the reference position can adopt a reflection structure and is used for reflecting the converged light, and specifically, a reflective chromium line can be adopted, the reflective chromium line is positioned on the surface of the object to be measured 54, the length direction of the line is vertical to the movement direction of the object to be measured 54, and the light is focused on the surface of the object to be measured 54.
It should be noted that the scheme can be applied to detecting the zero position of the object to be detected, and the accuracy of detecting the zero position can be improved.
In order to further improve the accuracy of the translation position of the object to be measured and avoid the phenomenon (a) in fig. 2 and (c) in fig. 2 caused by the variation of the intensity of the light source, as shown in fig. 3, two photoelectric receivers are used, as shown in fig. 5, a transmission structure is used, when two photoelectric receivers 5 are used for performing phase differential comparison, each photoelectric receiver 5 includes a first photoelectric receiver 51 and a second photoelectric receiver 52, the first photoelectric receiver 51 and the second photoelectric receiver 52 are arranged parallel to the moving direction of the object to be measured 54, i.e. both face the side of the object to be measured 54, the length of the slit line is perpendicular to the moving direction of the object to be measured 54, when the light passes through the reference position, the first photoelectric receiver 51 receives the first path of optical signal before the second photoelectric receiver 52, the second photoelectric receiver 52 receives the second path of optical signal subsequently, the first path of signal and the second path of signal have phase difference, the trigger starts to work when the amplitude of the first path of optical signal reaches a first amplitude or the amplitude of the second path of optical signal reaches a second amplitude, the first optical signal and the second optical signal are intersected at a first coincidence point O point, the trigger 53 triggers a pulse signal when the first optical signal and the second optical signal are equal, the pulse signal is used for prompting a reference position aimed by an object to be detected, the pulse width between the first amplitude corresponding point E and the second amplitude corresponding point F is less than or equal to 3 mu m, and from a Lissajous picture synthesized by two paths of photoelectric signals in (c) in figure 2, a signal of an O point is very sharp, when the signal amplitude is 3.5V and the comparator dead zone is 2mV, the pulse precision can reach (2 mV/2X 3500mV) 3 μm/2-0.00043 μm translation position information comparison precision.
The first and second photoelectric receivers 51 and 52 are arranged along a light spot scanning direction of light, and specifically, when a transmissive structure is adopted, the first and second photoelectric receivers 51 and 52 are arranged in parallel and are disposed along a moving direction of the object 54 to be measured, and when a reflective structure is adopted, the first and second photoelectric receivers 51 and 52 are arranged in parallel and are disposed toward a reflecting direction of the polarization beam splitter 2. When a transmission structure is adopted, the reference position of the object to be measured adopts a slit structure, so that light from the light source irradiates on the first photoelectric receiver and the second photoelectric receiver through the slit, when a reflection structure is adopted, the reference position of the object to be measured adopts reflective chromium lines, the light from the light source irradiates on the reflective chromium lines after passing through the polarization beam splitter, and the reflected light irradiates on the first photoelectric receiver and the second photoelectric receiver after passing through the reflection of the polarization beam splitter.
It should be noted that, the moving directions of the object 54 to be measured are different, and the receiving sequence of the first photoelectric receiver 51 and the second photoelectric receiver 52 may be different.
In order to further improve the precision of the translation position, avoid the phenomenon that the position information is widened or reduced due to the change of the light source intensity, and further improve the position detection precision, as shown in fig. 7, the optical aiming and pointing device based on the phase shift differential motion in the embodiment of the present invention adopts a reflective structure, and further includes a polarization beam splitter 2, a quarter-wave plate 3, a light source 1, a polarization beam splitter 2, a quarter-wave plate 3, a lens 4, and an object to be detected 54, wherein the light paths of the light source 1, the polarization beam splitter 2, the quarter-wave plate 3, and the lens 4 are collinear, that is, located on the same straight line, the light of the light source 1 sequentially passes through the polarization beam splitter 2, the quarter-wave plate 3, and the lens 4 and irradiates on the object to be detected 54, the reflected light reflected by the chromium reflection line of the object to be detected 54 sequentially passes through the lens 4 and the quarter-wave plate 3 and irradiates on the polarization beam splitter 2, and is totally reflected by 90 degrees, the first photoelectric receiver 51 and the second photoelectric receiver 52 are arranged in parallel and placed in a reflection direction of the polarization beam splitter 2, and the reflected light is reflected by the reflection surface and then received by the first photoelectric receiver 51 and the second photoelectric receiver 52, it should be noted that, when the light source is an LED light source, the LED light source has no polarization and can change the polarization beam splitter 2 into a beam splitter, and the quarter-wave plate 3 is not needed. When the light passes through the zero position, the first photoelectric receiver 51 receives a first path of optical signal before the second photoelectric receiver 52, the second photoelectric receiver 52 receives a second path of optical signal subsequently, the first path of signal and the second path of signal have a phase difference, the trigger starts to work when the amplitude of the first path of optical signal reaches a first amplitude or the amplitude of the second path of optical signal reaches a second amplitude, the first path of optical signal and the second path of optical signal are crossed at a first coincident point O, the amplitudes of the first path of optical signal and the second path of optical signal are the same at the moment, the comparator triggers a pulse signal, the point is an aiming positioning point position, from a lissajous graph synthesized by two paths of optical electrical signals in (c) in fig. 6, we can see that the signal at the O point is very high, the length from the E point to the F point is 3 μm, and when the signal amplitude is 3.5V, When the comparison dead zone of the comparator is 2mV, the pulse precision reaches (2mV/2 × 3500mV) × 3 μm/2 ═ 0.00043 μm positioning information to be extremely accurate.
As shown in (b) and (c) of fig. 6, when the slit passes through the intersection of the converged light, due to the difference of the scanning positions, the signals received by the two receivers cannot reach the highest peak at the same time, i.e. there is a phase difference diagram for the two signals; when the signal passes the point O, the first photoelectric receiver 51 receives the point signal before the second photoelectric receiver 52 receives the point signal, one path of signal goes downward and the other path goes upward, the two paths of photoelectric signals are crossed at the point O, and the comparator 53 starts to operate when the signal is higher than the point E, F.
The pulse may be divided into a positive pulse or a negative pulse according to the scanning direction of the light, which is not limited.
The photoelectric receiver adopts a photodiode, a phototriode or a photomultiplier, and can also adopt a single-point photoelectric receiver or other photoelectric receivers, so that the use requirement can be met, and the photoelectric receiver is not limited.
The light source 1 is a monochromatic laser generator, and other types of light sources, such as an LED light source, may also be used, without limitation.
It should be noted that, because the monochromatic laser emits monochromatic polarized light, in order to better utilize the energy of the light, the polarization beam splitter 2 and the quarter-wave plate 3 need to be used, when the light source is an LED light source, the polarization beam splitter 2 can be replaced by a reflective mirror, and the quarter-wave plate 3 is not needed.
Accordingly, the embodiment of the present invention further provides an optical aiming and pointing method based on phase shift differential, which can be applied to the optical aiming and pointing device based on phase shift differential.
The optical aiming and pointing device and method based on phase shift differential provided by the invention can determine the translation position of the object 54 to be detected, and can improve the position detection precision by adopting two photoelectric receivers to carry out phase shift differential displacement detection, compared with the prior scheme, the detection precision is as high as tens of times.
It is clear to those skilled in the art that, for convenience and brevity of description, the specific working processes of the above-described systems, apparatuses and units may refer to the corresponding processes in the foregoing method embodiments, and are not described herein again.
In the several embodiments provided in the present application, it should be understood that the disclosed system, apparatus and method may be implemented in other manners. For example, the above-described apparatus embodiments are merely illustrative, and for example, the division of the units is only one logical division, and other divisions may be realized in practice, for example, a plurality of units or components may be combined or integrated into another system, or some features may be omitted, or not executed. In addition, the shown or discussed mutual coupling or direct coupling or communication connection may be an indirect coupling or communication connection through some interfaces, devices or units, and may be in an electrical, mechanical or other form.
The units described as separate parts may or may not be physically separate, and parts displayed as units may or may not be physical units, may be located in one place, or may be distributed on a plurality of network units. Some or all of the units can be selected according to actual needs to achieve the purpose of the solution of the embodiment.
In addition, functional units in the embodiments of the present invention may be integrated into one processing unit, or each unit may exist alone physically, or two or more units are integrated into one unit. The integrated unit can be realized in a form of hardware, and can also be realized in a form of a software functional unit.
While the optical pointing and pointing device and method based on phase shift differential provided by the present invention have been described in detail, those skilled in the art will appreciate that the various embodiments and applications of the invention can be varied.
Claims (5)
1. An optical aiming and pointing device based on phase shift differential is characterized by comprising a light source, a lens, an object to be measured with a reference position, a photoelectric receiver and a trigger, wherein the object to be measured moves along an X direction, the photoelectric receiver comprises a first photoelectric receiver and a second photoelectric receiver, when light emitted by the light source is converged through the lens and irradiates the reference position on the object to be measured, the first photoelectric receiver receives a first path of optical signal before the second photoelectric receiver receives the first path of optical signal, the second photoelectric receiver receives a second path of optical signal subsequently to complete phase shift, the first path of optical signal and the second path of optical signal have a phase difference, the trigger starts to work when the amplitude of the first path of optical signal reaches a first amplitude or the second path of optical signal reaches a second amplitude, and the first path of optical signal and the second path of optical signal are intersected at a first coincident point, completing differential motion, and determining the reference position of the object to be detected by utilizing the first coincident point;
when the device adopts a transmission type structure, the reference position adopts a slit; the slit is positioned on the surface of the object to be detected, the linear length direction of the slit is vertical to the motion direction of the object to be detected, and light is focused on the surface of the object to be detected;
when the device adopts a reflection type structure, the reference position adopts a reflection structure, and the reflection structure adopts a reflection chromium line; the light-reflecting chromium wire is positioned on the surface of the object to be detected, the length direction of the light-reflecting chromium wire is vertical to the motion direction of the object to be detected, and the light is focused on the surface of the object to be detected;
the first photoelectric receiver and the second photoelectric receiver are arranged along the direction vertical to the length of the slit line or along the direction vertical to the length of the conjugate image line of the reflective chromium line.
2. The phase shift differential based optical aiming and pointing device according to claim 1, further comprising a beam splitter having a transmission surface and a reflection surface, wherein the light from the light source sequentially passes through the transmission surface of the beam splitter and the lens to irradiate on the reflective chrome line of the object to be measured, the reflected light reflected by the reflective chrome line sequentially passes through the lens to irradiate on the reflection surface of the beam splitter, and the reflected light is reflected by the reflection surface and then received by the first and second photo-receivers.
3. The optical aiming and pointing device based on phase shift differential motion as claimed in claim 2, wherein when the light source employs a monochromatic laser, the beam splitter is a polarization beam splitter, the device further comprises a quarter-wave plate, the light from the light source sequentially passes through the transmission surface of the polarization beam splitter, the quarter-wave plate and the lens to irradiate on the object to be measured, the reflected light reflected by the reflective chrome line sequentially passes through the lens and the quarter-wave plate to irradiate on the reflection surface of the polarization beam splitter, and the reflected light is received by the first and second photoelectric receivers after being reflected by the reflection surface.
4. The phase shift differential based optical sighting and pointing device of claim 1 wherein the photoreceiver employs a photodiode, a phototransistor or a photomultiplier tube.
5. An optical aiming and pointing method based on phase shift differential, which is applied to the optical aiming and pointing device based on phase shift differential as claimed in any one of claims 1 to 4.
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| CN1118680C (en) * | 1999-12-10 | 2003-08-20 | 中国科学院长春光学精密机械研究所 | Laser auto-collimation collimator |
| CN100590421C (en) * | 2003-06-19 | 2010-02-17 | 麻省理工学院 | System and method for measuring phase |
| CN1487264A (en) * | 2003-08-22 | 2004-04-07 | 清华大学 | Detection device and method for oscillating attitude of planar mirrow |
| CN101852677A (en) * | 2010-05-24 | 2010-10-06 | 中国科学院长春光学精密机械与物理研究所 | Method for improving focal distance detection precision of long focal distance collimator |
| CN203605919U (en) * | 2013-08-14 | 2014-05-21 | 北京镭测科技有限公司 | Laser exocoel feedback low-angle roll angle measuring system |
| JP6740143B2 (en) * | 2017-01-25 | 2020-08-12 | オリンパス株式会社 | Lighting equipment |
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