CN111058019A - 一种提高lep工艺中化镀层附着力的方法及lep化学镀产品 - Google Patents

一种提高lep工艺中化镀层附着力的方法及lep化学镀产品 Download PDF

Info

Publication number
CN111058019A
CN111058019A CN201911421573.0A CN201911421573A CN111058019A CN 111058019 A CN111058019 A CN 111058019A CN 201911421573 A CN201911421573 A CN 201911421573A CN 111058019 A CN111058019 A CN 111058019A
Authority
CN
China
Prior art keywords
lep
chemical plating
scanning area
layer
seed layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201911421573.0A
Other languages
English (en)
Inventor
马承文
翟后明
薛阔
张东胜
孔维贞
胡宗亮
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shanghai Amphenol Airwave Communication Electronics Co Ltd
Original Assignee
Shanghai Amphenol Airwave Communication Electronics Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shanghai Amphenol Airwave Communication Electronics Co Ltd filed Critical Shanghai Amphenol Airwave Communication Electronics Co Ltd
Priority to CN201911421573.0A priority Critical patent/CN111058019A/zh
Publication of CN111058019A publication Critical patent/CN111058019A/zh
Pending legal-status Critical Current

Links

Images

Classifications

    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C18/00Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
    • C23C18/16Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
    • C23C18/1601Process or apparatus
    • C23C18/1603Process or apparatus coating on selected surface areas
    • C23C18/1607Process or apparatus coating on selected surface areas by direct patterning
    • C23C18/1608Process or apparatus coating on selected surface areas by direct patterning from pretreatment step, i.e. selective pre-treatment
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C18/00Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
    • C23C18/16Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
    • C23C18/1601Process or apparatus
    • C23C18/1633Process of electroless plating
    • C23C18/1635Composition of the substrate
    • C23C18/1639Substrates other than metallic, e.g. inorganic or organic or non-conductive
    • C23C18/1641Organic substrates, e.g. resin, plastic
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C18/00Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
    • C23C18/16Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
    • C23C18/1601Process or apparatus
    • C23C18/1633Process of electroless plating
    • C23C18/1646Characteristics of the product obtained
    • C23C18/165Multilayered product
    • C23C18/1651Two or more layers only obtained by electroless plating
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C18/00Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
    • C23C18/16Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
    • C23C18/18Pretreatment of the material to be coated
    • C23C18/20Pretreatment of the material to be coated of organic surfaces, e.g. resins
    • C23C18/2006Pretreatment of the material to be coated of organic surfaces, e.g. resins by other methods than those of C23C18/22 - C23C18/30
    • C23C18/2026Pretreatment of the material to be coated of organic surfaces, e.g. resins by other methods than those of C23C18/22 - C23C18/30 by radiant energy
    • C23C18/204Radiation, e.g. UV, laser
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C18/00Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
    • C23C18/16Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
    • C23C18/31Coating with metals
    • C23C18/38Coating with copper
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C18/00Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
    • C23C18/16Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
    • C23C18/31Coating with metals
    • C23C18/42Coating with noble metals

Landscapes

  • Chemical & Material Sciences (AREA)
  • Mechanical Engineering (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Optics & Photonics (AREA)
  • Toxicology (AREA)
  • Chemically Coating (AREA)

Abstract

本发明公开了一种提高LEP工艺中化镀层附着力的方法,包括如下步骤:提供一基板;采用激光束对基板的表面进行连续扫描,得到第一扫描区域;采用激光束在第一扫描区域上进行点状扫描,打下相互之间具有间距的光斑,得到第二扫描区域;将第一、二扫描区域浸入金属离子溶液中,并在第一、二扫描区域上诱导镀制金属作为种子层;化学镀加厚种子层,在种子层的上层形成化镀层。本发明在现有LEP工艺的基础上,增加了一道激光处理工艺,即在第一扫描区域上采用激光按照一定间距打下圆形的光斑,通过加深的光斑圆孔增加了化镀层的接触面积,从而增加了化镀层的附着力,解决了LEP技术中一直存在的难题,将LEP技术在实际产品中得到了运用。

Description

一种提高LEP工艺中化镀层附着力的方法及LEP化学镀产品
技术领域
本发明属于激光诱导化学镀领域,尤其涉及一种提高LEP工艺中化镀层附着力的方法及LEP化学镀产品。
背景技术
激光诱导化学镀(LEP)技术是最常见的激光诱导液相沉积技术之一,主要特点是在没有LDS塑胶材料上使用特殊工艺,在激光加工后可以吸附金属粒子,在化镀时可以在表面形成线路。
现在常规的LEP技术工艺流程为:先连续利用激光在基板材料上留下粗糙表面,然后将基板置于金属离子溶液中,在基板的表面诱导镀制种子层,最后在种子层上化镀形成线路,但这种工艺最大的缺点是,基板上的化镀层的附着力较弱,在实际应用中经常无法通过附着力测试,导致无法运用到实际产品中。
发明内容
本发明的目的是提供一种提高LEP工艺中化镀层附着力的方法及LEP化学镀产品,提高基板上化镀层的附着力,能够将LEP工艺运用于实际产品中。
为解决上述问题,本发明的技术方案为:
一种提高LEP工艺中化镀层附着力的方法,包括如下步骤:
提供一基板;
第一道激光处理:采用激光束对所述基板的表面进行连续扫描,得到第一扫描区域;
第二道激光处理:采用激光束在所述第一扫描区域上进行点状扫描,打下相互之间具有间距的光斑,得到第二扫描区域;
将所述第一扫描区域及第二扫描区域浸入金属离子溶液中,并在所述第一扫描区域及所述第二扫描区域上诱导镀制金属作为种子层;
化学镀加厚所述种子层,在所述种子层上形成化镀层。
优选地,所述第一道激光处理和所述第二道激光处理中,采用的激光束的能量均为3~9W,激光束的光斑大小为0.06~0.1mm。
优选地,所述第一道激光处理和所述第二道激光处理中,采用的激光束的能量为6W,激光束的光斑大小为0.08mm。
优选地,所述第二道激光处理中,所述光斑之间的间距为0.15~ 0.5mm,所述光斑的深度为0.02~0.05mm。
优选地,所述金属离子溶液为钯离子溶液。
优选地,所述基板是塑胶基板。
优选地,所述化学镀加厚所述种子层,在所述种子层的上层形成化镀层具体包括:化学镀铜加厚所述种子层,在所述种子层的上层形成化学铜层。
基于相同的发明构思,本发明还提供了一种LEP化学镀产品,采用上述的提高LEP工艺中化镀层附着力的方法制得,所述LEP化学镀产品包括:
基板,所述基板的表面上分布有若干个光斑凹槽;
种子层,所述种子层诱导沉积于所述基板表面上及光斑凹槽内;
化镀层,所述化镀层沉积于所述种子层上。
优选地,所述光斑凹槽之间的间距为0.15~0.5mm,所述光斑凹槽的深度为0.02~0.05mm。
优选地,所述种子层为钯金属。
本发明由于采用以上技术方案,使其与现有技术相比具有以下的优点和积极效果:
1)本发明提供了一种提高LEP工艺中化镀层附着力的方法,包括如下步骤:提供一基板;采用激光束对基板的表面进行连续扫描,得到第一扫描区域;采用激光束在第一扫描区域上进行点状扫描,打下相互之间具有间距的光斑,得到第二扫描区域;将第一扫描区域及第二扫描区域浸入金属离子溶液中,在第一扫描区域和第二扫描区域上诱导镀制金属作为种子层;化学镀加厚种子层,在种子层的上层形成化镀层。本发明在现有LEP工艺的基础上,增加了一道激光处理工艺,即在第一扫描区域上采用激光按照一定间距打下圆形的光斑,通过加深的光斑圆孔增加了化镀层的接触面积,从而增加了化镀层的附着力,解决了LEP技术中一直存在的难题,将LEP技术在实际产品中得到了运用。
2)本发明还提供了一种LEP化学镀产品,其包括表面分布有若干个光斑凹槽的基板、诱导沉积于基板表面上及其光斑凹槽内的种子层以及化镀沉积于种子层上的化镀层,本发明通过在基板表面上采用激光加工具有一定深度的光斑凹槽,增加了化镀层的接触面积,从而增加了化镀层的附着力,解决了LEP技术一直存在的难题,使LEP 化学镀产品得到了实际运用。
附图说明
图1为本发明实施例提供的一种提高LEP工艺中化镀层附着力的方法的流程图;
图2A至图2D为本发明实施例提供的一种提高LEP工艺中化镀层附着力的方法的流程示意图;
图3为本发明实施例提供的一种LEP化学镀产品的示意图;
图4为本发明实施例提供的百格测试示意图。
附图标记说明:
1:基板;11:第一扫描区域;12:第二扫描区域;13:光斑凹槽;2:种子层;3:化镀层。
具体实施方式
以下结合附图和具体实施例对本发明提出的一种提高LEP工艺中化镀层附着力的方法及LEP化学镀产品作进一步详细说明。根据下面说明和权利要求书,本发明的优点和特征将更清楚。
实施例一
参看图1、图2A至图2D所示,本实施例提供了一种提高LEP 工艺中化镀层附着力的方法,包括如下步骤:
提供一基板1,在本实施例中,基板1为塑胶基板;
第一道激光处理:参看图2A所示,采用较高能量的激光束对塑胶基板的表面进行连续扫描,得到表面粗糙的第一扫描区域11,在本实施例中,第一道激光处理中所采用的激光束的能量为3~9W,激光束的光斑大小为0.06~0.1mm,其中,激光束的能量优选为6W,光斑大小优选为0.08mm;
第二道激光处理:参看图2B所示,采用激光束在第一扫描区域 11上进行点状扫描,打下相互之间具有间距的光斑,得到第二扫描区域12,在本实施例中,相邻光斑之间的间距为0.15~0.5mm,光斑的深度为0.02~0.05mm,在第二扫描区域12上打下具有一定深度的光斑,是为了增加化镀层的接触面积,从而增加化镀层的附着力;在本实施例中,第一道激光处理中所采用的激光束的能量为3~9W,激光束的光斑大小为0.06~0.1mm,其中,激光束的能量优选为6W,光斑大小优选为0.08mm;
参看图2C所示,将第一扫描区域11和第二扫描区域12浸入金属离子溶液中,在第一扫描区域11和第二扫描区域12上诱导镀制金属作为种子层2,在本实施例中,金属离子溶液优选为钯离子溶液,钯活化的具体步骤为:首先将第二扫描区域12浸入浓度为40~90ppm的氯化钯溶液中,氯化钯溶液的浓度优选为60ppm;然后在氯化钯溶液中加入还原剂甲醛,析出金属钯粒子,附着在塑料基材的上表面以及光斑凹槽内,钯活化的反应温度为30~40℃,优选为35℃,反应时间为5~10min,优选为8min。
参看图2D所示,化学镀加厚种子层2,在种子层2的上层形成化镀层3,在本实施例中,以钯金属粒子为基础,采用化学镀铜加厚种子层2,在种子层2的上层形成化学铜层,化镀铜的具体步骤为:首先将种子层2浸入氯化铜溶液中,然后在氯化铜溶液中加入还原剂甲醛,最后加入氢氧化钠溶液调节溶液的PH值,在PH值为11左右发生还原反应,在种子层2上产生铜层沉积形成化学铜层,一般在实际生产中,化镀铜溶液中氯化铜的浓度为2~6g/L,甲醛浓度为3~5%,氢氧化钠的浓度为4~6%,化镀铜的反应温度为60℃左右,化镀时间为4~6h。
本实施例提供了一种提高LEP工艺中化镀层附着力的方法,在现有LEP工艺的基础上,增加了一道激光处理工艺,即在第一扫描区域上采用激光按照一定间距打下圆形的光斑,通过加深的光斑圆孔增加了化镀层3的接触面积,从而增加了化镀层3的附着力,解决了LEP技术一直存在的难题,将LEP技术在实际产品中得到了运用。
实施例二
基于相同的发明构思,参看图3所示,本实施例还提供了一种 LEP化学镀产品,采用实施例一所述的提高LEP工艺中化镀层附着力的方法制得,LEP化学镀产品包括基板1、种子层2及化镀层3:
基板1,基板1的表面上分布有若干个光斑凹槽13,相邻的光斑凹槽13之间具有一定的间距,在本实施例中,光斑凹槽13之间的间距为0.15~0.5mm,光斑凹槽13的深度为0.02~0.05mm;
种子层2(由于其为很薄的一层,故在图3中未示出),诱导沉积于基板1表面上及光斑凹槽13内,在本实施例中,种子层2是利用钯离子溶液产生钯金属粒子附着在基板1表面上及光斑凹槽13而成;
化镀层3,沉积于种子层2上,在本实施例中,化镀层3的材质为铜,即以钯金属粒子为基础,采用化学镀铜的方法,在钯金属粒子上形成化学铜层。
参看图4所示,本发明采用百格测试的方法测试化镀层3的附着力,百格测试是电镀行业/丝印及漆面进行附着力性能测试的一种实验,其具体的操作方法为:用百格刀在测试样本表面划10*10个1mm *1mm的小网格,每一条划线应深及化镀层的底层;用毛刷将测试区域的碎片刷干净;用3M600号胶纸或等同效力的胶纸牢牢粘住被测试的小网格,并用橡皮擦用力擦拭胶带,以加大胶带与被测区域的接触面积及力度;静置3~5分钟后用手抓住胶带的一端,向垂直方向迅速扯下胶带,同一位置进行两次相同实验。
在本实施例中,总共选取不同光斑凹槽间距和不同光斑凹槽深度的六组样品进行百格测试,其中每组样品个数为三个,六组样品所选取的参数及百格测试结果如表一所示。
表一不同光斑凹槽间距和不同光斑凹槽深度样品的百格测试结果
Figure RE-GDA0002410492210000071
参看图4所示,以上六组样品在经过百格测试后,其表面的化镀层没有脱落,化镀层3的附着力好,可以在生产中进行运用。
本实施例提供的一种LEP化学镀产品,其包括表面分布有若干个光斑凹槽13的基板1、诱导沉积于基板1表面上及其光斑凹槽13 内的种子层2以及化镀沉积于种子层2上的化镀层3,本发明通过在基板1表面上采用激光加工具有一定深度的光斑凹槽13,增加了化镀层3的接触面积,从而增加了化镀层3的附着力,解决了LEP技术一直存在的难题,使LEP化学镀产品得到了实际运用。
上面结合附图对本发明的实施方式作了详细说明,但是本发明并不限于上述实施方式。即使对本发明作出各种变化,倘若这些变化属于本发明权利要求及其等同技术的范围之内,则仍落入在本发明的保护范围之中。

Claims (10)

1.一种提高LEP工艺中化镀层附着力的方法,其特征在于,包括如下步骤:
提供一基板;
第一道激光处理:采用激光束对所述基板的表面进行连续扫描,得到第一扫描区域;
第二道激光处理:采用激光束在所述第一扫描区域上进行点状扫描,打下相互之间具有间距的光斑,得到第二扫描区域;
将所述第一扫描区域及第二扫描区域浸入金属离子溶液中,并在所述第一扫描区域及所述第二扫描区域上诱导镀制金属作为种子层;
化学镀加厚所述种子层,在所述种子层上形成化镀层。
2.根据权利要求1所述的提高LEP工艺中化镀层附着力的方法,其特征在于,所述第一道激光处理和所述第二道激光处理中,采用的激光束的能量均为3~9W,激光束的光斑大小为0.06~0.1mm。
3.根据权利要求2所述的提高LEP工艺中化镀层附着力的方法,其特征在于,所述第一道激光处理和所述第二道激光处理中,采用的激光束的能量为6W,激光束的光斑大小为0.08mm。
4.根据权利要求1所述的提高LEP工艺中化镀层附着力的方法,其特征在于,所述第二道激光处理中,所述光斑之间的间距为0.15~0.5mm,所述光斑的深度为0.02~0.05mm。
5.根据权利要求1所述的提高LEP工艺中化镀层附着力的方法,其特征在于,所述金属离子溶液为钯离子溶液。
6.根据权利要求1所述的提高LEP工艺中化镀层附着力的方法,其特征在于,所述基板是塑胶基板。
7.根据权利要求1所述的提高LEP工艺中化镀层附着力的方法,其特征在于,所述化学镀加厚所述种子层,在所述种子层的上层形成化镀层具体包括:化学镀铜加厚所述种子层,在所述种子层的上层形成化学铜层。
8.一种LEP化学镀产品,其特征在于,采用权利要求1至7任一项所述的提高LEP工艺中化镀层附着力的方法制得,所述LEP化学镀产品包括:
基板,所述基板的表面上分布有若干个光斑凹槽;
种子层,所述种子层诱导沉积于所述基板表面上及光斑凹槽内;
化镀层,所述化镀层沉积于所述种子层上。
9.根据权利要求8所述的LEP化学镀产品,其特征在于,所述光斑凹槽之间的间距为0.15~0.5mm,所述光斑凹槽的深度为0.02~0.05mm。
10.根据权利要求8所述的LEP化学镀产品,其特征在于,所述种子层为钯金属。
CN201911421573.0A 2019-12-31 2019-12-31 一种提高lep工艺中化镀层附着力的方法及lep化学镀产品 Pending CN111058019A (zh)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201911421573.0A CN111058019A (zh) 2019-12-31 2019-12-31 一种提高lep工艺中化镀层附着力的方法及lep化学镀产品

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201911421573.0A CN111058019A (zh) 2019-12-31 2019-12-31 一种提高lep工艺中化镀层附着力的方法及lep化学镀产品

Publications (1)

Publication Number Publication Date
CN111058019A true CN111058019A (zh) 2020-04-24

Family

ID=70306143

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201911421573.0A Pending CN111058019A (zh) 2019-12-31 2019-12-31 一种提高lep工艺中化镀层附着力的方法及lep化学镀产品

Country Status (1)

Country Link
CN (1) CN111058019A (zh)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113774384A (zh) * 2021-09-15 2021-12-10 上海莘芝光电科技有限公司东莞分公司 通过激光蚀刻和化学抛光降低立体线路喷涂成本的方案
CN116092929A (zh) * 2023-02-16 2023-05-09 浙江萃锦半导体有限公司 一种双面晶圆化镀工艺

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102806789A (zh) * 2011-06-03 2012-12-05 上海安费诺永亿通讯电子有限公司 在绝缘体表面形成金属图案的方法
CN106399982A (zh) * 2016-08-31 2017-02-15 潍坊歌尔精密制造有限公司 一种陶瓷表面导体线路的制作方法
CN108552931A (zh) * 2018-02-05 2018-09-21 浙江三禾厨具有限公司 一种不粘锅
CN108558413A (zh) * 2018-07-02 2018-09-21 上海安费诺永亿通讯电子有限公司 一种陶瓷基电子线路的制备方法

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102806789A (zh) * 2011-06-03 2012-12-05 上海安费诺永亿通讯电子有限公司 在绝缘体表面形成金属图案的方法
CN106399982A (zh) * 2016-08-31 2017-02-15 潍坊歌尔精密制造有限公司 一种陶瓷表面导体线路的制作方法
CN108552931A (zh) * 2018-02-05 2018-09-21 浙江三禾厨具有限公司 一种不粘锅
CN108558413A (zh) * 2018-07-02 2018-09-21 上海安费诺永亿通讯电子有限公司 一种陶瓷基电子线路的制备方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113774384A (zh) * 2021-09-15 2021-12-10 上海莘芝光电科技有限公司东莞分公司 通过激光蚀刻和化学抛光降低立体线路喷涂成本的方案
CN116092929A (zh) * 2023-02-16 2023-05-09 浙江萃锦半导体有限公司 一种双面晶圆化镀工艺

Similar Documents

Publication Publication Date Title
CN111058019A (zh) 一种提高lep工艺中化镀层附着力的方法及lep化学镀产品
US4789437A (en) Pulse electroplating process
US11952310B2 (en) Silicate glass compositions useful for the efficient production of through glass vias
TW201542351A (zh) 粗化處理銅箔、覆銅積層板及印刷電路板
CN107337176B (zh) 表面增强拉曼散射基底及其制备工艺
EP3276042B1 (en) Method for producing plated article
AU748566B2 (en) Method of providing conductive tracks on a printed circuit and apparatus for use in carrying out the method
JP4494155B2 (ja) 金めっき構造体およびこの金めっき構造体からなる燃料電池用セパレーター
CN103747636A (zh) 镀金线路板引线回蚀的方法
ATE42351T1 (de) Verfahren zur selektiven metallisierung eines werkstuecks.
CN101513632A (zh) 一种金属片涂镀铁氟龙的方法
JP2013185163A (ja) 金属化フィルムおよび金属箔
CN104073845A (zh) 一种pcb板镀金的方法
CN115023059B (zh) 一种介质材料表面共形导电线路的制造方法
TW201510233A (zh) 表面處理鋁材及其製造方法
DE19833593C2 (de) Verfahren zur selektiven Metallisierung
CN110996539A (zh) 一种改善lds工艺中化镀层溢镀及附着力性能的方法
US20030173225A1 (en) Method of providing conductive tracks on a printed circuit and apparatus for use in carrying out the method
CN2886559Y (zh) 一种应用于扫描电子显微镜硅片样品镀铂金的载体
Xu et al. Study on the preparation mechanism and property analysis of a localized Au coating by laser-induced cyanide-free electroplating
CN1250772C (zh) 电镀预处理溶液和电镀预处理方法
CN105316719A (zh) 一种含有铊的亚硫酸盐无氰镀金的电镀液及电镀方法
CN109309000A (zh) 一种gpp芯片镀金方法
CN105132965A (zh) 一种电镀铂的碱性镀液及其电镀方法
CN105316720A (zh) 一种含有锑的亚硫酸盐无氰镀金的电镀液及电镀方法

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
RJ01 Rejection of invention patent application after publication
RJ01 Rejection of invention patent application after publication

Application publication date: 20200424