CN111863571B - Electric target mechanism based on non-contact electromagnetic drive and absolute displacement feedback - Google Patents
Electric target mechanism based on non-contact electromagnetic drive and absolute displacement feedback Download PDFInfo
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- CN111863571B CN111863571B CN202010722711.5A CN202010722711A CN111863571B CN 111863571 B CN111863571 B CN 111863571B CN 202010722711 A CN202010722711 A CN 202010722711A CN 111863571 B CN111863571 B CN 111863571B
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J35/00—X-ray tubes
- H01J35/02—Details
- H01J35/04—Electrodes ; Mutual position thereof; Constructional adaptations therefor
- H01J35/08—Anodes; Anti cathodes
- H01J35/112—Non-rotating anodes
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- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B6/00—Apparatus for radiation diagnosis, e.g. combined with radiation therapy equipment
- A61B6/40—Apparatus for radiation diagnosis, e.g. combined with radiation therapy equipment with arrangements for generating radiation specially adapted for radiation diagnosis
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J35/00—X-ray tubes
- H01J35/24—Tubes wherein the point of impact of the cathode ray on the anode or anticathode is movable relative to the surface thereof
Abstract
The invention discloses an electric target mechanism based on non-contact electromagnetic drive and absolute displacement feedback, which adopts an electromagnetic chuck and an inductive proximity switch to form a drive and sensing unit of a drive and sensing assembly, utilizes the characteristic that the electromagnetic chuck can generate large suction force in a tiny air gap, balances the restoring force of radial deformation of a corrugated pipe, utilizes the absolute displacement measurement characteristic of the inductive proximity switch, and combines a controller, a power amplifier and the electromagnetic chuck to form a displacement feedback control loop to realize the precise control of two-dimensional micro displacement of a window target. The invention has the characteristics of simple structure, low cost and high moving precision.
Description
Technical Field
The invention relates to the technical field of X-ray imaging, in particular to an electric target mechanism based on non-contact electromagnetic driving and absolute displacement feedback.
Background
The X-ray source is a core component of an X-ray imaging system, is widely applied to the fields of electronic packaging detection, medical imaging and the like, and has the basic principle that a window target made of a tungsten-plated diamond sheet is bombarded by high-energy electron beams generated by field emission or thermal electron emission in the X-ray source to generate X rays, and the generated X rays penetrate through the window target to radiate outwards. Because the tungsten layer of the diamond window is bombarded by high-energy electron beams for a long time, the coating can be corroded by pits, and the target function is lost. In order to ensure the long-term stable operation of the radiation source, the focus point of the electron beam on the target needs to be transferred periodically to avoid the continuous bombardment of the electron beam on a certain target point.
In the using process, the bombardment of the high-energy electron beam needs to be carried out in a vacuum environment, the displacement of the target material is difficult to realize in the vacuum environment by conventional equipment, and the adjustment time of part of the equipment capable of realizing the displacement of the target material in the vacuum environment is too long while the precision is not high.
International application No. WO2014/123835A1 describes a magnetic lens type moving target mechanism, which adopts a plurality of groups of electromagnetic coils to form a magnetic lens to realize two-dimensional deflection of an electron beam, focuses on different positions of a target, and has complex structure and control and high cost.
Patent No. 201210423880.4 describes a detachable anode target device of an open microfocus X-ray tube, which can change the electron bombardment position of an anode target by rotating to use different positions of the anode target, but the vacuum degree of the tube needs to be destroyed in the using process, and after the position of the anode target is replaced, the tube needs to be vacuumized again, and the tube cannot work in the period, so that inconvenience in maintenance and use can be caused. The breakdown of the vacuum degree also affects the withstand voltage performance of the tube, and may cause a drop in the high voltage of the tube.
Application number 201811278692.0 discloses a manual formula target mechanism that floats, adopts compression bellows 4 to realize the vacuum separation of source of radiation shell and target holder, relies on ball bearing to prevent bellows 4's vertical shrink, and actuating mechanism quadrature is arranged on the source of radiation shell, realizes the two-dimensional translation of target holder and window target. However, since the roller bearings are located in the vacuum tube, on one hand, maintenance and material influence on airtightness, and on the other hand, due to the vacuum adsorption effect, the friction coefficient of the ball bearings is large, so that the driving force required by the driving mechanism is large, and the moving target mechanism is difficult to realize lateral displacement. In addition, the technology has the defects of tedious manual adjustment, low precision and difficult automation integration.
In conclusion, the existing adjusting mechanism for the two-dimensional micro-displacement of the window target holder has the problems of complex structure, influence on the performance of other parts and the like, the reliability is poor, and the moving precision of the movable target holder cannot be accurately controlled.
Disclosure of Invention
The invention aims to provide an electric target mechanism based on non-contact electromagnetic driving and absolute displacement feedback, which has high reliability, simple structure and control and high moving precision of a movable target seat.
The invention solves the technical problems through the following technical means:
an electric target mechanism based on non-contact electromagnetic drive and absolute displacement feedback comprises a movable target holder (12), an upper mounting plate (13), a lower mounting plate (13'), at least two-dimensional guide assemblies (15), a first drive and sensor unit (2), a second drive and sensor unit (20) and a corrugated pipe (4); the lower end surface of the corrugated pipe (4) is fixed with a lower mounting plate (13') in an airtight manner, and the upper end surface of the corrugated pipe (4) is fixed with the movable target seat (12) in an airtight manner through an upper mounting plate (13); at least two-dimensional guide assemblies (15) are arranged in the circumferential direction of the corrugated pipe (4) and are fixedly connected with an upper mounting plate (13) and a lower mounting plate (13') respectively;
the first driving and sensor unit (2) of the corrugated pipe (4) comprises a first electromagnetic chuck, a first magnetic conduction plate and a first displacement sensor (23); the second driving and sensor unit (20) comprises a second electromagnetic chuck (21), a second magnetic conduction plate (22) and a second displacement sensor (23);
the first magnetic conduction plate is vertically arranged, the first electromagnetic chuck is fixed with the upper mounting plate (13) and is connected with an air gap of the side A of the first magnetic conduction plate at an interval, the side A of the first magnetic conduction plate is also fixedly connected with one two-dimensional guide assembly (15), and the side B of the first magnetic conduction plate is connected with an air gap of the first displacement sensor (23); the first displacement sensor (23) is arranged at an interval with the outer wall of the corrugated pipe (4) and is fixed with the upper mounting plate (13);
the second magnetic conduction plate (22) is vertically arranged, the second electromagnetic chuck (21) is fixed with the lower mounting plate (13') and is connected with an air gap on the side A of the second magnetic conduction plate (22) at an interval, the side A of the second magnetic conduction plate (22) is also fixedly connected with the other two-dimensional guide assembly (15), and the side B of the second magnetic conduction plate (22) is connected with an air gap of the second displacement sensor (23) at an interval; the second displacement sensor (23) is arranged at an interval with the outer wall of the corrugated pipe (4) and is fixed with the lower mounting plate (13');
the first displacement sensor (23) is arranged orthogonally to the second displacement sensor (23).
When the position of the target holder needs to be adjusted, the first electromagnetic chuck or the second electromagnetic chuck is selected to be electrified to generate suction force according to the direction needing to be adjusted, the corresponding magnetic conduction plate is adsorbed, the two-dimensional guide assembly moves through the magnetic conduction plate, so that the upper mounting plate is driven to move, the corrugated pipe is driven by the upper mounting plate to send radial micro-displacement, the focusing point of an electron beam on a window target is transferred, and the electron beam is prevented from continuously bombarding at a certain target point.
Furthermore, the electric target mechanism also comprises a first power amplifier, a second power amplifier and a controller; the output ends of the first electromagnetic chuck and the second electromagnetic chuck are respectively connected with the input ends of the first absolute displacement sensor and the second absolute displacement sensor, and the output ends of the first absolute displacement sensor and the second absolute displacement sensor are respectively connected with the input end of the controller. The output end of the controller is connected with the input ends of the first power amplifier and the second power amplifier, and the output ends of the first power amplifier and the second power amplifier are respectively connected with the input ends of the first electromagnetic chuck and the second electromagnetic chuck.
Further, the two-dimensional guide assembly (15) comprises an upper miniature guide rail (151), a motion block (152) and a lower miniature guide rail (153); the upper miniature guide rail (151) is fixed on the lower surface of the upper mounting plate (13), the lower miniature guide rail (153) is fixed on the upper surface of the lower mounting plate (13'), and the track directions of the upper miniature guide rail (151) and the lower miniature guide rail (153) are orthogonally arranged; the motion block (152) is positioned between the upper micro guide rail (151) and the lower micro guide rail (153) and is in sliding connection with the upper micro guide rail (151) and the lower micro guide rail (153); the first magnetic conduction plate and the second magnetic conduction plate (22) are respectively and fixedly connected with the corresponding motion block (152).
Furthermore, the electric target mechanism also comprises a rolling support assembly (14), and the rolling support assembly (14) is respectively connected and fixed with the upper mounting plate (13) and the lower mounting plate (13').
Furthermore, the first displacement sensor (23) and the second displacement sensor (23) are inductive proximity switches.
Furthermore, the displacement sensor is fixed through an upper mounting plate (13) or a lower mounting plate (13') corresponding to the L-shaped bracket (3); one side plate of the L-shaped support (3) is fixed with the upper mounting plate (13) or the lower mounting plate (13') through a screw, the other side plate is provided with a hole, and the displacement sensor is fixed through the hole.
Furthermore, the air gap distance between the first electromagnetic chuck and the first magnetic conduction plate and the air gap distance between the second electromagnetic chuck (21) and the second magnetic conduction plate (22) are 0.5-2 mm.
Furthermore, the air gap distance between the first displacement sensor (23) and the second magnetic conduction plate (22) and the air gap distance between the second displacement sensor (23) and the second magnetic conduction plate (22) are 0.5-5 mm.
Furthermore, the two-dimensional guide assembly (15) comprises an upper miniature guide rail (151), a moving block (152) and a lower miniature guide rail (153), wherein the upper miniature guide rail (151) is fixed on the lower surface of the upper mounting plate (13), the lower miniature guide rail (153) is fixed on the upper surface of the lower mounting plate (13'), and the track directions of the upper miniature guide rail (151) and the lower miniature guide rail (153) are orthogonally arranged; the motion block (152) is positioned between the upper micro guide rail (151) and the lower micro guide rail (153) and is in sliding connection with the upper micro guide rail (151) and the lower micro guide rail (153), and the motion block (152) can freely slide in two-dimensional directions under the driving of external force.
The invention has the advantages that:
1) The invention adopts the suction force generated by the electromagnetic chuck to drive the magnetic conduction plate to move, and the magnetic conduction plate drives the corresponding two-dimensional guide assembly to move so as to drive the upper mounting plate to horizontally displace, thereby transferring the focusing point of the electron beam on the window target and avoiding the continuous bombardment of the electron beam at a certain target point. The electromagnetic chuck and the inductive proximity switch form a driving and sensing unit of the driving and sensing assembly, the electromagnetic chuck can generate large suction force in a tiny air gap, the restoring force of the radial deformation of the corrugated pipe is balanced, and the absolute displacement measurement characteristic of the inductive proximity switch is utilized,
2) A displacement feedback control loop is formed by combining the controller, the power amplifier and the electromagnetic chuck, and the precise control of the two-dimensional micro displacement of the window target is realized. The invention has the characteristics of simple structure, low cost and high moving precision.
3) The two-dimensional guide assembly and the rolling support assembly are respectively fixed with the upper mounting plate and the lower mounting plate as a whole, so that the structural rigidity of the movable target holder is improved, the deformation of the movable target holder under vacuum is reduced, the reliability of a ray source is improved, and the moving precision of the movable target holder is also improved.
Drawings
FIG. 1 is a schematic view of the overall structure of an electric target mechanism in an embodiment of the present invention;
FIG. 2 is a schematic top view of the electric target mechanism with the upper mounting plate removed according to the embodiment of the present invention;
FIG. 3 is a schematic diagram of a driving and sensor unit according to an embodiment of the present invention;
FIG. 4 is a displacement feedback control loop for the electric handle mechanism in an embodiment of the present invention;
FIG. 5 is a diagram illustrating the relationship between the suction force generated by the electromagnetic chuck and the gap distance according to an embodiment of the present invention.
11. A fixed housing; 12. a target holder; 13. an upper mounting plate; 13', a lower mounting plate; 14. a rolling support assembly; 15. a two-dimensional guide assembly; 2. a first drive and sensor unit; 20. a second drive and sensor unit; 21. a second electromagnetic chuck; 22. a second magnetic conductive plate; 23. a displacement sensor; 3. an L-shaped bracket; 151. an upper miniature guide rail; 152. a motion block; 153. a lower micro guide rail; 141. a universal ball; 142. a ball seat; 4. a bellows.
Detailed Description
In order to make the objects, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the embodiments of the present invention, and it is obvious that the described embodiments are some embodiments of the present invention, but not all embodiments. All other embodiments, which can be obtained by a person skilled in the art without inventive step based on the embodiments of the present invention, are within the scope of protection of the present invention.
As shown in fig. 1 and 2, the present embodiment provides an electric target mechanism based on non-contact electromagnetic driving and absolute displacement feedback, which includes a fixed housing 11, a movable target holder 12, an upper mounting plate 13, a lower mounting plate 13', a two-dimensional guide assembly 15, a first driving and sensor unit 2, a second driving and sensor unit 20, and a bellows 4. The lower end surface of the corrugated pipe 4 is fixed with the top of the fixed shell 11 in an airtight way through a lower mounting plate 13', and the upper end surface of the corrugated pipe 4 is fixed with the movable target holder 12 in an airtight way through an upper mounting plate 13; the two-dimensional guide assembly 15 is fixedly connected with the upper mounting plate 13 and the lower mounting plate 13' respectively. In the present embodiment, the mounting structures of the upper mounting plate 13, the lower mounting plate 13', the bellows 4, the fixed housing 11 and the movable target holder 12 are conventional technologies, and will not be described in detail herein.
In this embodiment, the extension dimensions of the upper mounting plate 13 and the lower mounting plate 13 'are larger than the diameter of the corrugated tube 4, so that the two drive and sensor units, the two-dimensional guide assembly 15, and the rolling support assembly 14 have mounting spaces, and the two drive and sensor units, the two-dimensional guide assembly 15, are arranged in the circumferential direction of the corrugated tube 4 and between the upper mounting plate 13 and the lower mounting plate 13'.
In this embodiment, 3 two-dimensional guide modules 15 are provided, and the directions of movement of the 3 two-dimensional guide modules 15 are the same. The two-dimensional guide assembly 15 is constructed as follows:
the device comprises an upper miniature guide rail 151, a moving block 152 and a lower miniature guide rail 153, wherein the upper miniature guide rail 151 is fixed on the lower surface of an upper mounting plate 13, the lower miniature guide rail 153 is fixed on the upper surface of a lower mounting plate 13', and the track directions of the upper miniature guide rail 151 and the lower miniature guide rail 153 are orthogonally arranged. The moving block 152 is located between the upper micro guide rail 151 and the lower micro guide rail 153, and is slidably connected to the upper micro guide rail 151 and the lower micro guide rail 153, and the moving block 152 can freely slide in two-dimensional directions under the driving of an external force.
In this embodiment, the specific mounting structure of the two driving and sensor units is as follows:
as shown in fig. 3, the two driving and sensor units have the same structure, and take the second driving and sensor unit 20 as an example, and include a second electromagnetic chuck 21, a second magnetic conductive plate 22, and a second displacement sensor 23. The first driving and sensor unit 2 comprises a first electromagnetic chuck, a first magnetic conduction plate and a first displacement sensor; in this embodiment, the first displacement sensor and the second displacement sensor 23 both use an inductive proximity switch for analog output.
The first magnetic conduction plate is vertically arranged, the first electromagnetic chuck is fixed with the upper mounting plate 13 and connected with the air gap on the A side of the first magnetic conduction plate, and the air gap is generally set according to the actual requirement of equipment, such as 0.5-2 mm. The side a of the first magnetic conductive plate is further fixedly connected to the side wall of the moving block 152 of one of the two-dimensional guide assemblies 15, and the side B of the first magnetic conductive plate is connected to an air gap distance of the first displacement sensor, which is generally set according to actual requirements of equipment, for example, 0.5 to 5mm. The first displacement sensor is arranged at an interval with the outer wall of the corrugated pipe 4 and is fixed with the upper mounting plate 13;
second magnetic conduction plate 22 sets up vertically, and second electromagnetic chuck 21 is fixed with lower mounting plate 13', and is connected with the air gap interval of A side of second magnetic conduction plate 22, and the air gap interval generally sets for according to equipment actual need, for example 0.5 ~ 2mm. The side a of the second magnetic conductive plate 22 is also fixedly connected to the side wall of the moving block 152 of the other two-dimensional guide assembly 15, and the side B of the second magnetic conductive plate 22 is connected to the air gap distance of the second displacement sensor 23, which is generally set according to the actual requirements of the device, for example, 0.5-5 mm. The second displacement sensor 23 is spaced from the outer wall of the bellows 4 and is fixed to the lower mounting plate 13'.
Based on the relationship between the suction force generated by the electromagnetic chuck and the air gap as shown in fig. 5, the suction force and the air gap of the electromagnetic chuck can be determined according to the characteristics of the corrugated pipe, such as material and hardness.
Wherein the first displacement sensor is arranged orthogonally to the second displacement sensor 23.
In this embodiment, the two displacement sensors 23 are respectively fixed to the upper mounting plate 13 and the lower mounting plate 13' through the L-shaped brackets 3. L shape support 3 one side is fixed with last mounting panel 13, lower mounting panel 13' through the screw, and the hole is opened to the other side, and displacement sensor 23 passes the hole to supplementary fixed can through the screw.
The working principle is as follows:
when the position of the target holder 12 needs to be adjusted, the first electromagnetic chuck or the second electromagnetic chuck 21 is selected to be powered on to generate suction force according to the direction needing to be adjusted, the corresponding magnetic conduction plate is adsorbed, the magnetic conduction plate drives the motion block 152 to move, so that the upper mounting plate 13 is driven to move, the upper mounting plate 13 drives the corrugated pipe 4 to send radial micro displacement, the focus point of an electron beam on a window target is transferred, and the electron beam is prevented from continuously bombarding at a certain target point.
As shown in fig. 4, in this embodiment, the electric target mechanism further includes a first power amplifier, a second power amplifier, and a controller; the output ends of the first electromagnetic chuck and the second electromagnetic chuck 21 are respectively connected with the input ends of the first displacement sensor and the second displacement sensor, and the output ends of the first displacement sensor and the second displacement sensor are respectively connected with the input end of the controller. The output end of the controller is connected with the input ends of the first power amplifier and the second power amplifier, and the output ends of the first power amplifier and the second power amplifier are respectively connected with the input ends of the first electromagnetic chuck and the second electromagnetic chuck, so that the first electromagnetic chuck and the second electromagnetic chuck, the power amplifier and the controller form a displacement feedback control loop. The controller is communicated with the computer, the displacement can be input into the computer according to the displacement needing to be adjusted, and high-precision adjustment is realized through the controller.
In this embodiment, the electric target mechanism further includes 3 sets of rolling support assemblies 14, and the rolling support assemblies 14 are respectively connected and fixed with the upper mounting plate 13 and the lower mounting plate 13', and are uniformly distributed in the circumferential direction of the corrugated pipe 4 to support the axial height of the corrugated pipe 4. The rolling support assembly 14 includes a universal ball 141, a ball seat 142; the ball seat 142 is fixed to the lower mounting plate 13', and the universal ball 141 is rolled and fixed to the top plate of the ball seat 142 and abuts against the lower surface of the upper mounting plate 13. When the upper mounting plate 13 is displaced, the gimbaled ball 141 provides a supporting force and rolls freely along the lower surface of the upper mounting plate 13.
The above examples are only intended to illustrate the technical solution of the present invention, but not to limit it; although the present invention has been described in detail with reference to the foregoing embodiments, it will be understood by those of ordinary skill in the art that: the technical solutions described in the foregoing embodiments may still be modified, or some technical features may be equivalently replaced; and such modifications or substitutions do not depart from the spirit and scope of the corresponding technical solutions of the embodiments of the present invention.
Claims (9)
1. The utility model provides an electronic target mechanism based on non-contact electromagnetic drive and absolute displacement feedback which characterized in that: comprises a movable target holder (12), an upper mounting plate (13), a lower mounting plate (13'), at least two-dimensional guide assemblies (15), a first driving and sensor unit (2), a second driving and sensor unit (20) and a corrugated pipe (4); the lower end surface of the corrugated pipe (4) is fixed with a lower mounting plate (13') in an airtight manner, and the upper end surface of the corrugated pipe (4) is fixed with the movable target holder (12) in an airtight manner through an upper mounting plate (13); at least two-dimensional guide assemblies (15) are arranged in the circumferential direction of the corrugated pipe (4) and are fixedly connected with an upper mounting plate (13) and a lower mounting plate (13') respectively;
the first driving and sensor unit (2) comprises a first electromagnetic chuck, a first magnetic conduction plate and a first displacement sensor (23); the second driving and sensor unit (20) comprises a second electromagnetic chuck (21), a second magnetic conduction plate (22) and a second displacement sensor (23);
the first magnetic conduction plate is vertically arranged, the first electromagnetic chuck is fixed with the upper mounting plate (13) and is connected with an air gap of the side A of the first magnetic conduction plate at an interval, the side A of the first magnetic conduction plate is also fixedly connected with one two-dimensional guide assembly (15), and the side B of the first magnetic conduction plate is connected with an air gap of the first displacement sensor (23); the first displacement sensor (23) is arranged at an interval with the outer wall of the corrugated pipe (4) and is fixed with the upper mounting plate (13);
the second magnetic conductive plate (22) is vertically arranged, the second electromagnetic chuck (21) is fixed with the lower mounting plate (13') and is connected with an air gap on the side A of the second magnetic conductive plate (22) at an interval, the side A of the second magnetic conductive plate (22) is also fixedly connected with the other two-dimensional guide assembly (15), and the side B of the second magnetic conductive plate (22) is connected with an air gap of the second displacement sensor (23) at an interval; the second displacement sensor (23) is arranged at an interval with the outer wall of the corrugated pipe (4) and is fixed with the lower mounting plate (13');
the first displacement sensor (23) is arranged orthogonally to the second displacement sensor (23).
2. An electric target mechanism based on non-contact electromagnetic drive and absolute displacement feedback according to claim 1, characterized in that: the electric target mechanism also comprises a first power amplifier, a second power amplifier and a controller; the output ends of the first electromagnetic chuck and the second electromagnetic chuck are respectively connected with the input ends of a first absolute displacement sensor and a second absolute displacement sensor, and the output ends of the first absolute displacement sensor and the second absolute displacement sensor are respectively connected with the input end of a controller; the output end of the controller is connected with the input ends of the first power amplifier and the second power amplifier, and the output ends of the first power amplifier and the second power amplifier are respectively connected with the input ends of the first electromagnetic chuck and the second electromagnetic chuck.
3. An electric target mechanism based on non-contact electromagnetic drive and absolute displacement feedback according to claim 1 or 2, characterized in that: the two-dimensional guide assembly (15) comprises an upper miniature guide rail (151), a moving block (152) and a lower miniature guide rail (153); the upper miniature guide rail (151) is fixed on the lower surface of the upper mounting plate (13), the lower miniature guide rail (153) is fixed on the upper surface of the lower mounting plate (13'), and the track directions of the upper miniature guide rail (151) and the lower miniature guide rail (153) are orthogonally arranged; the motion block (152) is positioned between the upper miniature guide rail (151) and the lower miniature guide rail (153) and is in sliding connection with the upper miniature guide rail (151) and the lower miniature guide rail (153); the first magnetic conduction plate and the second magnetic conduction plate (22) are respectively and fixedly connected with the corresponding motion blocks (152).
4. An electric target mechanism based on non-contact electromagnetic drive and absolute displacement feedback according to claim 1 or 2, characterized in that: the electric target mechanism further comprises a rolling support assembly (14), and the rolling support assembly (14) is fixedly connected with the upper mounting plate (13) and the lower mounting plate (13') respectively.
5. An electric target mechanism based on non-contact electromagnetic drive and absolute displacement feedback according to claim 1 or 2, characterized in that: the first displacement sensor (23) and the second displacement sensor (23) are inductive proximity switches.
6. An electric target mechanism based on non-contact electromagnetic drive and absolute displacement feedback according to claim 2, characterized in that: the displacement sensor is fixed through an upper mounting plate (13) or a lower mounting plate (13') corresponding to the L-shaped bracket (3) respectively; one side plate of the L-shaped support (3) is fixed with the upper mounting plate (13) or the lower mounting plate (13') through a screw, the other side plate is provided with a hole, and the displacement sensor is fixed through the hole.
7. An electric target mechanism based on non-contact electromagnetic drive and absolute displacement feedback according to claim 2, characterized in that: the air gap distance between the first electromagnetic chuck and the first magnetic conduction plate and between the second electromagnetic chuck (21) and the second magnetic conduction plate (22) is 0.5-2 mm.
8. An electric target mechanism based on non-contact electromagnetic drive and absolute displacement feedback according to claim 2, characterized in that: the air gap distance between the first displacement sensor (23) and the second magnetic conduction plate (22) and the air gap distance between the second displacement sensor (23) and the second magnetic conduction plate (22) are 0.5-5 mm.
9. An electric target mechanism based on non-contact electromagnetic drive and absolute displacement feedback according to claim 2, characterized in that: the two-dimensional guide assembly (15) comprises an upper miniature guide rail (151), a motion block (152) and a lower miniature guide rail (153), wherein the upper miniature guide rail (151) is fixed on the lower surface of the upper mounting plate (13), the lower miniature guide rail (153) is fixed on the upper surface of the lower mounting plate (13'), and the track directions of the upper miniature guide rail (151) and the lower miniature guide rail (153) are orthogonally arranged; the motion block (152) is positioned between the upper miniature guide rail (151) and the lower miniature guide rail (153) and is in sliding connection with the upper miniature guide rail (151) and the lower miniature guide rail (153), and the motion block (152) can freely slide in two-dimensional directions under the driving of external force.
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| Application Number | Priority Date | Filing Date | Title |
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| CN202010722711.5A CN111863571B (en) | 2020-07-24 | 2020-07-24 | Electric target mechanism based on non-contact electromagnetic drive and absolute displacement feedback |
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| Application Number | Priority Date | Filing Date | Title |
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| CN202010722711.5A CN111863571B (en) | 2020-07-24 | 2020-07-24 | Electric target mechanism based on non-contact electromagnetic drive and absolute displacement feedback |
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| CN111863571B true CN111863571B (en) | 2023-01-31 |
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Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1162128A (en) * | 1996-01-31 | 1997-10-15 | 东芝株式会社 | X-ray tomography device |
| CN1574181A (en) * | 2003-05-27 | 2005-02-02 | 通用电气公司 | Axial flux motor driven anode target for x-ray tube |
| JP2016146281A (en) * | 2015-02-09 | 2016-08-12 | 株式会社大阪真空機器製作所 | Target mount for x-ray generation apparatus and x-ray generation apparatus using the same |
| CN106128925A (en) * | 2015-05-08 | 2016-11-16 | 株式会社岛津制作所 | X-ray generator |
| CN111063596A (en) * | 2020-02-20 | 2020-04-24 | 丹东华日理学电气有限公司 | Transmission type microfocus X-ray tube |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7852988B2 (en) * | 2008-07-31 | 2010-12-14 | General Electric Company | High flux X-ray target and assembly |
-
2020
- 2020-07-24 CN CN202010722711.5A patent/CN111863571B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1162128A (en) * | 1996-01-31 | 1997-10-15 | 东芝株式会社 | X-ray tomography device |
| CN1574181A (en) * | 2003-05-27 | 2005-02-02 | 通用电气公司 | Axial flux motor driven anode target for x-ray tube |
| JP2016146281A (en) * | 2015-02-09 | 2016-08-12 | 株式会社大阪真空機器製作所 | Target mount for x-ray generation apparatus and x-ray generation apparatus using the same |
| CN106128925A (en) * | 2015-05-08 | 2016-11-16 | 株式会社岛津制作所 | X-ray generator |
| CN111063596A (en) * | 2020-02-20 | 2020-04-24 | 丹东华日理学电气有限公司 | Transmission type microfocus X-ray tube |
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| CN111863571A (en) | 2020-10-30 |
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