CN111063596A

CN111063596A - Transmission type microfocus X-ray tube

Info

Publication number: CN111063596A
Application number: CN202010103819.6A
Authority: CN
Inventors: 毛笑儒; 戴东辉; 高波; 郭红云; 孙典奎; 刘士震; 王鹏; 段新宇; 孙喆
Original assignee: Dandong Huari Electric Co ltd
Current assignee: Dandong Huari Electric Co ltd
Priority date: 2020-02-20
Filing date: 2020-02-20
Publication date: 2020-04-24

Abstract

The invention discloses a transmission-type microfocus X-ray tube, comprising: the device comprises a target unit, an anode unit, a cathode unit, an electron cloud generation unit and a high-voltage sleeve unit which are arranged in series; the electron cloud generating unit is connected with the high-voltage sleeve unit, and generates electron cloud after voltage is applied, and electrons are emitted to the target electrode unit from the cathode unit through the anode unit. The target pole unit, the anode unit and the cathode unit are fixed in a sleeve I, the high-voltage sleeve unit is arranged in a sleeve II, and the sleeve I and the sleeve II are detachably connected. The transmission type microfocus X-ray tube provided by the invention ensures the conversion efficiency and the ray precision of X-rays through the target, the anode/cathode assembly and the high-voltage sleeve which are arranged in series. Through open packaging structure, guaranteed that the main spare part of CRT is removable, overcome traditional CRT integrated into one piece's CRT, after partial damage, the shortcoming of unable change maintenance.

Description

Transmission type microfocus X-ray tube

Technical Field

The invention relates to a transmission type microfocus X-ray tube, in particular to a discharge tube H01J basic electric element of a patent classification number H electric H01 or a discharge lamp H01J 35/00X-ray tube.

Background

With the development of nondestructive testing, there is an increasing demand for obtaining high-magnification and high-quality images. The requirements for the focal spot size of the ray tube are increasing. The internationally recognized microfocus tube has a focal spot size of 50 μm or less. Most microfocus x-ray tube packaging structures are closed. The minimum focal size can be made to be 5 μm. The radiation angles are all below 90 degrees. And the focal spot size of the transmission type X-ray tube can be below 2 μm.

The existing transmission type X-ray tube generally adopts a closed design, and the tube cannot be maintained and can only be scrapped after being damaged. And the focal point size is relatively large, the radiation angle is small, and the use requirement of high precision is difficult to meet.

Disclosure of Invention

In view of the above problems, the present invention discloses a transmissive microfocus X-ray tube, comprising: the device comprises a target unit, an anode unit, a cathode unit, an electron cloud generation unit and a high-voltage sleeve unit which are arranged in series;

the electron cloud generating unit is connected with the high-voltage sleeve unit, and generates electron cloud after voltage is applied, and electrons are emitted to the target electrode unit from the cathode unit through the anode unit.

In a preferred embodiment, the target unit, the anode unit and the cathode unit are fixed in a sleeve I, the high-voltage sleeve unit is arranged in a sleeve II, and the sleeve I and the sleeve II are detachably connected.

In a preferred embodiment, the sleeve I and the sleeve II are hinged.

In a preferred embodiment, the high-pressure sleeve unit is fixed to the sleeve II by a fixing flange provided at an end of the sleeve II.

Furthermore, the high-pressure sleeve unit is connected with the adjusting flange.

In a preferred embodiment, the high-voltage sleeve is provided with an electron cloud generation unit and a grid assembly covering the electron cloud generation unit.

In a preferred embodiment, the anode unit comprises an anode casing assembly with a conical front end, the anode casing assembly is externally wound with a focusing coil assembly, the rear end of the anode casing assembly is connected with a focusing hole column, and the hole column is externally wound with a deflection coil.

Furthermore, the target pole unit comprises a target pole and a target pole placing seat which are detachably connected; the target electrode unit is fixed on the front end surface of the anode unit shell assembly.

Furthermore, a shaft center hole is formed in the anode shell assembly, and a focusing window fixed by a focusing sleeve is arranged at the front section of the shaft center hole.

In a preferred embodiment, the electron cloud generating unit is a filament connected to the high voltage sleeve assembly through a lead.

By adopting the technical scheme, the transmission type microfocus X-ray tube provided by the invention ensures the conversion efficiency and the ray precision of X rays through the target electrode, the anode/cathode assembly and the high-voltage sleeve which are arranged in series. Through open packaging structure, guaranteed that the main spare part of CRT is removable, overcome traditional CRT integrated into one piece's CRT, after partial damage, the shortcoming of unable change maintenance.

Drawings

In order to more clearly illustrate the embodiments of the present invention or the technical solutions of the prior art, the drawings needed to be used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to the drawings without creative efforts.

FIG. 1 is a cross-sectional view of the present invention

FIG. 2 is a side view of a target and target assembly of the present invention

FIG. 3 is a schematic end view of the target holder of the present invention

FIG. 4 is a schematic sectional view of the high-pressure sleeve unit of the present invention

FIG. 5 is a schematic view of a focusing window and a focusing sleeve according to the present invention

FIG. 6 is a schematic view of a gate and a gate assembly according to the present invention

In the figure, 1, a target locking nut, 2, a target placing seat, 3, an insulating pad, 4, an insulating sleeve, 5, a focusing sleeve, 6, a focusing window, 7, an anode shell component, 8, a focusing coil component, 9, a hinge mechanism, 10, a focusing hole column, 11, a deflection coil component, 12, a cathode unit, 13, an electron cloud generating unit, 14, a grid component, 15, a high-voltage sleeve unit, 16, a fixing flange, 17, an adjusting flange, 18, a target, 19, a cathode shell, 20, a high-voltage sleeve, 21, a grid cap, 22, a filament assembly, 23, a filament assembly pad and 24, a filament fixing ring.

Detailed Description

In order to make the objects, technical solutions and advantages of the embodiments of the present invention clearer, the following describes the technical solutions of the embodiments of the present invention clearly and completely with reference to the accompanying drawings in the embodiments of the present invention:

as shown in fig. 1-6: a transmission type microfocus X-ray tube mainly comprises a tube body and a vacuum pump, wherein in figure 1, a part vertical to the tube body is the vacuum pump.

The tube is composed of a front tube section and a rear tube section which are connected through a hinge mechanism 9. The hinge mechanism 9 facilitates the opening of the tube during use and maintenance. In a preferred embodiment, the tube has a tubular casing of equal diameter, generally a body of revolution in cross-section, and in the present embodiment, a cylindrical body.

The front pipe section is respectively packaged with a target unit, an anode unit and a cathode unit. The rear pipe section, i.e., the cathode housing 19, encloses the electron cloud generating unit 13 and the high pressure sleeve unit 15.

The electron cloud generating unit 13 is connected to the high voltage sleeve unit 15, and generates an electron cloud after voltage is applied, and electrons are emitted from the cathode unit 12 to the target unit through the anode unit.

In order to enable a detachable connection of the high-pressure sleeve unit 15, the high-pressure sleeve unit is preferably fastened to the rear section (sleeve II) by means of a fastening flange 16 arranged at the end of the sleeve II.

Further, in order to adjust the orientation of the high-pressure sleeve unit 15, as a preferred embodiment, the high-pressure sleeve unit is further connected with an adjusting flange 17, and the generating direction of the electron beam can be ensured by mechanical adjustment. In a preferred embodiment, a large gap is left between the adjusting flange 17 and the fixing flange 16, and the adjusting flange 17 and the fixing flange 16 are sealed in an end face sealing manner, so that the required sealing performance of the tube can be ensured. The position of the adjusting flange 17 in the fixing flange 16 can be adjusted by a jackscrew at the periphery of the fixing flange 16 for the purpose of adjustment.

In a preferred embodiment, an electron cloud generating unit 13 and a grid assembly 14 covering the electron cloud generating unit are provided at the front section of the high-voltage sleeve, and the grid assembly 14 is mainly composed of a grid cap 21 and a filament assembly 22 provided inside the grid cap 21. The filament assembly 22 is fixed by a filament fixing ring 24 and a filament assembly pad 23.

In the working state, the wire of the electron cloud generating unit 13 is applied with current and voltage by the lead of the high-voltage sleeve unit 15. The electrons are excited to form an electron cloud, at which time a high voltage is applied to the cathode unit so that the electrons can be emitted toward the anode.

Then, by applying a gate voltage to the emission end of the cathode unit 12, electron emission is suppressed, and the electron beam is made fine. When the electrons are bombarded to the anode unit, the electron beams are bombarded to the target surface through electromagnetic focusing to generate X rays which are directly transmitted out from the target. The cathode emission end and the grid assembly are used for controlling, so that electrons can be orderly arranged and emitted to the anode unit.

In a preferred embodiment, the anode unit comprises an anode casing assembly with a conical front end, the anode casing assembly is surrounded by a focusing coil assembly 8, the rear end of the anode casing assembly is connected with a focusing hole column 10, and the hole column is surrounded by a deflection coil assembly 11.

Furthermore, as a preferred embodiment, the target unit is detachable and comprises a target 18 and a target holder 2 which are connected by a detachable connection, preferably by a target lock nut 1. The target unit is fixed on the front end face of the anode shell component 7. As shown in fig. 3, the target holder 2 includes a plurality of target locknuts 1 arranged at the outer edge and in central symmetry, and a blind hole arranged at the middle for receiving the bottom fixing post of the target 18.

Preferably, the anode shell assembly 7 is internally provided with a shaft hole, and the front section of the shaft hole is provided with a focusing window 6 fixed by a focusing sleeve 5. As shown in fig. 5, the focusing sheath 5 includes a hollow tube section at the rear, a slot hole matched with the focusing window 6 is arranged at the front section of the tube section, and the focusing window 6 is fixed in the slot hole and detachably connected with the focusing sheath 5, and can be selected to be clamped and connected.

The above description is only for the preferred embodiment of the present invention, but the scope of the present invention is not limited thereto, and any person skilled in the art should be considered to be within the technical scope of the present invention, and the technical solutions and the inventive concepts thereof according to the present invention should be equivalent or changed within the scope of the present invention.

Claims

1. A transmissive microfocus X-ray tube, comprising: the device comprises a target unit, an anode unit, a cathode unit, an electron cloud generation unit and a high-voltage sleeve unit which are arranged in series;

2. The transmissive microfocus X-ray tube of claim 1, further characterized by: the target pole unit, the anode unit and the cathode unit are fixed in a sleeve I, the high-voltage sleeve unit is arranged in a sleeve II, and the sleeve I and the sleeve II are detachably connected.

3. The transmissive microfocus X-ray tube of claim 1, further characterized by: the sleeve I is hinged with the sleeve II.

4. The transmissive microfocus X-ray tube of claim 1, further characterized by: the high-pressure sleeve unit is fixed with the sleeve II through a fixing flange arranged at the tail end of the sleeve II.

5. The transmissive microfocus X-ray tube of claim 4, further characterized by: the high-pressure sleeve unit is connected with the adjusting flange.

6. The transmissive microfocus X-ray tube of claim 1, further characterized by: the high-voltage sleeve is provided with an electron cloud generation unit and a grid assembly wrapping the electron cloud generation unit.

7. The transmissive microfocus X-ray tube of claim 1, further characterized by: the anode unit comprises an anode shell assembly with a conical front end, a focusing coil assembly is wound outside the anode shell assembly, the rear end of the anode shell assembly is connected with a focusing hole column, and a deflection coil is wound outside the hole column.

8. The transmissive microfocus X-ray tube of claim 7, further characterized by: the target pole unit comprises a target pole and a target pole placing seat which are detachably connected; the target electrode unit is fixed on the front end surface of the anode unit shell assembly.

9. The transmissive microfocus X-ray tube of claim 7, further characterized by: the anode shell component is internally provided with a shaft center hole, and the front section of the shaft center hole is provided with a focusing window fixed by a focusing sleeve.

10. The transmissive microfocus X-ray tube of claim 1, further characterized by: the electron cloud generating unit is a filament connected with the high-voltage sleeve assembly through a lead.