CN102891059A - Open type micro-focus X-ray tube - Google Patents
Open type micro-focus X-ray tube Download PDFInfo
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- CN102891059A CN102891059A CN2012104238950A CN201210423895A CN102891059A CN 102891059 A CN102891059 A CN 102891059A CN 2012104238950 A CN2012104238950 A CN 2012104238950A CN 201210423895 A CN201210423895 A CN 201210423895A CN 102891059 A CN102891059 A CN 102891059A
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Abstract
The invention discloses an open type micro-focus X-ray tube. An anode target is fixed on an electron beam locus tube, the electron beam locus tube passes through a coil and a cooling water block so as to be fixed on a top cover, the top cover is fixed on a top cover base, the cooling water block is fixed on the coil, the top cover base is fixed on an upper cover, one end of the upper cover is connected with a butterfly buckle device while the other end thereof is fixed on the tube body, a vacuum device is also fixed on the tube body, a lamp filament is mounted in a lamp filament hood, a lamp filament hood top cover is fixed above the lamp filament, the lamp filament hood is fixed on a cable sleeve device, and the cable sleeve device is fixed on the tube body. The open type micro-focus X-ray tube is wholly connected by screws, and sealing rings are used for high-pressure vacuum sealing and water sealing; the open type micro-focus X-ray tube can be opened conveniently, and various elements, such as the lamp filament and the anode target, in the pen type micro-focus X-ray tube can be maintained, so that the disadvantage that various elements, such as the lamp filament and the anode target, of a closed pen type micro-focus X-ray tube are all sealed in one shell and cannot be maintained is solved.
Description
Technical field
The present invention relates to the microfocus X-ray pipe that a kind of Non-Destructive Testing is used, relate to specifically a kind of easy to maintenance, the open microfocus X-ray pipe of replaceable inner components.
Background technology
The microfocus X-ray pipe is a kind of of the X-ray tube that uses during X ray detects, it is mainly used in the analysis of the internal displacements such as semiconductor BGA, wiring board, be beneficial to BGA weld defects such as differentiating empty weldering, rosin joint, microelectronics system and rubber seal element, cable, harness and the analysis of working of plastics inner case etc.The microfocus X-ray pipe of domestic market is closed microfocus X-ray pipe, and the characteristics of this closed microfocus X-ray pipe are that volume is little, and cathode filament, electron bunch cylinder, plate target etc. are sealed in the vaccum case together.Filament in the X-ray tube of this structure or plate target are in case damage can't be keeped in repair, and whole X-ray tube must be scrapped, and the economic loss that causes is very large.Along with the fast development of China's semicon industry and electron trade, the unrepairable of closed microfocus X-ray pipe has not satisfied the demand in market.
Summary of the invention
For having closed microfocus X-ray pipe maintenance difficulty now, be difficult for changing the problem of parts, the invention provides the open microfocus X-ray pipe of a kind of easy-maintaining, energy quick-replaceable parts.
Solving the problems of the technologies described above the concrete technical measures of taking is:
A kind of open microfocus X-ray pipe, it is characterized in that: by target cover 1, plate target 2, top cover 3, electricity beam trajectory pipe 4, coil 5, cooling water piece 6, butterfly buckle device 7, top cover base 8, loam cake 9, spring screw 10, body 11, vacuum plant 12, filament cap top cover 13, filament 14, filament cap 15 and cable joint-box device 16 form, plate target 2 is fixed on the electric beam trajectory pipe 4 by target cover 1, electricity beam trajectory pipe 4 passes coil 5 and cooling water piece 6 is fixed on the top cover 3, top cover 3 is fixed on the top cover base 8, cooling water piece 6 is fixed on the coil 5, top cover base 8 is fixed on the loam cake 9, one end of loam cake 9 is connected on the butterfly buckle device 7, the other end is fixed on the body 11 with spring screw 10, also be fixed with vacuum plant 12 on the body 11, filament 14 is installed in the filament cap 15, anchored filament cover top cover 13 above filament 14, filament cap 15 is fixed on the cable joint-box device 16, and cable joint-box device 16 is fixed on the body 11 by flange.
Beneficial effect of the present invention: the filament in the X-ray tube, plate target etc. easily wearing detail are easy to dismounting, anyone can operate, and keeps in repair very conveniently, has greatly saved cost, overcome the drawback of closed microfocus X-ray pipe unrepairable, prolonged the useful life of X-ray tube.
Description of drawings
Fig. 1 is structural representation of the present invention.
Embodiment
Below in conjunction with accompanying drawing the present invention is described in further details.
A kind of open microfocus X-ray pipe, as shown in Figure 1, by target cover 1, plate target 2, top cover 3, electricity beam trajectory pipe 4, coil 5, cooling water piece 6, butterfly buckle device 7, top cover base 8, loam cake 9, spring screw 10, body 11, vacuum plant 12, filament cap top cover 13, filament 14, filament cap 15 and cable joint-box device 16 form, plate target 2 is fixed on the electric beam trajectory pipe 4 by target cover 1 usefulness screw thread, electricity beam trajectory pipe 4 passes coil 5 and four M4 sunk screws of cooling water piece 6 usefulness are fixed on the top cover 3, top cover 3 usefulness are fixed on the top cover base 8 with six sunk screws, cooling water piece 6 is fixed on the coil 5, in cooling water piece 6, filling the circulating water of sealing, the thermal energy conduction that produces is being gone out.Top cover base 8 is fixed on the loam cake 9, and an end of loam cake 9 is connected on the butterfly buckle device 7, and the other end is fixed on the body 11 with spring screw 10, this butterfly buckle device 7 plays a part hinge, spring screw 10 is turned on, just can be opened loam cake, and fix in corresponding position.Also be fixed with vacuum plant 12 on the body 11, by vacuum plant 12 body 11 remained in the state of high vacuum.Filament 14 is contained in the filament cap 15, anchored filament cover top cover 13 above filament 14, open loam cake 9 after, just can dismantle each parts.Filament cap 15 is screwed on cable joint-box device 16, cable joint-box device 16 is screwed on body 11 by flange, just formed so an airtight space in the body 11, constantly work by vacuum pump, this space is reached and keep high vacuum state, at this moment, the electronics that filament emission is abundant, these electronics are by electric beam trajectory pipe 4, focused on by coil 5, impinge upon on the plate target 2, wherein a part just converts X ray to, this x-ray focus is very little, is fit to detect small defective.Whole ray tube connects with screw, carries out high vacuum seal and water-stop with sealing ring, therefore, all parts all can be dismantled, in case the damage of components such as filament wherein, plate target can be opened easily, and all parts can be keeped in repair and change easily.
Claims (1)
1. open microfocus X-ray pipe, it is characterized in that: by target cover (1), plate target (2), top cover (3), electricity beam trajectory pipe (4), coil (5), cooling water piece (6), butterfly buckle device (7), top cover base (8), loam cake (9), spring screw (10), body (11), vacuum plant (12), filament cap top cover (13), filament (14), filament cap (15) and cable joint-box device (16) form, plate target (2) is fixed on the electric beam trajectory pipe (4) by target cover (1), electricity beam trajectory pipe (4) passes coil (5) and cooling water piece (6) is fixed on the top cover (3), top cover (3) is fixed on the top cover base (8), cooling water piece (6) is fixed on the coil (5), top cover base (8) is fixed on the loam cake (9), one end of loam cake (9) is connected on the butterfly buckle device (7), the other end is fixed on the body (11) with spring screw (10), also be fixed with vacuum plant (12) on the body (11), filament (14) is installed in the filament cap (15), at the top of filament (14) anchored filament cover top cover (13), filament cap (15) is fixed on the cable joint-box device (16), and cable joint-box device (16) is fixed on the body (11) by flange.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210423895.0A CN102891059B (en) | 2012-10-31 | 2012-10-31 | Open microfocus X-ray pipe |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210423895.0A CN102891059B (en) | 2012-10-31 | 2012-10-31 | Open microfocus X-ray pipe |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN102891059A true CN102891059A (en) | 2013-01-23 |
| CN102891059B CN102891059B (en) | 2015-12-09 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201210423895.0A Active CN102891059B (en) | 2012-10-31 | 2012-10-31 | Open microfocus X-ray pipe |
Country Status (1)
| Country | Link |
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| CN (1) | CN102891059B (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103681180A (en) * | 2013-12-16 | 2014-03-26 | 丹东奥龙射线仪器集团有限公司 | Open type reflection target microfocus X-ray tube |
| CN106139276A (en) * | 2016-07-28 | 2016-11-23 | 江苏摩科特医疗科技有限公司 | X-ray blood irradiation instrument apparatus |
| CN107342204A (en) * | 2017-08-28 | 2017-11-10 | 丹东市无损检测设备有限公司 | New ceramics cone component equipped with ring spring |
| CN110574137A (en) * | 2017-04-28 | 2019-12-13 | 浜松光子学株式会社 | X-ray tube and X-ray generating apparatus |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0141041A2 (en) * | 1983-08-26 | 1985-05-15 | feinfocus Verwaltungs GmbH & Co. KG | X-ray lithographic apparatus |
| CN85106786A (en) * | 1985-09-07 | 1987-04-29 | 株式会社东芝 | X-ray tube |
| CN1387744A (en) * | 1999-10-29 | 2002-12-25 | 浜松光子学株式会社 | Nondestructive inspection apparatus |
| JP4781156B2 (en) * | 2006-04-18 | 2011-09-28 | 株式会社日立メディコ | Transmission X-ray tube |
| CN102456528A (en) * | 2010-10-26 | 2012-05-16 | 通用电气公司 | Apparatus and method for improved transient response in an electromagnetically controlled x-ray tube |
| CN202871736U (en) * | 2012-10-31 | 2013-04-10 | 丹东奥龙射线仪器有限公司 | Open type micro focus point X-ray tube |
-
2012
- 2012-10-31 CN CN201210423895.0A patent/CN102891059B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0141041A2 (en) * | 1983-08-26 | 1985-05-15 | feinfocus Verwaltungs GmbH & Co. KG | X-ray lithographic apparatus |
| CN85106786A (en) * | 1985-09-07 | 1987-04-29 | 株式会社东芝 | X-ray tube |
| CN1387744A (en) * | 1999-10-29 | 2002-12-25 | 浜松光子学株式会社 | Nondestructive inspection apparatus |
| JP4781156B2 (en) * | 2006-04-18 | 2011-09-28 | 株式会社日立メディコ | Transmission X-ray tube |
| CN102456528A (en) * | 2010-10-26 | 2012-05-16 | 通用电气公司 | Apparatus and method for improved transient response in an electromagnetically controlled x-ray tube |
| CN202871736U (en) * | 2012-10-31 | 2013-04-10 | 丹东奥龙射线仪器有限公司 | Open type micro focus point X-ray tube |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103681180A (en) * | 2013-12-16 | 2014-03-26 | 丹东奥龙射线仪器集团有限公司 | Open type reflection target microfocus X-ray tube |
| CN103681180B (en) * | 2013-12-16 | 2016-05-04 | 丹东奥龙射线仪器集团有限公司 | Open reflecting target microfocus X-ray pipe |
| CN106139276A (en) * | 2016-07-28 | 2016-11-23 | 江苏摩科特医疗科技有限公司 | X-ray blood irradiation instrument apparatus |
| CN110574137A (en) * | 2017-04-28 | 2019-12-13 | 浜松光子学株式会社 | X-ray tube and X-ray generating apparatus |
| CN107342204A (en) * | 2017-08-28 | 2017-11-10 | 丹东市无损检测设备有限公司 | New ceramics cone component equipped with ring spring |
Also Published As
| Publication number | Publication date |
|---|---|
| CN102891059B (en) | 2015-12-09 |
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Address after: 118009 No. 46 Fumin Avenue, Lingang Industrial Park, Liaoning, Dandong Applicant after: Dongdan Aolong Radiative Instrument Group Co., Ltd. Address before: 118009 No. 46 Fumin Avenue, Lingang Industrial Park, Liaoning, Dandong Applicant before: Dandong Aolong Radiative Instrument Co., Ltd. |
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