CN203605919U - Laser exocoel feedback low-angle roll angle measuring system - Google Patents
Laser exocoel feedback low-angle roll angle measuring system Download PDFInfo
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- CN203605919U CN203605919U CN201320496238.9U CN201320496238U CN203605919U CN 203605919 U CN203605919 U CN 203605919U CN 201320496238 U CN201320496238 U CN 201320496238U CN 203605919 U CN203605919 U CN 203605919U
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- laser
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- exocoel
- wave plate
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Abstract
The utility model discloses a laser exocoel feedback low-angle roll angle measuring system and belongs to the technical problem of laser measuring. In the roll angle measuring system, a laser feedback system composed of an LD pumped single-frequency microchip Nd: YAG laser, a stationary wave plate, a rotatable wave plate and an external reflector is adopted for measuring a roll angle. 45-degree angles are formed between the fast and slow shafts of the stationary wave plate and a laser polarization direction, the fast and slow shafts of the rotatable wave plate and the fast and slow shafts of the stationary wave plate are superposited at a zero point position. The rotatable wave plate is rotated within 45 degrees, and the phase differences among the feedback signals outputted by a laser are continuously variable and have one-to-one corresponding relations with angles, so that the roll angle can be precisely measured. The laser exocoel feedback low-angle roll angle measuring system has the advantages of simple and compact structure, easy assembling and adjusting, high measuring precision and low cost.
Description
Technical field
The utility model relates to fields of measurement, relates in particular to a kind of laser exocoel feedback low-angle rolling angle measurement system in fields of measurement.
Background technology
Angle is an important measurement unit, also be one of important geometric parameter in machinery, instrument and meter and electronic product simultaneously, its accuracy directly affects quality and the life-span of product, is all extremely important and acts in many fields such as machinery, optics, electronics, Aero-Space, navigation, military affairs.
In angle measurement technique research the earliest be mechanical type and electromagnetic type angle measurement technique, as multiteeth indexing table, inductosyn and circle magnetic grid etc., the major defect of these methods is that volume is excessive, and people are accustomed to the diameter of hundreds of millimeter, and it makes difficulty, expensive.Extremely people's the attention owing to having noncontact, high precision degree and highly sensitive feature of optics angle-measuring method, the development of especially stable LASER Light Source makes industry spot measurement become possibility, therefore makes the application of optical measuring method more and more extensive.What at present, optics angle-measuring method was conventional has autocollimation method, parallel interferogram technique, photoelectric encoder method, circle raster method, optics internal reflection method, laser interferance method and surface plasma resonance method etc.Laser interferance method is the highest measuring method of current progress, but is nonlinear in its principle, and measurement range is little, the main calibrating with doing additive method.Circle grating and inductosyn etc., its measurement mechanism is made up of " moving plate " and " still ", needs strictly with one heart, and processing and matching requirements are too harsh.
Summary of the invention
The utility model utilizes the feedback of laser exocoel to cause the laser intensity of laser instrument x, y both direction to be subject to different modulation, has proposed a kind of new roll angle measurement method.Under double wave sheet exocoel feedback condition, the laser intensity of laser instrument x, y both direction has phasic difference, and this phasic difference becomes one-to-one relationship with the phasic difference of the rotatable wave plate of exocoel.Just can realize high-precision rolling angle measurement by the phasic difference of measuring between the laser intensity in x, y direction.
The utility model provides a kind of laser exocoel feedback low-angle rolling angle measurement system, and this rolling angle measurement system comprises:
With the LD pumping source 1 of tail optical fiber, this LD pumping source 1 is for generation of pump light;
Collimation focusing lens combination 2, this collimation focusing lens combination 2 is connected with this LD pumping source 1 by optical fiber;
The Nd:YAG laser instrument being formed by the Nd:YAG crystal 3 of full inner chamber, the plane of incidence of this Nd:YAG crystal 3 and exit facet form the resonator cavity of this Nd:YAG laser instrument, the pump light that this collimation focusing lens combination 2 produces this LD pumping source 1 converges at this plane of incidence of this Nd:YAG crystal 3, resonance between this plane of incidence and this exit facet, and from this exit facet output single-frequency linearly polarized laser;
Displacement driver 8, this displacement driver 8 is fixedly connected with this exocoel feedback catoptron 7, with under the effect of driving voltage, promotes this exocoel feedback catoptron 7 and moves along the axis of this single-frequency linearly polarized laser, changes the length of this feedback exocoel;
Acquisition of signal and drive unit, this acquisition of signal and drive unit are used for fast axle and this both direction of slow axis at this static wave plate 5 respectively, survey the light intensity of this single-frequency linearly polarized laser of this Nd:YAG laser instrument output, and for providing driving voltage to this displacement driver 8;
Phase detectors, the phase differential of these phase detectors light intensity on fast axle and this both direction of slow axis of this static wave plate 5 for detection of this single-frequency linearly polarized laser; With
Wherein, this acquisition of signal and drive unit comprise:
Two photodetectors 10,11, these two photodetectors 10,11 are arranged to survey respectively the light intensity of this two-way light.
Alternatively, in the utility model embodiment, the fast axle of this rotatable wave plate 6 and slow axis overlap with fast axle and the slow axis of this static wave plate 5 respectively.
Alternatively, in the utility model embodiment, this acquisition of signal and drive unit also comprise:
Alternatively, in the utility model embodiment, this beam splitter is arranged in this feedback exocoel.
Alternatively, in the utility model embodiment, this beam splitter is arranged on a side of this exocoel feedback catoptron 7, receives this single-frequency linearly polarized laser of these exocoel feedback catoptron 7 transmissions.
Alternatively, in the utility model embodiment, the wavelength of this single-frequency linearly polarized laser of this Nd:YAG laser instrument output is 1064nm.
Based on technique scheme, laser exocoel feedback low-angle rolling angle measurement system of the present utility model, utilize the feedback of laser exocoel to cause the laser intensity of laser instrument x, y both direction to be subject to different modulation, thereby under double wave sheet exocoel feedback condition, there is phasic difference according to the laser intensity of laser instrument x, y both direction, this phasic difference becomes one-to-one relationship with the phasic difference of the rotatable wave plate of exocoel, just can realize high-precision rolling angle measurement by the phasic difference of measuring between the laser intensity in x, y direction.And laser exocoel feedback low-angle rolling angle measurement system of the present utility model also has feature simple and compact for structure, that equipment adjustment is easy, measuring accuracy is high, cost is low.
Accompanying drawing explanation
In order to be illustrated more clearly in the technical scheme of the utility model embodiment, to the accompanying drawing of required use in the utility model embodiment be briefly described below, apparently, described accompanying drawing is only embodiment more of the present utility model below, for those of ordinary skills, do not paying under the prerequisite of creative work, can also obtain according to these accompanying drawings other accompanying drawing.
Fig. 1 is according to the schematic block diagram of laser exocoel feedback low-angle rolling angle measurement system of the present utility model.
Fig. 2 is the schematic diagram of the coordinate system of double-refraction external cavity feedback wave plate measuring system.
Fig. 3 (a), Fig. 3 (b), Fig. 3 (c) and Fig. 3 (d) are respectively the measurement result schematic diagram to different roll angles according to laser exocoel feedback low-angle rolling angle measurement system of the present utility model.
Embodiment
Below in conjunction with the accompanying drawing in the utility model embodiment, the technical scheme in the utility model embodiment is clearly and completely described, obviously, described embodiment is a part of embodiment of the present utility model, rather than whole embodiment.Based on the embodiment in the utility model, the every other embodiment that those of ordinary skills obtain under the prerequisite of not making creative work, should belong to the scope that the utility model is protected.
Fig. 1 shows according to the schematic block diagram of laser exocoel feedback low-angle rolling angle measurement system of the present utility model.As shown in Figure 1, this laser exocoel feedback low-angle rolling angle measurement system comprises:
With the LD pumping source 1 of tail optical fiber, this LD pumping source 1 is for generation of pump light;
Collimation focusing lens combination 2, this collimation focusing lens combination 2 is connected with this LD pumping source 1 by optical fiber;
The Nd:YAG laser instrument being formed by the Nd:YAG crystal 3 of full inner chamber, the plane of incidence of this Nd:YAG crystal 3 and exit facet form the resonator cavity of this Nd:YAG laser instrument, the pump light that this collimation focusing lens combination 2 produces this LD pumping source 1 converges at this plane of incidence of this Nd:YAG crystal 3, resonance between this plane of incidence and this exit facet, and from this exit facet output single-frequency linearly polarized laser;
Displacement driver 8, this displacement driver 8 is fixedly connected with this exocoel feedback catoptron 7, with under the effect of driving voltage, promotes this exocoel feedback catoptron 7 and moves along the axis of this single-frequency linearly polarized laser, changes the length of this feedback exocoel;
Acquisition of signal and drive unit, this acquisition of signal and drive unit are used for fast axle and this both direction of slow axis at this static wave plate 5 respectively, survey the light intensity of this single-frequency linearly polarized laser of this Nd:YAG laser instrument output, and for providing driving voltage to this displacement driver 8;
Phase detectors, the phase differential of these phase detectors light intensity on fast axle and this both direction of slow axis of this static wave plate 5 for detection of this single-frequency linearly polarized laser; With
Wherein, this acquisition of signal and drive unit comprise:
Two photodetectors 10,11, these two photodetectors 10,11 are arranged to survey respectively the light intensity of this two-way light.
Alternatively, the fast axle of this rotatable wave plate 6 and slow axis overlap with fast axle and the slow axis of this static wave plate 5 respectively.
Alternatively, this acquisition of signal and drive unit also comprise:
Alternatively, this beam splitter is arranged in this feedback exocoel.
Alternatively, this beam splitter is arranged on a side of this exocoel feedback catoptron 7, receives this single-frequency linearly polarized laser of these exocoel feedback catoptron 7 transmissions.
Alternatively, the wavelength of this single-frequency linearly polarized laser of this Nd:YAG laser instrument output is 1064nm.
Particularly, in Fig. 1,1 can be the semiconductor laser with tail optical fiber output, as pumping source; 2 can be collimation focusing lens combination, pump light is focused on to 3 surface; 3 can be gain medium-Nd:YAG crystal, and two surfaces of 3 form laserresonator; 4 can be beam splitter, and laser instrument output light is divided into two parts, and wherein a part is for feedback, and another part is as acquisition of signal; 5 can be that a bit phase delay amount is the static wave plate of 45 degree (being not limited only to 45 degree), and it is fast, slow axis and laser instrument output polarisation of light angular separation are 45 degree; 6 can be that bit phase delay amount is the rotatable wave plate of 45 degree (being not limited only to 45 degree), is connected, for sensitive detection roll angle with object under test; 7 can be exocoel feedback catoptron, and reflectivity is for example 50%; 8 can be piezoelectric ceramics, and it is fixed on above-mentioned exocoel feedback catoptron, and under the effect of input voltage, it promotes above-mentioned exocoel feedback catoptron 7 along the left and right movement of laser axis direction; 4,5,6,7 and the output face of Nd:YAG crystal 3 jointly form laser feedback exocoel; 9 can be polarization splitting prism (wollaston prism); 10 and 11 can be two photodetectors; 9,10 and 11 form signal receiving device.12 can be data handling system, comprising: A/D converter, and its input signal is respectively the laser intensity signal of photodetector 10,11 outputs; D/A, the output of this D/A is connected with the input end of described piezoelectric ceramics 8; Computing machine is connected with the output terminal of described A/D converter, the input end of D/A.
Principle of the present utility model is as follows:
Set up coordinate system as shown in Figure 2, Z axis is the direction of propagation of Nd:YAG laser instrument output light.The direction of an electric field of laser
become 45 degree with X-axis, Y-axis respectively.In birefringence feedback exocoel, fast, the slow axis (being o-axle, e-axle) of wave plate 5 overlaps with X-axis, Y-axis respectively.Two optical axises of polarization splitting prism 9 overlap with X-axis, Y-axis respectively.
Single mode Nd:YAG laser instrument is under light feedback, and the variation delta g of gain for threshold value is:
In formula, g is the gain for threshold value while having light feedback, g
0gain for threshold value during for unglazed feedback, ζ is the reflection coefficient that the light feedback factor is proportional to exocoel catoptron, and n is the refractive index of Nd:YAG crystal, and d is the thickness of Nd:YAG crystal, and ω is laser angular frequency, and c is the light velocity in vacuum, and L is that laser external cavity is long.
Electric field
in feedback exocoel, be broken down into E along o axle and the e direction of principal axis of wave plate
o, E
e.Fed back to the E of laserresonator by exocoel catoptron
o, E
erespectively with chamber internal electric field
x to, y to component E
x, E
yact on, in x, y direction, modulated respectively the gain for threshold value of laser instrument, as follows:
In formula, δ is the E that rotatable wave plate rotational angle theta causes
o, E
ebetween phase differential,
Wherein, n
oand n
erespectively ordinary refraction index and the extraordinary ray refractive index of wave plate; D is the geometric thickness of wave plate; λ is optical maser wavelength.
During due to feedback, the variation of laser intensity is proportional to the variation of gain for threshold value,
I=I
0-kΔg, （5）
In formula, I
0initial light intensity when thering is no feedback, k is a constant.
, under light feedback, the laser intensity of laser instrument in x, y direction is:
I
x=I
x0+ζk/2nd·cos(2ωL/c), （6）
I
y=I
y0+ζk/2nd·cos(2ωL/c+90+2δ), （7）
In formula, I
xand I
yduring for light feedback x to, y to laser intensity, I
x0and I
y0when thering is no light feedback x to, y to initial light intensity.
From formula (5), (6), the displacement of every change 1/2nd optical wavelength of exocoel feedback mirror, I
xand I
y, still, there are phase differential 2 δ between the two in the one-period that all fluctuates, the rotational angle theta (, roll angle to be measured) of δ wherein and rotatable wave plate 6 becomes corresponding relation.Therefore, only need measure I
xand I
ybetween phase differential, just can obtain the phasic difference of tested wave plate.The effect of static wave plate 5 is the null position of outer corner measurement to be set to the zero crossing of cosine curve, makes measuring system have higher sensitivity.
Experimental system as shown in Figure 1, when feedback mirror 7 is under the promotion of piezoelectric ceramics 8, while moving left and right along laser axis, the laser intensity adjustment curve being recorded by photodetector 10,11 is as shown in Fig. 3 (a), Fig. 3 (b), Fig. 3 (c) and Fig. 3 (d).Wherein, the corresponding rotatable wave plate of Fig. 3 (a)-Fig. 3 (d) difference is-45
0,-40
0, 35
0, 45
0when all angles, the phase differential between laser instrument output feedback signal.According to Fig. 3 (a)-Fig. 3 (d), between roll angle and phase differential, there is one-to-one relationship.Therefore, in laser exocoel feedback rolling angle measurement system, only need to measure x to and y to laser intensity curve between phasic difference, just can record easily the roll angle of testee.
The laser exocoel feedback rolling angle measurement system of the utility model design is by light source, feedback exocoel, 4 part compositions of acquisition of signal and data handling system.What its system source was used is the single-frequency microplate Nd:YAG laser instrument of LD pumping.In measuring process, continuously change external cavity length by data handling system control exocoel feedback mirror, measure simultaneously laser instrument x to y to laser intensity curve.By calculate x to and y to laser intensity curve between phasic difference, can obtain the roll angle of object under test.The designed laser exocoel feedback rolling angle measurement system of the utility model has compact conformation, measuring accuracy high.
In the several embodiment that provide in the application, should be understood that disclosed system, apparatus and method can realize by another way.For example, device embodiment described above is only schematic, for example, the division of described unit, be only that a kind of logic function is divided, when actual realization, can have other dividing mode, for example multiple unit or assembly can in conjunction with or can be integrated into another system, or some features can ignore, or do not carry out.In addition, shown or discussed coupling each other or direct-coupling or communication connection can be indirect coupling or communication connections by some interfaces, device or unit, can be also electric, machinery or other form connect.
The described unit as separating component explanation can or can not be also physically to separate, and the parts that show as unit can be or can not be also physical locations, can be positioned at a place, or also can be distributed in multiple network element.Can select according to the actual needs some or all of unit wherein to realize the object of the utility model embodiment scheme.
In addition, the each functional unit in each embodiment of the utility model can be integrated in a processing unit, can be also that the independent physics of unit exists, and can be also that two or more unit are integrated in a unit.Above-mentioned integrated unit both can adopt the form of hardware to realize, and also can adopt the form of SFU software functional unit to realize.
If described integrated unit is realized and during as production marketing independently or use, can be stored in a computer read/write memory medium using the form of SFU software functional unit.Based on such understanding, the part that the technical solution of the utility model contributes to prior art in essence in other words, or all or part of of this technical scheme can embody with the form of software product, this computer software product is stored in a storage medium, comprise that some instructions (can be personal computers in order to make a computer equipment, server, or the network equipment etc.) carry out all or part of step of method described in each embodiment of the utility model.And aforesaid storage medium comprises: various media that can be program code stored such as USB flash disk, portable hard drive, ROM (read-only memory) (ROM, Read-Only Memory), random access memory (RAM, Random Access Memory), magnetic disc or CDs.
The above; it is only embodiment of the present utility model; but protection domain of the present utility model is not limited to this; any be familiar with those skilled in the art the utility model disclose technical scope in; can expect easily modification or the replacement of various equivalences, within these modifications or replacement all should be encompassed in protection domain of the present utility model.Therefore, protection domain of the present utility model should be as the criterion with the protection domain of claim.
Claims (5)
1. a laser exocoel feedback low-angle rolling angle measurement system, is characterized in that, comprising:
With the LD pumping source (1) of tail optical fiber, described LD pumping source (1) is for generation of pump light;
Collimation focusing lens combination (2), described collimation focusing lens combination (2) is connected with described LD pumping source (1) by optical fiber;
The Nd:YAG laser instrument being formed by the Nd:YAG crystal (3) of full inner chamber, the plane of incidence of described Nd:YAG crystal (3) and exit facet form the resonator cavity of described Nd:YAG laser instrument, the pump light that described collimation focusing lens combination (2) produces described LD pumping source (1) converges at the described plane of incidence of described Nd:YAG crystal (3), resonance between the described plane of incidence and described exit facet, and from described exit facet output single-frequency linearly polarized laser;
Exocoel feedback catoptron (7), described exocoel feedback catoptron (7) forms feedback exocoel with the exit facet of described Nd:YAG crystal (3), the single-frequency linearly polarized laser of described Nd:YAG laser instrument output is reflected back described Nd:YAG laser instrument by described exocoel feedback catoptron (7), to produce the feedback of laser exocoel;
Static wave plate (5), described static wave plate (5) is arranged in described feedback exocoel, and the fast axle of described static wave plate (5) and slow axis respectively with the polarization direction of the single-frequency linearly polarized laser of described Nd:YAG laser instrument output in angle of 45 degrees;
Rotatable wave plate (6), described rotatable wave plate (6) is arranged in described feedback exocoel, and is fixedly connected with object under test, with the roll angle of the described object under test of sensitivity;
Displacement driver (8), described displacement driver (8) is fixedly connected with described exocoel feedback catoptron (7), with under the effect of driving voltage, promote described exocoel feedback catoptron (7) and move along the axis of described single-frequency linearly polarized laser, change the length of described feedback exocoel;
Acquisition of signal and drive unit, described acquisition of signal and drive unit are used for fast axle and this both direction of slow axis at described static wave plate (5) respectively, survey the light intensity of the described single-frequency linearly polarized laser of described Nd:YAG laser instrument output, and for providing driving voltage to described displacement driver (8);
Phase detectors, the phase differential of described phase detectors light intensity on fast axle and this both direction of slow axis of described static wave plate (5) for detection of described single-frequency linearly polarized laser; With
Data processor (12), described data processor (12), for the phase differential based on described phase detectors detection, is determined the roll angle of described object under test,
Wherein, described acquisition of signal and drive unit comprise:
Polarization splitting prism (9), the described single-frequency linearly polarized laser of described Nd:YAG laser instrument output is spatially divided into two-way light by described polarization splitting prism (9), and described two-way direction of light is parallel to respectively the direction of described fast axle and described slow axis; With
Two photodetectors (10,11), described two photodetectors (10,11) are arranged to survey respectively the light intensity of described two-way light.
2. laser exocoel feedback low-angle rolling angle measurement system according to claim 1, is characterized in that, the fast axle of described rotatable wave plate (6) and slow axis overlap with fast axle and the slow axis of described static wave plate (5) respectively.
3. laser exocoel feedback low-angle rolling angle measurement system according to claim 1 and 2, is characterized in that, described acquisition of signal and drive unit also comprise:
Beam splitter (4), described beam splitter (4) is for being divided into two parts by the described single-frequency linearly polarized laser of described Nd:YAG laser instrument output, and wherein a part of described single-frequency linearly polarized laser incides described polarization splitting prism (9).
4. laser exocoel feedback low-angle rolling angle measurement system according to claim 3, is characterized in that, described beam splitter is arranged in described feedback exocoel.
5. laser exocoel feedback low-angle rolling angle measurement system according to claim 3, it is characterized in that, described beam splitter is arranged on a side of described exocoel feedback catoptron (7), receives the described single-frequency linearly polarized laser of described exocoel feedback catoptron (7) transmission.
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103471527A (en) * | 2013-08-14 | 2013-12-25 | 北京镭测科技有限公司 | Laser exocoel feedback low-angle roll angle measuring system |
| CN106289155A (en) * | 2016-07-21 | 2017-01-04 | 哈尔滨工业大学 | A kind of hypersensitive angle detecting devices based on photon trajectory angular momentum and method |
| CN108709514A (en) * | 2018-03-16 | 2018-10-26 | 华中科技大学 | A kind of compact rolling angle sensor device and measurement method |
| CN111121617A (en) * | 2018-10-31 | 2020-05-08 | 中国科学院长春光学精密机械与物理研究所 | Optical aiming and pointing device and method based on phase shift differential motion |
| CN111121665A (en) * | 2018-10-31 | 2020-05-08 | 中国科学院长春光学精密机械与物理研究所 | Optical aiming and orienting device and method based on phase shift differential motion |
| CN111121618A (en) * | 2018-10-31 | 2020-05-08 | 中国科学院长春光学精密机械与物理研究所 | Zero position detection system of rotary motion turntable |
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2013
- 2013-08-14 CN CN201320496238.9U patent/CN203605919U/en not_active Expired - Lifetime
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103471527A (en) * | 2013-08-14 | 2013-12-25 | 北京镭测科技有限公司 | Laser exocoel feedback low-angle roll angle measuring system |
| CN103471527B (en) * | 2013-08-14 | 2016-04-13 | 北京镭测科技有限公司 | A kind of laser external cavity feedback low-angle rolling angle measurement system |
| CN106289155A (en) * | 2016-07-21 | 2017-01-04 | 哈尔滨工业大学 | A kind of hypersensitive angle detecting devices based on photon trajectory angular momentum and method |
| CN108709514A (en) * | 2018-03-16 | 2018-10-26 | 华中科技大学 | A kind of compact rolling angle sensor device and measurement method |
| CN111121617A (en) * | 2018-10-31 | 2020-05-08 | 中国科学院长春光学精密机械与物理研究所 | Optical aiming and pointing device and method based on phase shift differential motion |
| CN111121665A (en) * | 2018-10-31 | 2020-05-08 | 中国科学院长春光学精密机械与物理研究所 | Optical aiming and orienting device and method based on phase shift differential motion |
| CN111121618A (en) * | 2018-10-31 | 2020-05-08 | 中国科学院长春光学精密机械与物理研究所 | Zero position detection system of rotary motion turntable |
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