CN102891059B - Open microfocus X-ray pipe - Google Patents
Open microfocus X-ray pipe Download PDFInfo
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- CN102891059B CN102891059B CN201210423895.0A CN201210423895A CN102891059B CN 102891059 B CN102891059 B CN 102891059B CN 201210423895 A CN201210423895 A CN 201210423895A CN 102891059 B CN102891059 B CN 102891059B
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Abstract
A kind of open microfocus X-ray pipe, plate target is fixed on electric beam trajectory pipe, electricity beam trajectory pipe is fixed on top cover through coil and cooling water block, top cover is fixed on top cover base, cooling water block is fixed on coil, top cover base is fixed on and covers, one end of upper cover is connected on butterfly buckle device, the other end is fixed on body, body is also fixed with vacuum plant, and filament is arranged in filament cap, anchored filament cover top cover above filament, filament cap is fixed on cable joint-box device, and cable joint-box device is fixed on body.The present invention's entirety connects with screw, high vacuum seal and water-stop is carried out with sealing ring, can open easily, can keep in repair all parts such as filament wherein, plate targets, each parts such as filament, plate target overcoming closed microfocus X-ray pipe are all sealed in the drawback can not carrying out in a housing keeping in repair.
Description
Technical field
The present invention relates to the microfocus X-ray pipe that a kind of Non-Destructive Testing uses, relate to a kind of easy to maintenance specifically, the open microfocus X-ray pipe of replaceable inner components.
Background technology
Microfocus X-ray pipe is the one of the X-ray tube used during X ray detects, it is mainly used in the analysis of the internal displacements such as semiconductor BGA, wiring board, be beneficial to and differentiate the BGA such as missing solder, rosin joint weld defect, microelectronics system and rubber seal element, cable, harness and the analysis of working of plastics inner case etc.The microfocus X-ray pipe of domestic market is closed microfocus X-ray pipe, and the feature of this closed microfocus X-ray pipe is that volume is little, cathode filament, electron bunch cylinder, plate target etc. is sealed in together in a vaccum case.Filament in the X-ray tube of this structure or plate target are once damage, and cannot keep in repair, whole X-ray tube must be scrapped, and the economic loss caused is very large.Along with the fast development of China's semicon industry and electron trade, the unrepairable of closed microfocus X-ray pipe can not meet the demand in market.
Summary of the invention
Difficult for existing closed microfocus X-ray pipe maintenance, not easily change the problem of parts, the invention provides the open microfocus X-ray pipe of a kind of easy-maintaining, energy quick-replaceable parts.
Solving the problems of the technologies described above taked concrete technical measures is:
A kind of open microfocus X-ray pipe, it is characterized in that: by target cover 1, plate target 2, top cover 3, electricity beam trajectory pipe 4, coil 5, cooling water block 6, butterfly buckle device 7, top cover base 8, upper cover 9, spring screw 10, body 11, vacuum plant 12, filament cap top cover 13, filament 14, filament cap 15 and cable joint-box device 16 form, plate target 2 is fixed on electric beam trajectory pipe 4 by target cover 1, electricity beam trajectory pipe 4 is fixed on top cover 3 through coil 5 and cooling water block 6, top cover 3 is fixed on top cover base 8, cooling water block 6 is fixed on coil 5, top cover base 8 is fixed on upper cover 9, one end of upper cover 9 is connected on butterfly buckle device 7, other end spring screw 10 is fixed on body 11, body 11 is also fixed with vacuum plant 12, filament 14 is arranged in filament cap 15, anchored filament cover top cover 13 above filament 14, filament cap 15 is fixed on cable joint-box device 16, cable joint-box device 16 is fixed on body 11 by flange.
Beneficial effect of the present invention: the filament in X-ray tube, plate target etc. easily wearing detail are easy to dismounting, anyone can operate, and keeps in repair very convenient, has greatly saved cost, overcome the drawback of closed microfocus X-ray pipe unrepairable, extend the useful life of X-ray tube.
Accompanying drawing explanation
Fig. 1 is structural representation of the present invention.
Embodiment
Below in conjunction with accompanying drawing, the present invention is described in further details.
A kind of open microfocus X-ray pipe, as shown in Figure 1, by target cover 1, plate target 2, top cover 3, electricity beam trajectory pipe 4, coil 5, cooling water block 6, butterfly buckle device 7, top cover base 8, upper cover 9, spring screw 10, body 11, vacuum plant 12, filament cap top cover 13, filament 14, filament cap 15 and cable joint-box device 16 form, plate target 2 is fixed on electric beam trajectory pipe 4 by target cover 1 screw thread, electricity beam trajectory pipe 4 is fixed on top cover 3 through coil 5 and cooling water block 6 four M4 sunk screws, top cover 3 is with being fixed on top cover base 8 with six sunk screws, cooling water block 6 is fixed on coil 5, the circulating water of sealing is filled with in cooling water block 6, the thermal energy conduction of generation is gone out.Top cover base 8 is fixed on upper cover 9, and one end of upper cover 9 is connected on butterfly buckle device 7, and other end spring screw 10 is fixed on body 11, this butterfly buckle device 7 plays a part hinge, spring screw 10 is turned on, just can open upper cover, and fix in corresponding position.Body 11 is also fixed with vacuum plant 12, body 11 can be made to remain in the state of high vacuum by vacuum plant 12.Filament 14 is contained in filament cap 15, anchored filament cover top cover 13 above filament 14, after opening upper cover 9, just can dismantle each parts.Filament cap 15 is screwed on cable joint-box device 16, cable joint-box device 16 is screwed on body 11 by flange, an airtight space is just defined in such body 11, constantly worked by vacuum pump, this space just can be made to reach and keep high vacuum state, now, the electronics that filament emission is abundant, these electronics are by electric beam trajectory pipe 4, focused on by coil 5, impinge upon on plate target 2, wherein a part just converts X ray to again, this x-ray focus is very little, is applicable to detecting small defect.Whole ray tube screw connects, and carries out high vacuum seal and water-stop, therefore with sealing ring, all parts all can be dismantled, once the damage of components such as filament, plate target wherein, can open easily, all parts can be keeped in repair easily and be changed.
Claims (1)
1. an open microfocus X-ray pipe, it is characterized in that: by target cover (1), plate target (2), top cover (3), electricity beam trajectory pipe (4), coil (5), cooling water block (6), butterfly buckle device (7), top cover base (8), upper cover (9), spring screw (10), body (11), vacuum plant (12), filament cap top cover (13), filament (14), filament cap (15) and cable joint-box device (16) composition, plate target (2) is fixed on electric beam trajectory pipe (4) by target cover (1), electricity beam trajectory pipe (4) is fixed on top cover (3) through coil (5) and cooling water block (6), top cover (3) is fixed on top cover base (8), cooling water block (6) is fixed on coil (5), the circulating water of sealing is filled with in cooling water block (6), the heat conduction of generation is gone out, top cover base (8) is fixed on upper cover (9), one end of upper cover (9) is connected on butterfly buckle device (7), other end spring screw (10) is fixed on body (11), this butterfly buckle device (7) plays a part hinge, spring screw (10) is turned on, just upper cover can be opened, and fix in corresponding position, body (11) is also fixed with vacuum plant (12), filament (14) is arranged in filament cap (15), in top anchored filament cover top cover (13) of filament (14), after opening upper cover (9), just can dismantle each parts, filament cap (15) is fixed on cable joint-box device (16), cable joint-box device (16) is fixed on body (11) by flange, an airtight space is just defined in such body (11), whole ray tube screw connects, high vacuum seal and water-stop is carried out with sealing ring, constantly worked by vacuum pump, this space just can be made to reach and keep high vacuum state.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210423895.0A CN102891059B (en) | 2012-10-31 | 2012-10-31 | Open microfocus X-ray pipe |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210423895.0A CN102891059B (en) | 2012-10-31 | 2012-10-31 | Open microfocus X-ray pipe |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN102891059A CN102891059A (en) | 2013-01-23 |
| CN102891059B true CN102891059B (en) | 2015-12-09 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201210423895.0A Active CN102891059B (en) | 2012-10-31 | 2012-10-31 | Open microfocus X-ray pipe |
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| CN (1) | CN102891059B (en) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103681180B (en) * | 2013-12-16 | 2016-05-04 | 丹东奥龙射线仪器集团有限公司 | Open reflecting target microfocus X-ray pipe |
| CN106139276B (en) * | 2016-07-28 | 2019-04-02 | 江苏摩科特医疗科技有限公司 | X-ray blood irradiator device |
| JP6849518B2 (en) * | 2017-04-28 | 2021-03-24 | 浜松ホトニクス株式会社 | X-ray tube and X-ray generator |
| CN107342204A (en) * | 2017-08-28 | 2017-11-10 | 丹东市无损检测设备有限公司 | New ceramics cone component equipped with ring spring |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0141041A2 (en) * | 1983-08-26 | 1985-05-15 | feinfocus Verwaltungs GmbH & Co. KG | X-ray lithographic apparatus |
| CN85106786A (en) * | 1985-09-07 | 1987-04-29 | 株式会社东芝 | X-ray tube |
| CN1387744A (en) * | 1999-10-29 | 2002-12-25 | 浜松光子学株式会社 | Nondestructive inspection apparatus |
| JP4781156B2 (en) * | 2006-04-18 | 2011-09-28 | 株式会社日立メディコ | Transmission X-ray tube |
| CN102456528A (en) * | 2010-10-26 | 2012-05-16 | 通用电气公司 | Apparatus and method for improved transient response in an electromagnetically controlled x-ray tube |
| CN202871736U (en) * | 2012-10-31 | 2013-04-10 | 丹东奥龙射线仪器有限公司 | Open type micro focus point X-ray tube |
-
2012
- 2012-10-31 CN CN201210423895.0A patent/CN102891059B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0141041A2 (en) * | 1983-08-26 | 1985-05-15 | feinfocus Verwaltungs GmbH & Co. KG | X-ray lithographic apparatus |
| CN85106786A (en) * | 1985-09-07 | 1987-04-29 | 株式会社东芝 | X-ray tube |
| CN1387744A (en) * | 1999-10-29 | 2002-12-25 | 浜松光子学株式会社 | Nondestructive inspection apparatus |
| JP4781156B2 (en) * | 2006-04-18 | 2011-09-28 | 株式会社日立メディコ | Transmission X-ray tube |
| CN102456528A (en) * | 2010-10-26 | 2012-05-16 | 通用电气公司 | Apparatus and method for improved transient response in an electromagnetically controlled x-ray tube |
| CN202871736U (en) * | 2012-10-31 | 2013-04-10 | 丹东奥龙射线仪器有限公司 | Open type micro focus point X-ray tube |
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|---|---|
| CN102891059A (en) | 2013-01-23 |
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| CB02 | Change of applicant information |
Address after: 118009 No. 46 Fumin Avenue, Lingang Industrial Park, Liaoning, Dandong Applicant after: Dongdan Aolong Radiative Instrument Group Co., Ltd. Address before: 118009 No. 46 Fumin Avenue, Lingang Industrial Park, Liaoning, Dandong Applicant before: Dandong Aolong Radiative Instrument Co., Ltd. |
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